Mems Unit 1

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MEMS and Its Applications
Dr.R.RAMAN
Associate Professor
Department of Electronics and Communication Engineering
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Course Outcomes
At the end of the Course, Student will be able to:
CO 1 : To introduce the basic concepts of micro systems and advantages of
miniaturization
CO 2 : To study the various materials and their properties used for micromachining
techniques.
CO 3 : To analyze the fundamentals of micromachining and micro fabrication
techniques.
CO 4 : To impart knowledge of the basic concept of electromechanical effects, thermal
effects Micro fluidics and Integrated fluidic systems.
CO 5 : To study the fundamentals of pressure sensors and accelerometer sensors
through design and modeling
CO 6 :
MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

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Course Contents
UNIT I : Overview of MEMS and Microsystems

UNIT II : Working Principles of Microsystems
UNIT III: Scaling Laws in Miniaturization
UNIT IV: Micro system Fabrication Process
UNIT V : Applications of MEMS-Switching

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Prerequisite
Integrated
Circuits
MEMS And Its

Applications

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Text Books
1. Tai-Ran Hsu, “MEMS and Microsystems: Design and

Manufacture”, Tata McGraw Hill, (2002)
2. Gabriel M. Rebeiz, “RF MEMS Theory, Design and

Technology”, Wiley India PvtLtd.

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Unit : I Overview of MEMS and Microsystems

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Overview of MEMS and Microsystems

(UNIT-I)
Dr.R.RAMAN
Associate Professor
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Unit-1 Outcomes
At the end of the Course, Student will be able to:
CO 1 : To introduce the basic concepts of micro systems and advantages of

miniaturization

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Contents
Overview of MEMS and Microsystems:
• MEMS and Microsystems,
• Typical MEMS and Microsystem products,
• Evolution of Microfabrication,
• Microsystem and Microelectronics,
• The Multidisciplinary nature of microsystem design and manufacture,
Microsystem and Miniaturization.
• Application of Microsystems in the automotive industry,
• Application of Microsystems in other industries: Health care industry,
Aerospace industry, Industrial products, Consumer products,
Telecommunications.
• Markets for Microsystems.
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MEMS and Microsystems

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MEMS and Microsystems
Dr.R.RAMAN
Associate Professor
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Learning Outcomes
At the end of this lecture, Student will be able to:
LO 1 : To introduce the basic concepts of micro systems

and advantages of miniaturization

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MEMS & MICROSYSTEMS

Micro ElectroMechanical System (MEMS)
Micro : Small size, Micro fabricated structure

Electro : Electrical signal /control
Mechanical : Mechanical functionality
Systems : Structure , Device ,Systems
(1Micrometer (µm) to 1 millimeter (mm) )
MEMS Technology is a precision device technology that integrates mechanical elements, sensors,
actuators and electronics on a common silicon substrate through micro fabrication technology.

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The Core element in MEMS Consists of two important components

• Sensing or Actuating element
• A small transduction Unit
MEMS as Microsensor
Power Supply
Micro sensing Transduction

Input Signal Output Signal
Element Unit

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• Micro sensors are built to sense the existence and intensity of certain
physical, chemical or biological quantities such as temperature,
pressure, force, sound, light, nuclear radiation, magnetic flux &
chemical composition
• Micro sensors have the advantages of being sensitive and accurate with
minimal amount of required sample substance.
• They can also be mass produced in batches with large volumes.

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• Micro sensors are the most widely used mems devices today.
• Micro sensors are used to measure many physical quantities based on
their principal applications.
1. Acoustic wave sensors

2. Biomedical Sensors and Bio Sensors
3. Chemical Sensors
4. Optical Sensors
5. Pressure Sensors
6. Thermal Sensors

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ACOUSTIC WAVE SENSORS
• The principal application of an acoustic wave sensor is to measure

chemical composition in a gas.
• These sensors generate acoustic waves by converting mechanical
energy into electrical.
• Actuation energy for this type of sensor is provided by two principal
mechanism : piezoelectric and magnetostrictive.

