You are on page 1of 21

dfeao MachPniu

aflow chavt

AbY Clearu no
tont
cuoer
DepottuenD
CEvaposattop Sputteicn), cUD etc
metal, eofcordue loy, drelee tiy

o Cextey
ka ndy
S

a
Ahe
y

nReskstocek pttein thange


ufe

Achung
Cuott, dy, RIE
bRIE,SuGs1ate Relge
eacb

sothopc peoitar
anito bopic thuh ey
diUms
AD TC rotekna althung slep
may be otplated bdrusion co ion
im phrtation

COfe lece bondirg packciotr

bis i ot wodtr t h

com mon pfure deoteey


1OCelsc Each e
hc Cun {rigt
Dre at lach

equied A dte motLn fed


Relaake oth
on a heacler
dartcel th
Eunjatk
minomachinus na rat kau1
ant

TTI
pachae deto.
bals miro machinëng

Dtl mibromaeknirg 1s Toitalied tn th

eome a oate a r Cton tethoctogg

mer6
Xmy e eb Cf
Moovi Commeia
U

tLeg bal oioro machinu

Bauls UrO meth nung StraLctuve mo h

Stodi m
keno0s 40
ehrtkne 10 the eu

A latex the dusertv i n 0

eus diesons 300 mm

blk mit0 machynung V S UN


amf
mttenal enmo ued cho05 con
oembey of Cont leLe beoumg
ute
6 m

crHeren heley a otbe pe y

Stractute
Ueng bulk TCAo matSnigpo Cely corth

wet chem coetthung u sthauduve cun be


tohicuted on SES an des ut tep the

te Fnbelueal in balk machi nuroy


h the rOce

r1e Sunmeeol below

GnoD thf ck Cio laueY on ue

$pio- coa phowotst o 0 layer


to Cant leuer
Conyout phob thoqraphuj choe
oxi de etch
geome tp
out Oí de to unuane d el e a to ov
ttth

Ccarttlee beam eole on Sajacc

Do anfotehtc elehurg om Cotty n

uwale
8hahog/

thuny Remoufng uneanted meferial drom subr bad

wet elthing and Dry kchurp


A
tokrbic den- 15olop ic etthg

chemfcu t we
ekhug F a chemfcal t w

ore ugung ound materialype


a sn
De
ae dppina the matthal Tn
the
called wt etthig. o this 3Cmolle

topper o then layea(.


chemica
mot n g
otaqphfc -
we are

(oled Ysotaopbi
cve usur9
into the del'n Wt we

dlon totropbic
coalled
oriepted bemia
trequuTt othe

clonisotophit -mo etching

uniomiiy
Etch ote
Etch selecthuity e teh
tthyate
materal
ooturt
vemo ued pey uuit
The

Beaubstrade

pboto m a teial protec ted Apuoands Suby tral


ed ts. Notect ohTch oe dt ccant

Temote.

e aYe plaein
Dae t pheto reit+ e r wt eueN

Echio
Tbe prOcels Temoue unwantto mferia
drom loy nterelt

Ctching
yer tt pejta med ter a protcoton
layer Cphoto vutt) about the tange

patteon
4Etchin9 a chemical xn ) ohich no talk d

precip tate
is med ttchig can Le et thev
Hope n Lqui d C1) peo phale,

Etthing pea
0 alcd elthing
dtthin

Calct ctehtrg
D Lquid lpbae n know cOet et
xpblw
the ma-tesal vemoucd by themica
a the
a0 etthim lelo cLno tbe material

Subetate

chedi
o phyfcal
phavical
dtthrg T doe by
dh bate
Su btb hate
TonisedSu
Tonised
?oteractuon
blto ato m a

bry ave ch yaoleized bey


Ethig moCe! Cuet|
0 Etb nte Eth selatu ytth unpity
0 thh ede
ral Te.rme ted pe
he tisctone an ma te

Eth tedectudy
ht
1qtr o ma tesial emo ued to othe

matrial eent on the

4hdoFloic i emou So muthaty

Etth Ogtmity
Reen the uoypmi ty in elthdeptb of
tbe etchtd Sufa

UOt etthi
Clapny o wd etchug oced the etto

nate t untem tn all dhyecluon n nat t

ft is rsotr ophtt doeidt depend en Chystal


Strac tae (ov) ieplaton (wd. elthing
wetl o Poduura pupott oniep kluch
oppcaich eceg o to c
nhe
gbe batfc skpt TnuolVed Yn the wet
etchu
oOceu qne

SoialieD ohole toto Nernfcooduutor to Si

State

nnttucly ehaqed ott retp to -ely


dttachi ng

chaysd bCeD
ReachoD bleo hdrated licon and complen

pott To ol ttlachont lolo,

6 Dreeluton
xD pro dtuet Toto
the

etcherct den

alet otchuhg e conicd cut by dupi the

Sabetrate n an ethum sel'n Lo1) prau

etthirg tsln.

