Technical and Vocational Education and Training Institute

School of Graduate studies

Faculty of Electrical-Electronics and ICT Technology

Department of Electrical-Electronics Technology

Title: - Position of control stack piezoelectric Actuator Intelligent Controller

Thesis proposal for the Partial Fulfillment for the Degree of Master of Science in Electrical
Automation and Control Technology

By
BEREKET DANIEL

(MTR/067/11)

Advisor

Dr. PETCHI NATHAN

Assistant Professor

January 2020

Addis Ababa, Ethiopia

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 ABSTRACT

In this thesis proposal, intelligent controlling techniques are proposed for the position control
of the piezoelectric actuator. The piezoelectric actuator is a device that features high displacement
accuracy, high response speed, and high force generation. It has mainly been applied in support of
industrial machinery that requires precise position control. The piezoelectric actuator achieves
displacement by directly applying the deformation of a solid, and thus features a higher
displacement accuracy, larger generation force and higher response speed than other types of
actuators. These advantages have resulted in the piezoelectric actuator being applied mainly in
industrial equipment requiring precision position control.

The open-loop hysteresis is the main problem in the piezoelectric actuator is an input/output
non-linearity with the effects of non-local memory. That is, the output of the system depends not
only on the instantaneous input but also on the history of its operation. In this thesis, an adaptive
fuzzy PID controller will be used as an intelligent technique the performance of the adaptive
fuzzy PID controller will be compared with conventional controller architecture for the control of
continuous-time actuated by piezoelectric actuators. The controlled plant consists of a nonlinear
system preceded by a hysteresis. Based on solutions of a general hysteresis model, an inverse
function is introduced, which is implemented by a fuzzy logic method. Combining this inverse
function with adaptive control techniques, an intelligent control algorithm is developed. As a
result, the effect of the hysteresis is overcome and the desired control accuracy is guaranteed.
Simulation results are included to demonstrate the control performance.

KEYWORDS: Piezoelectric actuator, Sensor, intelligent control, Current/Charge control

Amplifier, PID, Adaptive Fuzzy PID Controller

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 Contents
Abstract..............................................................................................................................................i

Acronyms and Abbreviation............................................................................................................iv

List of figures....................................................................................................................................v

List of tables......................................................................................................................................v

chapter 1............................................................................................................................................1

1. Introduction................................................................................................................................1

1.1. Problem statement..............................................................................................................1

1.2. Objective.............................................................................................................................2

1.2.1. Main Objective............................................................................................................2

1.2.2. Specific objective........................................................................................................2

Chapter 2...........................................................................................................................................3

2. Literature Review.......................................................................................................................3

chapter 3............................................................................................................................................8

3. Methodology..............................................................................................................................8

3.1. Mathematical Model of Stack piezoelectric actuator.........................................................8

3.2. Controllers........................................................................................................................11

3.2.1. PID Controller...........................................................................................................11

3.2.2. Adaptive Fuzzy PID Controller.................................................................................12

chapter 4..........................................................................................................................................12

4. Budget and Time breakdown...................................................................................................13

4.1. Budget...............................................................................................................................13

4.2. Work Plan.........................................................................................................................14

Reference.........................................................................................................................................15

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 ACRONYMS AND ABBREVIATION

AFM Atomic Force Microscopy

ce rate of change of error
CMAC Cerebellar Model Arithmetic Computer
e Error
FL Fuzzy Logic
FLC Fuzzy Logic controller
FPID Fuzzy Proportional, Integral and Derivative
NB Negative Big
NM Negative Medium
NS Negative Small
PB positive Big
PEA Piezoelectric Actuator
PID Proportional Integral and Derivative
PI-FLC Proportional Integral Fuzzy Logic Controller
PM Positive Medium
PMB Positive Medium Big
PMS Positive Medium Small
PS Positive small
PVB Positive Very Big
PVS Positive Very Small
STM Scanning Tunnel Microscopy
Z Zero

List of figures
Figure1 Block diagram intelligent controller……………………...…………………………..….,.5
Figure 2 Illustration of a PZT stack actuator……………………………………………………...10

Figure 3 electromechanical model…………………………………………………………...…...12

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Figure 4 PID Controller System…………………………………………………………….……13
Figure 5 Structure of the adaptive fuzzy PID controller………………………………………....13

