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Article history: The heat transfer enhancement of microchannel heat sinks with periodic expansion–constriction cross-
Received 4 December 2012 sections is investigated both experimentally and numerically. Each heat sink consists of 10 parallel
Received in revised form 25 February 2013 microchannels with 0.1 mm wide and 0.2 mm deep in constant cross-section segment and each
Accepted 2 March 2013
microchannel consists of an array of periodic expansion–constriction cross-sections. Three-dimensional
Available online 16 April 2013
laminar numerical simulations, based on the Navier–Stokes equations and energy equation, are obtained
for pressure drop and heat transfer in these microchannel heat sinks under the same experimental
Keywords:
conditions. Multi-channel effect, entrance effect, conjugate heat transfer, viscous heating and tempera-
Expansion–constriction
Microchannel
ture dependent properties are considered. It is found that the numerical predictions of apparent friction
Heat transfer factor and Nusselt number are in good agreement with experimental data. The influences of periodic
Thermal resistance expansion–constriction cross sections on pressure drop, heat transfer and thermal resistance are dis-
cussed, respectively. The effects of the entrance and exit plenum regions and the lateral parts of silicon
wafer on fluid flow and heat transfer are discussed. Special attentions are given to analyze the variation of
thermal resistance for each term with pumping power, corresponding to three stages of heat release at
the substrate of heat sink.
Ó 2013 Elsevier Ltd. All rights reserved.
0017-9310/$ - see front matter Ó 2013 Elsevier Ltd. All rights reserved.
http://dx.doi.org/10.1016/j.ijheatmasstransfer.2013.03.045
742 L. Chai et al. / International Journal of Heat and Mass Transfer 62 (2013) 741–751
Nomenclature
a stacked two–layer microchannels with multiple MEMS easy-pro- in the transverse microchambers and analyzed the effects of
cessing passive microstructures. Korichi and Oufer [7] numerically dimension and position parameters of rectangular rib on these
investigated the fluid flow and heat transfer in a horizontal channel characteristics. Xia et al. [15,16] analyzed the effect of geometric
with periodically mounted obstacles on both upper and lower parameters on water flow and heat transfer characteristics in the
walls for 50 6 Re 6 1000. Promvonge et al. [8] carried out a microchannel heat sink with fan-shaped and triangular reentrant
numerical investigation to examine laminar flow and heat transfer cavities, and obtained the optimal geometric parameters on the
characteristics in a three-dimensional isothermal wall square basis of the thermal enhancement factor performance.
channel with 45°-angled baffles. Sui et al. [9] numerically studied From the above literatures one can see that to interrupt the
laminar water flow and heat transfer in three-dimensional wavy thermal boundary layer and to induce the mainstream separation
microchannels with rectangular cross-sections. Foong et al. [10] are two significant means to enhance heat transfer in microscale.
conducted a three-dimensional numerical simulation to investi- Therefore, in this paper we use the thermal boundary layer rede-
gate the fluid flow and heat transfer characteristics of a square veloping concept in microscale [4] and the mainstream separation
microchannel with four longitudinal internal fins. Dogan and method [12] to propose a new design of the silicon-based micro-
Sivrioglu [11] studied the mixed convection heat transfer from channel array with periodic expansion–constriction cross-sections.
longitudinal fins in a horizontal channel with a uniform heat flux Based on the optimal geometric parameters of microchannel heat
boundary condition at the bottom surface. Danish et al. [12] sink with fan-shaped and triangular reentrant cavities, two micro-
performed the shape optimization of a microchannel heat sink channel heat sinks with periodic expansion–constriction cross-sec-
with a grooved structure using a multi-objective evolutionary tions were designed and manufactured. Then the experimental
algorithm. The thermal-resistance and pumping-power character- study on forced convection of water in microchannel heat sinks
istics of the microchannel heat sink were investigated numerically. has been performed. Combined with the experimental research,
The Navier–Stokes and energy equations for laminar flow and numerical computations were developed to obtain the local and
conjugate heat transfer were solved using a finite-volume solver. average flow and heat transfer characteristics.
