读出电路文献调研记录

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1 A. Fatema, A. Navnit, D. Devendra and A. M. Hussain, "A Combined Capacitance
and Resistance Digital Readout Circuit for Sensory Nodes," 2021 IEEE Sensors, 2021,
pp. 1-4, doi: 10.1109/SENSORS47087.2021.9639763.

电阻电容双模读出

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2 N. Yazdi, H. Kulah and K. Najafi, "Precision readout circuits for capacitive
microaccelerometers," SENSORS, 2004 IEEE, 2004, pp. 28-31 vol.1, doi:
10.1109/ICSENS.2004.1426091.

三种读出电路比较
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3 P. K. Chan and J. Cui, "Design of Chopper-Stabilized Amplifiers With Reduced
Offset for Sensor Applications," in IEEE Sensors Journal, vol. 8, no. 12, pp. 1968-
1980, Dec. 2008, doi: 10.1109/JSEN.2008.2006446.

利用斩波放大器电路消除失调

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4 M. S. Arefin, J. -M. Redouté and M. R. Yuce, "A Low-Power and Wide-Range
MEMS Capacitive Sensors Interface IC Using Pulse-Width Modulation for
Biomedical Applications," in IEEE Sensors Journal, vol. 16, no. 17, pp. 6745-6754,
Sept.1, 2016, doi: 10.1109/JSEN.2016.2587668.

环形振荡器ring oscillator

脉冲宽度与电容成正比
优势：高线性度、高灵敏度、低功耗

劣势：

C-F电路比C-V电路消耗更高的功率，但它们的优势在于，在较高频率下具有更低
的相位、闪烁和白噪声

原理：两路检测电路，一路为传感电容电路，一路为参考电容电路，通过异或两路
输出的占空比来得到最终的PWM波，使得PWM占空比与电容成正比，电路中既有
低通又有高通滤波器，形成一个带通滤波器，问：其实是不是一路也可以实现功
能，两路的原因是减小误差？
 、
5 R. N. Dean and A. Rane, "An improved capacitance measurement technique
based of RC phase delay," 2010 IEEE Instrumentation & Measurement Technology
Conference Proceedings, 2010, pp. 367-370, doi: 10.1109/IMTC.2010.5488213.
利用相位延迟方式来测量，通过延迟方波与参考方波比较产生PWM波

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6 Y. Meng and R. N. Dean, "A Technique for Improving the Linear Operating
Range for a Relative Phase Delay Capacitive Sensor Interface Circuit," in IEEE
Transactions on Instrumentation and Measurement, vol. 65, no. 3, pp. 624-630,
March 2016, doi: 10.1109/TIM.2015.2507698.

上文改进版：
 、
7 J. H. -L. Lu, M. Inerowicz, S. Joo, J. -K. Kwon and B. Jung, "A Low-Power, Wide-
Dynamic-Range Semi-Digital Universal Sensor Readout Circuit Using Pulsewidth
Modulation," in IEEE Sensors Journal, vol. 11, no. 5, pp. 1134-1144, May 2011, doi:
10.1109/JSEN.2010.2085430.

晶振产生方波来提供方波

low-power, low complexity, and wide-dynamic-range

8、https://doi.org/10.1016/j.egyr.2021.11.128
基于微分器的采样保持电路，实现电容到电压转换并且读出：
 、
9 B. Liu, Z. Hoseini, K. -S. Lee and Y. -M. Lee, "On-Chip Touch Sensor Readout
Circuit Using Passive Sigma-Delta Modulator Capacitance-to-Digital Converter," in
IEEE Sensors Journal, vol. 15, no. 7, pp. 3893-3902, July 2015, doi:
10.1109/JSEN.2015.2403132.
直接采用Σ-Δ调制器将电容转换为数字信号输出，通过计算检测周期内调制器输出脉冲的数
量来简单地获得

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10 J. H. Yang et al., "A novel readout IC with high noise immunity for charge-
based touch screen panels," IEEE Custom Integrated Circuits Conference 2010,
2010, pp. 1-4, doi: 10.1109/CICC.2010.5617378.

采用SC方式调研
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1 L. Zhong, X. Lai and D. Xu, "Oversampling Successive Approximation Technique
for MEMS Differential Capacitive Sensor," in IEEE Journal of Solid-State Circuits,
vol. 53, no. 8, pp. 2240-2251, Aug. 2018, doi: 10.1109/JSSC.2018.2827922.

OSSA技术，降低功耗、面积

2、L. Zhong, X. Lai and D. Xu, "Oversampling Successive Approximation Technique

for MEMS Differential Capacitive Sensor," in IEEE Journal of Solid-State Circuits,
vol. 53, no. 8, pp. 2240-2251, Aug. 2018, doi: 10.1109/JSSC.2018.2827922.
有讲到采样保持电路不适合在MEMS电路下实现

采用CSA（charge sense amplifier）

1、Y. Zhao et al., "A Sub-0.1°/h Bias-Instability Split-Mode MEMS Gyroscope With
CMOS Readout Circuit," in IEEE Journal of Solid-State Circuits, vol. 53, no. 9, pp.
2636-2650, Sept. 2018, doi: 10.1109/JSSC.2018.2844285.

这种方法要求Rb比较大，使用伪电阻网络，比起开关电容可以减少噪声、降低功耗

电流激励与电压激励对比
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1 Y. Hong, Y. Wang, W. L. Goh, Y. Gao and L. Yao, "A current-excited triple-time-
voltage oversampling method for bio-impedance model for cost-efficient circuit
system," 2015 37th Annual International Conference of the IEEE Engineering in
Medicine and Biology Society (EMBC), Milan, Italy, 2015, pp. 1037-1040, doi:
10.1109/EMBC.2015.7318542.

However, current excitation is the mainstream stimulus technique that is less affected by
the impedance of the electrode.