EXPERIMENT NO.

1
OBJECTIVE :- To Determine the electric field strength of a simple Dipole SOFTWARE USED :- COMSOL 4.3b THEORY :- An electric dipole is a separation of positive and negative charges. The
simplest example of this is a pair of electric charges of equal magnitude but opposite sign, separated by some (usually small) distance. Dipoles can be characterized by their dipole moment, a vector quantity. For the simple electric dipole given above, the electric dipole moment points from the negative charge towards the positive charge, and has a magnitude equal to the strength of each charge times the separation between the charges.

Geometry :

Materials : AIR

Electromagnetic wave, Frequency domain :

Mesh :

Parameter :
Electric Field Strength Expression used(emw.Ex+emw.Ey) Frequency parameter-

RESULT :-

EXPERIMENT NO. 2
OBJECTIVE :- To determine the displacement of cantilever SOFTWARE USED :- COMSOL 4.3b THEORY :- Cantilevered beams are the most ubiquitous structures in the field
of MEMS. MEMS cantilevers are commonly fabricated from silicon (Si), silicon nitride (Si3N4), or polymers. The principal advantage of MEMS cantilevers is their cheapness and ease of fabrication in large arrays. The challenge for their practical application lies in the square and cubic dependences of cantilever performance specifications on dimensions. These superlinear dependences mean that cantilevers are quite sensitive to variation in process parameters. Controlling residual stress can also be difficult. A cantilever is a beam anchored at only one end. The beam carries the load to the support where it is resisted by moment and stress. A Cantilever structure consists of greater length as compare to its width with optimal thickness. The movement of the cantilever is effected by its length, width, thickness and various properties of the material used to make the structure. The geometric shape, as well as the material used to build the cantilever determines the cantilever's stiffness.

Geometry :

Materials : SILICON

Free Constraint :

Fixed Constraint :

Mesh :

RESULT :For Eigen Frequency = 1.080422e5

EXPERIMENT NO. 3
OBJECTIVE :- To determine the displacement and analysis of harmonics of
Cantilever beam using different Eigen frequencies.

SOFTWARE USED :- COMSOL 4.3b THEORY :- Cantilevered beams are the most ubiquitous structures in the field
of MEMS. MEMS cantilevers are commonly fabricated from silicon (Si), silicon nitride (Si3N4), or polymers. The principal advantage of MEMS cantilevers is their cheapness and ease of fabrication in large arrays. The challenge for their practical application lies in the square and cubic dependences of cantilever performance specifications on dimensions. These superlinear dependences mean that cantilevers are quite sensitive to variation in process parameters. Controlling residual stress can also be difficult. A cantilever is a beam anchored at only one end. The beam carries the load to the support where it is resisted by moment and stress. A Cantilever structure consists of greater length as compare to its width with optimal thickness. The movement of the cantilever is effected by its length, width, thickness and various properties of the material used to make the structure. The geometric shape, as well as the material used to build the cantilever determines the cantilever's stiffness.

Geometry :

Materials : SILICON

Free Constraint :

Fixed Constraint :

Mesh :

RESULT :1) For Eigen Frequency = 1.080422e5

2) For Eigen Frequency = 6.06468e5

3) For Eigen Frequency = 1.88501e6

4) For Eigen Frequency = 3.678634e6

EXPERIMENT NO. 4
OBJECTIVE :- Determination of Velocity and Pressure of Leminar flow of liquid
through parallel plates.

SOFTWARE USED :- COMSOL 4.3b THEORY :- Consider steady, incompressible, laminar flow between two infinite
parallel horizontal plates as shown in the figure. The flow is in the x- direction, hence there is no velocity component in either the y- or z- direction (i.e., v = 0 and w = 0). The steady-state continuity equation becomes

Geometry :

Materials : WATER Inlet :

Outlet :

Mesh :

RESULT :-

Outlet:

Inlet:

EXPERIMENT NO. 5
OBJECTIVE :- Analyzing the Moving Boundary of geometry(Square) with respect
to time.

SOFTWARE USED :- COMSOL 4.3b THEORY :Geometry :

RESULT :-

MICRO ELECTRO MECHANICAL SYSTEMS LAB MANUAL

MASTER OF TECHNOLOGY In VLSI DESIGN

By: KARNIKA SHARMA

(01311805212)

Affiliated to

GGSIPU, Delhi , CDAC B-30, Sector 62, Noida 201307 {December ,2013}

MICRO ELECTRO MECHANICAL SYSTEMS LAB MANUAL

MASTER OF TECHNOLOGY In VLSI DESIGN

By: RAHUL BHATIA

(00311805212)

Affiliated to

GGSIPU, Delhi , CDAC B-30, Sector 62, Noida 201307 {December ,2013}

INDEX

S. No. 1

Experiment To Determine the electric field strength of a simple Dipole. To determine the displacement of cantilever.

Date

Signature

To determine the displacement and analysis of harmonics of Cantilever beam using different Eigen frequencies.

Determination of Velocity and Pressure of Leminar flow of liquid through parallel plates.

Analyzing the Moving Boundary of geometry(Square) with respect to time