In comparison with a smooth microchannel, a decrease in the
thermal resistance and an increase in the Nusselt number were
obtained in a grooved microchannel at the expense of pumping 2. Test section and experimental apparatus
power. Liu et al. [13] numerically studied the forced convection
heat transfer occurring in microchannel using CFD (computational 2.1. Description of the microchannel heat sinks
fluid dynamics) and LB (lattice Boltzmann) approaches. The results
implied that the shield shaped groove microchannel possessed the Three silicon microchannel heat sinks were fabricated in clean
high heat exchange performance and compared with the lowest room environment. Two of these heat sinks are the newly proposed
heat transfer efficiency of the plain surface structure, the averaged microchannel heat sinks with periodic expansion–constriction
Nusselt number could be increased by about 1.3 times. Chai et al. cross-sections. And the last one is the rectangular straight micro-
[14] studied the pressure drop and heat transfer characteristics channel heat sink (R for short) for comparison. As shown in
of the interrupted microchannel heat sink with rectangular ribs Fig. 1a, the silicon wafer is 20 mm in length, 10 mm in width,
L. Chai et al. / International Journal of Heat and Mass Transfer 62 (2013) 741–751 743
0.35 mm in thickness, respectively. The whole length of the paral- using a high precision electronic balance (LP6200S), which has the
lel microchannels in longitudinal direction is 10 mm, the total accuracy of 0.01 g. All of the pressure and temperature signals were
width covering the ten microchannels is 3 mm, and the depth of collected by an Agilent data acquisition system. In order to decrease
the microchannel is 0.2 mm. The lengths of the entrance and exit the heat loss to environment, the high quality heat insulation mate-
plenum regions are 5 mm, respectively. The length of the lateral rial was wrapped on the outer surface of the connection tube be-
parts of silicon wafer is 3.5 mm. A thin platinum film was depos- tween the outlet of the water tank and the outlet of the test section.
ited at the backside of the silicon wafer by ‘‘chemical vapor depo-
sition’’ technique to provide a uniform heat flux. The thin film has 2.3. Data acquisition
the same length and width of the parallel microchannel region,
which is displayed in Fig. 1a as the red box drawing. The film hea- The data reduction procedure is similar to Wu and Cheng [18].
ter was connected to a precision DC power supply unit and heat Since the pressure gradients found in microchannels are quite
generated in the heater was transferred to the liquid flow from high, the flow lengths are generally kept low. To account for the
microchannels. Fig. 1b shows the dimensions of the expansion– developing region, the pressure drop equations are presented in
constriction cross-section. For the microchannel with fan-shaped terms of an apparent friction factor. The overall apparent friction
reentrant cavities (F for short), the field angle of the fan-shaped factor fapp,ave is defined as:
reentrant cavity is 120° and the radius is 0.1 mm. For the micro-
Dh 1
channel with triangular reentrant cavities (T for short), the length fapp;ave ¼ Dpmic ð1Þ
L 2qf u2ave
of expansion cross-section is 0.06 mm and the length of the con-
striction cross-section is 0.14 mm in the direction of the flow,
Dpmic ¼ Dpexp Dplos ð2Þ
and the depth of the triangular reentrant cavity is 0.05 mm. The
distance between two adjacent reentrant cavities is 0.4 mm. where 4pmic is the pressure drop across the microchannel, 4pexp is
The three silicon microchannel heat sinks were manufactured the experimental measured pressure drop by the transducer, 4plos
by the dry etching-based micro-fabrication technologies, which is the pressure loss, including the frictional loss between the
could achieve high vertical aspect ratios and extend the limits of position of transducer and the microchannels, the expansion and
deep etching down to the 40–300 lm in the manufacturing of sin- contraction loss due to area change [2]. qf is the density of water.
