MEPE22 - MEMS Design

and Fabrication
Radio Frequency MEMS Switch

BY
Kishore Manikandan (111122059)
Arjun G (111122015)
ILAMARAN R(111122047)
The Various Parameters involved in RF Technology

Balancing between the following factors is crucial in optimising and

selecting the most suitable RF technology for each application.

Cost : varied initial and operational costs.

Frequency : unique operational frequency range.
Lifetime: Operational lifespan varies and in turn maintenance
Power Consumption: Energy efficiency varies.
Integration: Some technologies are easier to integrate into larger systems.
Power Handling: Ability to handle power levels differs.
Reliability: Reliability under different conditions varies.
Ruggedness: Some technologies are more resilient.
What are RF MEMS?
● A radio-frequency microelectromechanical system (RF MEMS)
is a microelectromechanical system with electronic
components comprising moving sub-millimeter-sized parts
that provide radio-frequency (RF) functionality.

● RF functionality can be implemented using a variety of RF

technologies.
Applications of RF MEMS
The RF MEMS satisfy many functions in high-value military phased array and satellite to
mass applications like mobile phones and consumer electronics, including telecom
infrastructure, RF test equipment, and automotive radar and antennas.

Wireless Communications: RF signal routing and switching.

Radar and Defense Systems: Phased-array antennas,radar and communication systems.

Healthcare Devices: Monitoring vital signs, detecting biomarkers, MRI machines.

Automotive Industry: Adv. driver-assistance(ADA), vehicle-to-everything(V2X) communication.

SpaceCraft Exploration: environmental monitoring, spacecraft health diagnostics.

 RF MEMS Switch
● RF MEMS Switch is one of various types of RF MEMS components available.

● They can be used instead of FET and HEMT switches (FET and HEMT
transistors in common gate configuration), and PIN diodes.

● RF MEMS switches, switched capacitors and varactors are classified by

○ actuation method (electrostatic, electrothermal, magnetostatic,

piezoelectric)
○ axis of deflection (lateral, vertical)
○ circuit configuration (series, shunt)
○ clamp configuration (cantilever, fixed-fixed beam)
○ contact interface (capacitive, ohmic)
Sample RF MEMS Switch Designs
Working Principle of RF MEMS Switch

● From an electromechanical perspective, the components behave like a

damped mass-spring system, actuated by an electrostatic force.

● The spring constant is a function of the dimensions of the beam, as well as

the Young's modulus, the residual stress and the Poisson ratio of the beam
material.

● The electrostatic force is a function of the capacitance and the bias voltage.

● Knowledge of the spring constant allows for hand calculation of the pull-in
voltage, which is the bias voltage necessary to pull-in the beam, whereas
knowledge of the spring constant and the mass allows for hand calculation of
the switching time.
Advantages of using RF MEMS
● High Speed Switching: RF MEMS devices can switch at very high speeds,
enabling rapid on/off transitions. This high-speed switching capability is
advantageous in applications that require fast response times, such as in high-
frequency communication systems.

● Low Insertion Loss and High Isolation: RF MEMS switches typically exhibit
low insertion loss and high isolation, leading to improved signal quality and
reduced signal degradation in communication systems.

● Frequency Agility: RF MEMS devices can be designed to operate across a

broad range of frequencies. This frequency agility is valuable in applications
where the operating frequency needs to be adjusted or tuned dynamically.

● High-Quality Factor (Q-factor): RF MEMS resonators can have a high Q-

factor, contributing to better frequency selectivity and stability in filters and
oscillators.
Disadvantages of using RF MEMS
● Reliability Concerns: RF MEMS devices may face reliability issues due to factors like
stiction, wear and tear, or mechanical failure over time. The long-term stability and
durability of these devices can be challenging to achieve
● Limited Switching Lifetime: The switching lifetime of some RF MEMS switches may
be limited compared to other technologies like semiconductor-based switches. This
limitation can impact the overall reliability and lifespan of the devices, especially in
applications with frequent switching requirements.

● Integration Challenges: Integration with existing electronic systems, especially

those based on traditional semiconductor technologies like CMOS, can be
challenging. Ensuring compatibility and reliable integration can require additional
design considerations and engineering efforts.

● Fabrication Complexity: The fabrication process for RF MEMS devices can be

complex and may involve multiple intricate steps. This complexity can increase
manufacturing costs and potentially limit the scalability of production.
References
● https://en.wikipedia.org/wiki/Radio-frequency_microelectromechanical_system

● https://resources.pcb.cadence.com/blog/2023-rf-mems-micro-electro-mechanical-systems-i
ntroduction

● https://www.sciencedirect.com/science/article/pii/S0026269223002045

● https://www.sciencedirect.com/science/article/pii/S2352484722018832