Vacuum Techniques :

Vacuum Techniques

Introduction :
Introduction The term vacuum refers to the condition of an enclosed space that is devoid of all gases
or other material content. It is not experimentally feasible to achieve a “perfect” vacuum, although
one can approach this condition extremely closely.

Common Pressure Units :

Common Pressure Units 1 Torr = 1 mm Hg at 0°C, standard gravity 1 atm = 760 Torr 1 micron = 1 mm
Hg = 10-3 Torr = 1m Torr

Mean free path :

Mean free path The mean free path ? is the average distance traveled by a gas molecule between
collisions with other molecules. Where d is the molecular diameter “T” temp in Kelvin, “P” pres. in
Torr,”k” Boltzman’s const.

Gas FlowImportance of mean free path :

Gas FlowImportance of mean free path Viscous flow mfp << size of system (D) gas - gas collisions
dominate molecules “drag” one another Intermediate flow (transition) mfp comparable to size of
system (D) complicated flow Molecular flow mfp >> size of system gas - wall collisions dominate
molecules move independently of one another

Vacuum measurements :
Vacuum measurements

Vacuum System Components :

Vacuum System Components

VACUUM PUMPS Rotary mech. pump :

VACUUM PUMPS Rotary mech. pump 1.Begin expansion cycle. 2. Seal off expanded volume
3.Compresses gas out exhaust

Safety considerations for a Rotary oil pump :

Safety considerations for a Rotary oil pump Trap vapors entering pump-(to prevent degradation of
pump oil and seals Do not pump on atmosphere-(the pump would over heat)

Diffusion pumps :
Diffusion pumps Principle of Operation -momentum transfer by vapor jet stream Individual molecules
are “pushed” toward exhaust by jet stream. Hence the pump works in the molecular flow regime
Applicable range 10-2 to 10-6 Torr

Safety consideration for a Diffusion pump :

Safety consideration for a Diffusion pump Rotary oil pump must be on to reduce the pressure to < 10-2
Torr(Otherwise hot oil would combust in presence of Oxygen) Diffusion pump must be cooled with
water or air(to prevent overheating) Vacuum line must be provided with a trap to prevent migration of
diffusion pump oil

Other Pumps :
Other Pumps Turbomolecular pump: Ultra-fast fan blades knock molecules out of vacuum system Cryo
pump: molecules are frozen out Sorption pump: molecules diffuse into absorbing material Sputter ion
pump: molecules are ionized and buried

Valves :
Valves High vacuum Valve The d.p. is connected to the coating chamber via a combined oil baffle and
isolation valve which permits the d.p. to be kept under vacuum at operating temp. when the coating
chamber is at atm. Pressure. Oil Vapor Baffle Valve The d.p. is adequately baffled against the direct
entry of oil vapor molecules into vacuum chamber Two Way Valve Air Admittance Valve

Cold Trap :
Cold Trap Purpose Prevents pump oil from contaminating vacuum system prevents organic solvents
from reaching pump acts as a pump by condensing molecules Principle of operation freeze out
contaminants

Pressure gauges :
Pressure gauges Barometer Uses the height of a column of mercury to measure ambient atmospheric
pressure Manometer Uses the height of a mercury column to measure system pressure relative to
ambient atmospheric pressure

Pressure gauges contd...Pirani gauge :

Pressure gauges contd...Pirani gauge Principle pressure dependence of thermal conductivity At higher
pressures , the temperature of the sensing wire decreases as the thermal conductivity of the gas
increases. Consequently the resistance of the wire decreases and the current thru the unbalanced
bridge indicates the change in pressure.

Pressure gauges contd...Ionization gauge :

Pressure gauges contd...Ionization gauge Principle of operation ionization of residual gas by a high
voltage which results in a current of charged particles

Vacuum pump oils/grease :

Vacuum pump oils/grease Rotary pump oil molecular distilled oil Properties: - lubricants - doesn’t mix
with water - highly resistant to corosive gases Help : - better yield - better pump life - good recovery

Oils and grease contd. :

Oils and grease contd. Diffusion pump oils sillicon fluids/poly phenyl-ether fluids (e.g. DC 702,704,705)
properties: - these silicon fluids are not oxidised by air at working temperatures - not hydrolised by
water vapor

Vacuum oils/grease contd. :

Vacuum oils/grease contd. Vacuum grease silicon grease use: - to lubricate seals and act as sealant
properties: - polymer based lubricant - paste material which doesn’t flow - consistency from -40 to 260
deg. C - used upto 10-8 torr - insoluble in water,methanol, ethanol, acetone etc.

Slide 21:
Boiler Foreline Valve R.P.Vent Valve Roughing Valve Air Vent Valve Water Cooled Diffusion Pump
H.V./Baffle Valve Base Plate Penning Gauge Pirani Gauge 2 A Typical Diffusion Pumped Deposition
System

Slide 22:
Boiler Water Cooled Diffusion Pump Vacuum Pumps Rotary Mechanical Pump

Slide 23:
Boiler Foreline Valve R.P.Vent Valve Roughing Valve Air Vent Valve H.V./Baffle Valve Base Plate Valves

Slide 24:
Boiler Penning Gauge Pirani Gauge 2 Vacuum Gauges Pirani Gauge 1

Slide 25:
WATER SUPPLY ON R.P. ON OPEN CLOSED CLOSED CLOSED Getting started

Slide 26:
WATER SUPPLY ON R.P. ON OPEN CLOSED CLOSED CLOSED BOILER ON Never let a hot D.P. See a high
or atm. pressure D.P. ON/Fore-line pumping
Slide 27:
R.P. ON BOILER ON D.P. ON CLOSED CLOSED OPEN CLOSED CLOSED BELL JAR CLOSED WATER SUPPLY
ON Rough Pumping the chamber

Slide 28:
WATER SUPPLY ON R.P. ON OPEN CLOSED CLOSED OPEN BOILER ON Pumping to High Vacuum

References :
References K.L.Chopra, Thin film phenomena L.Holland, vacuum deposition of thin films L.Maissel and
R.Glang, Handbook of thin film technology