List of tables
Table 1 Human resource budget………………………………………………………………….14

Table 2 Stationery resource budget………………………………………………………………14

Table 3 Grand total cost………………………………………………………………………….14

Table 4 time break down ………………………………………………………………………...15

CHAPTER 1

1. INTRODUCTION

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 A piezoelectric material stack is formed by stacking many thin plates of piezoelectric material
along their axes of polarization with opposite polarization directions between adjacent plates.
Two adjacent thin piezoelectric plates share the same electrodes, and are thus connected
mechanically in series but electrically in parallel. Moreover, the preload spring prevents the
piezoelectric stack from improper bending and stretching motions that may damage it presents the
specifications of the commercial piezoelectric actuator used in the experiment. [8]
Piezoelectric actuators are popularly applied as actuators in high precision systems due to
their small-displacement resolution, fast response, and simple construction. However, the
hysteresis nonlinear behavior limits the dynamic modeling and tracking control of piezoelectric
actuators. a dynamic model of a moving stage driven by a piezoelectric stack actuator. In this
thesis modeling of a stack PEA including hysteresis effect, analyses linearization of stack PEA
hysteresis and analyze its performance and also design a controller for position control of stack
PEA using adaptive fuzzy PID controller are proposed.

1.1. Problem statement

A major limitation of piezoelectric actuators, however, is open-loop hysteresis and the rate-
independent hysteresis exhibited between voltage and displacement. If not specifically addressed,
this type of behavior can cause closed-loop limit cycling and possible instability. Because piezo
ceramic materials are ferroelectric, they fundamentally exhibit hysteresis behavior in their
response to an applied electric field. This proposed thesis focuses on the design of intelligent
controller for a class of dynamic systems actuated by piezoelectric actuators. A piezoelectric
actuator is an electrically controllable positioning element which functions on the basis of the
piezoelectric effect.

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1.2. Objectives

1.2.1. General Objective

 To design and simulation of position control of stack piezoelectric Actuator using an

Intelligent Controller.

1.2.2. Specific objectives

 To model a stack PEA including hysteresis effect.
 To linearize stack PEA hysteresis and analyze its performance
 To design PID controller for position control of stack PEA
 To design an intelligent controller for stack PEA.
 To compare & analyze the performance of an intelligent controller with PID
controller.

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 CHAPTER 2

2. LITERATURE REVIEW

Piezoelectric actuators are widely used in micro- and Nano-positioning applications. The aim of
this research work is to develop models and control schemes for PEAs in micro- and Nano-
positioning applications.
M. N. Minja, (2013). Piezoelectric actuators are popularly applied as actuators in high precision
systems due to their small displacement resolution, fast response and simple construction.
However, the hysteresis nonlinear behavior limits the dynamic modeling and tracking control of
piezoelectric actuators. Piezoelectric actuators are specific actuators using piezoelectric materials
as active materials. They are several types of piezoelectric actuators, such as stacks, benders, flex
tensional, lingering transducers and various motors. The most popular ones are stacks and
benders. A stack contains a pile of piezo ceramic layers and electrodes mounted electrically in
parallel and mechanically in series, which increases the maximum displacement.[1]

J. Figura, (2013). Piezoelectric actuators (PEAs) utilize the inverse piezoelectric effect to
generate fine displacement with a resolution down to sub-nanometers and as such, they have been
widely used in various micro- and Nano positioning applications. However, the modeling and
control of PEAs have proven to be challenging tasks. The main difficulties lie in the existence of
various nonlinear or difficult-to-model effects in PEAs, such as hysteresis, creep, and distributive
vibration dynamics. Such effects can seriously degrade the PEA tracking control performances or
even lead to instability. This raises a great need to model and control PEAs for improved
performance. This research is aimed at developing novel models for PEAs and on this basis,
developing model-based control schemes for the PEA tracking control taking into account the
aforementioned nonlinear effects.[2]

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 Aissa Rebai, (2014). This paper deals with piezoelectric actuators control. A fractional order
fuzzy PID controller is designed for this class of systems with the help of particle swarm
optimization (PSO) algorithm. Due to its special characteristics, the modeling and control of
piezoelectric actuators has been one of the research topics for the last decade. In this work, the
fractional order fuzzy PID controller parameters are defined as an optimization problem and the
PSO is used to find their optimal values. First, the dynamic model is introduced based on the
Bouc-Wen model which is generally used with a second order linear model to describe
piezoelectric actuators behavior. After giving its principle, the fractional order fuzzy PID is
designed using the PSO algorithm. Finally, the proposed approach validation and their
performances evaluation are done through simulation. The major contribution of this paper is that
the proposed controller structure is easy to implement, and has the same structure with the
classical PID controller, but it gives better performances compared with classical PID and fuzzy
PID controllers. [3]

