MEMS

Microelectromechanical
Systems
 PREPARED BY:
HARSHIT KATHURIA(07BEE055)
PRAKHAR SHARMA(07BEE056)
SEMESTER VI(ELECTRICAL)
FACULTY GUIDE: P.N. KAPIL
 Points to be covered
Introduction to MEMS
History
Scope
Materials
Basic Processes
Manufacturing
Applications
-Picosat
-Accelerometer
-Bio-mems
-Pressure sensors
 INTRODUCTION
Micro-Electro-Mechanical Systems (MEMS) is the
integration of mechanical elements, sensors,
actuators, and electronics on a common substrate
through the utilization of microfabrication
technology or “microtechnology”.

IN A NUT SHELL
Electronics merged with mechanical components
such as gears, actuators etc. .
 CLOSE UP OF SINGLE ACTUATOR

MATRIX OF ACTUATORS
 HISTORY
TRANSISTORS

INTEGRATED CIRCUITS
ICs with Germanium
ICs with Silicon

EMBEDDED
SYSTEMS

MICROMACHINING

MEMS
 SCOPE
MEMS promises to revolutionize nearly every product
category by bringing together silicon-based
microelectronics with micromachining technology, making
possible the realization of complete systems-on-a-chip.
Fields in which MEMS has large potentials include
-Space Exploration
-Biomedical Research
-Stealth Ops
-Automation
-Display Devices
-Wireless Computing
-Smart Dust
 BASIC PROCESSES

DEPOSITION PATTERNING ETCHING

Physical Chemical Lithography Wet Dry

Physical vapour Photolithography Etchant type Vapour type
deposition 1. LPCVD
1.Sputterring 2. PECVD Electron Beam Lithography Isotropic
Anisotropic
2.Evaporation Plasma type
Ion Beam Lithography
Electro
X-ray Lithography chemical type
 Manufacturing Technologies
MEMS manufacturing technologies include the
following:

BULK MICROMACHING
SURFACE MICROMACHING
LIGA
 Applications
MEMS applications include a vast variety of fields
which include
• Space applications
• Accelerometer
• Bio-MEMS
• Pressure Sensor
• Inkjet printers
• Displays
• Interferometric modulator display (IMOD)
• Actuator based load systems
 MEMS based Space Applications

Space applications include the following

• Sun Sensor
• Ion Thrusters
• Picosats
• Space Radars
 SUN SENSOR
The sun sensor is an analog slit sensor with triangular photodiodes.
 ION THRUSTER
Electric propulsion (EP) has been considered and utilised since the early
days of space light as an alternative to on-board chemical propulsion. The
commonly used notation divides EP in three main categories based on the
method of accelerating the propellant - electrothermal, electromagnetic, and
electrostatic.
 Pressure Sensor
A pressure sensor measures pressure, typically
of gases or liquids. Pressure is an expression of
the force required to stop a fluid from
expanding, and is usually stated in terms of
force per unit area. A pressure sensor usually
acts as a transducer; it generates a signal as
a function of the pressure imposed. For the
purposes of this article, such a signal is
electrical.
 ACCELEROMETER
An accelerometer measures proper
acceleration, which is the acceleration it
experiences relative to freefall, and is the
acceleration that is felt by people and objects .
 Bio-MEMS
Bio-MEMS combines biological component
with physio-chemical detector. The specific
applications include:
• Glucose Monitoring
• Detection of Pesticides
• Drug Discovery
• Repairing of Damaged Tissues
 REFRENCES

Micromechanics and Mems : Classic and Seminal Papers to

1990; by W. Trimmer (Editor)
Fundamentals of Microfabrication; Marc J. Madou
An Introduction to MEMS Engineering; by Nadim Maluf
Silicon Micromachining; by Elwenspoek and Jansen
DARPA http://www.darpa.mil.mto
IEEE EXPLORE http://ieeeexplore.ieee.org/Xplore/DynWel.jsp
THE END