MEMS : an Introduction

By : Tris Dewi Indraswati

MEMS
What are MEMS (microsystems)? What kinds of MEMS are there? How are MEMS made today? What are MEMSs application

What are MEMS ? [9]

3 Features of Micro Systems

Miniaturization is essential. Multiplicity is key to successful microsystem. Microelectronics is required to move microelements to cooperate with each other and to perform given task.

MEMS Feature
Miniaturization : micromachines (sensors and actuators) can handle microobjects and move freely in small spaces Multiplicity: cooperative work from many small micromachines may be best way to perform a large task inexpensive to make many machines in parallel Microelectronics: integrate microelectronic control devices with sensors and actuators

Components of MEMS [2]

Mechanical Sensors Thermal Sensors Radiation Sensors Magnetic Sensors etc
Electrostatic actuators Magnetic actuators Piezoelectric actuators Hydraulic actuators Thermal actuators etc

Driver circuits

Signal Condition
Signal Processing Signal Transmission Control System

Micromirror Microvalve Microfluidic Other mechanical

elements

What kinds of MEMS are there?

Micro-Machining

Bulk Surface Micro-Machining Micro-Machining

Wafer Bonding

LIGA

Micro-Molding

SURFACE MICROMACHINING
Layers of structural and sacrificial material are deposited and patterned

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BULK/SURFACE MICROMACHINING

Wet Etching

Dry Etching

Process of removing substrate itself

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Wet Etching
All it requires is a container with a liquid solution that will dissolve the material in question

Difference between isotropic and anisotropic etching

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DRY ETCHING

Reactive ion Etching Sputter etching Vapour phase etching

Ions are accelerated towards, and react at the surface of material being etched

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MICRO-MOLDING
To transfer microscopic shapes fabricated earlier (i) Mass Production
(Sacrificial Layer)

(ii) Used for various material including Si

(Structural Layer)

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How are MEMS made today?

Photolithography Overview for MEMS

MEMS Application