MEMS based

Gyroscope
Presentation by:
Shristi Goswami (2015034)
Rituraj Roy (2015048)

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Table of contents

01 02 03 04
Introduction Device Design & Fabrication Experimental Data
Working Principle

05 06
Applications Conclusion

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INTRODUCTIO
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 1 Gyroscope
A gyroscope is a mechanical or electronic device used to
measure and maintain orientation or angular velocity.

It is often used in various applications, including navigation

systems, robotics, aviation, and more, where the precise
determination of orientation or rotational motion is essential.

MEMS Gyroscope
They are a type of micro-electro-mechanical system (MEMS) that
combines mechanical and electrical components on a very small
scale, often at the micro or nanometer level to facilitate precise
motion sensing and orientation detection. Figure.1. MEMS Gyroscope implementation in
smartphones

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Differences between Mechanical Gyroscopes
and MEMS Gyroscopes
Mechanical Gyroscopes MEMS Gyroscopes

Relies on the conservation of angular momentum. A spinning wheel or Operates based on the Coriolis effect. A vibrating mass or structure
rotor resists changes in orientation. deflects due to angular motion.

Typically larger and bulkier, making them unsuitable for many Extremely compact and can be integrated into small electronic devices.
compact applications

Consumes more power due to the mechanical spinning components. Consumes less power, making them suitable for battery-powered
devices.

Typically more expensive to manufacture and maintain. Cost-effective due to mass production and integration into consumer
devices.

Becoming less common in modern applications. Prevalent in a wide range of consumer and industrial products.

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DEVICE DESIGN & WORKING
PRINCIPLE

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2 Design & Working Principle
MEMS gyroscopes typically
operate based on the Coriolis
effect. When the device undergoes
angular motion, a vibrating mass or
structure inside the gyroscope is
subject to Coriolis forces due to the
rotation. These forces cause the
mass to deflect, and this deflection
is detected and converted into
electrical signals.

Figure.2. Schematic of the Gyroscope’s Mechanical Structure

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2 Design & Working Principle

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2 Design & Working Principle

Figure.3. Sketch map of the MEMS gyroscope

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FABRICATIO
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3 Fabrication
1 Proof Mass

2 Suspension System

3 Driving Electrodes

4 Capacitive Sensor

5 Substrate Figure.4. Schematic architecture of a single proof

mass vibrating gyroscope

6 Supporting Pillars

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3 Fabrication

Figure.5. Micro-fabrication of the Gyroscope Figure 6. Sensor design.

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EXPERIMENTAL DATA

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4 Experimental Data

Figure.7. Voltage vs Time; X-axis

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4 Experimental Data

Figure.8. Voltage vs Time; Y-axis

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4 Experimental Data

Figure.9. Voltage vs Time; Z-axis

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APPLICATIONS

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5 Applications

Consumer Electronics Robotics

Aerospace & Aviation Defence & Military

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6 Conclusion
Understood the idea of a gyroscope, particularly, a MEMS Gyroscope, its working and design
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configuration.
The key steps involved in the fabrication or manufacturing of a MEMS Gyroscope.
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Some experimental data to highlight the key parameters such as size range, power consumption
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or sensitivity that make the use of MEMS based Gyroscope prevalent in the industrial sector.
The varied sections of application for the instrument.
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References

Sl No. Research Paper Details

1 Zhanshe, G., Fucheng, C., Boyu, L. et al. Research development of
silicon MEMS gyroscopes: a review. Microsyst Technol 21, 2053–2066
(2015). https://doi.org/10.1007/s00542-015-2645-x

2 Armenise, M.. (2010). MEMS Gyroscopes.

10.1007/978-3-642-15494-2_6.

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Thank You!

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