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Biomedical Sensors and Bio Sensors

Major technical issues involved in the application of MEMS in biomedicine are
• Functionality for biomedical operations
• Adaptivity to existing instruments and equipment.
• Compatibility with biological system of patients
• Controllability, mobility and easy navigation for operations such as those
required in a laparoscopy surgery
• Fabrication of mems structures with high aspect ration defined as the ratio of
the dimensions in the depth of the structure to the dimension of the surface.
There are two types of sensors used in biomedicine
1. Biomedical sensors and
2. biosensors
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Biomedical sensors
• Biomedical sensors can be classified as biomedical instruments that are
used to measure biological substances as well as for medical diagnosis
purpose.
• These sensors can analyse biological samples in a quick and accurate
ways.
• They require typically minute amount of samples and can perform
analyses much faster with virtually no dead volume.
• Ex. Electrochemical sensor

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• That certain biological substances, such as glucose in human blood can
release certain elements by chemical reaction.
• A small sample of blood is introduced to a sensor with polyvinyl alcohol
solution. Two electrodes present in the sensor : a platinum film electrode
and a thin Ag/AgCl.
• Glucose +O2 gluconolactone + H2O2
• The H2O2 produced by this chemical reaction is electrolyzed by applying a
potential to the platinum electrode, with a production of positive hydrogen
ions, which flow towards this electrode.

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Biosensors
• Biosensors work on the principle of interaction of the analytes that need

to the detected with biologically derived biomolecules, such as enzyme,
antibodies and other form of protein.
• The biomolecules when attached to the sensing element can alter the
output signals of the sensor when they interact with analytes.

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Piezoelectric Sensor
• The sensor which works on piezoelectric effect are called piezoelectric
sensor.
• Piezoelectric Effect is the ability of certain materials to generate an electric
charge in response to applied mechanical stress.
• The word Piezoelectric is derived from the Greek piezein, which means to
squeeze or press, and piezo, which is Greek for “push”.
• One of the unique characteristics of the piezoelectric effect is that it is
reversible.
There are two types of Piezoelectric effects
1. Direct piezoelectric effect
2. Inverse piezoelectric effect

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Direct piezoelectric effect
• Piezo ceramic material are non-conductive and is placed between the
two metal plates.
• For piezoelectricity to be generated, it needs that material to be
compressed or squeezed.
• Mechanical stress applied to piezoelectric ceramic material generates
electricity.

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Inverse piezoelectric effect
Reversal of the piezoelectric effect, called the inverse piezoelectric effect, is
when voltage is applied to shrink or expand a piezoelectric crystal.
Piezoelectric materials:
• PZT (also known as lead zirconate titanate), barium titanate, and lithium
niobate.
• These man-made materials have a more pronounced effect (better
material to use) than quartz and other natural piezoelectric materials.

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Microactuators
An actuator is a component of a machine that is responsible for moving
and controlling a mechanism or system, for example by opening a valve.
In simple terms, it is a "mover".
• An actuator requires a control signal and a source of energy.
• The control signal is relatively low energy and may be electric voltage
or current, pneumatic, or hydraulic fluid pressure, or even human power.
• Its main energy source may be an electric current, hydraulic pressure, or
pneumatic pressure.
• When it receives a control signal, an actuator responds by converting the
source's energy into mechanical motion.

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Microactuators
Power Supply
Micro sensing Transduction

Output Signal
Element Unit

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TYPES OF ACTUATOR
Thermal
• Thermal actuators are simply devices used to transform energy into
motion.
• A thermal actuator is a type of non-electric motor made of components
such as a piston and a thermal sensitive material capable of producing
linear motion in response to temperature changes.
Example – Bimetallic Strip

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Shape memory alloy
A shape-memory alloy is an alloy that can be deformed when cold but
returns to its pre-deformed ("remembered") shape when heated.
• It may also be called memory metal, memory alloy, smart metal.
• Shape-memory alloys have different shape-memory effects. Two
common effects are a one-way and two-way shape memory.

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Piezoelectric
Piezoelectric actuators are transducers that convert electrical energy into
a mechanical displacement or stress based on a piezoelectric effect, or
vice versa.

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Electrostatic
• Electrostatic actuators rely on the force between two conducting
electrodes when a voltage is applied between them.
• Depending on the arrangement of the electrodes, various types of
actuators are possible.
• However, whatever the electrode arrangement, if there exists mutual
capacitance, there will also be an attractive force when a voltage is
applied between the electrodes.
• This force will nearly always be attractive

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Microsystems Power
Supply
• It is an Engineering that contains MEMS components that are
designed to perform specific Engineering functions
• Microsystems are typically in “Mesoscale” Signal
Transduction
[ Scale between micro and macro scale ] and
• Most microsystems are designed and constructed to perform single Processing
Unit
functions
• There is a clear trend in the industry to incorporate signal
Actuator
processing and closed-loop feedback control systems in a Sensor
microsystem to make the integrated system “intelligent”
Microsystems
Fig.: Components of a Microsystem

Fig.: Package on a single chip Aditya
Input:
Sensing and/or
Desired Transduction
Actuating
Measureme Unit
element
nt (or) Signal conditions
Functions And Processor
MEMS
Controller Actuator
Output
Measurem
Signal Processor ent
(Or)
Actions
Comparator Measurements

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TYPICAL MEMS AND MICROSYSTEM PRODUCTS

MICROGEARS
• Microgears are key elements in microdrive systems.
• They allow to reduce the speed and enhance the torque of miniature
electromagnetic motors, which deliver typical output torques of several micro
Newton meters at speeds up to 50 000 rpm.
• Only when combined with a gearbox the motors become applicable for many
applications in microrobotics and automatization.