Jin-Siang Shaw, (2019), This paper aims to integrate the particle swarm optimization (PSO)
method with the adaptive fuzzy sliding mode controller (AFSMC) to achieve vibration
attenuation in a piezoelectric actuator subject to base excitation. The piezoelectric actuator is a
complicated system made of ferroelectric materials and its performance can be affected by
nonlinear hysteresis loop and unknown system parameters and external disturbances. In this
study, an adaptive fuzzy sliding mode controller is proposed for the vibration control of the
system, because the fuzzy sliding mode controller is designed to tackle the unknown parameters
and external disturbance of the system, and the adaptive algorithm is aimed for fine-tuning this
controller for error converging purpose. Particle swarm optimization method is used in order to
find the optimal controller parameters for the piezoelectric actuator. PSO starts with a population
of random possible solutions, called particles. The particles move through the search space with
dynamically adjusted speed and direction that change according to their historical behavior,
allowing the values of the particles to quickly converge towards the best solutions for the
proposed problem.[4]

M. N. Islam, (2014), Sensor less position control can be helpful in applications where traditional
sensor mounting is challenging due to space constraints or cost. A novel HPO is developed in this
study by fusing capacitance-based position self-sensing with charge based self-sensing. As a

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result, neither frequency dependent inverse mappings of the piezoelectric hysteresis behavior nor
a sophisticated charge controller are required. A new sensor less position control technique is
proposed which requires neither an accurate inverse mapping nor a sophisticated charge amplifier
in order to compensate for hysteresis. A constitutive relationship is employed to infer position
from charge measurement through current integration. To eliminate drift from the charge based
measurement, an observer is presented in this study which uses a second self-sensing position
estimate that is based on the variation of effective piezoelectric capacitance with stroke[5]

J.A. Dzoleko Dongmo, (2010), The current/charge control amplifier is combined to the self-
sensing. This combination is done to monitor the system dynamic behavior while getting rid of
the hysteresis at the same time. Finally, the use of the self-sensing method for closed-loop
feedback control purpose is explored. A positive position feedback is implemented to damp a
resonant mode of the piezoelectric actuators system.[6]

Aissa Rebai, (2015), In order to control this property, a new Adaptive fuzzy synergetic control
strategy is proposed in this paper. Indeed, to highlight the problem, the hysteresis behavior of the
system is described using a backlash-like model. Then a synergetic control scheme is proposed to
deal with the problem of controlling non-linear hysteretic systems. It's formed of a fuzzy system
to approximate the unknown system dynamics with an adaptive synergetic controller to achieve
the desired performances. The proposed approach is validated through simulation along with its
satisfactory performances. Fuzzy logic control is used in various fields due to its high
performance. In this context, fuzzy and synergetic theories are combined in this paper to design a
new fuzzy adaptive synergetic controller to mitigate the hysteretic phenomenon without the above
restrictions. An adaptive fuzzy system is used to approximate the unknown system dynamics and
the system stability is analyzed by Lyapunov theory. Also, the proposed control strategy is
compared to the adaptive back stepping control method, and the results show that the proposed
controller has better efficiency, with an excellent tracking performance. [7]

Ziqiang Chi, (2014), Piezoelectric actuator is widely used in the field of micro/Nano positioning.
However, piezoelectric hysteresis introduces nonlinearity to the system, which is the major
obstacle to achieve a precise positioning. In this paper, the Preisach model is employed to
describe the hysteresis characteristic of piezoelectric actuator and an inverse Preisach model is
developed to construct a feedforward controller. Considering that the analytical expression of

x
inverse Preisach model is difficult to derive and not suitable for practical application, a digital
inverse model is established based on the input and output data of a piezoelectric actuator.
Moreover, to mitigate the compensation error of the feedforward control, a feedback control
scheme is implemented using different types of control algorithms in terms of PID control, fuzzy
control, and fuzzy PID control. Extensive simulation studies are carried out using the three kinds
of control systems. Comparative investigation reveals that the fuzzy PID control system with
feedforward compensation is capable of providing quicker response and better control accuracy
than the other two ones. It provides a promising way of precision control for piezoelectric
actuator.[8]

Zeyi Wu and Qingsong Xu, (2018), This section briefly introduces four kinds of actuators,
which are popularly adopted in micro-/Nano-positioning stage design. The classification is based
on their working principles, i.e., electromagnetic, electrostatic, electro thermal and piezoelectric
effects. The introduced actuators can cover the stroke requirement ranging from the sub-
nanometer to centimeter scale. Therefore, they are widely used with compliant mechanisms in the
field of micro-/Nano-positioning. Furthermore, a detailed survey about the performance and
selection of actuators can be found in [9].

