&ROOHFWLRQHIILFLHQF\RI(89VRXUFHV

*XHQWKHU'HUUDDEDQG:ROIJDQJ6LQJHUF
D
3KLOLSV*PE+5HVHDUFK/DERUDWRULHV$DFKHQ:HLVVKDXVVWU$DFKHQ*HUPDQ\
E
3KLOLSV([WUHPH89*PE+6WHLQEDFKVWU$DFKHQ*HUPDQ\
F
&DUO=HLVV607$*2EHUNRFKHQ*HUPDQ\

$%675$&7

7KHFROOHFWLRQHIILFLHQF\LVRQHRIWKHPRVWLPSRUWDQWFKDUDFWHULVWLFVRIDVRXUFHLQDQ(89OLWKRJUDSK\V\VWHP,WLV
GHILQHG DV WKH IUDFWLRQ RI WKH WRWDO LQEDQG (89 UDGLDWLRQ SRZHU ZKLFK FDQ DFWXDOO\ EH SLFNHG XS DQG XVHG LQ WKH
VXEVHTXHQWWRWDORSWLFDOSDWKRIDQ(89SURMHFWLRQV\VWHPGRZQWRWKHZDIHU,WLVQRWDSURSHUW\RIWKHVRXUFHDORQH
EXWLVGHWHUPLQHGERWKE\WKHGHWDLOVRIWKHRSWLFDOV\VWHPZLWKLWVHWHQGXHOLPLWDWLRQVDQGE\WKHJHRPHWULFDOLQWHQVLW\
GLVWULEXWLRQRIVRXUFHSODVPD8QWLOQRZWKHVRXUFHSHUIRUPDQFHKDGWREHHYDOXDWHGE\UD\WUDFLQJFDOFXODWLRQVRIWKH
FRPSOHWHRSWLFDOOLWKRJUDSKLFV\VWHPLQFOXGLQJWKHVRXUFHZKLFKZHUHTXLWHWLPHFRQVXPLQJ
7KHUHIRUHDVLPSOHDQGIDVWEXWVWLOOUHOLDEOHPHWKRGIRUHYDOXDWLRQRIFROOHFWLRQHIILFLHQF\KDVEHHQGHYHORSHGZKLFK
LVEDVHGRQWDNLQJSLQKROHLPDJHVRIWKHVRXUFHSODVPDZLWKD&&'FDPHUD)URPWKHVHDVRXUFHLQWHQVLW\GLVWULEXWLRQ
LV FRQVWUXFWHG ZKLFK LV XVHG DV LQSXW WR D VXEVHTXHQW VLPSOH SURMHFWLRQ DOJRULWKP %\ WDNLQJ LQWR DFFRXQW UDGLDWLRQ
IURPDQDOORZHGVRXUFHYROXPHRQO\ZKLFKLVFRQVWUXFWHGEHIRUHKDQGE\ULJRURXVUD\WUDFLQJWKHDFWXDOFROOHFWHG
SRZHUDQGWKHFROOHFWLRQHIILFLHQF\LVFDOFXODWHG
&RPSDULVRQZLWKGHWDLOHGUD\WUDFLQJPRGHOFDOFXODWLRQVRIWKHFRPSOHWHRSWLFDOV\VWHPLQGLFDWHWKHJRRGDFFXUDF\RI
WKHPHWKRG,WFDQEHXVHGLQDVLPSOHZD\IRUVRXUFHRSWLPL]DWLRQDQGHQDEOHVUHOLDEOHHYDOXDWLRQDQGVSHFLILFDWLRQRI
VRXUFHSHUIRUPDQFHLQ(89SURMHFWLRQV\VWHPV

.H\ZRUGV(89OLWKRJUDSK\(89VRXUFH+&7SLQFKVRXUFHFROOHFWLRQHIILFLHQF\HWHQGXHVRXUFHVL]H


1. ,1752'8&7,21

2QHRIWKHPRVWLPSRUWDQWFKDUDFWHULVWLFVRIDQ(89OLJKWVRXUFHIRUPLFUROLWKRJUDSK\LVWKHDYDLODEOHLQEDQG(89
SRZHU$SRZHURIDWOHDVW:ZLOOEHQHHGHGIRUDSURGXFWLRQWRROPHDVXUHGDWWKHVHFRQGIRFXVRIWKHFROOHFWRU
WDNLQJ LQWR DFFRXQW WKH RSWLFDO UHTXLUHPHQWV ± H[SUHVVHG E\ WKH V\VWHP HWHQGXH  RI WKH ZKROH LPDJLQJ V\VWHP 7KH
DYDLODEOHSRZHULQWKHVHFRQGIRFXVLVJLYHQE\WKHHOHFWULFDOLQSXWSRZHU3HOWKHFRQYHUVLRQHIILFLHQF\&(RIHOHFWULFDO
LQSXWWR(89UDGLDWLRQV\VWHPWUDQVPLVVLRQ7V\VWDNLQJLQWRDFFRXQWFROOHFWRUUHIOHFWLYLW\DQGSRVVLEOHJDVWUDQVPLVVLRQ
DQG±WREHFRQVLGHUHGKHUH±WKHFROOHFWLRQHIILFLHQF\ FRO
 3(89 = 3HO ⋅ &( ⋅ 7V\V ⋅ηFRO 

7KH FROOHFWLRQ HIILFLHQF\ LV RQH RI WKH PRVW LPSRUWDQW FKDUDFWHULVWLFV RI D UDGLDWLRQ VRXUFH LQ DQ (89 OLWKRJUDSK\
V\VWHP,WLVDJHRPHWULFDOTXDQWLW\GHILQHGDVWKHIUDFWLRQRIWKHWRWDOLQEDQG(89UDGLDWLRQSRZHUZKLFKFDQDFWXDOO\
EHSLFNHGXSDQGXVHGLQWKHVXEVHTXHQWWRWDORSWLFDOSDWKRIDQ(89SURMHFWLRQV\VWHPGRZQWRWKHZDIHU,WLVQRWD
SURSHUW\RIWKHVRXUFHDORQHEXWLVGHWHUPLQHGERWKE\WKHGHWDLOVRIWKHRSWLFDOV\VWHPDQGE\WKHJHRPHWULFDOLQWHQVLW\
GLVWULEXWLRQRIWKHVRXUFHSODVPD
7KHFROOHFWLRQHIILFLHQF\RIDQH[WHQGHGVRXUFHLQDQRSWLFDOV\VWHPFDQEHDQDO\]HGE\WKHHWHQGXHIRUPDOLVP8QGHU
WKHDVVXPSWLRQRIDQHOOLSVRLGDOVRXUFHLQWHQVLW\GLVWULEXWLRQDQDQDO\WLFDOH[SUHVVLRQIRUWKHVRXUFHHWHQGXHLVGHULYHG
7KLVFDQEHXVHGWRDQDO\]HWKHFROOHFWLRQHIILFLHQF\IRUYDULRXVVRXUFHJHRPHWULHVDVDIXQFWLRQRIFROOHFWLRQDQJOH

728 Emerging Lithographic Technologies VII, Roxann L. Engelstad, Editor,

Proceedings of SPIE Vol. 5037 (2003) © 2003 SPIE · 0277-786X/03/$15.00

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/17/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 7KHGHVLJQRIHIILFLHQWLOOXPLQDWLRQV\VWHPVDQGGHWDLOHGVLPXODWLRQDQDO\VLVRIWKHFROOHFWDEOHVRXUFHSRZHULVFRPSOH[
DQG WLPH FRQVXPLQJ 7KH JRDO RI WKLV SDSHU LV WKHUHIRUH WR SURYLGH DQ HVWLPDWH RI WKH FROOHFWDEOH VRXUFH SRZHU E\ D
VLPSOLILHG DQDO\VLV ,Q D ILUVW VWHS WKH pWHQGXH RI DQ LGHDOL]HG VRXUFH LQ GHSHQGHQFH RI WKH FROOHFWLRQ DSHUWXUH LV
HYDOXDWHG7KLVOHDGVWRDFROOHFWDEOHVRXUFHYROXPHIURPZKLFKLQDVHFRQGVWHSWKHFROOHFWHGSRZHURIDUHDOVRXUFH
FDQEHHVWLPDWHGE\SURMHFWLQJDQGLQWHJUDWLQJWKHFROOHFWHGUDGLDQFHRIWKHVRXUFH

