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Why
lntn Scali?
rom th
02) Voe mouaularn machintk exist toduy? ya, in
exampu. 1f vnot, why:
wmpownd
L Mo caulan machin is a mohlar
p.T.O
Struchuv_DeqTa o6 Coniunone Deqv of trudom
Nomumdaum
Bulk O Bulk matvwudr
Qwamtum Wll 20 syrtm
2
NanMwIY
(uamtum Dot
- OD sstm
OS Nwmical
ad (m )A
2x d 200 nm)
2
d 3 5. 714 m
TCor)
lop-Down Approach
LTop-Down appr0a MAD involves breaking
down b wlk mateua into naD siz1d
Srucwus pauhi dus
Thwe proAU a inhwum ty 6imakeI sinnplur
LTe mc
G Sublimahn, cardbonau
Potymun
humoysi/ Pq» us: (Corabdlhu
Parhd mhoM
Hin- cMnGu amd
Ar dis chong
Lae ovbloubm.
RF sputtiny
- beam ewaA
Prupolysis
ombuna
Sowcohu
high e )
9Plawna MtaodA
Cmi(al etthinq
chami cal poliyhrg
Onwi
Auchropolishing
Atuooizin
Combus tn
5Litogmpi,
Photo ho araphy
Nao - inmpvintLHa. -
GNamosphuu ifho.
6 P'hotolitograp
fabyicaonSymhis
down muhod
E is top
n a o shru
thwLd dowie
matoil is appicd
fo sunhau o silin
A
Subsa
predttomind Paltou .
nvolve no
COnfac wh The esisp
LProxim vininq
trom 7eist. Rsouion
hwd 20 -
5 0 MM
Mask
Mask
Fresnad nu dd dikrahin
not w q00d becoz
i t
W K JAd
Lang qap C No Fesnd dittrathion)
rei
RLseuion goveumd by Kayuy
wk N.A e nsine
N. A
n is rathu ivd
(or)
Elacron Lithocraphy
Photoli Hhqrap hy:UV- Liyht d hy cdacen aua,
Seannn ordq
2
JUNE
MEETINGS/APPOINTMENT1S
10
au mituing W
MONDAAY
DAY 1/9 1 27
nL ehantal mema
r t coate
12
can'ster iluo anD matertau
Mlal'um hou
mechanicaal att hm prin u'pal
fo duwn
koalldumllngA
T u bul
mrosim
mpat uwhu' n
mArtal neTdt
YLAAonA
plasne d Mnt,
CO htch cai
ompach'on, el ayh
mah'on ayh cc
Pann'cl
a chun wldyg
urmr Aamu ah
0 po du aba
hthiss mumoe nanAnabendl4 t t 20 m
D WH_rn0CpenA
onre o
ie, Noumy
MEETINGS/APPONMA porhcu TUESDAY
10
WK 27 DAY 179-186
28
12
bo
2
6
Page No.:
Date
PWsed Deposition
a techg to obtown
mattwa the Tha daposited
oen
A A Hgh power used JassN
bepm ed en The
torge_mateual n a
TAvono s dapaitroen
the bass matenual nth a
Aed th
tangel
Bass mate
Pwke Cswbstret)
Plumad
cols ia h ee t
is d to descesco
bu A g m e l
Th cel onmd_oue
iade
J i r , thanks to tha mivLopC
ing prL prssl en fha
oinas
eado a /
p
Dae Oacattenuhg by
Aluen Aanbclas the pLoska
outsido
an
ight
hon ha p is iniaated
Sm ho iasida, ths amllan.
th u b olo,ANCR
emmouca VAn
Dichno um
FCC
nwba
Ne wil toy do generae fomuda for
Sw Atr (FcC)
tarke =3 sn
n'
atem = 8
A *p