X. Liu and J. Wang, (2018), This paper presents the dynamic analytical solution of a
piezoelectric stack utilized in an actuator and a generator based on the linear piezo-elasticity
theory. The solutions for two different kinds of piezoelectric stacks under external load were
obtained using the displacement method. The effects of load frequency and load amplitude on the
dynamic characteristics of the stacks were discussed. The analytical solutions were validated
using the available experimental results in special cases. The proposed model is able not only to
predict the output properties of the devices, but also to reflect the inner electrical and mechanical
components, which is helpful for designing piezoelectric actuators and generators in a
comprehensive manner.[10]

Abdurrahman Bouguerra, (2015). In this paper, a Fault-Tolerant Control of 2 DOF Helicopter

(TRMS System) Based on Fuzzy Gain-Adaptive PID is presented. In particular, the introduction
part of the paper presents a Fault-Tolerant Control (FTC), the first part of this paper presents a
description of the mathematical model of TRMS, an adaptive PID controller is proposed for fault-
tolerant control of a TRMS helicopter system in the presence of actuator faults, a fuzzy inference

xi
scheme is used to tune in real-time the controller gains, the proposed adaptive PID controller is
compared with the conventional PID. The obtained results show the effectiveness of the proposed
method. [11]

Jiwen Fang, (2019), The piezoelectric actuator (PA) is one of the most commonly used actuators
in a micro-positioning stage. But its hysteresis non-linearity can cause error in the piezo-actuated
stage. A modified Bouc–Wen model is presented in this paper to describe the hysteresis non-
linearity of the piezo-actuated stage. This model can be divided into two categories according to
the input frequency: rate-independent type and rate-dependent type. A particle swarm
optimization method (PSO) is employed to identify these parameters of the Bouc–Wen hysteresis
model. An inverse model feedforward compensator is established based on the modified Bouc–
Wen model. The fuzzy proportional-integral-derivative (PID) controller combined with the
feedforward compensator is implemented to the piezo-actuated stage. The experimental results
indicate that the proposed control strategy can compensate for the hysteresis phenomenon [12]

Tesfahun Desale, (2019). In this literature, self-tuning FPID based position control of stack
piezoelectric actuator for high precision applications using MATLAB is presented. PEA is a
nonlinear and time-varying complex system. After proper assumptions and approximations are
made to model and linearize the mathematical equations describing the stack actuator, transfer
functions are obtained in the frequency domain. Bouc-Wen hysteresis modeling is used in a thesis
paper in order to design the hysteresis of the stack PEA and Gaussian stochastic linearization is
used to linearize it. The results of the PID position controller are not satisfactory to the higher
degree of accuracy condition. Even it introduces steady-state error to the system, fuzzy control not
only has the prominent advantage in complex, time-varying and nonlinear system control but also
don't need the mathematical model of the controlled object. [13]

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 CHAPTER 3

3. METHODOLOGY

The first step in the analysis and design of the control system is the mathematical modeling of
the different components. The transfer function method is widely used in designing control
systems. After proper assumptions and approximations are made to linearize the mathematical
equations describing the PEA components, transfer functions are obtained. Thus, using these
transfer functions, the stack PEA is modeled for position control.

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 Figure 1 Block diagram intelligent controller

3.1. Mathematical Model of Stack piezoelectric actuator

The first step in the analysis and design of the control system is the mathematical modeling of the
different components. The transfer function method is widely used in designing control systems.
After proper assumptions and approximations are made to linearize the mathematical equations
describing the PEA components, transfer functions are obtained. Thus, using these transfer
functions, the stack PEA is modeled for position control.