2. (7(1'8(2),//80,1$7,216<67(06

2.1 The geometrical flux of extended volume sources of elliptical shape

,Q*+DQVHQLQWURGXFHGWKHWHUPLQXVµ/LFKWOHLWZHUW¶IRU%HUHNVJHRPHWULFDOIOX[*RIDQRSWLFDOV\VWHPZKHQKH
LQYHVWLJDWHG WKH LPDJLQJ RI YROXPH VRXUFHV  ,W ZDV VKRZQ ODWHU WKDW WKH JHRPHWULFDO IOX[ * FRUUHVSRQGV WR WKH
+HOPKROW]/DJUDQJH,QYDULDQW +/,  RI RSWLFDO V\VWHPV DOVR
FDOOHG pWHQGXH RU 3KDVH 6SDFH 9ROXPH RI FRQVHUYDWLYH V\VWHPV U
eWHQGXHJHRPHWULFDOIOX[+HOPKROW]/DJUDQJH,QYDULDQWRUSKDVH Uα
VSDFH YROXPH DUH V\QRQ\PRXV WHUPV $FFRUGLQJ WR IXQGDPHQWDO Ω(α)
ODZV RI SK\VLFV WKH JHRPHWULFDO IOX[ LV LQYDULDQW LQ RSWLFDO 5 α
V\VWHPV  7KHUHIRUHRQFHWKHJHRPHWULFDOIOX[LVJLYHQHJDWWKH D
REMHFWSODQHRIDQRSWLFDOV\VWHPDOVRWKHFROOHFWDEOHSRZHURID
OLJKWVRXUFHLVGHWHUPLQHG α
E
7KH JHRPHWULFDO IOX[ * LV LQ JHQHUDO GHILQHG E\ D  GLPHQVLRQDO ]
YROXPH LQWHJUDO RYHU HJ WKH ILHOG VL]H RI WKH RSWLFDO V\VWHP DQG Gα
WKH DSHUWXUH 7KH DSHUWXUH LV GHILQHG UHODWLYH WR WKH PDLQ
SURSDJDWLRQ D[LV HJ WKH D[LV RI V\PPHWU\ RI DQRSWLFDO V\VWHP ]

7KHLQWHJUDWLRQLQDQJXODUGRPDLQKDVWKXVWREHWDNHQRYHURSWLFDO
)LJXUH,OOXVWUDWLRQRIWKHYLVLEOHVROLGDQJOHRIDQ
GLUHFWLRQ FRVLQHV S[ DQG S\ GHILQHG E\ WKH WDQJHQW YHFWRUV DW D H[WHQGHGYROXPHVRXUFHDWILHOGKHLJKWK
OLJKWUD\PXOWLSOLHGZLWKWKHUHIUDFWLYHLQGH[Q

 *=
∫∫ ∫∫ ) ([ \ S  S )G[G\GS GS =∫∫ G$ FRV α ⋅ GΩ 
$UHD GLUHFWLRQ FRV LQXV
[ \ [ \
$Ω

ZKHUH)LVWKHDSHUWXUHIXQFWLRQRIWKHRSWLFDOV\VWHPOLPLWHGHJE\ILHOGDQGSXSLOVWRSV7KHJHRPHWULFDOIOX[*RI
LPDJLQJRSWLFDOV\VWHPVLVJLYHQE\WKHILHOGDUHD$DQGWKHQXPHULFDODSHUWXUHKHUHJLYHQE\WKHVROLGDQJOHΩ$VDQ
H[DPSOHWKHREMHFWILHOGVL]HRI(89OLWKRJUDSK\V\VWHPVLVW\SLFDOO\LQWKHUDQJHRI; PP ×< PPWKH
DSHUWXUH DW ZDIHU LV HJ 1$   WKH PDJQLILFDWLRQ β   :LWK D H[HPSODU\ FRKHUHQFH SDUDPHWHU σ   WKH
JHRPHWULFDOIOX[*RIWKHLOOXPLQDWLRQGLVWULEXWLRQLVJLYHQE\

* = ; ⋅ < ⋅ π (σ ⋅ β ⋅ 1$) =  ⋅  ⋅ π (σ ⋅ β ⋅ 1$) PP  ≈ PP  

 


'XHWRWKHOLPLWHGJHRPHWULFDOIOX[*RIRSWLFDOV\VWHPVDOVRWKHFROOHFWDEOHOLJKWIURPDJLYHQLQFRKHUHQWVRXUFHRI
ILQLWHH[WHQVLRQLVUHVWULFWHG7KHHIILFLHQF\RIWKHLOOXPLQDWLRQV\VWHPLVOLPLWHGE\WKHUDGLDQFHRIWKHVRXUFHSURYLGHG
LQWRWKHSKDVHVSDFHYROXPHRUJHRPHWULFDOIOX[*RIWKHRSWLFDOV\VWHP)RUDJHRPHWULFDOIOX[RIDQ(89V\VWHPDQG
DJLYHQFROOHFWLRQDSHUWXUHDQLGHDOVRXUFHVL]HFDQWKXVEHGHULYHGIRUZKLFKDOOOLJKWFDQEHFROOHFWHG
)RUWKHHYDOXDWLRQRIWKHJHRPHWULFDOIOX[RIDQLQFRKHUHQWH[WHQGHGYROXPHVRXUFHLWLVFRQYHQLHQWWRDSSO\WKHULJKW
KDQGVLGHRIHTXDWLRQ  ZKHUHWKHDUHD$LVWDNHQLQDGLVWDQFHWRWKHVRXUFHDQGWKHVROLGDQJOH ΩLVJLYHQE\WKH
YLVLEOHVRXUFHVL]HIRUGLIIHUHQWFRRUGLQDWHVLQWKHDUHD$ VHHILJ :HIXUWKHUUHVWULFWWKHGLVFXVVLRQWRURWDWLRQDO
V\PPHWULFDOSODVPDVRXUFHV:HGHULYHIURPHT  
 * = ∫ ∫ G$ FRVα ⋅ GΩ = ∫ ∫ ∫ UGUGϕ FRVα ⋅ GΩ = π ∫ ∫ UGU FRVα ⋅ GΩ 
$Ω ϕ U Ω U Ω

Proc. of SPIE Vol. 5037 729

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/17/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 )RU D VLPSOLILHG DQDO\VLV WKH VRXUFH LV DSSUR[LPDWHG E\ DQ HOOLSVRLGRIGLDPHWHU E DQG OHQJWKD)RU (89SODVPD
VRXUFHVWKH)+:0OHYHORIVRXUFHGHQVLW\GLVWULEXWLRQFDQEHWDNHQWRGHWHUPLQHOHQJWKDQGGLDPHWHURIWKHHOOLSWLFDO
YROXPHPRGHO7KHYLVLEOHGLDPHWHUG α RIWKHVRXUFHFDQEHDSSUR[LPDWHGIRUODUJH]E\
 G (α ) =  D  VLQ  α + E  FRV  α 
7KHVROLGDQJOHΩLVJLYHQIRUODUJH]E\WKHUDWLRRIWKHSURMHFWHGDUHDRIWKHVRXUFHDQGWKHGLVWDQFH5 α 
πE ⋅ G (α ) 
 Ω(α ) =
5  (α )
,QVHUWLRQLQHT  JLYHVWKXV

E D  VLQ  α + E  FRV  α π E

∫
* = π UGU FRV α ⋅
U
5  (α )
= 
] ∫
UGU FRV  α ⋅ D  WDQ  α + E  
U

$IWHUVXEVWLWXWLRQRIU ]WDQαLWIROORZV

D
 * = π E  ∫ VLQ α ⋅  + WDQ  α ⋅ G VLQ α 
α
E
)RUαPLQ WKHLQWHJUDOFDQEHH[SDQGHGWR
π    π  D π  D
 * = π  E  1$ +

D 1$ +
 E 
( E 
− D 
)1$ 
+
 E 
(E  − D E  + D  )1$ + 2 (1$ )
)RUODUJHDSHUWXUHVLQWHJUDWLRQRIHT  \LHOGV
α PD[
     
  * = π E  D DUFWDQ E + D WDQ α  − E + D WDQ α
    
 with e = D  − E .
 H  H   + WDQ  α α
  PLQ

)LJ  VKRZV WKH UHVXOW IRU D  PP E  PP αPLQ   IRU GLIIHUHQW RUGHUV RI WKH VHULHV H[SDQVLRQ RI WKH
JHRPHWULFDOIOX[DFFRUGLQJHT  


 * LQWHJUDO
* 2
*HRPHWULFDO)OX[*>PPA@


* 2
 * 2







      
&ROOHFWLRQDQJOH>ƒ@

)LJXUH*HRPHWULFDO)OX[RIDQHOOLSWLFDOVRXUFHPRGHOZLWKD PPE PPLQGHSHQGHQFHRIWKHFROOHFWLRQDQJOH
7KHVHULHVH[SDQVLRQVRI*XSWRQGWKDQGWKRUGHUDUHJLYHQIRUFRPSDULVRQ

