Nama : Rivatul Haerunnisa

NPM : 3335210048
Kelas : C

Penyelesaian :

PA (torr) pada jarak reaktor (cm)

PB (torr)
0 1.5 2.5 4 6.5 9
Inlet AsH3 2 torr 0.129 0.075 0.05 0.03 0.018 0.016
Inlet AsH3 0.5 torr 0.129 0.095 0.085 0.08 0.042 0.04
Inlet AsH3 4 torr 0.129 0.045 0.022 0.01 0.01 0.01

Tekanan total = 152 torr

Inlet AsH3 2 torr

Z PA PA*100 dPa/dZ log dPa/dZ log PA
0 0.129 12.9 4.2898 0.632437045 1.11059
1.5 0.075 7.5 2.9299 0.466852798 0.875061
2.5 0.05 5 2.0233 0.306060282 0.69897
4 0.03 3 0.6634 -0.178224533 0.477121

y = 0.4533x^2-4.2898x+12.903
dy = 2*0.4533x-4.2898

Z vs Pa
14
12
y = 0.4533x2 - 4.2898x + 12.903
10 R² = 1
8
6
4
2
0
0 1 2 3 4 5
 log dPa/dZ VS log Pa
1.2
1
0.8
0.6
y = 0.7354x + 0.5648
0.4 R² = 0.9179
0.2
0
-0.2 0 0.2 0.4 0.6 0.8

Inlet AsH3 0,5 torr

Z PA PA*100 dPa/dZ log dPa/Dz log PA
0 0.129 12.9 3.2517 0.512110471 1.11059
1.5 0.095 9.5 0.29655 -0.527902072 0.977724
2.5 0.085 8.5 4.95705 0.6952233 0.929419
4 0.08 8 17.7627 1.249508981 0.90309

y = 12.9 - 3.2517x + 0.7467x^2 - 0.06x^3

dy = -3.2517 + 2*0.7467x - 3*0.06x^2

Z vs Pa
14
12
10
8
6
4 y = -0.06x3 + 0.7467x2 - 3.2517x + 12.9
R² = 1
2
0
0 1 2 3 4 5

log dPa/dZ VS log Pa

1.2
1
0.8
0.6
0.4 y = -0.0384x + 0.9987
R² = 0.0957
0.2
0
-1 -0.5 0 0.5 1 1.5
Inlet AsH3 4 torr
Z PA PA*100 dPa/dZ log dPa/dZ log PA
0 0.129 12.9 8.255 0.916717078 1.11059
1.5 0.045 4.5 3.35 0.525044807 0.653213
2.5 0.022 2.2 1.43 0.155336037 0.342423
4 0.01 1 0.575 -0.240332155 0

y = 12.9 -8.255x + 2.04x^2 -0.18x^3

dy = -8.255 + 2*2.04x -3*0.18x^2

Z vs Pa
14
12
10 y = -0.18x3 + 2.04x2 - 8.255x + 12.9
R² = 1
8
6
4
2
0
0 1 2 3 4 5

log dPa/dZ VS log Pa

1.2
1
0.8
0.6
0.4 y = 0.9486x + 0.2048
R² = 0.9934
0.2
0
-0.25 -0.05
-0.2 0.15 0.35 0.55 0.75 0.95 1.15