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Abstract
Integration of a scanning electron microscope (SEM) and focused ion beam (FIB) technology into a single
FIB/SEM system permits use of the FIB as a nano-scalpel to reveal site-specific subsurface microstructures
which can be examined in great detail by SEM. The FIB/SEM technology is widely used in the semicon-
ductor industry and material sciences, and recently its use in the life sciences has been initiated. Samples
for FIB/SEM investigation can be either embedded in a plastic matrix, the traditional means of prepara-
tion of transmission electron microscopy (TEM) specimens, or simply dried as in samples prepared for
SEM imaging. Currently, FIB/SEM is used in the life sciences for (a) preparation by the lift-out technique
of lamella for TEM analysis, (b) tomography of samples embedded in a matrix, and (c) in situ site-specific
FIB milling and SEM imaging using a wide range of magnifications. Site-specific milling and imaging has
attracted wide interest as a technique in structural research of single eukaryotic and prokaryotic cells, small
animals, and different animal tissue, but it still remains to be explored more thoroughly. In the past, prepa-
ration of samples for site-specific milling and imaging by FIB/SEM has typically adopted the embedding
techniques used for TEM samples, and which have been very well described in the literature. Sample
preparation protocols for the use of dried samples in FIB/SEM have been less well investigated. The aim
of this chapter is to encourage application of FIB/SEM on dried biological samples. A detailed description
of conventional dried sample preparation and FIB/SEM investigation of dried biological samples is pre-
sented. The important steps are described and illustrated, and direct comparison between embedded and
dried samples of same tissues is provided. The ability to discover links between gross morphology of the
tissue or organ, surface characteristics of any selected region, and intracellular structural details on the
nanometer scale is an appealing application of electron microscopy in the life sciences and merits further
exploration.
Key words: Scanning electron microscopy, FIB-milling, Sample preparation for electron microscopy
1. Introduction
Alioscka A. Sousa and Michael J. Kruhlak (eds.), Nanoimaging: Methods and Protocols, Methods in Molecular Biology, vol. 950,
DOI 10.1007/978-1-62703-137-0_16, © Springer Science+Business Media, LLC 2013
275
276 D. Drobne
ion beam (FIB) techniques are very important tools for nano-
structuring of surfaces and microstructure characterization in the
semiconductor industry and material sciences (1). As early as the
1960s FIB instruments were also used to erode biological material
and expose subsurface structures (2–5), but difficulties in the inter-
pretation of the results and uncertainties about the side effects of
ion manipulation placed significant limitations on the broad appli-
cation of ion etching in biology.
In the past several years, however, FIB/SEM systems have
become uniquely attractive for the nanoscale investigation of bio-
logical structures. FIB/SEM is currently used in the life sciences for
(a) TEM sample preparation of lamella by a lift-out technique, (b)
FIB–SEM tomography of embedded samples, and (c) in situ site-
specific exposure of subsurface structures by FIB milling and imag-
ing in a wide range of magnifications. The FIB/SEM technology
enables investigation of biological samples embedded in plastic, such
as those used routinely for transmission electron microscopy (TEM)
imaging (6). FIB/SEM can also be performed on dried samples that
are typically prepared for conventional SEM imaging (7, 8).
In a FIB device, samples are irradiated with Ga3+ ions produced
by a liquid metal ion source (LMIS) and accelerated to an energy
of 30–50 keV. The ion beam is governed by different parameters
including the beam profile, the angle of incidence, ion species, ion
dose, and ion energy. The beam profile has a core with the Gaussian
type of current-density distribution and the beam diameter may be
as small as 5–7 nm (9). The ion beam is focused and rastered across
a sample surface by a set of electrostatic lenses, and ions striking
the surface with a very high momentum cause some atoms and
ions to be sputtered away (9, 10).
FIB milling of a selected region is followed by SEM imaging.
The emitted signal in conventional SEM is primarily dependent
upon surface topography and on the atomic number of elements
on the surface. Topographic contrast is proportional to the inten-
sity of secondary electrons ejected from the sample. In samples
embedded in plastic, a backscattered electron (BSE) detector is
used to produce an image of the surface. Plastic embedded samples
have to be stained with heavy metals, a process known as en bloc
staining, because the intensity of the BSE signal is highly depen-
dent upon the atomic number (Z) of the specimen.
One of the most important applications of a FIB/SEM system
is preparation of samples for transmission electron microscopy by
an in situ lift-out technique, which involves cutting out electron-
transparent slices from specific parts of a resin embedded sample
and lifting them out for TEM study. The FIB enables the prepara-
tion of large, site specific samples of uniform thickness. This FIB
application for biomaterials has been reviewed by Grandfield and
Engqvist (in press).
Serial FIB and SEM imaging of resin-embedded samples for 3D
tissue reconstruction is the more common application of FIB/SEM
16 3D Imaging of Cells and Tissues by Focused… 277
2. Materials
e−
Ga+
Fig. 1. Schematic illustration of a FIB/SEM system. The scheme shows a sample hit by
both ions (Ga+) and electrons (e−) during FIB/SEM operation.
16 3D Imaging of Cells and Tissues by Focused… 279
3. Methods
3.1.3. Dehydration 1. Wash the tissue in 50% ethanol for 10–15 min.
2. Wash in 70% ethanol for 10–15 min (may be stored overnight
at this stage if necessary).
3. Wash in 95% ethanol for 10–15 min.
4. Wash three times in 100% ethanol for 15 min each.
5. Wash three times in 100% acetone for 15 min each.
6. Shake specimen from time to time during the process to ensure
full penetration and infiltration of chemicals.
3.1.4. Drying Critical point drying (CPD) is an automated process that requires
approximately 40 min to be completed. It relies on the following
physical principle: the liquid in the biological tissue is replaced with
a suitable inert fluid whose critical temperature at a realizable pres-
sure is just above the ambient temperature. The choice of fluids is
severely limited and despite early work with Freon 13 and N2O, CO2
is now commonly used. With CO2, a critical point of approximately
35°C can be achieved at a pressure of about 1,200 psi. Samples are
transferred in 100% acetone to the pressure chamber of a critical
point dryer. When the acetone is replaced with liquid CO2 and the
temperature is raised to above the critical temperature, the liquid
CO2 vaporizes with no change in density. As a consequence, there
are no surface tension effects that can distort morphology and ultra-
structure. However, another method using hexamethyldisilazane
can be used for drying. In our experience, the two drying methods
are found to produce a similar appearance of cellular ultrastructure.
When the two protocols are compared, we find that HMDS drying
takes less effort, has lower costs for chemicals, requires no special-
ized equipment and has a high rate of success. In our laboratory and
elsewhere (14), CPD- and HMDS-dried samples have typically
shown equally good results (Fig. 2) (15). The high magnifications in
Fig. 2a, b are unusual for SEM investigation of biological samples
prepared by drying. This is evidence of satisfactory sample stabiliza-
tion and conductivity, as well as, of successful FIB operation.
For drying with Hexamethyldisilazane:
1. Incubate tissue block in acetone–HMDS (1:1) for 10 min.
2. Remove the HMDS–acetone and replace with HMDS.
16 3D Imaging of Cells and Tissues by Focused… 281
Fig. 2. (a) CPD-dried specimen followed by FIB exposure and SEM imaging of the cell interior. Sample was aldehyde-fixed
and osmium-postfixed (0.4% paraformaldehyde and 1% glutaraldehyde in 0.1 M sodium cacodylate buffer; 1% osmium
tetroxide in distilled water). Homogenous regions correspond to lipid droplets (arrows). (b) HMDS-dried sample subjected
to FIB exposure and SEM imaging of cell interior. Sample was aldehyde-fixed and osmium-postfixed (0.4% paraformalde-
hyde and 1% glutaraldehyde in 0.1 M sodium cacodylate buffer; 1% osmium tetroxide in distilled water). Note different
electron beam voltages (left image 3 kV, right image 5 kV). Arrows—lipid droplets; asterisk—lamellar body. Image (b)
reprinted from ref. 15 with permission.
3.1.5. Mounting Dried Dried samples are mounted on standard SEM microscope stubs
Samples onto Specimen prior to FIB/SEM investigation. Double-stick adhesive tape, con-
Stubs ductive silver paint, or both can be used to attach specimens to
stubs. Due to the small size of specimens and because sometimes
samples are mechanically opened in order to expose their subsur-
face structure, a stereo microscope with magnification up to 10× is
indispensible.
3.1.6. Sputter Coating Samples are sputter coated with a layer of carbon or platinum/pal-
of Dry Samples ladium, or other metals (thickness of ~10–30 nm). Metal atoms
ejected from the target by the ionized gas cross the plasma and are
deposited onto any surface within the coating unit, including the
specimen. A low vacuum is used (0.1–0.05 mbar), which with a
modern low voltage sputter coater, enables metal to be deposited
at a rate of 1 nm/s. For SEM imaging, when high magnifications
are required, sputtering is a very important step that is needed to
ensure the thickness and evenness of the cover layer. In Fig. 3a, b
we provide examples of different qualities of sample coating.
282 D. Drobne
Fig. 3. SEM micrograph of the digestive gland cells prepared for conventional SEM. (a) Unsuitable sputter coating when
high magnifications are required. Surface deposits are sputtering artifacts. (b) Properly coated samples allowing imaging
at high magnifications. Image (b) taken by M. Hočevar; IMT, Ljubljana, Slovenia.
3.2. Sample Fixation is the same as described above (Subheading 3.1.1), using
Preparation for FIB a mix of paraformaldehyde and glutaraldehyde in sodium cacody-
Milling and SEM late buffer.
Imaging by Resin
Embedding
3.2.1. Fixation
3.2.2. Staining Following fixation, the samples are stained en bloc for enhancement
of contrast. Uranyl acetate, usually used for staining thin sections for
transmission electron microscopy, is used here for en bloc staining
before dehydration. It also acts as both an electron stain and as a
fixative. As a fixative, uranyl acetate stabilizes membranous and
nucleic acid-containing structures but also reacts with proteins (12).
1. Wash tissue block at least 3–5 times for 10 min each in distilled
water to remove all excess phosphate ions, therefore prevent-
ing precipitation of uranyl acetate (UA).
2. En bloc stain with 3% aqueous uranyl acetate for 4.5 h at room
temperature in the dark to prevent uranyl acetate from being
precipitated. This is necessary because UA is photo-reductive.
3. Wash three times in distilled water for 10 min each.
3.2.3. Dehydration The dehydration steps are the same as described above
(Subheading 3.1.3), using an increasing series of ethanol
concentration.
3.2.4. Embedding The embedding steps are similar to those commonly used for
preparing samples for TEM. To embed our samples we use Spurr’s-
based resin.
16 3D Imaging of Cells and Tissues by Focused… 283
3.2.5. Mounting of Resin Embedded samples are mounted on standard SEM microscope
Embedded Samples onto stubs prior to FIB/SEM investigation. The plastic block is cut by a
the Specimen Stubs diamond knife in an ultramicrotome until the selected region of a
sample is reached. Then the entire block is mounted on the SEM
microscope stub. The mounting steps are identical to those used
for mounting dried samples (Subheading 3.1.5).
3.2.6. Sputter Coating of The sputter coating procedure is not applied to embedded sam-
Resin Embedded Samples ples. Here, the investigated surface is flat and the sample is conduc-
tively stained, therefore no significant charging is typically observed
during imaging. In addition, sputtering would cover the region of
interest, which is embedded in resin block.
3.3. FIB Milling In the FIB/SEM instrument, both beams are aimed at the same
and SEM Imaging point on the specimen surface. A focused high current ion beam of
gallium ions (Ga3+) is used for site-specific in situ sputtering or
3.3.1. FIB Milling and SEM
milling (Fig. 4a). The same beam at low beam currents can be used
Imaging Operation
for polishing (Fig. 4b).
Fig. 4. FIB milling and polishing of biological samples prepared for conventional SEM. (a) Top down view from the same
direction as the Ga3+ ion beam; the region where the Ga3+ ions mill the surface is marked with an arrow. (b) Polished part
of the FIB-milled trench is indicated by one asterisk; the unpolished part is indicated by two asterisks.
284 D. Drobne
Fig. 5. (a) FIB milling and SEM imaging of dry sample prepared for conventional SEM. (b) FIB milling and SEM imaging of
resin embedded sample as prepared for TEM. Arrows indicate FIB milled regions. Image (b) is reprinted from ref. 15 with
permission.
16 3D Imaging of Cells and Tissues by Focused… 285
3.3.2. Examples of FIB FIB milling and conventional SEM imaging of dried samples pro-
Milling and SEM Imaging vides structural information on tissue (Fig. 6a, b) and reveals some
of Biological Samples morphological characteristics of the cell interior (Fig. 6c, d).
In dried samples, SEM contrast is based on topographical con-
trast. The emitted signal is related primarily to surface topography,
but there are also other interactions that increase or minimize con-
trast from the image. Traditional SEM sample preparation proto-
cols were not designed for subcellular investigation and,
consequently, little is known of the appearance of the cellular ele-
ments when the cells are opened by FIB milling and imaged by
SEM (see Note 5).
A certain similarity is observed between dried and embedded
samples that are processed for FIB/SEM. This is true, however,
only for particular structures such as lamellar bodies, which exhibit
a characteristic shape (Fig. 7a, b). It seems lamellar cellular struc-
tures can be, in fact, investigated more effectively with FIB/SEM
of dried samples than by TEM or by FIB/SEM of embedded sam-
ples (17). Generally, FIB/SEM samples prepared for conventional
scanning electron microscopy are suited for the characterization of
intracellular morphological features with membranous or lamellar
appearance, or structures whose homogeneity or density are differ-
ent than the remainder of the cell (8). With our present state of the
knowledge, however, FIB/SEM of dried samples does not allow
unambiguous recognition of cellular organelles, unless they are
prepared in parallel for conventional TEM, embedded in plastic,
286 D. Drobne
Fig. 6. (a) SEM micrograph of tissue gross morphology digestive gland tubes (terrestrial isopod, Porcellio scaber ). (b) Detailed
view of digestive gland cells; one cell is encircled. (c) FIB milled lipid droplets on the cell surface. (d) Detail from the cell
interior from the region where two lipid droplets touch.
Fig. 7. Comparison between (a) SEM micrograph of FIB milled epithelial cells exhibiting lamellar structure prepared for
conventional SEM and (b) lamellar structure as seen in embedded FIB-milled and BSE-imaged tissue. Arrows—lipid drop-
lets; asterisk—lamellar body.
Fig. 8. Electron micrograph of FIB milled area of embedded sample. (a) Reverse contrast of back-scattered image. (b) Same
image as (a) in positive contrast. Reprinted from ref. 15 with permission.
3.3.3. FIB Milling and SEM For 3D tomography of embedded samples, serial FIB milling
Imaging of Biological (sectioning) operations are followed by SEM imaging. FIB sec-
Samples for 3D tioning is performed perpendicular to the sample surface.
Tomography The FIB milling and SEM imaging of embedded samples can
be used for 3D tomography (18) of larger scale structures like
288 D. Drobne
Fig. 9. 3D reconstruction of mitochondria and endoplasmic reticulum from endothelial cells from human umbilical cord.
(a) Epon-embedded cells were repeatedly FIB milled and SEM imaged. As reported by the authors (20), block face sections
of 5.2 × 4.6 mm2 size were imaged with a pixel size of 3.1 nm. (b) The endoplasmic reticulum (green) and the mitochondria
(orange) were segmented in individual sections. (c) The reconstructed volume (1.2 × 4.6 × 5.4 mm3) reveals a very dense
and complex network of the endoplasmic reticulum. Also, the mitochondria seem to be connected, forming a large com-
plex. Reproduced with permission from ref. 19 with permission.
Fig. 10. Serial FIB milling followed by SEM imaging of a lamellar body in a digestive gland epithelium cell of a terrestrial
isopod. Reprinted from ref. 16 with permission.
4. Conclusion
5. Notes
Acknowledgments
I would like to thank F. Tatti, FEI Co., Milan, Italy who performed
all FIB operations. Samples were prepared by my former or present
PhD Students, Vladka Lešer, Marjetka Kralj Kunčič, and Živa
Tkalec Pipan, whom I would also like to thank. Finally, I would
like to thank Bill Milne for English editing and Ana Fortič for tech-
nical editing and critical reading of the draft of this chapter.
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