730 Proc. of SPIE Vol. 5037

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/17/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 2.2 Collection angle of efficient illumination systems
)URP)LJXUHWKHLGHDOFROOHFWLRQDQJOHIRUDQHIILFLHQWLOOXPLQDWLRQV\VWHPFDQEHGHULYHG7KHJHRPHWULFDOIOX[*RI
* PPRIWKHH[DPSOHDERYHLVUHDFKHGDWDFROOHFWLRQDQJOHRIƒRUDQXPHULFDODSHUWXUHRI1$a$VVRRQ
DV WKH FROOHFWLRQ DSHUWXUH LQFUHDVHV DERYH 1$ a  VRPH RI WKH FROOHFWHG OLJKW PXVW EH ORVW VRPHZKHUH LQ WKH
LOOXPLQDWLRQ RSWLFDO V\VWHP HJ DW SK\VLFDO VWRSV RU OHQV RU PLUURU ERXQGDULHV 7KH HYDOXDWLRQ RI WKH FROOHFWDEOH
DSHUWXUHRIaƒDFFRUGLQJWR)LJVKRZVWKDWIRUDVRXUFHZLWKDGLDPHWHURI∅ PPDQGDOHQJWKRI/ PP
):+0 WKHFROOHFWDEOHSRZHULVUHVWULFWHGWRaRIWKHSRZHUHPLWWHGLQWRπLIRQO\WKHJHRPHWULFDOORVVHVDUH
FRQVLGHUHG +RZHYHU WKH UDGLDQFH SURYLGHG E\ WKH SODVPD VRXUFH LV LQ JHQHUDO QRW FRQVWDQW DQG WKH FROOHFWHG
JHRPHWULFDOIOX[RUSKDVHVSDFHYROXPHWKXVZLOOQRWEHILOOHGKRPRJHQHRXVO\7KLVRIIHUVWKHFDSDELOLW\WRRSWLPL]HWKH
HIILFLHQF\E\VHOHFWLYHO\FROOHFWLQJWKHSDUWVRIWKHJHRPHWULFDOIOX[RIWKHVRXUFHZLWKODUJHUUDGLDQFH
7KH VRXUFH YROXPH RI PP × PP OLPLWV WKH
VRXUFH UHJLRQ IURP ZKLFK DOO HPLWWHG UD\V LQWR WKH
FRQH GHWHUPLQHG E\ WKH H[HPSODU\ FROOHFWLRQ DSHUWXUH
RI WKH FROOHFWRU ZLWK 1$   FDQ EH FROOHFWHG )RU
ODUJHUVRXUFHVKRZHYHUDQ\UD\LQWKHGLUHFWLRQRIWKH WKHRQD[LV
5HDOVRXUFH
FROOHFWDEOH DSHUWXUH ZKLFK LQWHUVHFWV WKH LGHDO VRXUFH 9ROXPH
FROOHFWHG
YROXPHGRHVQRWLQFUHDVHWKHJHRPHWULFDOIOX[DQGFDQ VRXUFHYROXPH
H[DPSOH α JLYHV, 
WKXV DOVR EH FROOHFWHG $Q H[DPSOH LV JLYHQ LQ )LJ 
ZKHUHWKHLGHDOVRXUFHYROXPHLVVKRZQLQDQDUELWUDU\
VRXUFH GLVWULEXWLRQ 7KH OLPLWHG JHRPHWULFDO IOX[
GHWHUPLQHVDFROOHFWDEOHEXQGOHRIUD\VDQGRIFRXUVH
LW GRHV QRW OLPLW WKH SRVLWLRQ RQ DQ LQGLYLGXDO UD\ WKH
VRXUFH HPLWWLQJ WKLV UD\ +RZHYHU WKH ODUJHU WKH LGHDOFROOHFWDEOH WKHRIID[LVFROOHFWHG
VRXUFH9ROXPH VRXUFHYROXPHJLYHV, α
GLVWDQFHRIDVRXUFHSRLQW3ZLWKWKHFROOHFWDEOHVRXUFH
YROXPH WKH VPDOOHU LV WKH FROOHFWDEOH FRQH RI UD\V & 
IURP WKLV VRXUFH SRLQW 7KHUHIRUH WKH FROOHFWLRQ )LJXUH&ROOHFWHGUDGLDWLRQIURPDVRXUFHODUJHUDVWKH
HIILFLHQF\GHFUHDVHVUDSLGO\ZLWKLQFUHDVLQJVRXUFHVL]H LGHDOHOOLSWLFDOVRXUFHYROXPHWKHFROOHFWHG
OHDGLQJ WR ODUJH OLJKW ORVW LQ WKH LOOXPLQDWLRQ RSWLFDO UDGLDQWLQWHQVLW\GHSHQGVRQDQJOHα
V\VWHPOHDGLQJWRHJXQZDQWHGKHDWORDG

3. '(7(50,1$7,212)(896285&(32:(5

$ TXLWH DFFXUDWH PHWKRG IRU VRXUFH HYDOXDWLRQ IRU DQ (89 OLWKRJUDSKLF V\VWHP LV RSWLFDO UD\WUDFLQJ RI WKH WRWDO
LOOXPLQDWLRQ DQG LPDJLQJ V\VWHP $FFXUDWH UD\WUDFLQJ UHTXLUHV FRQVLGHUDEOH FRPSXWLQJ WLPH KRZHYHU ZKLFK LV
OLPLWLQJLWVXVHDVDTXLFNGLDJQRVWLFWRRO,QDGGLWLRQWKHUD\WUDFLQJKDVWRUHO\RQDPRGHORIWKHVRXUFHGLVWULEXWLRQ
ZKLFKKDVWREHH[WUDFWHGIURPSLQKROHFDPHUD PHDVXUHPHQWVDQGFDQWKXVQRWEHIUHHRIHUURUV,IWKHSURFHGXUHLV
GRQHFDUHIXOO\WKHUD\WUDFLQJPHWKRGLVDJRRGUHIHUHQFHIRUHYDOXDWLRQRIWKHVRXUFHSHUIRUPDQFH
'XULQJVRXUFHGHYHORSPHQWDQGRSWLPL]DWLRQRIDVRXUFHKRZHYHUDTXLFNHYDOXDWLRQRIODERUDWRU\PHDVXUHPHQWVLV
QHFHVVDU\ZKLFKFDQEHGRQHZLWKLQWKHVRXUFHGHYHORSPHQWJURXS)ROORZLQJWKHGLVFXVVLRQJLYHQDERYHLWLVSRVVLEOH
WRGHULYHDQDOORZHGVRXUFHYROXPHRIHOOLSVRLGDOVKDSHGHILQLQJDUHJLRQLQVSDFHIURPZKLFKUD\VIURPWKHVRXUFH
FDQEHFROOHFWHGWKURXJKWKHRSWLFDOV\VWHPWDNLQJLQWRDFFRXQWDOOHWHQGXHOLPLWDWLRQV7KLVKDVWREHGRQHRQO\RQFHIRU
DJLYHQRSWLFDOV\VWHP
%DVHGRQWKLVDVLPSOHDQGIDVWEXWVWLOOUHOLDEOHPHWKRGIRUHYDOXDWLRQRIFROOHFWLRQHIILFLHQF\KDVEHHQGHYHORSHG7KH
QHZ PHWKRG LV EDVHG RQ WDNLQJ SLQKROH LPDJHV RI WKH VRXUFH SODVPD ZLWK D &&' FDPHUD SUHIHUDEO\ XQGHU YDULRXV
REVHUYDWLRQ DQJOHV )URP WKHVH LQWHQVLW\ PDSV D WKUHHGLPHQVLRQDO PRGHO VRXUFH LQWHQVLW\ GLVWULEXWLRQ FDQ EH
HVWLPDWHG 7KH HVWLPDWH RI WKH VRXUFH LQWHQVLW\ GLVWULEXWLRQ LV XVHG DV LQSXW WR D VXEVHTXHQW SURMHFWLRQ DOJRULWKP WR
FDOFXODWHSURMHFWHGLPDJHV%\FRPSDULVRQZLWKWKHPHDVXUHGSLQKROHLPDJHVWKHVRXUFHLQWHQVLW\GLVWULEXWLRQPRGHOLV
UHILQHGLWHUDWLYHO\
8VLQJWKLVVRXUFHLQWHQVLW\GLVWULEXWLRQZLWKWKHSURMHFWLRQPRGHODQJXODUUDGLDWLRQFKDUDFWHULVWLFVRIWKHVRXUFHFDQEH
FDOFXODWHG,QWHJUDWLRQ\LHOGVDOVRWKHWRWDOUDGLDWLRQSRZHUZLWKLQDFHUWDLQFROOHFWLRQDQJOH

Proc. of SPIE Vol. 5037 731

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/17/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 )LQDOO\WKHHWHQGXHOLPLWVRIWKHRSWLFDOV\VWHPDUHLQFOXGHGE\SHUIRUPLQJWKHVDPHSURMHFWLRQFDOFXODWLRQVEXWWDNLQJ
LQWR DFFRXQW RQO\ UDGLDWLRQ IURP WKH DOORZHG VRXUFH YROXPH GHWHUPLQHG EHIRUHKDQG 7KLV LV UHVXOWLQJ LQ WKH DFWXDO
FROOHFWHGSRZHUZLWKLQHWHQGXHOLPLWVDQGWKHFROOHFWLRQHIILFLHQF\
&RPSDULVRQZLWKGHWDLOHGUD\WUDFLQJPRGHOFDOFXODWLRQVRIWKHFRPSOHWHRSWLFDOV\VWHPLQGLFDWHWKHJRRGDFFXUDF\RI
WKHPHWKRG,WFDQEHXVHGLQDVLPSOHZD\IRUVRXUFHRSWLPL]DWLRQDQGHQDEOHVUHOLDEOHHYDOXDWLRQDQGVSHFLILFDWLRQRI
VRXUFHSHUIRUPDQFHLQ(89SURMHFWLRQV\VWHPV
7RVXPPDUL]HWKHSURSRVHGPHWKRGFDQEHRXWOLQHGDVIROORZV
D  $EVROXWHPHDVXUHPHQWRIWKHVRXUFHUDGLDWLRQSRZHUE\DFDOLEUDWHGSKRWRGLRGH
HTXLSSHGZLWKDPXOWLOD\HUWRROWROLPLWWKHVSHFWUDOUHVSRQVHWRWKHQPEDQG 
E  2QHRUPRUHSLQKROHFDPHUDPHDVXUHPHQWVRIWKHVRXUFHXQGHUYDULRXVDQJOHVWRWKHRSWLFDOD[LV
F  'HWHUPLQDWLRQRIDPRGHOVRXUFHGLVWULEXWLRQIURPWKHSLQKROHFDPHUDLPDJH V 
G  &DOFXODWLRQRIXVDEOHUDGLDWLRQE\DSURMHFWLRQDOJRULWKPLQFOXGLQJHOHFWURGHREVFXUDWLRQHIIHFWVDQGHWHQGXH
OLPLWVE\WDNLQJLQWRDFFRXQWWKHSUHFDOFXODWHGVRXUFHYROXPH
H  &DOFXODWLRQRIDQJXODUGLVWULEXWLRQ
I  &DOFXODWLRQRIFROOHFWLRQHIILFLHQF\DQGWRWDOXVDEOHUDGLDWLRQ
$PRUHGHWDLOHGGLVFXVVLRQRIWKHGLIIHUHQWVWHSVZLOOQRZIROORZ