gle-crystal silicon for micro-electro-mechanical-systems (MEMS). Dh and L are the hydraulic diameter and the length of microchannel
The schematic representation of the primary steps in the process along longitudinal direction, respectively. uave is the average veloc-
flow is displayed in the Ref. [17].The processed wafer is stripped ity of water. For the convenience of calculations and to contrast
of any remaining resist or oxide layers and anodically bonded to with the corresponding straight microchannel, the values of uave
a 1 mm thick polished Pyrex (glass) wafer to form a sealed device. and Dh in the constant cross–section segment are adopted for all
The detailed manufacturing operations were completed by the Na- the microchannels.
tional Key Laboratory of Science and Technology on Micro/Nano The overall heat transfer coefficient is expressed as:
Fabrication, Institute of Microelectronics, Peking University, Bei-
qAfilm
jing, China. have ¼ ð3Þ
The packaging used to mount the silicon microchannel heat NAcon DT m
sinks is shown in Fig. 1c. The packaging material is PMMA (poly
mcp ðT out T in Þ
methyl meth acrylate), which has a very small thermal conductiv- q¼ ð4Þ
ity (0.18 W m1 K1). The heat sink was carefully introduced into Afilm
the cuboid cavity, which had the size of 11 0.5 3 mm. The gaps
1
between the cavity and the heat sink were sealed by sealant. Par- DT m ¼ T w ðT in þ T out Þ ð5Þ
ticular attention was paid to connecting to prevent the sealant into 2
the heat sink. To avoid damaging the heat sink in the packaging where q is the effective heat flux based on the film heater area, m is
and experiment processes, two reinforced girders are chosen be- the mass flowrate of water, N is the number of parallel microchan-
tween the two packagings. nels, cp is the specific heat of water, Afilm is the platinum film heater
area (Afilm = 10 3 = 30 mm2), Acon is the contact surface area of
2.2. Experimental apparatus water and a single longitudinal microchannel, for convenience in
calculation and contrast with the microchannel R, which is defined
Fig. 2 shows the experimental setup and corresponding as (Acon = 10 0.5 = 5 mm2), 4Tm is the temperature difference be-
apparatus used in the present investigation. The deionized water tween the substrate and the water, Tw is the average temperature of
in the water tank, being pumped by a pump, flowed successively the substrate and obtained by the temperature–resistance relation-
through a flowmeter, a liquid valve regulator, a constant tempera- ship of the microheater, Tin and Tout are the measured inlet and the
ture water tank, a 2 lm filter, to the silicon wafer test section, and outlet fluid temperature, respectively.
finally returned to a glass beaker. The glass beaker was placed on a The average Nusselt number is written as:
high precision electronic balance. The water temperature into the
have Dh
test section was controlled by the constant temperature water tank. Nuave ¼ ð6Þ
kf
The inlet and outlet water temperatures were measured by the high
precision OMEGA T thermocouples with the diameters of 0.127 mm where kf is the thermal conductivity of water. The physical
and the uncertainty of 0.05 K. The inlet and outlet water pressures properties of water, including q, l, kf , and cp, are given in terms
were measured by the Rosemount pressure transducer and pressure of the mean temperature of water T f ¼ 12 ðT in þ T out Þ and are as-
difference transducer with the uncertainty less than 0.1%. The aver- sumed independent of pressure.
age temperature of the thin platinum film was determined accord- The experiment covers the following ranges: pressure drops of
ing to the relationship between resistance and temperature of 8.44–187.96 kPa, inlet temperatures of 293 K, mass flux of 832.17–
platinum. The thin platinum film heater was energized by a DC 5825.1 kg m2 s1, and the project heat flux is 0.6 MW m2, which
power supply, which could be regulated in the ranges of 0–50 V is defined as the total heating power that is received by the liquid
and 0–10 A. The steady water mass flow rate was determined by divided by the effective heating area. Deionized water is used as
weighing the mass increment over a longer given period of time the working fluid.