3.1.1 Electromechanical Model of Stack PEA

The most widely spread PEA configuration is the stacked one, of which a schematic
representation is given in the following Figure. Such a PEA stack consists of the series connection
of a number of piezo wafers with an electrode between every two wafers. Clearly, the wafers are
in series mechanically and in parallel electrically. The latter is done in order to strengthen the
effect of the individual wafers. With different sub-models representing hysteresis, creep, and
vibration dynamics of PEAs defined, macroscopic PEA models are constructed by connecting
such sub-models according to certain model structures. There are two categories of model
structures for macroscopic PEA models. In the first category, the behavior of a PEA, when
subject to voltage input and an external loading force, is decoupled into several effects such as
rate-independent hysteresis, vibration dynamics, and creep based on physical laws. Such effects
are then represented by individual sub-models and such sub-models are connected in various
manners to form a comprehensive model of the PEA.

The piezoelectric effect is represented by 𝑇𝑒𝑚, which is an electromechanical transducer with

transformer ratio 𝑇𝑒𝑚. The capacitance 𝐶𝑒 represents the sum of the capacitances of the
individual PZT wafers, which are electrically in parallel. The total current flowing through the
circuit is 𝑞. Furthermore, q may be seen as the total charge in the PZT actuator. The charge 𝑞𝑝 is
the transduced charge from the mechanical side. The voltage 𝑢𝑝 is due to the piezo effect. The
total voltage over the PZT actuator is 𝑢𝑖𝑛, 𝐹𝑝 is the transduced force from the electrical side,
𝐹𝑒𝑥𝑡 is the externally applied force, and the resulting elongation of the PZT actuator is denoted
by x. The mechanical relation between 𝐹𝑝 and x is denoted by M. Note that we have equal
electrical and mechanical energy at the ports of interaction, i.e.𝑢𝑝𝑞𝑝=𝐹𝑝𝑥

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 Figure 2 Illustration of a PZT stack actuator [13]

The piezoelectric ceramic has elasticity modulus 𝜀, viscosity 𝜂, and mass density 𝜌. Furthermore,
the geometrical properties of the PZT actuator are length 𝐿 and cross-sectional area 𝐴. Mass 𝑀,
stiffness 𝐾, and damping coefficient 𝐶 can be calculated from the material and geometrical
properties as follows

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 Figure 3 electromechanical model [13]

3.2. Controllers

3.2.1. PID Controller

The PID controller is named because there are three operating units in it, i.e. the
proportional operating unit, the integral operating unit, and the derivative operating unit. The
PID controller is graphically shown in the following Figure.

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 Figure 4. PID Controller System

The PID algorithm can be expressed as: -

Where,

In the above Equation, Γ is made up of the operating units. The system error e(t) is
identically fed into Γ and computed. Ψ can be considered as a weight vector spanned by the three

xvii
parameters Kp(t), Ki(t), and Kd(t). According to this Equation, the PID output is a weighted
summing of the outputs of Ψ.

3.2.2. Adaptive Fuzzy PID Controller

The adaptive fuzzy PID controller (AFPIDC) means that the PID parameters are adjusted by
fuzzy rules in real-time. it takes the error e and the error rate of change ec as input variables, and
it can adjust the PID parameters in real-time. The whole structure of adaptive fuzzy PID controller
is shown figure 5.

Figure 5. Structure of the adaptive fuzzy PID controller

The discrete algorithm of a PID controller is

Where kp is the proportional gain, ki is the differential gain, kd is the derivative gain, k is the
sampling number, T is the sampling time.

xviii
The fuzzy controller output the adjustable value Δkp, Δki, Δkd of PID parameters. So the
parameters that self-adaptive fuzzy PID controller output finally are shown as the following
equation.

Where kp0, ki0, kd0 are initial parameters

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 CHAPTER 4

4. BUDGET AND TIME BREAKDOWN

4.1. Budget
Table 1 Human resource budget

S.N. Variables Unit of Unit Total cost

measurement cost
1. Data collector and supervisor ETB 3,000 3,000
training cost
2. Data collector per-diem ETB 5,000 5,000
3. Fully cracked software purchase ETB 3,000 6,000
4. Internet access ETB 2,000 4,000

Table 2 Stationery resource budget

S.N Variables Measurement Total Unit cost Total cost

unit quantity (ETB)
1. Paper Pack 1 2,000 2,000
2. Pen Pack 1 200 400
3. Data collection print and Cent/papers 2,000 1 3,500
copy
4. Duplication cent 2,000 1 2,500

Table 3 Grand total cost

S.NO item Cots (ETB)

1. Human resource cost 18,000
2. Stationary cost 8,400
3. Sum total 26,400
4. Allowance (10%) 2,640
5. Grand total (tot sum + allowance) 29,040

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 4.2. Work Plan

Table 4 Time break down.