3.1 Pinhole camera measurement and fit of source distribution

)LUVWSLQKROHFDPHUDLPDJHVDUHWDNHQXQGHUDQDUELWUDU\DQJOHRIYLHZθZLWKUHVSHFWWRWKHRSWLFDOD[LV)RUUHDVRQVRI
DFFXUDF\ WKH DQJOH VKRXOG EH ODUJHU WKDQ  GHJUHHV SUHIHUDEO\ !  GHJUHHV 8VXDOO\ D IHZ PHDVXUHPHQWV DUH
VXIILFLHQWDQGD[LDOV\PPHWU\LVDVVXPHG)URPWKHPHDVXUHGLPDJHVSDUDPHWHUVDUHH[WUDFWHGZKLFKDUHODWHUXVHGIRU
FRPSDULVRQ ZLWK WKH PRGHO GLVWULEXWLRQ UHVXOWV 7KH PRVW LPSRUWDQW SDUDPHWHUV LQ FDVH RI D QHDUO\ HOOLSVRLGDO VRXUFH
LPDJHDUH] ]ORFDWLRQRIVRXUFHFHQWUH OS RQD[LV):+0OHQJWKRIVRXUFH US FHQWHUUDGLXVRIVRXUFH ):+0 
,QDVHFRQGVWHSWKLVPHDVXUHPHQWLVXVHGLQDILWWLQJSURFHGXUHWRJHQHUDWHDVRXUFHGLVWULEXWLRQPRGHORIWKH(89
VRXUFH7KLVLVGRQHDVIROORZV
$VXLWDEOHIXQFWLRQLVDVVXPHGIRUWKHVRXUFHGLVWULEXWLRQKDYLQJQRWWRRPDQ\IUHHSDUDPHWHUVSUHIHUDEO\WKUHHRUIRXU
6XLWDEOHVWDUWLQJYDOXHVIRUWKHSDUDPHWHUVDUHHVWLPDWHG7KHVRXUFHGLVWULEXWLRQIXQFWLRQLVUHSUHVHQWLQJWKHUDGLDQW
SRZHUSHUYROXPHHOHPHQWRIWKHVRXUFHPHDVXUHGLQ:Pñ$Q\VXLWDEOHIXQFWLRQFDQEHFKRVHQKHUHWRPDWFKWKH
PHDVXUHGSLQKROHFDPHUDLPDJHVZKHQHYHULWVWRWDOYROXPHLQWHJUDO HTXLYDOHQWWRWRWDOVRXUFHSRZHU LVILQLWH$VD
VLPSOHDQGRIWHQVXIILFLHQWO\DFFXUDWHPRGHOVRXUFHGLVWULEXWLRQRQHFDQXVHD*DXVVLDQGLVWULEXWLRQDVIROORZV
 ] − ] 
U 
  6 ] U = 6  H[S − − 
 λ  ρ  
8VLQJWKLVLQLWLDOVRXUFHGLVWULEXWLRQWKHSURMHFWHGYLHZRIWKLVVRXUFHGLVWULEXWLRQLVFRPSXWHGIRUWKHSURMHFWLRQDQJOH
θ  WDNLQJ LQWR DFFRXQW DQ\ REVFXUDWLRQ LQFDVH RI WKH +&7 SLQFKRI WKH DQRGH 7KH DVVXPSWLRQ RI DQ RSWLFDOO\ WKLQ
VRXUFH SODVPD LV XVHG KHUH &RPSDULQJ WKH FRPSXWHG SURMHFWLRQ RI WKH PRGHO VRXUFH GLVWULEXWLRQ ZLWK WKH SLQKROH
FDPHUDLPDJHWKHIUHHSDUDPHWHUVRIWKHVRXUFHGLVWULEXWLRQPRGHODUHDGMXVWHGLWHUDWLYHO\XQWLODJRRGPRGHOVRXUFH
GLVWULEXWLRQLVIRXQG
6RPHVWHSVRIWKHSURFHGXUHDUHQRZH[SODLQHGLQPRUHGHWDLO

3.2 Projection of the model source distribution

7KHSURMHFWLRQDOJRULWKPXVHGLVDVLPSOHSDUDOOHOSURMHFWLRQZKLFKLVQHDUO\LGHQWLFDOWRWKHSLQKROHFDPHUDLPDJLQJ
EHFDXVHWKHORQJLPDJLQJGLVWDQFHVXVHGDUHYHU\ODUJHFRPSDUHGWRWKH&&'LPDJHVL]H
$OOSRLQWVRIWKHVRXUFHGLVWULEXWLRQDUHYLHZHGXQGHUDQDUELWUDU\DQJOHθ 7KHSRLQWV ][\ RIWKHVRXUFHGLVWULEXWLRQ
DUHWKHUHIRUHILUVWWUDQVIRUPHGLQWRDWLOWHGFRRUGLQDWHV\VWHP ZXY 7KHQDSURMHFWLRQDORQJWKHZ±D[LVWRWKH XY 
SODQHLVSHUIRUPHGZKLFKLVWKHSURMHFWLRQSODQHVHH)LJXUHIRUUHIHUHQFH

732 Proc. of SPIE Vol. 5037

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/17/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 9LHZRQWRVRXUFHYROXPH
\
\ [

T
Y
X

Z
[
7RSYLHZ

] X VLQT[ X FRVT

˜ ˜
]

T
X

 ]   FRV θ VLQ θ    Z
      X
 [  =  − VLQ θ FRV θ  ⋅ X 
 \       Y 
Z 
   
)LJXUH3URMHFWLRQJHRPHWU\

%HFDXVHWKHSODVPDLVRSWLFDOO\WKLQDQDVVXPSWLRQZKLFKFDQEHMXVWLILHGE\FRPSDULVRQRISKRWRGLRGHVLJQDOVXQGHU
GLIIHUHQWREVHUYDWLRQDQJOHVWKHLQWHQVLW\ PHDVXUHGLQ:PðVU RIDVRXUFHZLWKHPLVVLRQFRHIILFLHQW  PHDVXUHGLQ
:PñVU DWDSRLQW XY XQGHUDQDQJOH θFDQEHZULWWHQDVDSURMHFWLRQLQWHJUDO$OOVRXUFHSRLQWVO\LQJRQWKHOLQHRI
VLJKWFDQEHVXPPHGXSWRREWDLQWKHWRWDOLQWHQVLW\
∞

∞
] Z = X VLQ θ + Z FRV θ
  / X Yθ = ∫ ε GZ = ∫ 6 [] Z + ]9 − ]   U Z ]⋅ GZ ZLWK 
π ⋅ VU −∞ U Z = (X FRV θ + Z VLQ θ ) + Y 

−∞

+HUH]YLVWKHLQWHUVHFWLRQRIWKHYLHZGLUHFWLRQ ZD[LV DQGWKH]D[LV]WKHORFDWLRQRIWKHVRXUFHFHQWUH6 ]U LVWKH

VRXUFHGLVWULEXWLRQGHILQHGDVLQHT  IRULQVWDQFH

3.3 Projection of source volume

$QDORJRXV WR WKH SURMHFWLRQRI WKH VRXUFHLW LV XVHIXO WRFDOFXODWH DOVR WKH SURMHFWLRQRI WKH VSHFLILHG VRXUFH YROXPH
DOUHDG\ GLVFXVVHG DERYH 7KLV PHDQLQJ RI WKLV VRXUFH YROXPH LV QRW D VKDUSO\ GHILQHG YROXPH ZKHUH RQO\ UDGLDWLRQ
IURP WKLV YROXPH LV FRQWULEXWLQJ WR WKH XVDEOH UDGLDWLRQ SRZHU $V GLVFXVVHG EHIRUH VHH )LJXUH   LW UDWKHU LV D
WRXFKLQJ YROXPH ZKLFK DOO UD\V RI UDGLDWLRQ IURP WKH VRXUFH WR WKH FROOHFWLRQ RSWLFV KDYH WR WRXFK LQ RUGHU WR
FRQWULEXWHWRWKHWRWDOXVDEOHSRZHU,QWKHIROORZLQJWKHVRXUFHYROXPHVKDSHLVDVVXPHGHOOLSVRLGDO
 (] − ] ) U 


