Novel Powder-based Physical Vapor

Deposition (PPVD) Magnetron Sputtering

Patent No. : PI 2014704070
INTRODUCTION

Magnetron sputtering technique is the most favourable technique to deposit nano-

scale and nano-structured thin films

High energy gas particles bombard the material surface causing atoms to be
dislodged and deposited on surface of bulk material
Magnetron sputtering deposition process
Idea of PPVD spurs out due to limitation of conventional PVD system that can
only deposit solid material, difficulty in depositing materials of ferromagnetic,
and consume high energy and time in one cycle of production INVENTION
Special magnetron set up that captures and entraps electrons for better
ionizations and high plasma density

Liquid nitrogen trap in the PPVD system fastens the evacuation process, and thus
consumes less time and energy.

MARKET ANALYSIS

PVD market attractiveness by industry segment, 2016–2024

(Source: Transparency Market
PVD demands based on country Research (TMR))
(Source: Transparency Market Research (TMR) )

Arrangement of magnetron inside the chamber Machine in use. Magnetron assembly

USER FRIENDLY PRODUCTIVITY COST EFFECTIVE EASE OF MAINTAINENCE

Easy operation Machine can sustain up to 5 Consume less time for Simple maintenance
cycles per day. chamber evacuation

FLEXIBLE
REPRODUCIBLE ENERGY EFFICIENCY GREEN TECHNOLOGY CUSTOMIZATION
Controlled high quality of Save 60% energy per run Free from toxic or gas Customized for
PVD market analysis by application (Microelectronics, Data storage, Solar Products, Cutting tools, Medical Equipment) and Segment thin films compared to conventional pollutant magnetrons, power
Forecast to 2024. PVD supply and chamber size.
Note: Compound Growth Annual Rate(CGAR). (Source: www.grandviewresearch.com )

AWARD & RECOGNITION

*Published and presented in International

Conference Knowledge Transfe

Market events and activities related to PPVD Visit from MPRC (Malaysian Petroleum
Resource Corporation) NGL Tech.

*Awards: UM 2015 Social Engagement

Project Leader: Project Members: Contact: Award (category: Knowledge Transfer
PROF. DATIN IR. DR. BUSHROA Project Industry).
CENTRE OF ADVANCED MANUFACTURING &
BINTI ABDUL RAZAK 1. Dr Mahmoud Zakaria Al Sayed AlFatah MATERIAL PROCESSING (AMMP),
2. Soon Wee Teck DEPARTMENT OF MECHANICAL ENGINEERING,
Photo 3. Taium Tasneem Azmi UNIVERSITY OF MALAYA,
(Project Leader) Acknowledgement: 4. NurAthirah binti M Sukrey 50603 KUALA LUMPUR, *PECIPTA ‘17 (bronze award)
Funded by 5. Prof Datuk Ir . Dr. Mohd Hamdi Abd
KTP grant no. : KT008-2013 Shukor
MALAYSIA.
*PECIPTA ’19 (gold award)
TEL : 03 – 7967 5239/ 016 225 0871
UMRG grant no. : RP017-2012 6. Dr Reza Mahmoodian
7. Prof Kiyotaka Wasa FAX : 03 – 7967 5330
8. Umi Zhalilah Zaidi

ammp@um.edu.my