MEMS Sensors

23rd October 2022

Engineeri BY: AIMAL KHIAM

ng SUPERVISOR:
Faculty,
Dr. MOHIBULLAH WALI
Kabul
Universit
y
 Agenda points
1. What are MEMS?
2. MEMS Sensors
3. WHAT MEMS Sensors do?
4. Advantages
5. MEMS Working Principles
6. MEMS Application
7. Summary
8. Reference
 What are MEMS?

• Micro-electro-mechanical systems
• In United States, the technology is known as
microelectromechanical systems (MEMS)
• In Europe, it is called microsystems technology (MST)
• Miniaturized mechanical and-
electro-mechanical elements Bamyan
• Milli, micro and nanosize components
• Having some sort of mechanical functionality
• Convert a measured mechanical signal-
into an electrical signal
• interdisciplinary devices for their diverse use;
• automotive, medical, electronic, communication, and
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defense applications

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 MEMS Sensors
• MEMS sensors are at the very core of a MEMS device or system.
• Measure the mechanical, thermal, magnetic, chemical, or electromagnetic information;
• A microsensor detects changes in the system’s environment;
• An ‘intelligent’ part processes the information detected by
the sensor and makes a decision in the form of a signal;
• A microactuator acts on this signal to create some form of
changes in the environment.
• Multisensing applications in conjunction with other sensors. Bamyan
For instance, measuring the flow rate of a liquid sample and,
in the meantime, identify any pollutants within the sample.

And good MEMS Sensors

 Precision: same output for same input
 Resolution: detect small changes Paktya
 Accuracy: precision + resolution + calibration.

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 What MEMS do?

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Engineeri Paktya
ng
Faculty,

Kabul
University 5
 Advantages
• Interdisciplinary nature in terms of technology
• Micromachining techniques
• Diversity of application
• Outstanding advent of new devices, especially in biology and microelectronics.
• Minuscule size, volume, light weight, and suitable cost. Bamyan

• Suitable and friendly method of production than integrated circuits.

• Have an IP67 seal, withstand some intense temperatures ranging from 40º to +85ºC

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 Working Principles
• MEMS is a chip-based technology where sensors are composed of a suspended mass between a pair of
capacitive plates. 

• When the sensor is tilted, a difference in electrical potential is created by this suspended mass.

• The created difference is then measured as a change in capacitance.

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MEMS Sensors Application

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 Smartphones and MEMS
MEMS Sensors are used in several applications to illustrate the range, diversity, and utility.

Smartphones can do much of what they do

because of the various MEMS sensors built into
them.
• Proximity( when objects closes)
• Accelerometer(Rotation & Game)
• Gyroscope (3-axis directions & twisting) Bamyan
• Orientation (measure the surface level)
• Ambient Light (measure the flux of env. & controls the
brightness & darkness)
• Magnetic sensor(measure the magnetic field)
• Campus (north, south & helps GPS)
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• Humidity (measure moisture & turns off)
• Sound( measure the sound while talking)

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 Summary
The automotive industry was one of the first industries to embrace the use of MEMS.
Since then, MEMS have found applications in wireless communications, biomedical,
aerospace, and consumer products (to name a few).
The potential uses for MEMS are endless.

Bamyan

Engineeri
ng Paktya
Faculty,

Kabul
Universit
10
y
 Refrerences
[1] De Silva, Clarence W. Sensors and actuators: control system instrumentation. CRC Press, 2007.
[2] De Silva, Clarence W. Sensors and actuators: Engineering system instrumentation. CRC press, 2015.
[3] Mishra, Manish Kumar, et al. "MEMS technology: A review." J. Eng. Res. Rep 4.1 (2019): 1-24.
[4] Antonsson, Erik K. "Structured design methods for MEMS final report." A Workshop sponsored by the
National Science Foundation. 1995.
[5] Gad-el-Hak, Mohamed, ed. The MEMS handbook. CRC press, 2001.
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Ideas, thoughts for the way forward