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    Facts at Your Fingertips-201001-Low-Pressure Measurement PDF

    Uploaded by

    onizuka-t2263

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
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    of 1

    Low-Pressure

    Measurement
    Department Editor: Scott Jenkins

    B
    ecause of the behavior of materials under vacuum, including 5IFVTFGVMPQFSBUJOHSBOHFPGBDPOWFOUJPOBM#"UZQFHBHF
    lowered boiling points, low-pressure operations are useful tools FYUFOETCFUXFFO–3BOEo torr.
    in chemical processing, as well as in research and develop-
    ment and manufacturing. Areas where a vacuum system is neces- Crossed-electromagnetic-field IG
    sary or useful include the following: "OPUIFSCSPBEUZQFPGJPOJ[BUJPOHBHFTDBOCFDMBTTJmFEBT
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    t1SFWFOUJOHVOXBOUFEDIFNJDBMSFBDUJPOTCFUXFFOQSPDFTTNBUFSJ- charge between cathode and anode that is maintained with a
    als and the surrounding environment by removing air NBHOFUJDmFME
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    maintains a cathode-anode discharge by applying a magnetic
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    differential pressures directly to the anode; instead, they travel in helical paths through
    t%FQPTJUJOHUIJOmMNTPOTVSGBDFT TVDIBTJOUIFNJDSPFMFDUSPOJDT the vacuum space.
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    greater mass than electrons, they are unaffected by the magnetic
    LOW-PRESSURE MEASUREMENT mFMEBOEBSFDBQUVSFE
    5IFQSPCBCJMJUZPGDPMMJTJPOTJTQSPQPSUJPOBMUPHBTEFOTJUZ5IF
    Because of vacuums’ central role in processing and research, it is current generated by the ion collection process is an indirect indica-
    important to be able to measure pressures that may be a tiny frac- tion of vacuum pressure.
    tion of typical atmospheric pressures. 5BCMFDPNQBSFTUIFBEWBOUBHFTBOEEJTBEWBOUBHFTPGFNJUUJOH
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    TABLE 2. ADVANTAGES AND DISADVANTAGES OF ECG
    TABLE 1. TYPICAL RANGES FOR VACUUM QUALITY VERSUS CROSSED-EMF IONIZATION GAGES

    Pressure in torr Pressure in Pa Advantages Disadvantages

    Atmospheric pressure 760 101.3 kPa Emitting- t"DDVSBDZCFUUFSUIBO t-POHFSEFMBZTUPBD-


    cathode DSPTTFE&.' FTQFDJBMMZ RVJSFBTUBCMFSFBEJOH
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    1 × 10–12 t&MFDUSPOFNJTTJPODVS-
    Extremely high vacuum <1 × 10–12 <100 pPa SFOUDBOCFDPOUSPMMFE 
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    Outer space 1 × 10–6 to 100 μPa to < 3fPa
    3 × 10–17 (1fPa = 10–15 Pa) $SPTTFE t$BOCFUVSOFEPO t0VUQVUWBSJFTOPO
    FMFDUSP- BUIJHIFSQSFTTVSFT MJOFBSMZXJUIQSFTTVSF
    Perfect vacuum 0 0 magnetic EVSJOHBQVNQEPXO t1VNQJOHTQFFEIJHIFS
    mFME*(T t/P9SBZMJNJU FMFDUSPOT than emitting cathode
    "UQSFTTVSFTCFMPXUPSS GPSDFTFYFSUFECZHBTFPVTNPMFDVMFTBSFOPU QSPEVDF9SBZT XIJDI HBHFTBOEDBOOPUCF
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    UIBUJTJOEJTUJHVJTIBCMF t&MFDUSPOTQBDFDIBSHF
    must be inferred by assessing a pressure-dependent physical property
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    of the gas, such as thermal conductivity, ionizability or viscosity. t&MFDUSPOTUJNVMBUFEEFT- MFBETUPJOTUBCJMJUJFT
    PSQUJPOFGGFDUTBSFTNBMM
    IONIZATION GAGES
    Selecting IGs
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    measuring an electrical current. Characteristics of ionization gages t1SFTTVSFSBOHFSFRVJSFEGPSBQQMJDBUJPO
    include and electron source, an ion collector that is negative rela- t(BHFQVNQJOHTQFFE
    UJWFUPUIFDBUIPEF BOBDDFMFSBUJPOWPMUBHFPGBCPVU7 BOEB t*EFOUJUZPGHBTTQFDJFTUPCFNFBTVSFE
    mechanism for measuring electric current. tAccuracy and stability
    t4J[FBOENFDIBOJDBMTUBCJMJUZ
    Emitting-cathode ionization gages t*OUFSGFSFODFTXJUINBHOFUJDmFMET
    0OFUZQFPG*(DBOCFDMBTTJmFEBTFNJUUJOHDBUIPEF*(T &$(
     t1SJDF
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    IFBUFEmMBNFOUUIBUTFSWFTBTTPVSDFPGFMFDUSPOT References
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    electrons are emitted in a well-controlled, regular fashion from
    SEFEJUJPO FECZ8BMUFS#PZFT
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    As electrons pass through the space between the electrodes, Eng.,0DU QQo
    they collide with gas molecules in the vacuum system to generate 4UBOGPSE3FTFBSDI4ZTUFNT*OD )PUWT$PME*POJ[BUJPO(BVHFT5FDIOJDBM
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    JOUIFHBHF 5FDIOJDBMOPUF XXXCSPPLTDPN

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