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Facts at Your Fingertips-201001-Low-Pressure Measurement PDF
Facts at Your Fingertips-201001-Low-Pressure Measurement PDF
Measurement
Department Editor: Scott Jenkins
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ecause of the behavior of materials under vacuum, including 5IFVTFGVMPQFSBUJOHSBOHFPGBDPOWFOUJPOBM#"UZQFHBHF
lowered boiling points, low-pressure operations are useful tools FYUFOETCFUXFFO–3BOEo torr.
in chemical processing, as well as in research and develop-
ment and manufacturing. Areas where a vacuum system is neces- Crossed-electromagnetic-field IG
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maintains a cathode-anode discharge by applying a magnetic
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differential pressures directly to the anode; instead, they travel in helical paths through
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greater mass than electrons, they are unaffected by the magnetic
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Because of vacuums’ central role in processing and research, it is current generated by the ion collection process is an indirect indica-
important to be able to measure pressures that may be a tiny frac- tion of vacuum pressure.
tion of typical atmospheric pressures. 5BCMFDPNQBSFTUIFBEWBOUBHFTBOEEJTBEWBOUBHFTPGFNJUUJOH
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TABLE 2. ADVANTAGES AND DISADVANTAGES OF ECG
TABLE 1. TYPICAL RANGES FOR VACUUM QUALITY VERSUS CROSSED-EMF IONIZATION GAGES