MEMS Sensor Working and Its

Applications

he term MEMS stands for micro-electro-mechanical systems. These are a set of

devices, and the characterization of these devices can be done by their tiny size
& the designing mode. The designing of these sensors can be done with the 1-
100-micrometer components. These devices can differ from small structures to
very difficult electromechanical systems with numerous moving elements
beneath the control of incorporated micro-electronics. Usually, these sensors
include mechanical micro-actuators, micro-structures, micro-electronics, and
micro-sensors in one package. This article discusses what is a MEMS sensor,
working principle, advantages and it’s applications

What is a MEMS Sensor?

MEMS are low-cost, and high accuracy inertial sensors and these are used to
serve an extensive range of industrial applications. This sensor uses a chip-
based technology namely micro-electro-mechanical-system. These sensors are
used to detect as well as measure the external stimulus like pressure, after that it
responds to the pressure which is measured pressure with the help of some
mechanical actions. The best examples of this mainly include revolving of a
motor for compensating the pressure change.
The MEMS IC fabrication can be done with silicon, whereby slight material
layers are placed otherwise fixed onto a Si substrate. After that selectively fixed
away to leave microscopic 3D structures like diaphragms, beams, levers,
springs, and gears.
The MEMS fabrication needs many techniques which are used to construct
other semiconductor circuits like oxidation process, diffusion process, ion
implantation process, low-pressure chemical vapor deposition process,
sputtering, etc. Additionally, these sensors use a particular process like
micromachining.

MEMS Sensor Working Principle

Whenever the tilt is applied to the MEMS sensor, then a balanced mass makes a
difference within the electric potential. This can be measured like a change
within capacitance. Then that signal can be changed to create a stable output
signal in digital, 4-20mA or VDC.

These sensors are fine solutions to some applications which do not demand the
maximum accuracy like industrial automation, position control, roll, and pitch
measurement, and platform leveling.

How MEMS Accelerometer Works?

MEMS(Micro Electro Mechanical Systems) accelerometer consists of a micro-
machined structure built on top of a silicon wafer.
This structure is suspended by polysilicon springs. It allows the structure to
deflect at the time when the acceleration is applied on the particular axis.

Due to deflection the capacitance between fixed plates and plates attached to the
suspended structure is changed. This change in capacitance is proportional to
the acceleration on that axis.

Hardware Overview of ADXL335 Accelerometer

At the heart of the module is a small, low power triple axis MEMS
accelerometer from Analog Devices with extremely low noise – ADXL335. The
sensor has a full sensing range of ±3 g. It can measure the static acceleration
due to gravity in tilt-sensing applications, as well as dynamic acceleration
resulting from motion, shock, or vibration.
The sensor works on power between 1.8V to 3.6VDC (3.3V optimal), and
typically consumes just 350µA of current. However, an on-board 3.3V regulator
makes it a perfect choice for interfacing with 5V microcontrollers such as the
Arduino.

This breadboard friendly board breaks out every pin of the ADXL335 to a 6-
pin, 0.1″ pitch header. This includes 3 analog outputs for X, Y and Z axis
measurements, 2 supply pins and a self-test pin which allows you to check the
functioning of the sensor in the final application.

The analog outputs are Ratiometric, meaning 0g measurement output is

nominally equal to half of the 3.3V supply voltage (1.65V), -3g is at 0v and 3g
is at 3.3V with full scaling in between.
Here are the complete specifications of ADXL335 Accelerometer IC.

Operating Voltage 1.8V – 3.6V

Operating Current 350μA (typical)
Sensing Range ±3g (Full Scale)
Temperature Range −40 to +85°C
Sensing axis 3 axis
Sensitivity 270 to 330mV/g (Ratiometric)
Shock Resistance Up to 10,000g
Dimension 4mm x 4mm x 1.45mm

ADXL335 Accelerometer Pinout

Before diving into hookup and example code, let’s first take a look at its Pinout.

VCC pin provides power for the accelerometer which can be connected to 5V on

the Arduino.
X-Out pin outputs analog voltage proportional to acceleration exerted on X axis.

Y-Out pin outputs analog voltage proportional to acceleration exerted on Y axis.

Z-Out pin outputs analog voltage proportional to acceleration exerted on Z axis.

GND pin is connected to GND on Arduino

ST(Self-Test) pin controls the self-test feature. This feature is discussed in detail

at the end.