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Components are in micrometers with complex

geometry using silicon, si-compounds and polymers:
25 m
Fig.: A micro gear-train by Sandia National

Laboratories

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MICROMOTORS
• MEMS micromotors are real rotational actuators characterized by their

millimeter to submillimeter dimensions, fabrication compatibility with
standard micro machining techniques, and their intended role in micro-
scale devices

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MICROVALVE
• A microvalve is microscale valve, i.e. a microfluidic two-port component that regulates the flow
between two fluidic ports.
• Microvalves are basic components in microfluidic devices, such as Labs-on-a-chip, where they
are used to control the fluidic transport.
• Microvalves found today can be roughly categorized as active microvalves and passive
microvalves.
• Based on the medium they control, microvalves can be divided into gas microvalves and liquid
microvalves.
• Based on their initial mode, microvalves can be divided into normally open, normally closed
and bistable microvalve
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Active mechanical microvalves consist of mechanically movable

membrane or boss structure, coupled to an actuation method, that can
close of an orifice, thus blocking the flow path between the inlet and
outlet ports.
The actuator can either be an integrated magnetic, electrostatic,

piezoelectric or thermal micro actuator.

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Passive microvalves are valves for which the operational state, i.e. open or
close, is determined by the fluid they control.
Most common passive microvalves are flap valves, membrane microvalves

and ball microvalves.

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MICRO PUMPS
• Micro pumps are devices that can control and manipulate small fluid
volumes.
• Although any kind of small pump is often referred to as micro pump, a more
accurate definition restricts this term to pumps with functional dimensions
in the micrometre range.

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MICROTURBINES
• A Microturbine was produced to generate power
• As shown in figure the turbine is made of Nickle
• The rotor has a diameter of 130µm.
• A 5µm gap is provided between the axle and the rotor
• The turbine has a height of 150µm
• The entire unit is made of Nickle
• The maximum rotational speed reaches 150000 revolutions per minute (rpm) with a life time
up to 100 million rotations

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MICRO OPTICAL COMPONENTS Aditya
• These Components are extensively used for high speed signal transmission in the telecommunication
industry
• A micro optical switch made by a silicon based manufacturing process is shown in figure.
• These switches are used to regulate incident light from optical fiber to appropriate receiving optical fibers.
• PMMA micro lenses made of transparent polymers PMMA
• Each lens has a diameter of 150µm
• These arrays of lenses are combined into micro objectives for endoscopy with an optical resolution down
to 3µm.
• These lenses can be used for copiers, lasers, scanners and printers
• At the right is a combination of micro-objective for neurosurgery.

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Inertia Sensor for “Air Bag” Deployment System
(Courtesy of Analog Devices, Inc.)

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Inertia Sensor for Automobile “Air Bag” Deployment System

Micro inertia sensor (accelerometer) in place:
Sensor-on-a-chip:
(the size of a
rice grain)
Collision
(Courtesy of Analog Devices, Inc)

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EVOLUTION OF MICROFABRICATION
●There is no machine tool with today’s technology can produce any

device or MEMS component of the size in the micrometer scale (or in
mm sizes).
●The complex geometry of these minute MEMS components can only

be produced by various physical-chemical processes – the
microfabrication techniques originally developed for producing
integrated circuit (IC) components.

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•Significant technological development towards miniaturization was initiated with the

invention of transistors by three Nobel Laureates, W. Schockley, J. Bardeen and W.H.
Brattain of Bell Laboratories in 1947.
•This crucial invention led to the development of the concept of integrated circuits (IC)
in 1955, and the production of the first IC three years later by Jack Kilby of Texas
Instruments.
•ICs have made possible for miniaturization of many devices and engineering
systems in the last 50 years.
•The invention of transistors is thus regarded as the beginning of the 3rd

Industrial Revolution in human civilization.