744 L. Chai et al. / International Journal of Heat and Mass Transfer 62 (2013) 741–751
Fig. 1. Structure and size of heat sinks. (a) Structure (b) size (c) packaging.
An uncertainty analysis is carried out on relevant parameters Eq. (7) can be further written as
using the procedure described by Moffat [19]. If R is a given func-
" 2 2 2 2 #1=2
tion of the independent variables x1 ; x2 ; x3 ; . . . ; xn , and DR 1 @R 1 @R 1 @R 1 @R
Dx1 ; Dx2 ; Dx3 ; . . . ; Dxn are the uncertainties in these independent ¼ 2 Dx1 þ 2 D x2 þ 2 Dx3 þ þ 2 D xn
R R @x1 R @x2 R @x3 R @xn
variables, the uncertainty of R can be evaluated by
ð8Þ
" 2 2 2 2 #1=2 In this paper, the maximum values of uncertainty are domi-
@R @R @R @R
DR ¼ D x1 þ D x2 þ Dx3 þ þ Dxn ð7Þ nated by the flow controller, manometer, and temperature mea-
@x1 @x2 @x3 @xn
surement limits. Based on the instruments and methods
L. Chai et al. / International Journal of Heat and Mass Transfer 62 (2013) 741–751 745
state. (2) The effect of gravity and other forms of body forces are
negligible. (3) The dynamic viscosity of water is set as piecewise-
linear functions of water temperature as shown in Table 2 [20].
(4) Viscous dissipation is taken into account. (5) Multi-channel
effect is considered (half of the heat sink is involved in the compu-
tation). The governing equations can be expressed as follows:
@
ðq ui Þ ¼ 0 ð9Þ
@xi f
@ @p @ @uj @ui
ðq ui uj Þ ¼ þ lf þ ; i; j ¼ 1; 2; 3 ð10Þ
@xi f @xj @xi @xi @xj
" 2 #
2
@ @ @T @ui @uj @ui
ðq ui cpf TÞ ¼ kf þ lf 2 þ þ ð11Þ
@xi f @xi @xi @xi @xi @xj
ðpmic;in px ÞDh
fapp;x ¼ ð15Þ
2ðx xmic;in Þqu2ave
Z Z
1
px ¼ pðx; y; zÞ dydz ð16Þ
yz y z
Nusselt numbers deviate 5.8%, 3.6% and 0.9% and the friction hx D h
Nux ¼ ð18Þ
factors deviate 4.1%, 2.3% and 0.7% from those of 1.6 million grids. kf
Thus we use 1.2 million grids for the heat sink R. For the heat sink
F, deviations of the average Nusselt numbers using 0.6, 1.2, 1.8 and qAsub
hx ¼ ð19Þ
2.4 million grids from that using 3.0 million grids are 10.2%, 6.3%, Acon ½T w ðxÞ T f ðxÞ
3.2% and 1.1%, and at which the friction factors deviate 8.7%, Z
4.1%, 1.9% and 0.9%. Thus we use 2.4 million grids for the heat sink 1
T w ðxÞ ¼ T w ðx; y; 0Þ dy ð20Þ
F. For the heat sink T, deviations of the average Nusselt numbers y y
using 0.6, 1.2, 1.8 and 2.4 million grids from that using 3.0 million R
grids are 10.4%, 6.6%, 3.6% and 1.2%, and at which the friction fac- Ac
quðx; y; zÞcp T f ðx; y; zÞ dAc
T f ðxÞ ¼ R ð21Þ
tors deviate 9.4%, 4.7%, 2.3% and 0.9%. Thus we use 2.4 million grids quðx; y; zÞcp dAc
Ac
for the heat sink T. Fig. 4 shows the unstructured grids of the x–y
plane for the computational domain of the heat sinks. where the Pr numbers are set as piecewise-linear functions of water
The simulations were performed using the FLUENT 6.3.26 soft- temperature as shown in Table 2 [20].