   LI   9 +  ≤  
69 ] U =  O9  U9
 RWKHUZLVH

69 ]U LVDIXQFWLRQZKLFKLVZLWKLQWKHVRXUFHYROXPHDQGHYHU\ZKHUHRXWVLGH:KHQHYHUWKHOLQHRIVLJKWGHILQHG
E\ XY LVWRXFKLQJWKHVSHFLILHGVRXUFHYROXPHWKHSURMHFWLRQYDOXHGHILQHGDERYHLVLIWKHOLQHRIVLJKWGRHVQRW
WRXFKWKHVRXUFHYROXPHLWLV]HUR
)RU WKH SURMHFWLRQ DOJRULWKP WKH IROORZLQJ ZHLJKWLQJ IXQFWLRQ LV XVHG ZKLFK GHOLYHUV XQLW\ DV UHVXOW RQO\ LI WKH UD\
GHILQHGE\ XYθ LVWRXFKLQJWKHVRXUFHYROXPH

Proc. of SPIE Vol. 5037 733

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/17/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

  ∞

   LI  ∫ 69 [] Z  U Z ]GZ>  

39 X Yθ = 
−∞
 RWKHUZLVH


3.4 Obscuration by electrode system

7KHHOHFWURGHREVFXUDWLRQFDQOHDGWRSDUWLDOREVFXUDWLRQRIWKHVRXUFHHVSHFLDOO\IRUODUJHREVHUYDWLRQDQJOHGHSHQGHQW
RQWKHUHODWLYHSRVLWLRQ]RIWKHVRXUFHDQG]HORIWKHHOHFWURGHDQGWKHHOHFWURGHUDGLXVUHO VHH)LJXUH 
$YLVLELOLW\IXQFWLRQRIWKHSURMHFWHGFRRUGLQDWHVFDQEHGHILQHGDVIROORZV
  X − (] HO − ]9 )VLQ θ 


  9,6 X Yθ = 

 LI   < UHO − Y  
 FRVθ 
 RWKHUZLVH

:KHQHYHUWKHOLQHRIVLJKWGHILQHGE\ XY LVWRXFKLQJWKHHOHFWURGHERUHKROHWKHYLVLELOLW\YDOXHGHILQHGDERYHLVLI
WKHOLQHRIVLJKWGRHVWRXFKWKHHOHFWURGHLWLV]HUR
[
3.5 Iteration of source distribution function
&RPSDULQJ WKH FRPSXWHG SURMHFWLRQ RI WKH PRGHO
VRXUFH GLVWULEXWLRQ DV GHVFULEHG DERYH ZLWK WKH ] ]HO]
SLQKROH FDPHUD LPDJH WKH IUHH SDUDPHWHUV RI WKH
VRXUFH GLVWULEXWLRQ PRGHO DUH DGMXVWHG LWHUDWLYHO\
XQWLO D JRRG PRGHO VRXUFHGLVWULEXWLRQ LV IRXQG$V UHOWDQT
PRVW LPSRUWDQW TXDQWLWLHV WKH SURMHFWHG OHQJWK DQG ]
ZLGWK RI WKH VRXUFH LV GHWHUPLQHG DQG FRPSDUHG WR UHO
TF
WKH FRUUHVSRQGLQJ SLQKROH FDPHUD LPDJH UHVXOWV ,Q
FDVH RI WKH *DXVVLDQ GLVWULEXWLRQ RI HT   XVHG
DERYHWKHDGMXVWDEOHSDUDPHWHUVDUHMXVWWKHVRXUFH
SRVLWLRQ ] WKH OHQJWK λ0 DQG WKH UDGLXV ρ  $IWHU
IHZ LWHUDWLRQ VWHSV QRUPDOO\ D JRRG PRGHO VRXUFH

GLVWULEXWLRQ LVIRXQG ZKLFKFDQ EHXVHG IXUWKHUIRU
HYDOXDWLRQRIWRWDOVRXUFHSRZHU )LJXUH*HRPHWU\IRUHOHFWURGHREVFXUDWLRQ

3.6 Angular distribution

7KHQH[WVWHSLVWKHFRPSXWDWLRQRIWKHVRXUFHDQJXODUGLVWULEXWLRQ+HUHWKHPRGHOVRXUFHGLVWULEXWLRQLVSURMHFWHGIRU
HYHU\REVHUYDWLRQDQJOHDQGWKHWRWDOLQWHQVLW\RIWKHSURMHFWHGUD\VLVLQWHJUDWHG2QO\WKRVHUD\VDUHLQFOXGHGZKLFK
DUHWRXFKLQJWKHVSHFLILHGVRXUFHYROXPH,QDGGLWLRQREVFXUDWLRQE\WKHHOHFWURGHVWUXFWXUHLVFRQVLGHUHG7KHDQJXODU
GLVWULEXWLRQRIUDGLDWHGSRZHUIRUDJLYHQREVHUYDWLRQDQJOHθLVFDOFXODWHGE\LQWHJUDWLRQRIDOOSURMHFWHGLQWHQVLW\RYHU
WKHWRWDOSURMHFWHGLPDJHSODQHWDNLQJLQWRDFFRXQWWKHHOHFWURGHREVFXUDWLRQ (T  
∞ ∞
  39,6 θ = ∫ ∫ / X  Y θ
−∞− ∞
⋅ 9,6 X Yθ GYGX 

7KHQRUPDOL]HGDQJXODUGLVWULEXWLRQLVWKHQVLPSO\ 3LVWKHWRWDOREVHUYHGSRZHULQDQRQD[LVPHDVXUHPHQW 

39,6 (θ )
  , (θ ) = ZLWK3 = 39,6 ( GHJ )
3
7KH GLVFXVVLRQ RI DQJXODU GLVWULEXWLRQ RI UDGLDWHG SRZHU JLYHQ VR IDU GLG QRW LQFOXGH WKH HWHQGXH OLPLWDWLRQV RI WKH
RSWLFDOFROOHFWLRQDQGLOOXPLQDWLRQV\VWHP7KLVFDQEHLQFOXGHGE\XVLQJWKHZHLJKWLQJIXQFWLRQ39 XY RIWKHVRXUFH
YROXPHGHILQHGDERYH2QO\UD\VWRXFKLQJWKHVSHFLILHGVRXUFHYROXPHDUHFRXQWHG

734 Proc. of SPIE Vol. 5037

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/17/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 ∞ ∞
  369 θ = ∫ ∫ / X  Y θ
− ∞−∞
⋅ 9,6 X Yθ ⋅39 X Yθ GYGX 

7KH UHVXOWLQJ DQJXODU GLVWULEXWLRQ \LHOGV WKH UDGLDWHG SRZHU XQGHU D FHUWDLQ REVHUYDWLRQ DQJOH LQFOXGLQJ HOHFWURGH
REVFXUDWLRQ DQG WDNLQJ WR DFFRXQW WKH HWHQGXH OLPLWHG FROOHFWLRQ FDSDELOLWLHV RI WKH FROOHFWLRQ DQG LPDJLQJ V\VWHP ,W
ZLOOEHFDOOHGDQJXODUGLVWULEXWLRQRIXVDEOHUDGLDWLRQSRZHU

3.7 Total usable radiation power

)LQDOO\ WKH WRWDO XVDEOH UDGLDWLRQ SRZHU LQFOXGLQJ WKH HWHQGXH OLPLWDWLRQV RI WKH RSWLFDO FROOHFWLRQ DQG LOOXPLQDWLRQ
V\VWHPLVFRPSXWHGIURPWKHDQJXODUGLVWULEXWLRQRIXVDEOHUDGLDWLRQ7KLVFDQEHGRQHE\VLPSOHLQWHJUDWLRQRYHUWKH
DFFHSWDQFHVROLGDQJOHRIWKHFROOHFWLRQV\VWHP
θ PD[
  369 WRW = π
θ
∫3
PLQ
69 θ VLQ θ Gθ 

,IQRUPDOL]DWLRQE\WKHWRWDOHPLWWHGSRZHULVLQFOXGHGWKHUHVXOWLVH[SUHVVHGLQDQHIIHFWLYHVROLGDQJOHZKLFKFDQEH
FRQVLGHUHGDVWKHFROOHFWLRQHIILFLHQF\RIWKHDFWXDOVRXUFHLQWKHRSWLFDOV\VWHP
  η FRO = 369 WRW 3 

'HWHUPLQDWLRQRIWKHWRWDOXVDEOHSRZHULQDEVROXWHQXPEHUVLVGRQHE\FDOLEUDWLRQZLWKDQDEVROXWHO\FDOLEUDWHGSKRWR
GLRGH HTXLSSHG ZLWK D FDOLEUDWHG PXOWLOD\HUWRRO WR OLPLW WKH VSHFWUDO UHVSRQVH WR WKH  QP EDQG 7KH GLRGH
PHDVXUHPHQWPXVWEHGRQHLQVXFKDZD\WKDWDOOOLJKWHPLWWHGE\WKHVRXUFHLQWRWKHPHDVXUHPHQWGLUHFWLRQLVFDSWXUHG
ZLWKRXWREVFXUDWLRQ7KHEDVLFPHDVXUHPHQWFDQEHGRQHRQD[LV)RUFRQWUROIRUWKHLQIOXHQFHRIFRQWULEXWLRQVIURP
SODVPDSDUWVORFDWHGGHHSO\LQWKHHOHFWURGHV\VWHPDQGFDQQRWEHVHHQXQGHUDQDQJOHWRWKHRSWLFDOD[LVDOVRGLRGH
PHDVXUHPHQWVXQGHUDQDQJOHDUHDGYLVDEOH7KHUHVXOWLQJDEVROXWHYDOXHFDQWKHQEHFRPSDUHGZLWKWKHFDOFXODWHGWRWDO
IOX[IURPWKHVRXUFHPRGHOGLVWULEXWLRQWR\LHOGDQDEVROXWHFDOLEUDWLRQRIWKHVRXUFHPRGHO