No. Activity Dec. Jan Feb March April May June
2020 /2020 2020 2020 2020
2019 2020

1. Title selection

2. Literature review

3. Model a stack PEA including hysteresis effect.

4.
linearize stack PEA hysteresis and analyze its
performance
5.
design PID controller for position control of
stack PEA
6.
Design intelligent controller for stack PEA.
7.
compare & analyze the performance of an
intelligent controller
8. Model a stack PEA including hysteresis effect.

9.
To linearize stack PEA hysteresis and analyze its
performance
10. Data analysis and report writing

11. Editing and finalizing of the report

12. Final paper defense

xxi
 REFERENCES

[1.]M. N. Minjal, “Modeling and control of piezoelectric stack actuators with hysteresis,” Faculty
of Electrical Engineering University Teknologi Malaysia Master of Engineering (Electrical -
Mechatronics & Automatic Control), pp. V, November 2013.
[2.] J. Figura, “Modeling and control of piezoelectric microactuators,” University of
Saskatchewan Saskatoon by, pp. II 2013.
[3.] A. Rebai, K. Guesmi, D. Gozim, and B. Hemici, “Design of an optimized fractional order
fuzzy PID controller for a piezoelectric actuator,” STA 2014 - 15th International
Conference on Sciences and Techniques of Automatic Control and Computer Engineering,
pp. 456–461, 2014.
[4.] A. J. Shaw, P. M. Caceres, and S. Xu, “Particle Swarm Optimization Based Vibration
Suppression of a Piezoelectric,” vol. 13, no. 2, pp. 1, 2019.
[5.]M. N. Islam, C. Canada, and R. Seethaler, “Sensorless Position Control for Piezoelectric
Actuators Using a Hybrid Position Observer,” IEEE/ASME transactions on mechatronics vol. 19,
no. 2, December 2015.
[6.] D. D. Cst, “Control of an experimental piezoelectric actuators system,” Eindhoven
University of Technology Department of Mechanical Engineering Control Systems
Technology Group, vol. 06, pp. I, 2010.
[7.] A. Rebai, K. Guesmi, D. Gozim, and B. Hemici, “Adaptive fuzzy synergetic control of
nonlinear systems with unknown backlash-like hysteresis,” 2015 19th International
Conference on System Theory, Control and Computing, ICSTCC 2015 - Joint Conference
SINTES 19, SACCS 15, SIMSIS 19, October 2016, pp. 213–218, 2015.
[8.]Z. Chi, M. Jia, and Q. Xu, “Fuzzy PID Feedback Control of Piezoelectric Actuator with
Feedforward Compensation,” vol. Hindawi Publishing Corporation Mathematical Problems in
Engineering Volume 2014, Article ID 107184, pp. 14, 2014.
[9.] Z. Wu and Q. Xu, “Survey on recent designs of compliant micro-/Nano-positioning stages,”
Actuators, vol. 7, no. 1, pp 2. 2018.
[10.] X. Liu and J. Wang, “applied sciences Dynamic Analytical Solution of a Piezoelectric
Stack Utilized in an Actuator and a Generator,” School of Civil Engineering, North China
University of Technology, Beijing 100144, China, pp .2, 2018.
[11.] Abdurrahman Bouguerra, Kamel Kara, Djamel Saigaa, Samir Zeghlache, Keltoum Lou,
“Fault-Tolerant Fuzzy Gain-Adaptive PID Control for a 2 DOF Helicopter, TRMS

xxii
 System” World Academy of Science, Engineering and Technology International Journal
of Mechanical and Mechatronics Engineering Vol:9, No:4, 2015.
[12.] J. Fang, J. Wang, C. Li, and W. Zhong, “A Compound Control Based on the Piezo-
Actuated Stage with Bouc – Wen Model,” School of Mechanical Engineering, Jiangsu
University of Science and Technology, China, pp.1, 2019.
[13.] Tesfahun Desale, “Self-Tuning Fuzzy PID Based Position Control of Stack Piezoelectric
Actuator for High Precision Applications” MSc Thesis, Addis Ababa University School of
Electrical and Computer Engineering, 2019.

xxiii