ware. The code were discretized by the second order upwind dif-
ferencing scheme, decoupling with the SIMPLEX algorithm and 4. Results and discussion
solved using a finite volume approach. The solutions were consid-
ered to be converged when the normalized residual values were 4.1. Pressure drop
less than 105 for all variables but 107 only for the energy equa-
tion. Because the smaller Reynolds number can result in larger Fig. 5 shows a comparison of the numerical predictions and
variations of physical properties of water at the given heat flux, experimental data for fapp Re. As shown in Fig. 5, the present
a smaller relaxation factor is needed to reach the convergence numerical predictions are found to be in excellent agreement with
of the computations. In this study, the relaxation factor is in the the experimental data, whose maximum differences are 1.02% for
range of 0.2–0.8 for the momentum and energy equations. the heat sink R, 6.16% for the heat sink F, 5.96% for the heat sink
T, respectively. From the figures, one can observe that in the range
of Re < 300, the heat sink with periodic expansion–constriction
cross-sections have substantial decrease of pressure drop
compared with the heat sink R. In the range of 300 < Re < 750, with
an increase of Reynolds number, the fappRe for the heat sink with
periodic expansion–constriction cross-sections increase rapidly
and are obviously higher than those of the heat sink R. This can
be attributed to the convective fluid mixing in the reentrant cavity
and the redeveloping boundary layer along the constant
cross-section segment. The fappRe of the heat sink T is obviously a
little larger than that of the heat sink F. This suggests that the form
drag induced by the triangular reentrant cavity is larger than that
of the fan-shaped reentrant cavity.
It is necessary to understand the flow structure and behavior in
the microchannels before discussing the local fluid flow character-
istics. Refs. [15,16] displayed the local flow structure in the reen-
trant cavity. Now, multi-channel effect is considered and half of
the heat sink is involved in the computation. Fig. 6 presents the
velocity distribution in the heat sink for Re = 474.6 at the plane Fig. 10. Nu versus Re.
of z = 0.25 mm. As shown in Fig. 6, in the entrance plenum region,
water flows gently and regularly. However, in the exit plenum re- to produce high dissipation rates and the velocity distribution is
gion, the main flow separates to form lots of recirculation regions, confused and disordered. Simultaneously, around the centerline
the water from the recirculation region joins the main liquid flow and near the sidewall in the exit plenum region, the velocity is
748 L. Chai et al. / International Journal of Heat and Mass Transfer 62 (2013) 741–751
relatively small and the laminar stagnation zone is so much more term in the reentrant cavities. When the water flows into the
prone to develop. expansion cross-section region, the velocity slows down and the
Fig. 7 presents the corresponding pressure distribution for pressure builds up, and when the water flows into the constriction
Re = 474.6 at the plane of z = 0.25 mm. Corresponding to the cross-section region, the velocity increases and the pressure de-
regular velocity distribution in the entrance plenum region, the creases. When the water flows in the constant cross-section region,
pressure has almost the same value for the fixed x value. Corre- because the laminar flow boundary layer is interrupted by the
sponding to the disordered velocity distribution in the exit plenum reentrant cavity, the pressure shows a clear trend of declining rap-
region, the pressure boundary is no longer tending to straight line idly. In the exit plenum region, the pressure drops slowly to the
and the pressure has larger values around the laminar stagnation general trend except at the beginning portion. There the pressure
zone. goes up firstly due to sudden-expansion cross-section, and fluctu-
Fig. 8 gives the calculation results of local pressure drop px ates wildly due to the laminar stagnation zone development.