4. (;$03/(0($685(0(176$77+(+&73,1&+

,QWKHIROORZLQJWKUHHPHDVXUHPHQWVRIWKH+&7SLQFK(89VRXUFHVDUHSUHVHQWHGDVH[DPSOHVWRGHPRQVWUDWH
WKHPHWKRG7KHPHDVXUHPHQWVZHUHGRQHE\25RVLHUDQG5$SHW]IURP)UDXQKRIHU,QVWLWXWHIU/DVHUWHFKQLNDQG
3KLOLSV([WUHPH89*PE+$DFKHQUHVSHFWLYHO\,WKDVWREHVWDWHGYHU\FOHDUO\WKDWWKHPHDVXUHPHQWVDQGWKHVRXUFH
PRGHOV SUHVHQWHG KHUH DUH UHODWHG WR D SDUWLFXODU FRQILJXUDWLRQV RI WKH VRXUFH DQG WR SDUWLFXODU VHWWLQJV RI GLVFKDUJH
SDUDPHWHUV&KDQJHVLQWKHVRXUFHJHRPHWU\DQGRSHUDWLQJSDUDPHWHUVZLOOOHDGWRGLIIHUHQWVRXUFHGLVWULEXWLRQVDQGWR
FRQVLGHUDEOHGHYLDWLRQVIURPWKHUHVXOWVJLYHQKHUH

4.1 Pinhole camera measurements

,Q WKH ILUVW H[DPSOH PHDVXUHPHQW WKH HOHFWURGH JHRPHWU\ ZDV DV
IROORZV GLDPHWHU FDWKRGH PP  GLDPHWHU DQRGH PP WKLFNQHVV
DQRGHPPHOHFWURGHJDSPP7KH(89UDGLDWLRQVRXUFHFHQWUH
ƒ ƒ
SRVLWLRQ ZDV DERXW PP DERYH WKH FDWKRGH HOHFWURGH 7KH SLQKROH
LPDJHV XQGHU GLIIHUHQW REVHUYDWLRQ DQJOHV DUH VKRZQ LQ )LJXUH  $V
FDQEHVHHQIURPWKHSLQKROHFDPHUDLPDJHVWKHVRXUFHFRQVLVWVRIDQ
HOOLSVRLGDOPDLQGLVWULEXWLRQSOXVDORQJWKLQWDLOH[WHQGLQJGRZQWR
WKHFDWKRGHERUHKROH

4.2 Fit of source distribution ƒ ƒ 

)RUWKHLWHUDWLYHFDOFXODWLRQRIWKHVRXUFHGLVWULEXWLRQDVXSHUSRVLWLRQ )LJXUH3LQKROH&DPHUD,PDJHVIRUYDULRXV
RIWZR*DXVVLDQIXQFWLRQVZDVXVHG REVHUYDWLRQDQJOHV

Proc. of SPIE Vol. 5037 735

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/17/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

  (] − ]  ) U    (] − ] ) U  
  6 ]  U = 6  ]  U + 6  ]  U = 6  H[S − −  + 6 H[S − −  

 λ  ρ    λ ρ  

$IWHUWKHLWHUDWLRQWKHUHVXOWLQJYDOXHVRIWKHSDUDPHWHUVZHUH

  6  =  ]  = PP λ  = PP ρ  = PP 


6  =  ] = −PP λ = PP ρ  = PP
$JUDSKRIWKHVRXUFHGLVWULEXWLRQ6 ]U LVVKRZQLQ)LJXUH



)LJXUH6RXUFHYROXPHGLVWULEXWLRQ7KHEODFNHOOLSVHLQGLFDWHVWKHVSHFLILHGVRXUFHYROXPH
WKHFURVVLVWKHFHQWHURIURWDWLRQIRUWKHSLQKROHFDPHUDPHDVXUHPHQWV

%\ LQWHJUDWLRQ RYHU YROXPH WKH UHODWLYH SRZHU LQ ERWK SDUWV 6 ]U  DQG 6 ]U  RI WKH VRXUFH GLVWULEXWLRQ FDQ EH
FDOFXODWHG WR EH  DQG  UHVSHFWLYHO\ 5RXJKO\ RQH WKLUG RI WKH UDGLDQW SRZHU LV ORFDWHG LQ WKH WDLO RI WKH
GLVWULEXWLRQ DQG FDQ KDUGO\ FRQWULEXWH WR WKH FROOHFWDEOH SRZHU 7ZR WKLUGV RI WKH WRWDO SRZHU DUH ORFDWHG LQ WKH
HOOLSVRLGDOKHDG7KHOHQJWKDQGGLDPHWHURIWKHVRXUFHGLVWULEXWLRQDUHPPDQGPP ):+0 UHVSHFWLYHO\
8VLQJ WKLV VRXUFH GLVWULEXWLRQ IXQFWLRQ WKH SURMHFWLRQ DOJRULWKP DERYH IRU YDULRXV REVHUYDWLRQ DQJOHV UHVXOWV LQ WKH
SURMHFWHGLPDJHVVKRZQLQ)LJXUH7KHLPDJHVDUHGLUHFWO\FRPSDUDEOHWRWKHRULJLQDOSLQKROHFDPHUDLPDJHVVKRZQ
LQ)LJXUH

ƒ ƒ ƒ ƒ


)LJXUH0HDVXUHGSLQKROHLPDJHV DERYH DQGSURMHFWHGLPDJHV
FDOFXODWHGIURPPRGHOVRXUFHGLVWULEXWLRQ EHORZ 
EODFNOLQHOHYHORIVRXUFHGLVWULEXWLRQZKLWHOLQHSURMHFWHGDQRGHHGJH


736 Proc. of SPIE Vol. 5037

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/17/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 ƒ ƒ

ƒ ƒ

ƒ ƒ

ƒ ƒ

ƒ ƒ

ƒ ƒ

)LJXUH&DOFXODWHGVRXUFHSURMHFWLRQVIRUYDULRXVSURMHFWLRQDQJOH
:KLWHOLQHDQRGHHGJHGDUNJUH\HOOLSVHVVRXUFHYROXPHERXQGDU\

$V FDQ EH VHHQ WKH VRXUFH PRGHO FDQ UHSURGXFH WKH PHDVXUHG SLQKROH FDPHUD LPDJHV TXLWH ZHOO ,Q )LJXUH  WKH
SURMHFWHGVRXUFHGLVWULEXWLRQLVVKRZQIRUVHYHUDOREVHUYDWLRQDQJOHV7KHHGJHRIWKHDQRGHRSHQLQJLVVKRZQDVZKLWH
OLQH,QDGGLWLRQWKHHOOLSWLFDOVRXUFHYROXPHDVVSHFLILHGDERYHLVLQGLFDWHG

4.3 Angular distribution

8VLQJ WKH VRXUFH GLVWULEXWLRQ IRXQG DERYH WKH HYDOXDWLRQ RI WKH WRWDO XVDEOH SRZHU LV SRVVLEOH $FFRUGLQJ WR WKH
SURFHGXUHGHVFULEHGDERYHWKHDQJXODUGLVWULEXWLRQVRIWKHWRWDOUDGLDWHGSRZHUDQGRISRZHUIURPUD\VWRXFKLQJWKH
VSHFLILHGVRXUFHYROXPHZHUHFDOFXODWHG LQFOXGLQJHOHFWURGHREVFXUDWLRQ 7KHUHVXOWLVJLYHQLQ)LJXUH


PHDVXUHG ZLWK=UILOWHU
ZLWK0/WRRO

PRGHO WRWDO
VRXUFHYRORQO\
QRUPDOL]HGLQWHQVLW\










      
REVHUYDWLRQDQJOHGHJUHHV

)LJXUH1RUPDOL]HGDQJXODUGLVWULEXWLRQRIWKHWRWDOUDGLDWHGSRZHUDFFRUGLQJWRWKHPRGHOFDOFXODWLRQ
DQGWRSKRWRGLRGHPHDVXUHPHQWV ZLWK=UILOWHUDQGPXOWLOD\HUWRRO 
7KHVROLGFXUYHLQGLFDWHVWKHDQJXODUGLVWULEXWLRQRIWKHUDGLDWLRQIURPWKHVSHFLILHGVRXUFHYROXPHRQO\