This involtes tranvoatng cat tet at to the


thee
Suae the subi rate; a themicc nxn

chwic
the aubdeguent emonl the odut oh tht

fealunet Calet ethum

in expene icLe equipment is wcd


0Relattuely
OConORue alepbelic and aid a uec

altcali

Galnate modu ae alo cot

dtcult toaduu.tomate

Lact abeue deatq of toct elhung PMt

mLuh dor indu/ tial hroateo 'Jattli ltey


aalalar
IretonRe ttchi
5u9

ZCCLLA nthis etohem

L66 33

Tbe
phale ame s1
rluaD
Tbe tckin maunnto enode

erycialune dtireclk.
tbe etth rate independe
uwfth aTegult thaut tthirg taeu daté toa
dlaeclent and may ene) be Cuom al

wulioni
co mmonu utd otio pbfc
eomdhoD
The
fofGcon(ft) t a YOiser tF3m/1
etchant

acrd (Hrlo3, m) anol atec attdCe,co01


lde
hee
heoe ae
ae 9cdto YCmole th licon tpe

h
i iec t
ce
och EnolCe b4 meY al

360K

eded Joy
neLdin
ttp
94otephie clthurg
matertau,
remottog the ougbnk
tie
edjel

stts dfeult ts teb the doapeio


ttoettie
etdhreu
th the
lateral & UerRea edge
noving
iuutb ani hophte
ue lesy , w e gie

ateuophie
dependen
kehy uxt etehtnt ce) Oieoleten

hu tan diuebe the gi pane 8erfccndu


mattaFaltai thap eta plodcr

The angle beaseth planeo co to plsu o to

110

The-engebto plctrie- of180 a0d


10O Su be teh nate
6.21

elahuhga iDoand 1o
eatuue antetiorbit

iented. ien waer


00 t10
t niid tkopung uonll Su e Af cal
de wall

clop dd veult Yp
ocal-elale (skopeoft/
dawoo tve
tchet ith
Ner tical te coally
e cNaused
po r le

f l a t botsm pavalle
ctultigaléhcaty
to t top Qa yate pot ble otto
ue etb g bidaes be etunnot be
a te Gny in some cale med.

Shape iulatao dhaperdtapay


diapmau eeun be ane d t to desoy
cenuentanalupdosred
to Coobal
a Eat tb control dia,ham Dful
dfaphra.m dimenlio
denoNy
03lop|2022
uyate (VEIO me Chani

-s lm

Saesorcial laye
D 6Yete ma nex
Compa cion balis ftio ma chi nt Dgn
techoq

adding, an ma tesTal lae on lop e


Stlttrote
rlrcoD dioxEole tayey Ye ued an tafatten
to
cehich nemo d ctched out

necetany Cwrde) n the thfcke Aiccudo AeclaoD


thicenc O a ayey i t t o 4 et h mae

adtonte 0oit30mach nLy

can Ge igteatd corl tbe


the C- tomtooe iu
monolithic e i o Um tompas
p brby e a l i a i elettrenic
mechani calstrac
ture g
Fy obleh
su(Gd-trcute, The
dimenroD
dimeDgtoo o
beealt on the Bame

then
mcLth male tha
Susfate Ciomachin

Comgne to btlh oituomachinuP


COwponeg
Sufae litomackinug
pyocek (
(thiceDs O-5uum
O-5um

pace laye
Sac cfal
co)

Micao ttractune

Snculaiov
maden
phospholale Gla CGhant) tipe
L PSG-
CFlicon tbale te)alicon dioyide CO
be deppo d
lhirp elchrg protty thteean
ate
choulel

oet etthing and Tbe e


Day etuhubg C r e m o u t

be igh Tpdatcaltoey Fu Cides


h madeu
aeF a to) Spate lyor e

STOa Co) hospho cate, thi fe o glas o em o ú e d

bytthung proce. the o Loes


layer stesbielcgt
echnelca

iaRieekpe Tovolv in Sacfcial

lap
ODepotizaon am pallesnirgacifeiad
chemca opou e
ou
Pepeci
f
chemca
uUa C L o w
preucue
CipeuDU
structeiae n(pleyGcon)
Deroeitan ed pattevum
CtpcuD) and Ctttaly mocea a o c e u )