along x direction for Re = 474.6. In the entrance plenum region, To take into account the entrance effects on the overall friction
the pressure is inching down with the same velocity of flow in factor in the microchannel region, the dimensionless developing
the three heat sinks due to the same geometry there. In the micro- length x+ is the proper parameter [21]. Fig. 9 shows the corre-
channel region, for the heat sink R, the pressure is continuously de- sponding varying local fapp,xRe with the non-dimensional flow dis-
creased by a frictional pressure loss along the microchannel, and tance x+ for Re = 474.6. As Ref. [22], for the heat sink R, the
for the newly proposed microchannel heat sinks, the pressure drop distribution of fapp,xRe does not depend on Re and the dimension-
consists of not only the term along the microchannel, but also the less hydrodynamic length x+ is 0.055. As shown Fig. 9, in the range
L. Chai et al. / International Journal of Heat and Mass Transfer 62 (2013) 741–751 749
Fig. 13. Tw,x versus x. Fig. 15. Total thermal resistance versus pumping power.
Fig. 14. Nu,x versus x⁄. Fig. 16. Term thermal resistance versus pumping power.
14 mm < x < 15 mm. In the range of 15 mm < x < 20 mm, corre- As shown in Fig. 15, with an increase of pumping power, the to-
sponding to the exit plenum region where there is no film heater tal thermal resistance reduces dramatically at low pumping power
at the substrate, the temperature at first diminishes rapidly, and and the drop speed continues to moderate at high pumping power.
then has a slight decline along x-direction due to the thermal con- This can be explained as follows: the convective term thermal
duction in solid silicon. It can also be seen from Fig. 13, the maxi- resistance decreases due to the rapid increase of heat transfer coef-
mum of temperature at the substrate of the newly proposed heat ficient with an increase of the Reynolds number as shown in
sinks is well below that of the heat sink R. Fig. 10, the capacitive term thermal resistance shows a linear
Fig. 14 shows the longitudinal distribution of local Nusselt downward trend and the conductive term does not change with
number for Re = 474.6. The following trends can be observed: (1) an increase of volumetric flow rate, all of these factors lead to
The Nusselt numbers are much higher at the entrance of micro- the total thermal resistance declining with an increase of pumping
channel region, but for the newly proposed microchannels, the power. However, with an increase of volumetric flow rate, the
thermal entrance effect is weakened obviously. This can be attrib- pressure drop also increases rapidly, and the pumping power will
uted to the expansion–constriction cross-sections, which hinder increase considerably whose growth rate is far faster than the drop
the development of the thermal boundary layer and keep it in a rate of total thermal resistance. The variation of each component of
certain level for a given Reynolds number. (2) Due to the thermal the thermal resistance with pumping power is given in Fig. 16.
conduction in the silicon wafer and the sudden-expansion cross- With an increase of pumping power, the conductive thermal resis-
section from the microchannel region to the exit plenum region, tance does not change, the convective and the capacitive thermal
an obvious positive gradient of Nusselt number occurs at the end resistances reduce, and the difference of thermal resistance be-
of the microchannel region. (3) For the newly proposed microchan- tween the newly proposed heat sinks and the heat sink R is mainly
nels, corresponding to the expansion–constriction cross-section, embodied in the convective term thermal resistance. Fig. 17 shows
the local Nusselt numbers present small fluctuations, which de-
crease in the expansion cross-section and increase in the constric- Table 1
tion cross-section, and the amplitude of periodic fluctuation is far Measurement uncertainties.
less than that of local friction factor because with the variation of Parameters Maximum Parameters Maximum
cross-section, the velocity of flow changes obviously but the tem- uncertainties (%) uncertainties (%)
perature alters little. Dh 0.34 Rt 2.28
Aflim 0.01 Dp 3.29
4.3. Thermal resistance m 1.00 DTm 7.35
uave 1.05 fave 3.95
Re 1.22 have 7.36
In order to give a clearer understanding of the thermal perfor-
Q 2.05 Nu 7.39
mance in the microchannel region of the heat sink, the relation
L. Chai et al. / International Journal of Heat and Mass Transfer 62 (2013) 741–751 751