Proc. of SPIE Vol. 5037 737

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/17/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 7KH GRWWHG FXUYH LQGLFDWHV WKH WRWDO UDGLDWLRQ LQWR D FHUWDLQ GLUHFWLRQ VR WKH LQWHJUDO RI DOO LQWHQVLW\ LQ WKH SURMHFWLRQ
LPDJHVDVVKRZQLQ)LJXUH7KHGHFUHDVHRILQWHQVLW\ZLWKLQFUHDVLQJREVHUYDWLRQDQJOHDERYHGHJUHHVLVUHVXOWLQJ
IURP WKH IDFW WKDW PRUH DQG PRUH LQWHQVLW\ IURP WKH WDLO RI WKH GLVWULEXWLRQ LV FXW RII E\ DQRGH REVFXUDWLRQ
2EVFXUDWLRQRIWKHPDLQGLVWULEXWLRQVHWVLQDWVRPHGHJUHHV
7KH WRWDO DQJXODU GLVWULEXWLRQ KDV EHHQ PHDVXUHGZLWK DSKRWRGLRGHZLWK WZRGLIIHUHQWPHWKRGV IRU VSHFWUDOILOWHULQJ
)LUVWD=LUFRQLXPILOWHUZDVXVHGZLWKDWUDQVPLVVLRQEHWZHHQDQGQP6HFRQGO\DPXOWLOD\HUWRROZLWKWZRQHDU
QRUPDO LQFLGHQFH UHIOHFWLRQV ZDV XVHG WR PHDVXUH WKH LQEDQG (89 GLVWULEXWLRQ 7KH FRPSDULVRQ RI WKH VLPXODWHG
DQJXODUGLVWULEXWLRQVZLWKWKHPHDVXUHGVKRZVUHPDUNDEO\JRRGDJUHHPHQW H[FHSWIRUGHJUHHVZKLFKLVGXHWRDQ
JHRPHWULFDODOLJQPHQWHUURU 

4.4 Total usable radiation power

)RUWKHH[DPSODU\(89OLWKRJUDSK\V\VWHPRIFKDSWHUWKHHOOLSVRLGDOVRXUFHYROXPHFRUUHVSRQGLQJWRWKHHWHQGXH
OLPLWRIPPðRIWKHOLWKRJUDSKLFV\VWHPKDGDOHQJWKRIPPDQGDZLGWKRIPP
7KHVROLGFXUYHLQ)LJXUHLVWKHDQJXODUGLVWULEXWLRQRIWKHSDUWRIWKHSURMHFWHGLPDJHVRULJLQDWLQJIURPWKHVSHFLILHG
VRXUFHYROXPHRQO\,WLQGLFDWHVWKHLQWHQVLW\XQGHUDFHUWDLQDQJOHLQWHJUDWHGRYHURQO\WKHSURMHFWHGVRXUFHYROXPH
LHRQO\WKHLQWHQVLW\LQVLGHWKHEODFNVRXUFHYROXPHSURMHFWLRQVLQ)LJXUH7KHYDOXHVDUHORZHUWKDQIRUWKHGRWWHG
OLQHEHFDXVHWKHVRXUFHGLDPHWHULVWRRELJWREHIXOO\FROOHFWDEOHZLWKLQWKHOLPLWVRIWKHVRXUFHYROXPH)RUWKHDFWXDO
VRXUFHGLVWULEXWLRQRIWKHWRWDOYDOXH3LVUHDFKHGRQWKHD[LV
7KHWRWDOXVDEOHSRZHUFDQQRZEHFDOFXODWHGE\LQWHJUDWLRQRYHUWKHFROOHFWRUDFFHSWDQFHDQJOHUDQJHXSWRƒ)LUVW
WKHWRWDODFFHSWDQFHVROLGDQJOHRIWKHFROOHFWRULVFRPSXWHGIRUUHIHUHQFH
 GHJ
  Ω FRO = π ∫ VLQ θ Gθ =  =  ⋅
 GHJ
π 

7KHYDOXHRIRIπLVWKHXSSHUOLPLWRIFROOHFWLRQHIILFLHQF\ZKLFKZRXOGEHUHDFKHGIRUDSRLQWVRXUFHZLWK
LGHDOO\IODWDQJXODUGLVWULEXWLRQZLWKLQWKHFROOHFWLRQUDQJHRIXSWRGHJUHHV
)LQDOO\WKHFROOHFWLRQHIILFLHQF\IRUWKHJLYHQVRXUFHGLVWULEXWLRQLVFDOFXODWHGLQFOXGLQJHOHFWURGHREVFXUDWLRQDQGWKH
V\VWHPHWHQGXHOLPLWV
 GHJ
  ηFRO = π 369 WRW
3 ∫
 GHJ
369 θ VLQ θ Gθ =
3
= =  π 

)RUWKLVH[DPSOHPHDVXUHPHQWRQO\RIWKH
WRWDOSRZHUHPLWWHGLQWRπFDQEHFROOHFWHG

4.5 Other examples

)RURWKHUVHWWLQJVRIWKH+&7SLQFKH[SHULPHQWDO
SDUDPHWHUV KLJKHU FROOHFWLRQ HIILFLHQFLHV FDQ EH T ƒ T ƒ
IRXQG $V D VHFRQG H[DPSOH WKH VRXUFH / PP / PP
PHDVXUHPHQWVKRZQLQ)LJXUH OHQJWKPP
GLDPHWHU PP ):+0  LV UHVXOWLQJ LQ D
FROOHFWLRQHIILFLHQF\RI
)LQDOO\ LQ D WKLUG H[DPSOH DOVR VKRZQ LQ)LJXUH
 D VPDOO VRXUFH FDQ DOVR EH UHDOL]HG ZLWK D
OHQJWK RI PP DQG ZLGWK PP ):+0  LV &ROOHFWLRQ(IILFLHQF\ &ROOHFWLRQ(IILFLHQF\
UHVXOWLQJ LQ D FROOHFWLRQ HIILFLHQF\ RI    S  S
 
ZKLFKLVDOUHDG\FORVHWRWKHOLPLWRI
)LJXUH2WKHUH[DPSOHVSLQKROHFDPHUDLPDJHVDQG
 FRUUHVSRQGLQJVRXUFHGLVWULEXWLRQV

738 Proc. of SPIE Vol. 5037

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/17/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 4.6 Variation of source size
8VLQJWKHVRXUFHPRGHOGHVFULEHGDERYHWKHHIIHFWRISLQFKVL]HZDVVWXGLHGE\FDOFXODWLQJWKHHIIHFWRIDYDULDWLRQRI
ERWKOHQJWKDQGZLGWKRIWKHVRXUFHGLVWULEXWLRQ)RUVLPSOLFLW\KHUHWKHWDLOSDUWRIWKHGLVWULEXWLRQZDVRPLWWHG7KH
HOOLSWLFDOVRXUFHYROXPHGLPHQVLRQVXVHGEHIRUHRIPPE\PPZHUHXVHGIRUDOOFDOFXODWLRQV
$VFDQEHVHHQLQ)LJXUHWKHFROOHFWLRQHIILFLHQF\LVLQFUHDVLQJZLWKGHFUHDVLQJVRXUFHOHQJWKXSWRWKHPD[LPXP
WKHRUHWLFDO OLPLW GHILQHG E\ WKH FROOHFWLRQ DQJOH UDQJH RI  GHJUHHV 7KH VRXUFH GLDPHWHU KDV D VPDOOHU LQIOXHQFH
2EYLRXVO\DGHFUHDVHLQSLQFKVL]HFDQUHVXOWLQDVLJQLILFDQWLPSURYHPHQWRIFROOHFWLRQHIILFLHQF\
7KHH[DPSOHVRXUFHGLVWULEXWLRQVSUHVHQWHGEHIRUHILWZHOOLQWRWKHRYHUDOOSLFWXUH*HQHUDOO\WKHPHDVXUHPHQWVVKRZ
VRPHZKDWORZHUYDOXHVWKDQH[SHFWHGIURPDQLGHDOVRXUFHGLVWULEXWLRQ)RUH[DPSOHIRUVRXUFH GLDPHWHUPP 
WKHFROOHFWLRQHIILFLHQF\LVaORZHUWKDQH[SHFWHGIURPWKHFRUUHVSRQGLQJJUH\OLQH6RXUFHGLVWULEXWLRQFORVHO\
DSSURDFKHVWKHOLPLWKRZHYHU


 WKHRUHWLFDOOLPLW
ƒFROOHFWRU


 E = 2.55 mm²s r
S V 1.3 x 1.6 mm²
FROOHFWLRQHIILFLHQF\SL



 

 GLDPHWHUPP

GLDPHWHUPP
 VRXUFH
VRXUFH

 VRXUFH
      
VRXUFHOHQJWKPP

)LJXUH(IIHFWRIFKDQJHRIWKHVRXUFHVL]HRQWKHFROOHFWLRQHIILFLHQF\ VRXUFHGLVWULEXWLRQVZLWKRXWWDLODUHDVVXPHG 
DQGFDOFXODWHGH[DPSOHVRXUFHGLVWULEXWLRQV



