KEITHLEY 4200A-SCS

Semiconductor Characterization
System

Q. Wang
2018/10/24
Contents

 4200A-SCS system overview

 Pulse Generator

 Keithley Pulse Application

4200A-SCS System Overview

Figure 1: 4200A-SCS summary

Pulse Generator
Pulse Generator Units
High-speed pulse
generator (PGU)
Pulse Measure Unit (PMU)

Figure 2: Simplified circuits

of the PGU and PMU
Pulse Generator
Pulse Measure Unit (PMU)
Advantages of PMU:

 Solid-state relay (SSR)

 Measure current and voltage
 Remote Preamplifier/Switch
Modules (RPM)

The PMU is superior to the PGU!

Figure 3: PMU block diagram
Pulse Generator
Pulse Modes
The PGU and PMU can provides the following types of output:

 Standard pulse mode:

The two-level pulse mode.

 Segment Arb waveform:

The multi-level pulse mode with many line segments.

 Full-arb pulse mode:

The multi-level pulse mode with user defined points.

Figure 4: Pulse Modes
Pulse Generator
Configure the PGU, PMU, and RPM using tests
The PGU, PMU and RPM preamplifier can also be configured and controlled using UTMs

and interactive test modules (ITMs)

 The type of terminal.

 The instrument that is attached to the terminal.

 The operation mode and basic settings

Figure 5: Configure pane

Pulse Generator
Pulse Timing Preview example

Figure 6: Pulse Timing Preview example

Pulse Generator
PMU connection compensation
Errors caused by:

 connections and cable length ；

 stray resistance in your test configuration ；

…… Short compensation
Categories:
Connection
compensation
Compensation Offset current compensation
Load-line effect
(For standard pulse I-V testing)
compensation
Pulse Generator
Perform connection compensation

Steps:

1. In Clarius, select Tools.

2. Select PMU Connection

Compensation.
PMU Connection
Clarius Tools dialog box Compensation dialog box 3. Select the PMU.

4. Select Measure Short or

Measure offset,
Figure 7: Perform connection compensation
Pulse Generator
Enabling connection compensation
Steps:

1. Select the test.

2. Select Configure.

3. Select the terminal to be compensated.

4. Select Terminal Settings.

5. Select Advanced
(PMU Advanced Terminal Settings dialog box)

6. Select compensation

7. Select OK
Figure 8: Enabling connection compensation
Keithley Pulse Application
Starting KPulse
Double-click Kpulse Select Tools Select Options

Tools

Figure 10: KPulse Options

Figure 9: KPulse GUI
Keithley Pulse Application
Standard pulse waveforms

Figure 11: Standard pulse operation settings

Keithley Pulse Application
Start, stop, and time restrictions:
Segment Arb waveforms
 The start level of the first segment and

the stop level of the last segment must

be the same.

 The stop level for a segment must be

the same as the start level for the next

segment.

 Time values are in 10 ns increments,

with a minimum of 20 ns
Figure 12: Segment Arb waveform settings
Keithley Pulse Application
Exporting Segment Arb waveform files
1. Select Tools.
2. Select Export Segment Arb to open the Segment Arb Export dialog box.
3. Select the pulse card and channel for the waveform to be exported.
4. Select ....
5. Locate the target folder.
6. Type a name for the file. The .ksf extension is added automatically.
7. Select Open.
8. Select Export

Figure 13: Segment Arb Export dialog box

Keithley Pulse Application
Custom file arb waveforms

Step2
Step1
Step3 Step5
Step4

Figure 14: Basic process to create and output custom file Arb waveforms
 Keithley Pulse Application
Operation: Select and configure waveforms
Steps:

1. Select the Arb Generator tab.

2. Select New Waveform.

3. Select the Waveform Type

4. Configure the Settings.

5. Update the waveform.

6. Type in name for the waveform.

7. Select OK to create the

Figure 15: Select and configure waveforms
 Keithley Pulse Application
Operation: Copy waveforms into Sequencer
Steps:

1. Select the Arb Generator tab.

2. Select Scratch Pad.

3. Select the scale.

4. Select a waveform to be copied.

5. Select Channel

6. Set the Time per Point.

7. Save the waveforms as a Keithley

Figure 16: Load waveform and turn on output
Arb File (.kaf).
 Keithley Pulse Application
Operation: Load waveform and turn on output
Steps:

1. Select a pulse card tab.

2. Select Custom File Arb.

3. Browse and load Waveform File.

4. Select a waveform to be copied.

5. Enable Channel.

6. Configure triggers and Channel.

Figure 17: Copy waveforms into Sequencer

 Keithley Pulse Application
Waveform types

Sine Square Triangle

Noise
Calculation Calculation Gaussian

Ramp
Ramp Sequences Custom
Figure 18: fundamental waveform types in Kpulse
谢谢！