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Unit-3 of Section B PDF
Unit-3 of Section B PDF
n n select Active
unit- 3 of section B - Elements of Physical
Wednesday, October 03, 2018 14
Design
The n+ regions are created whenever the Active and
n-select masks intersect
Substrate
dpo = minimum
extension of poly (Green)
beyond Active
(Red)
dpo
Metal -1 is used for interconnecting signals and also for power supply
distribution. Figure shows the contact cut through the oxide being filled
with a metal plug.
The two design rules shown in the drawing are
Wm1 = minimum width of metal -1 line
Sm1-ac = minimum spacing between metal-1 and active contact
Sm1-m1 = minimum spacing between two adjacent patterns of metal-1
unit- 3 of section B - Elements of Physical
Wednesday, October 03, 2018 29
Design
Why multiple contacts?
In figure there are
total of 12 contacts
so effective
resistance is
resistance of one
contact divided by 12
Inverted
logic cells
Through a poly-contact
ID ≈ I S
An advantage of
this approach of
using large devices
is that the overall
layout geometry
can be adjusted to
square or nearly
square shape
Ratio of
mobility r ≈ 2,
so to make
the
resistance of
pFET equal to n
that of nFET r
the channel p
width of pFET
is two times
the channel
width of
nFET,
Poly
contact
Shared ploy patterns in red colour
GND to p-substrate
contact
n-well to
VDD
contact
Poly
contact
Shared poly patterns
x y z
Polygons
and
instances
from the
preceding
level of
hierarchy