Energy dispersive

x ray
spectroscopy
(EDS)
 CONTENT

• Introduction
• Principle
• Instrumentation
• Application
Introduction
 Principal
• The incident beam may excite an electron in an
inner shell, ejecting it from the shell while creating
an electron hole where the electron was.

• characteristic X-rays primary e- beam An electron

from an outer, higher-energy shell then fills the hole,
and the difference in energy between the higher-
energy shell and the lower energy shell may be
released in the form of an X-ray.

• The number and energy of the X-rays emitted from a

specimen can be measured by an energy-dispersive
spectrometer.Incident Electrons Beam.
Instrumentation
EDS instrument is mainly composed of four components:

Electron beam source

X-ray Detector
 Analyzer
Pulse Processor
 The detector is used to record
both:
•Energy of X-ray photons
•Number of X-ray photons at a
given energy
Working
How It Works?
Brief Description of Components
Electron beam source

1) As like EDS and SEM Electron gun is used as the incident Electron
source and to focus the beam lenses are used along with aperture
2) The energy of the Electron beam has to be carefully selected to
overcome the compromise between the resolution requirements
and the production of X rays
3) Produced X rays are detected by two crystal spectrophotometers
X-ray Detector:
1. The X-rays counts (which is the abundance of emitted
X-rays) versus X-rays energies are measured by the EDS
detector.
2. Detector is a solid state device which is based on
lithium drifted silicon.
3. As X-rays strike the surface of the detector, a charge
pulse is created.
4. This charge pulse is directly proportional to theenergy
of the incident X-ray.
Pulse Processor:

1. A charge sensitive preamplifier is employed to convert charge

pulse to a voltage pulse.
Analyzer
1. Multichannel Analyzer used to collect the data from the pulse
processor and displays it as a Histogram of intensity (ie. Number
of counts) V/S voltage.
 The detection of X-rays takes place in the intrinsic layer in the middle
of the detector.

 An X-ray ejects a photoelectron in the Si which loses its energy by

promoting electrons from the valence band to the conduction band
forming electron-hole pairs.

 A reverse bias of 500 to 1000 volts is used to ensure that most of the
electron-hole pairs are collected.
 It is not possible to make silicon pure enough to be intrinsic - it usually
contains acceptor impurities and thus acts as a p-type semiconductor.

 The acceptor sites are thus “filled” with Li, and the Si is then called
“lithium drifted silicon” or Si(Li).

 These electron-hole pairs are counted by an amplifier, resulting in a pulse

whose height is proportional to the X-ray energy.

 The signal needs to be amplified by a factor of about 10^10.

 The pulses are counted as a function of energy and displayed on a

computer.
 Application

 Study of microorganism like bacteria viruses and pathogen have

made of the treatment disease very effective
 Use to study the topography of element used in industries
 Used to analysis of lead base paint
 Agriculture - trace metal analysis in soil and agriculture product
 Quantitative and qualitative analysis of surface
Thank you