Biz-Ocean Column June, 2015

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 48 3D NAND

3D NAND 32 48

3D NAND 15 32 48 . 15
, , , , SK . 3D
NAND SSD .
48 3D NAND .
2D NAND .

3D NAND 48 . 3D NAND 48
Stack 50% 20% 32
30% . 3D NAND 48 MLC(Multi Level Cell) TLC(Triple
Level Cell) 32 50%
.

1. 3D NAND

2. 2. 3D NAND 32 vs. 48

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 3D NAND SSD(Solid State Disk)
. 3D NAND 2016~ 2017
3D NAND . 3D FinFET AP
32bit 64bit
.

3D NAND 48 : + +

3D NAND 32 48 . ,
. 32 50% .

. 48 Uniformity () PE CVD
.

. 48 Hole
Hole . Dry Etching Wet Etching
. Dry Etching Wet Etching
.

, Staircase . 32 50%
. KrF
.

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3. 3D NAND 32 48

PE CVD

3D NAND CVD . 48
. 3D NAND 3
, . 3D
NAND 30nm 20nm 10nm
.

4. 3D NAND : CVD + Etch

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5. 3D NAND : CVD + Etch

ALD(Atomic Layer Deposition)

48 ALD(Atomic Layer Deposition) . 3D

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NAND ALD Dry Etching Hole TANOS SONOS
Hole Deposition .
PE CVD , LP CVD
ALD Hole .

6. 3D NAND : ALD ALE

7. 3D NAND :

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NAND 3D

3 NAND . NAND Logic 3D NAND

FinFET 3 . DRAM 3D DRAM
. NAND DRAM
.

NAND 1Tr . DRAM 1Tr 1C 3 .

NAND DRAM Source, Gate, Drain Tr .
NAND Tr Tr Data . Tr
Control Gate Floating Gate Floating Gate Data .
Tr Data 3 .

DRAM 1Tr Capacitor 3 . DRAM

Tr Gate Data Capacitor .
Cell , Capacitor .
Aspect Ratio DRAM Capacitor (828m)
. 3 Capacitor
.

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 DRAM Capacitor , Capacitor
. 3
. Capacitor 1T DRAM
.

8. DRAM vs. NAND

1T DRAM

DRAM 3 1T DRAM SOI (Silicon On Insulator) . 1T

DRAM Capacitor Impact Ionization
.

1T DRAM Drain 1 0 . 1T DRAM

. Buried Oxide
.
.

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9. 1T DRAM

10. 1T DRAM

During Writing 1 VG=0.6V, VS=0V, VD=2V

Holes generated by Hole Flux due to Impact

Impact Ionization Ionization:
At high VD(2V) Positive charge in the body

3D NAND CTF

3D NAND Floating Gate CTF(Charge Trap Flash)

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 Floating Gate . 3D NAND ONO
CTF . Floating Gate
CTF .

3D NAND CTF 2D NAND Floating Gate . 3D NAND CTF

Floating Gate . CTF TANOS SONOS
. TANOS TaN Al2O3, Si3N4 SiO2, Si
. SONOS Silicon, SiO2, Si3N4, SiO2, Si .
ALD .

11. 2D NAND vs 3D NAND

12. CTF (Charge Trap Flash) -TANOS

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3D NAND 48

3D NAND 48 2D NAND 16 . 32 2D
NAND 16 3D NAND
. 48 TLC 16nm .

NAND 16nm 3 . 16nm NAND

10nm . 20%
, 3D NAND 30% .
2D NAND 3D NAND .

13. 3D NAND vs. 2D NAND

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14. 3D NAND vs. 2D NAND

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 * NH .
[ .]

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286, 1312 ( 13 1312 )

TEL) 02-3281-0216
E-mail) info@biz-ocean.com

Homepage_Main & Seminar) www.biz-ocean.com

Homepage_Material & Component) www.biz-material.com

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