What is wafer?

It is a thin circular slice of pure

semiconductor containing repeated
Wafer patterns of IC.

Febus Reidj G. Cruz

2006
Sir Febus / Electronics Engineering / Microelectronics / Wafer

Raw Material… To remove oxygen in SiO2…

Sand Heating process

SiO2 Oxygen evaporates at 1400°
1400°C, melting
point for sand
Result: Silicon still with impurities

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 Zone Refining
To purify Silicon…

Zone Refining
It is a process of purifying a silicon bar by
repetitive heating, area by area.
Result: Silicon with 1 ppb impurity level
but polycrystalline

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Classifications of Solids
Atomic Arrangement of Solids
According to Atomic Arrangement

Amorphous
solids without any recognizable pattern
Polycrystalline
solids with short-
short-range pattern
Monocrystalline
solids with long-
long-range pattern
used in semiconductor devices

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 Polycrystal vs. Single Crystal To produce monocrystalline silicon…

Czochralski Technique
It is a crystal pulling process from a melt
using a single-
single-crystal seed to form a
monocrystalline silicon.
Result: Silicon Ingot

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Czochralski Technique Ingot

A pure and monocrystalline cylindrical silicon.

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Slicing of Ingot into Wafers Slicing of Ingot into Wafers

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Cleaning and polishing…

Slicing of Ingot into Wafers
Organic Treatment
Ethanol, Methanol, Acetone, Trichloroethylene, p-
p-Xylene

Inorganic Treatment
5H2O: 1H2O2: NH4OH
6H2O: 1H2O2: 1HCl
1H2SO4: 1H2O2
1HCl: 1HNO3

Rinse Cascade
A series of containers with running de-
de-ionized water used
for wafer rinsing after chemical treatment.
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 Wafer Cleaning Bath Polished Wafer

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Wafer Preparation

Sand
Heat Treatment
Zone Refining
Czochralski Crystal Pulling
Slicing
Cleaning and Polishing

Sir Febus / Electronics Engineering / Microelectronics / Wafer