Fick’s Law

Dr. Rohan Gupta

A.P,ECE
• To predict diffusion results
• Goal is to calculate electrical characteristics of
semiconductor device
• Two approaches of diffusion theories
• Continuum Theory of Fick’s diffusion equation
• Atomistic theory
• Diffusivity of dopant elements determined
from experimental measurements
• When impurity concentrations are low,
diffusion profiles agree with Fick’s diffusion
equation
• When impurity concentrations are high,
diffusion profiles deviate from diffusion theory
 Diffusion rate
• Mechanism of diffusion
• Temperature
• Properties of impurity
• Concentration gradient of impurities
• Geometry of semiconductor
F is rate of transfer of solute atoms per unit area
N is concentration of solute atoms
X is axis of direction of solute flow
D is diffusion constant
t is diffusion time
Above equation is Fick’s second law of diffusion
Fick’s equation applied to diffusion
Complementary Error function distribution
Constant source diffusion profiles
Gaussian distribution and limited source
diffusion
Erfc and Gaussian profiles
Thank You