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• 1950’s – Silicon Strain Guage commercially available

• 1960’s – first silicon pressure sensor demonstrated, invention of surface
micromachining
• 1970’s – first silicon accelerometer demonstrated, micromachined inkjet
nozzle
• 1980’s – first experiments in surface micromachined silicon, disposable
blood pressure transducer, silicon as a mechanical material, LIGA
Process
• 1990’s – first micrmachined hinge, deep reactive ion etching is patented,
biomems rapid development
• 2000’s - MEMS optical-networking components become big business

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COMPARISON OF MICROELECTRONICS AND MICROSYSTEMS
Microelectronics Microsystems (silicon based)
Primarily 2-dimensional structures Complex 3-dimensional structure

Stationary structures May involve moving components
Transmit electricity for specific electrical functions Perform a great variety of specific biological, chemical,
electromechanical and optical functions
IC die is protected from contacting media Delicate components are interfaced with working media
Use single crystal silicon dies, silicon compounds, Use single crystal silicon dies and few other materials,
ceramics and plastic materials e.g. GaAs, quartz, polymers, ceramics and metals
Fewer components to be assembled Many more components to be assembled

Mature IC design methodologies Lack of engineering design methodology and standards
Complex patterns with high density of electrical circuitry Simpler patterns over substrates with simpler electrical circuitry
over substrates
Large number of electrical feed-through and leads Fewer electrical feed-through and leads

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Industrial standards available No industrial standard to follow in design, material

selections, fabrication processes and packaging
Mass production Batch production, or on customer-need basis
Fabrication techniques are proven and well Many microfabrication techniques are used for
documented production, but with no standard procedures
Manufacturing techniques are proven and well Distinct manufacturing techniques

documented
Packaging technology is relatively well established Packaging technology is at the infant stage
Primarily involves electrical and chemical Involves all disciplines of science and engineering
engineering

The Multi-disciplinary Nature of Microsystems Engineering Aditya
Natural Science:
Physics & Biochemistry
Electrochemical Quantum physics

Material
Processes Solid-state physics
Science
Scaling laws
Mechanical Engineering
 Machine components design
Electrical Engineering  Precision machine design Materials Engineering
 Power supply  Mechanisms & linkages  Materials for substrates
 Electric systems for  Thermomechanicas: & package
electrohydro- (solid & fluid mechanics, heat  Materials for signal
dynamics and transfer, fracture mapping and transduction
signal transduction mechanics)  Materials for fabrication
 Electric circuit  Intelligent control processes
design  Micro process equipment
 Integration of design and manufacturing
MEMS and CMOS  Packaging and assembly
design
Chemical Engineering
 Micro fabrication Industrial Engineering
processes  Process design
 Thin film  Production control
MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE
Micro assembly
technology
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APPLICATION OF MICROSYSTEMS IN THE AUTOMOTIVE

INDUSTRY

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MEMS And Its Applications

Dr. R. Raman, Associate Professor, ECE
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Summary
At the end of this module you will be able to introduce the basic
concepts of micro systems and advantages of miniaturization

Mems Unit 1

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ADITYA

MEMS and Its Applications

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

UNIT I : Overview of MEMS and Microsystems

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

MEMS And Its

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

1. Tai-Ran Hsu, “MEMS and Microsystems: Design and

2. Gabriel M. Rebeiz, “RF MEMS Theory, Design and

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

Unit : I Overview of MEMS and Microsystems

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

Overview of MEMS and Microsystems

CO 1 : To introduce the basic concepts of micro systems and advantages of

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

MEMS and Microsystems

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

MEMS and Microsystems

At the end of this lecture, Student will be able to:

LO 1 : To introduce the basic concepts of micro systems

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

MEMS & MICROSYSTEMS

Micro : Small size, Micro fabricated structure

(1Micrometer (µm) to 1 millimeter (mm) )

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

The Core element in MEMS Consists of two important components

Micro sensing Transduction

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

• They can also be mass produced in batches with large volumes.

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

1. Acoustic wave sensors

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

ACOUSTIC WAVE SENSORS

• The principal application of an acoustic wave sensor is to measure

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

Biomedical Sensors and Bio Sensors

• Ex. Electrochemical sensor

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

• Biosensors work on the principle of interaction of the analytes that need

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

Micro sensing Transduction

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

microsystem to make the integrated system “intelligent”

Fig.: Components of a Microsystem

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

TYPICAL MEMS AND MICROSYSTEM PRODUCTS

• Microgears are key elements in microdrive systems.

MEMS And Its Applications Dr. R. Raman, Associate Professor, ECE

Components are in micrometers with complex

Fig.: A micro gear-train by Sandia National