o c
TEte
emou grD laer Cactc

ttboqvat
itbpqvat
oe ax utiq
pattemum
To
evPfcacep Ty
cep Ty
Sacifcalajp

oal e
Eno on
proiNed on
ttch bolte
boltg a e
poised
ttch
meio
machY neng
Stuvface emoltal t ma-tca

lyer to aeale
the Ctraclural t

tiom udei nefh


lhen hage qrea cantfleue beam e fovrmcd
cbnuno
TTfieAOmathining, bey tende to dellett
due-t suatt tenticD tnduted
Prquid daopld,

Co tcolaboD t0yev
attached t the ubitrate

duing fal ining & djig opeidueT


hchomenon KOen as &t Stiction
JJLIJH7-u

This thope7 pmed


oben uV 1a44

expokd

a4eS atmolucd
S3cmeduco

toal, the Sioa


aye
De abetue ene i

to oterCbmt

evera trecedetve e empleed


the pvttmatoc a ted oi th Srctum

columy
Odovotuon Bumbr on aifcel e

along olth Cafde

Roughenënq tbe eprotrte Cuyfate


Marcingp Srcen C) Cupfat. beduepho bie

latefia cal laye techoola


Rur'Ero o &aet
e matea ComponcAl

4pecace C nequy a compaable sel

g ettheny
etchert Struetunal mateial
baue
to
cqui red
vucinal mateial ane

methania popely cuch a hih yield


cauiile

Sbre rqth, mifni ma


m .

a l deactae,

1) 4ho ield
hactue ttrengh role
i) CAtr mum Oreep e at n
aCane." itnoMadhinng

M ave
duyjace m
mtefial jed in
Cpmmon
Common
(upcuD)
CLpcD)
rcon dioaide
1) pellbcon
pelsmde uoinium
tlicon 6ilicepol liten. (Huoicia eteh
JM Sat
lungtenlRon donide c f)- tkydheplued
utie
mate vial.
SaCifca
SHracHaa
Latewal

atfjPco
(yer
a
tu ul tng
Dep elytcop

emo uLg polyrlitn


o icon)
Ft Med fo
Tolaophfe elehng
leuev tralu,
&trtuetu,
a CaDti leuuev
capfi
alig a
to
Steps
Leps
Pouolued

Sayate micaoacbnirg soedann

loyp
or0 Dp o6 srrate
thfek, cro
Depec a

ad tbe
Depet photonestt bSpn coa.lng
tfrun trantje by Gtsoraph
4
photove'sr
euelop photo vet t cxpee on o Go for
to the etet ir e
etchiq d
trpy ve

o ilhtlad the tc king tep thl pllood


hued

tecccrarao

uherc the
area
motue the O daom tho(e

becm occuY on thcE i Y


cantt leue

pelagck

epoc7pelyiticon on the 8ujate CuD pk


T doprd to haq kt ctoh ChanactenfStfcs
Conductivi
Remota the ctD loyov Sacia latetch

ech quue
o5lolso32

Galefer Bondig techiyue

yednocie honding
(eleelrottalre Bopdurg

Docd bopdig

Iptemedi aile layey asig led bonding


cathode
2.00-1Coo
Glas CPyye- Tta
lype pala
rlron

HSUC
Lancde

hertury
al ato
qppyug bah
uo llege, l e
T o n g .b
Yebi
e
TO NE aY
Ton a
Tome
the glay eleates

con loye
mfgatto to the

SttQo SO
togetter um
togee uwem
oded
are

Pye eod oater


is
ug teominal o1 oPY duppy
auoodie bo pding
teamtal ncttd
og/er E u e
tncted tb icon
in
voltge opplied t
to gla, aJ thown f f
a bopdu empera tuse
tooov,
apge af oo to
tbe nau1ge
De
the&i Cubtrole
uoe obtainec y plael
a bealer C fook -from alas oiqrate eto lton

stcon& gloi, ekall


ie,lao ltuer blo
in tro na chemica bond.

tal
table eDAUe q0cd.quali
be below
byeas o a umma
aneclic bomeng

alues
porarmeler

lempera lane uS0 C

500V

poRnt Cootact
elec node
to smn
tfmt

SunAaLe uDetepoM NO.lltm

Checlde malched.
lberma expaneLop
Mera pauil
LOLM
Bond rength

You might also like