 WKHRUHWLFDOOLPLW
ƒFROOHFWRU

FROOHFWLRQHIILFLHQF\SL



 WKHRUHWLFDOOLPLW
ƒFROOHFWRU



HWHQGXHPPð

HWHQGXHPPð

s ource diameter 0.5 mm



      
VRXUFHOHQJWKPP

)LJXUH(IIHFWRIFKDQJHRIWKHVRXUFHVL]HRQWKHFROOHFWLRQHIILFLHQF\IRUDV\VWHPHWHQGXHRIPPðDQGPPð

Proc. of SPIE Vol. 5037 739

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/17/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 %DVHGRQDVRXUFHGLVWULEXWLRQRIPPGLDPHWHUWKHHIIHFWRILQFUHDVLQJWKHV\VWHPFROOHFWLRQDQJOHDQGHWHQGXHKDV
EHHQFDOFXODWHG$VVKRZQLQ)LJXUHWKHLQFUHDVHRIFROOHFWLRQDQJOHWRGHJUHHVDQGLQFUHDVHRIV\VWHPHWHQGXHWR
PPðFRXOGLQFUHDVHWKHFROOHFWLRQHIILFLHQF\VXEVWDQWLDOO\)RUH[DPSOHDWDVRXUFHOHQJWKRIPPWKHFROOHFWHGIOX[
FDQQHDUO\GRXEOHG
7KH UHVXOWV RI WKH VLPSOLILHG FROOHFWLRQ PRGHO XVLQJ WKH VSHFLILHG VRXUFH YROXPH WR DFFRXQW IRU WKH V\VWHP HWHQGXH
OLPLWVKDVEHHQFURVVFKHFNHGZLWKIXOOUD\WUDFLQJFDOFXODWLRQV$JRRGPDWFKEHWZHHQWKHUHVXOWVRIWKHQHZSURFHGXUH
SUHVHQWHGKHUHDQGWKHULJRURXVUD\WUDFLQJFDOFXODWLRQZDVIRXQGWKHGHYLDWLRQVZHUHEHORZHUURU

5. &21&/86,216

7KHFROOHFWLRQHIILFLHQF\RIDQH[WHQGHGVRXUFHLQDQRSWLFDOV\VWHPFDQEHDQDO\VHGE\WKHHWHQGXHIRUPDOLVP8QGHU
WKHDVVXPSWLRQRIDQHOOLSVRLGDOVRXUFHLQWHQVLW\GLVWULEXWLRQDQDQDO\WLFDOH[SUHVVLRQIRUWKHVRXUFHHWHQGXHLVGHULYHG
7KLV FDQEH XVHG WR DQDO\]H WKH FROOHFWLRQ HIILFLHQF\IRUYDULRXV VRXUFHJHRPHWULHV DV D IXQFWLRQRI FROOHFWLRQ DQJOH
*LYHQDOLWKRJUDSKLFLPDJLQJV\VWHPZLWKD1$RIFRKHUHQFHSDUDPHWHUWKHHWHQGXHOLPLWLVPPð)RUD
VRXUFH RI PP OHQJWK DQG PP GLDPHWHU D PD[LPXP FROOHFWLRQ DQJOH RI  GHJUHHV LV SRVVLEOH XQGHU WKHVH
FRQGLWLRQV
)URPWKHULJRURXVUD\WUDFLQJPRGHOVKRZHYHULWLVDOVRSRVVLEOHWRGHULYHDQDOORZHGVRXUFHYROXPHRIHOOLSVRLGDO
VKDSHGHILQLQJDUHJLRQLQVSDFHIURPZKLFKUD\VIURPWKHVRXUFHFDQEHFROOHFWHGWKURXJKWKHRSWLFDOV\VWHPWDNLQJ
LQWRDFFRXQWDOOHWHQGXHOLPLWDWLRQV
%DVHGRQWKLVDVLPSOHDQGIDVWEXWVWLOOUHOLDEOHPHWKRGIRUHYDOXDWLRQRIFROOHFWLRQHIILFLHQF\KDVEHHQGHYHORSHG7KH
QHZ PHWKRG LV EDVHG RQ WDNLQJ SLQKROH LPDJHV RI WKH VRXUFH SODVPD ZLWK D &&' FDPHUD SUHIHUDEO\ XQGHU YDULRXV
REVHUYDWLRQ DQJOHV )URP WKHVH LQWHQVLW\ PDSV D WKUHHGLPHQVLRQDO PRGHO VRXUFH LQWHQVLW\ GLVWULEXWLRQ FDQ EH
HVWLPDWHG7KHHVWLPDWHRIWKHVRXUFHLQWHQVLW\GLVWULEXWLRQLVXVHGDVLQSXWWRDVXEVHTXHQWVLPSOHSURMHFWLRQDOJRULWKP
WRFDOFXODWHSURMHFWHGLPDJHV%\FRPSDULVRQZLWKWKHPHDVXUHGSLQKROHLPDJHVWKHVRXUFHLQWHQVLW\GLVWULEXWLRQPRGHO
LVUHILQHGLWHUDWLYHO\
8VLQJWKLVVRXUFHLQWHQVLW\GLVWULEXWLRQZLWKWKHSURMHFWLRQPRGHODQJXODUUDGLDWLRQFKDUDFWHULVWLFVRIWKHVRXUFHFDQEH
FDOFXODWHG,QWHJUDWLRQ\LHOGVDOVRWKHWRWDOUDGLDWLRQSRZHUZLWKLQDFHUWDLQFROOHFWLRQDQJOH)LQDOO\WKHHWHQGXHOLPLWV
RIWKHRSWLFDOV\VWHPDUHLQFOXGHGE\SHUIRUPLQJWKHVDPHSURMHFWLRQFDOFXODWLRQVEXWWDNLQJLQWRDFFRXQWRQO\UDGLDWLRQ
IURPWKHDOORZHGVRXUFHYROXPHGHWHUPLQHGEHIRUHKDQG7KLVLVUHVXOWLQJLQWKHDFWXDOFROOHFWHGSRZHUZLWKLQHWHQGXH
OLPLWVDQGWKHFROOHFWLRQHIILFLHQF\
&RPSDULVRQZLWKGHWDLOHGUD\WUDFLQJPRGHOFDOFXODWLRQVRIWKHFRPSOHWHRSWLFDOV\VWHPLQGLFDWHWKHJRRGDFFXUDF\RI
WKHPHWKRG,WFDQEHXVHGLQDVLPSOHZD\IRUVRXUFHRSWLPL]DWLRQDQGHQDEOHVUHOLDEOHHYDOXDWLRQDQGVSHFLILFDWLRQRI
VRXUFHSHUIRUPDQFHLQ(89SURMHFWLRQV\VWHPV


6. $&.12:/('*(0(176

)UXLWIXO GLVFXVVLRQV ZLWK 0DUWLQ $QWRQL -RKDQQHV :DQJOHU .ODXV %HUJPDQQ 2OLYHU 5RVLHU 5ROI $SHW] DQG -RVHSK
3DQNHUWDUHJUDWHIXOO\DFNQRZOHGJHG:HDUHLQGHSWHGWR25RVLHUDQG5$SHW]IRUSHUIRUPLQJWKHPHDVXUHPHQWV
7KLV ZRUN ZDV SDUWLDOO\ VXSSRUWHG E\ %0%) SURMHFW QXPEHU 1 *UXQGODJHQ GHU (89/ /LWKRJUDSKLH
5|QWJHQRSWLNHQ" and SURMHFWQXPEHU1*UXQGODJHQGHU(89//LWKRJUDSKLH(894XHOOHQ"


740 Proc. of SPIE Vol. 5037

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/17/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 7. 5()(5(1&(6

 VHHHJ*+DQVHQ'LH$EELOGXQJYRQ9ROXPHQVWUDKOHUQLQ6SHNWURJUDSKHQ2SWLN±  

:.ODXQLJ'HU/LFKWOHLWZHUW)HLQJHUlWHWHFKQLN  S±  (+HOELJ*UXQGVlW]OLFKHV]XU
$XVOHXFKWXQJYRQRSWLVFKHQ6\VWHPHQ)HLQJHUlWHWHFKQLN  S±   DOOWKUHHLQJHUPDQODQJXDJH 
 9*LWLQ5DGLRPHWU\$FRPSUHKHQVLYHDSSURDFK-2SW7HFKQRO  ±  
 .%HUJPDQQHWDO3LQFKSODVPDUDGLDWLRQVRXUFHIRUH[WUHPHXOWUDYLROHWOLWKRJUDSK\ZLWKDNLORKHUW]UHSHWLWLRQ
IUHTXHQF\$SSOLHG2SWLFV  S  
 -3DQNHUW+ROORZFDWKRGHGLVFKDUJHQG,QW(89/6RXUFH:RUNVKRS,QWHUQDWLRQDO6HPDWHFK0DUFK
6DQWD&ODUD86$
 -3DQNHUW+ROORZFDWKRGHWULJJHUHGSLQFKSODVPDVRXUFHIRU(89OLWKRJUDSK\UG,QW:RUNVKRSRQ(89
/LWKRJUDSK\,QWHUQDWLRQDO6HPDWHFK2FW0DWVXH-DSDQ
 -3DQNHUWHWDO3K\VLFDOSURSHUWLHVRIWKH+&7(89VRXUFH63,(¶VWK,QW6\PSRVLXPRQ0LFUROLWKRJUDSK\
0DUFK6DQWD&ODUD86$
 -3DQNHUW8SGDWHRI3KLOLSVH[WUHPH89VRXUFH(89/6RXUFH:RUNVKRS,QWHUQDWLRQDO6HPDWHFK2FW
'DOODV86$





Proc. of SPIE Vol. 5037 741

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/17/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx