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L¼TH
ð ðð
1
¼ u_ H q u_ SH cS þ SH eH E þ EH eS þ EH eS E rdrdzd h
2 h z r
(5)
U ¼ N/ u (10) By substituting Eq. (23) into Eq. (6), we obtain the following:
( ð t2
where 1X
ddH € uu dþkuu u dt
mdþk
2 t1
N u ¼ N1 N2 N3 N4 (11)
ð t2 ð t2
H
2 3 þduH kuu dþkuu uÞdt þ d€ mþdH kuu þ uH kuu dtdd
Ni 0 0 t1 t1
6 7 jnh ð t2
Ni ¼ 6
40 Ni 0 75e (12)
þ dH kuu þ uH kuu dtdu ¼0
0 0 jNi t1
(24)
Nu ¼ Ni ejnh (13)
Hence, the equations of motion for the circular ridge waveguide
1 can be expressed as follows:
Ni ¼ ð1 þ nni Þð1 þ ggi Þ (14)
4 Xn o
md€ þkuu dþkuu u ¼ 0 (25)
where d is the displacement vector of a node, u is the potential
vector of a node, and n and g are dumb valuables. The strain S X
and electrical potential energy U are then expressed using the fol- fkuu dþkuu ug ¼ 0 (26)
lowing matrix: Xn T o
d€ mþdT kuu þ uT kuu ¼ 0 (27)
S ¼ Bu d (15)
X
dH kuu þ uT kuu ¼ 0 (28)
E ¼ Bu u (16)
where m, kuu, kuu, kuu, and kuu are symmetric matrices with real
where number values. Thus, Eqs. (25) and (27) are identical, as are
Eqs. (26) and (28). Combining the discretized elements to form a
global matrix, the equations of motion for the entire system are as
Bu ¼ Bu1 Bu2 Bu3 Bu4 (17)
follows:
Ur ¼ AUr (32)
Uz ¼ AUz (33)
Thus, the real sizes of Ur, Uz, and Uh corresponding to the unit
time and energy can be obtained. Figures 6(a) and 6(b) illustrate
the distribution of the radial displacement Ur at node “T” (as
3 Experimental Results
3.1 Electrode Design. This study utilized a PZT-4 piezoelec-
tric circular ridge waveguide that was manufactured by Eleceram
Inc., Taoyuan, Taiwan. The piezoelectric circular ridge wave-
guide’s height, outer radius, and inner radius were 12.64 mm,
13 mm, and 11 mm, respectively, yielding a thickness of 2 mm.
First, nitric acid was used to wash off the metal electrodes from
Fig. 8 Screen design drawing generated by using AUTOCAD. Fig. 10 Piezoelectric circular ridge waveguide in which the
n 5 2, n 5 3, n 5 4, n 5 5, and n 5 6. electrodes have been arranged for n 5 2
with the largest objective function value, the B point with the
i
smallest objective function value, and the O point with the value where FObject is the objective function, fExperiment is the experimen-
of the objective function between the two points. The process of tal value of the resonant frequency corresponding to each mode,
searching for the best solution can be divided into the following
four steps:
Step 1: Establish a reflection point R based on the highest point.
Suppose that value d is the distance from the maximum value
W to the midpoint Mp of the line connecting the remaining two
points, and the WMp line extends d to the reflection point R.
When the value of the point R is between the minimum and the
maximum of the objective function value, a new vertex is estab-
lished at reflection point R, and the maximum value of point W
is replaced.
Step 2: Establish an expansion point E.
If the objective function value of the reflection point R is
smaller than the lowest point B, the WMp line segment is
extended by 2d to point E. A comparison of the objective
Fig. 13 Impedance curves by measurement. (a) F(1, 2) mode, (b) F(2, 2) mode, (c) F(3, 2) mode, (d) F(1, 3) mode, (e) F(2,
3) mode, (f) F(3, 3) mode, (g) F(1, 4) mode, (h) F(2, 4) mode, (i) F(3, 4) mode, (j) F(1, 5) mode, (k) F(2, 5) mode, (l) F(3, 5)
mode, (m) F(1, 6) mode, (n) F(2, 6) mode, and (o) F(3, 6) mode.
(kHz) Experimental value Theoretical value Experimental value Theoretical value Experimental value Theoretical value
Table 3 The difference between the corresponding experimen- the size parameters of the structure are the inner radius Rin and the
tal and theoretical values before the inversion calculation of height h. Figures 16 and 17 show the comparison of the variation
structural parameters of the circumferential flexural wave dispersion curve with the the-
oretical model curve after adding 0.5 mm to the two parameters.
(Hz) m¼1 m¼2 m¼3 When Rin increases by 0.5 mm, the three dispersion curves are
n¼2 126 218 1047
shifted to the low frequency, where m ¼ 1 and 2 increases along
n¼3 543 723 1936 with the increase of k, while the offset of m ¼ 3 is similar to the
n¼4 887 726 1754 horizontal offset. Increasing the height h results in an obvious
n¼5 409 292 815 shift of m ¼ 3 curve to the low frequency, while the m ¼ 2 curve
n¼6 329 54 419 shifts only slightly to the low frequency. The m ¼ 1 curve has
almost no change.
Before the inverse calculation of the experimental measure-
different electrode positions, which are presumed to be caused by ments of the resonance frequency, the convergence condition and
uneven size distribution. In the axial mode, the difference of convergence of the program need to be discussed. Convergence
m ¼ 3 is the largest, assuming the theoretical value can infer the conditions are an important step in the whole process of the inver-
effect of uniform size. Therefore, during the first stage of this sion calculation and an important factor in determining the
study, the structural parameters are inversely calculated to obtain
the most likely uniform geometric size. After the actual geometric
shape of the circular ridge waveguide is obtained, the second stage
of the material parameters’ inversion calculation is performed.
Before performing the structural parameter inverse calculation,
the sensitivity of each structural parameter is discussed. Assuming
that the outer diameter of the circular ridge waveguide is constant,
Table 4 Theoretical values and experimental values after the inversion calculation of structural parameters
(kHz) Experimental value Theoretical value Experimental value Theoretical value Experimental value Theoretical value
Fig. 21 Sensitivity test of the elastic coefficients: (a) C11, (b) C12, (c) C13, (d) C33, (e) C44, (f) e15, (g) e31, (h)
e33, (i) e11, and (j) e33
Finally, the effects of the changes in C44 on the dispersion has lower sensitivity to the other coefficients. As a result, in this
curve are discussed, as shown in Fig. 21(e). When C44 is changed study, the only material coefficients discussed are the elastic coef-
to 120%, the three dispersion curves shift slightly to high frequen- ficients, and the priority of the inversion calculation is as follows:
cies. When k increases, the frequency also increases slightly; how- C11 > C12 > C13 > C44 > C33.
ever, the variation of the three curves is not particularly obvious.
The degree of influence of C44 and C13 is different, while the latter
has a greater influence on the m ¼ 3 curve. As a result, C44 is 4.5 Inversion Calculation of Material Parameters. Before
ranked after C13 when calculating priority inversions. the inversion calculation of the material coefficients is performed,
the convergence condition and convergence of the program are
4.4.2 The Sensitivity of Piezoelectric Coefficients. With discussed. The material coefficient inverse calculation conver-
respect to the piezoelectric coefficients, the effects e15, e31, and gence condition is defined as follows:
e33 are discussed. Figures 21(f)–21(h) depict corresponding dis-
persion curves shifted slightly to higher frequencies when e15, e31, jCwij Cbij j < 1 MPa (39)
and e33 increase to 120%. However, the offset of each dispersion
curve is not obvious; in particular, the dispersion curve corre- where Cwij represents the material coefficient corresponding to the
sponding to e33 exhibits almost no change. maximum point of the difference between the objective functions
in each point, and Cbij represents the material coefficient corre-
4.4.3 The Sensitivity of Dielectric Coefficients. With respect sponding to the minimum point of the objective function differ-
to the dielectric coefficients, the dispersion curves corresponding ence in each point. When the difference between the two material
to the increase of e11 and e33 to 120% are shown in Figs. 21(i) and coefficients is less than 1 MPa, it is judged to be convergent.
21(j), respectively. The change for e11 results in almost no change In the convergence test of the inverse calculation program,
in the dispersion curve. The change for e33 results in an unnotice- three methods m ¼ 1, m ¼ 1 and 2, and m ¼ 1, 2, and 3 are used to
able change in the dispersion curve; however, all three dispersion discuss the number of coefficients that can reach convergence.
curves shift slightly to low frequencies. The initial value in the inverse calculation process is the material
The above discussions of the effects of the elastic coefficients, coefficients (1 6 random number (0.0–0.3)) in Table 1.
piezoelectric coefficients, and dielectric coefficients indicate that
the elastic coefficients affect the variation of the dispersion curves 4.5.1 Inverse Calculation Using m ¼ 1 Dispersion Curve.
to a greater degree than the piezoelectric coefficients and the Figures 22(a)–22(d) show the convergence of two coefficients and
dielectric coefficients. This indicates a greater sensitivity by the three coefficients using only the m ¼ 1 curve. Figure 22(a) shows
elastic coefficients, especially C11 and C12, followed by C13. The that if only two coefficients are inversely calculated using the
dispersion curve of m ¼ 3 has a high sensitivity to C13, while it m ¼ 1 curve, the ten sets of randomly given material coefficients
Fig. 22 Convergence test results of inversely calculated by m 5 1 dispersion curve. (a) Two elastic coeffi-
cients C11 and C12, (b) three elastic coefficients (C11–C12 plane), (c) three elastic coefficients (C11–C13 plane),
and (d) three elastic coefficients (C12–C13 plane).
Fig. 23 Convergence test results of inversely calculated by m 5 1 and 2 dispersion curves. (a) Two elastic
coefficients C11 and C12, (b) three elastic coefficients (C11–C12 plane), (c) three elastic coefficients (C11–C13
plane), (d) three elastic coefficients (C12–C13 plane), (e) four elastic coefficients (C11–C12 plane), (f) four elas-
tic coefficients (C11–C13 plane), (g) four elastic coefficients (C11–C44 plane), (h) four elastic coefficients
(C12–C13 plane), (i) four elastic coefficients (C12–C44 plane), and (j) four elastic coefficients (C13–C44 plane).
high and, consequently, there is no need to be concerned about the best signal-to-noise ratio. Because of the anisotropic sintering
large analysis errors due to an insufficient number of circumferen- characteristics of piezoelectric ceramics, the geometrical dimen-
tial elements. sions of piezoelectric circular ridge waveguides are uneven. The
For experimental measurements, the position of the sensing differences between the experimental values and values obtained
electrodes can be designed on the basis of the different resonance by numerical analysis of the resonant frequencies are high for the
modes to achieve the function of enhancing or lowering a specific various circumferential modes. This may be as a result of the sens-
modal signal. However, the effect on the circumferential mode ing points corresponding to different circumferential modal num-
number or the circumferential hoop mode is not significant. In bers; thus, the influence of the uneven shape is more apparent.
addition to segmenting the original sensing electrodes in the elec- For that reason, before the inversion calculation of material
trode design, the driving electrode has the same number of cir- coefficients, the inverse of the structural geometric coefficients is
cumferential modes, which allows the impedance curve to obtain calculated first. If the structural geometric coefficients with the
smallest error are obtained, the error of the material coefficient
inverse calculation can be reduced. After the inversion calcula-
Table 6 Inversion calculation results for the two elastic coeffi- tion, the development trends of the dispersion curves can be more
cients after the structural parameters’ inversion calculation obviously corrected, specifically for the dispersion curve of m ¼ 3.
In the inversion calculation of material coefficients, since the
C11 C12 experimental data that can be compared consist of only a few
modal resonant frequencies, strategic choices must be made.
Theoretical value (GPa) 139 77.8
Therefore, only the coefficients with higher sensitivity among the
Inversion calculation value (GPa) 138.723 77.458
Difference (%) 0.199% 0.440% coefficients can be inversely calculated, and the influence of pie-
zoelectric and dielectric coefficients cannot be discussed. The
Table 7 Inversion calculation results for the three elastic coef- Table 8 Inversion calculation results for the two elastic coeffi-
ficients after the structural parameters’ inversion calculation cients before the structural parameters’ inversion calculation
Theoretical value (GPa) 139 77.8 74.3 Theoretical value (GPa) 139 77.8
Inversion calculation value (GPa) 137.466 75.833 73.004 Inversion calculation value (GPa) 133.393 72.146
Difference (%) 1.104% 2.528% 1.744% Difference (%) 4.034% 7.267%
Fig. 24 Convergence test results of inversely calculated by m 5 1, 2, and 3 dispersion curves. (a) Two elas-
tic coefficients C11 and C12, (b) three elastic coefficients (C11–C12 plane), (c) three elastic coefficients
(C11–C13 plane), (d) three elastic coefficients (C12–C13 plane), (e) four elastic coefficients (C11–C12 plane), (f)
four elastic coefficients (C11–C13 plane), (g) four elastic coefficients (C11–C14 plane), (h) four elastic coeffi-
cients (C12–C13 plane), (i) four elastic coefficients (C12–C44 plane), (j) four elastic coefficients (C13–C44 plane),
(k) five elastic coefficients (C11–C12 plane), (l) five elastic coefficients (C11–C13 plane), (m) five elastic coeffi-
cients (C11–C44 plane), (n) five elastic coefficients (C11–C33 plane), (o) five elastic coefficients (C12–C13
plane), (p) five elastic coefficients (C12–C44 plane), (q) five elastic coefficients (C12–C33 plane), (r) five elastic
coefficients (C13–C44 plane), (s) five elastic coefficients (C13–C33 plane), and (t) five elastic coefficients
(C44–C33 plane).
Funding Data
Ministry of Science and Technology of Taiwan (MOST 110-
2221-E-239-015; Funder ID: 10.13039/501100004663).
References
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