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Giovanni Anelli
CERN - European Organization for Nuclear Research
Physics Department
Microelectronics Group
CH-1211 Geneva 23 – Switzerland
Puebla, December 2004 Giovanni.Anelli@cern.ch
Outline
C. D. Motchenbacher and J. A. Connelly, Low Noise Electronic System Design, John Wiley and Sons, 1993.
p( x ) = e 2σ2
σ 2π σ
f(x)
0.1
f(x)
square) of the variable x 0.2 σ
σ2: variance (or mean square) 0.1
0
68% of the events occur within ± σ
-8 -6 -4 -2 0 2 4 6 8
99.7% of the events occur within ±3 σ x
John R. Taylor, An Introduction to Error Analysis, University Science Books, 2nd Edition, 1997, Chapter 5.
Power spectral density (PSD): shows how much power the signal (noise
in our case) carries at each frequency. It is generally indicated by S(f),
and measured in V2/Hz.
If a signal (noise) with PSD SIN(f) is applied to a linear time-invariant
system with transfer function H(f), then the output spectrum SOUT(f) is
given by: 2
SOUT (f ) = SIN (f ) ⋅ H(f )
The average noise power of the sum of two separate noise sources is:
1 T/2
Pav _ tot = Pav1 + Pav 2 + lim ∫ 2x 1(t )x 2 (t )dt
T → ∞ T −T / 2
The last term express the “correlation” between the 2 noise sources
Puebla, December 2004 Giovanni Anelli, CERN
Thermal noise
Thermal noise is caused by the random thermally excited vibration of the
charge carriers in a conductor.
Thermal noise was first observed by J. B. Johnson in 1927, and a
theoretical analysis was provided by H. Nyquist in 1928.
Thermal noise is therefore also called Johnson or Nyquist noise.
v 2 S v (f ) = 4kTR , f ≥ 0 [V 2 /Hz]
R n
vn2 = 4kTR ⋅ ∆f [V 2 ]
Noiseless
resistor k = 1.38 ⋅ 10 −23 J / K (Boltzmann ' s constant)
S v (f ) Thermal noise does not depend on
frequency (up to ∼ 100 THz), and it is
4kTR therefore called “white”. As white light is
made up by many colors, white noise is
f made up by many frequency components.
Puebla, December 2004 Giovanni Anelli, CERN
Shot noise
Shot noise is always associated with a direct current flow. It is present in
diodes, MOS transistors and bipolar transistors. Shot noise is given by
the current “granularity”, and it is associated with current flow across a
potential barrier.
Ib Ib
S1 / f ( f ) = K α f≥0 2
[A /Hz] i = K α ⋅ ∆f
2
n [A 2 ]
f f
α is a constant ≈ 1, b is a constant in the range 0.5 to 2.
S1 / f ( f )
The power spectral density of 1/f noise
depends on frequency!
f
P. R. Gray et al., Analysis and design of analog integrated circuits, John Wiley and Sons, 4th Edition, 2002, Chapter 11.
vn2,in
Noisy Noiseless
vn2 ,out in2,in vn2 ,out
circuit circuit
A. L. McWhorter, Semiconductor Surface Physics, University Pennsylvania Press, 1956, pp. 207-227.
i2d
= Sid = 4kTnγgm
∆f
i2f K 1 2
= Sif = 2 a gm
∆f Cox WL f α
i2dB
= SidB = 4kTR Bgmb
2
∆f
Z.Y. Chang and W.M.C. Sansen, "Low-noise wide-band amplifiers in bipolar and CMOS technologies", Kluwer Academic Publishers, 1991.
Puebla, December 2004 Giovanni Anelli, CERN
Input-referred noise generators
Z.Y. Chang and W.M.C. Sansen, "Low-noise wide-band amplifiers in bipolar and CMOS technologies", Kluwer Academic Publishers, 1991.
Puebla, December 2004 Giovanni Anelli, CERN
Input-referred voltage noise
2
vin2 1 Ka 1 gmb
= 4kTnγ + 2 α
+ 4kTR G + 4kT 2 R B
∆f gm Cox WL f gm
Channel thermal Gate resistance Bulk resistance
1/f noise
noise thermal noise thermal noise
0.66
1 1 I.C.
0.64
F(I.C.) = +
0.62
2 6 1
4
( )
1 + 4 ⋅ I.C. + 1
2
F(I.C.)
0.6
0.58 IDS
I.C. =
0.56
2nβφ 2t
0.54
0.52 kT
φt =
0.5 q
0.001 0.01 0.1 1 10 100 1000 10000
I.C.
⎛ v in2 ⎞ g 2
⎜ − 4kTR G ⎟ gm = 4kTn γ + 4kTR B mb
⎜ ∆f ⎟ g
⎝ ⎠ m
y = b + a x
S. Tedja et al., “Noise Spectral Density Measurements of a Radiation Hardened CMOS Process in the Weak and Moderate Inversion”, IEEE
Transactions on Nuclear Science (IEEE TNS), vol. 39, no. 4, 1992, pp. 804-808.
S. Tedja et al., “Analytical and Experimental Studies of Thermal Noise in MOSFET's”, IEEE Transactions on Electron Devices (IEEE TED),
vol. 41, no. 11, November 1994, pp. 2069-2075.
Puebla, December 2004 Giovanni Anelli, CERN
Noise measurement system
DUT
Bias circuit
vout
Transimpedance Gain
Stage Stage
DUT
vin
Spectrum
Vn2,TOT ( f ) − Vn2,BGD ( f ) Analyzer
E n ,DUT ( f ) = 2
G(f )
25
gm /IDS [ 1/V ]
20
15
10
5 IDS = 0.5 mA
0
1E-11 1E-10 1E-09 1E-08 1E-07 1E-06 1E-05 1E-04
IDS/W [ A/µ m ]
Puebla, December 2004 Giovanni Anelli, CERN
N-channel noise spectra
W = 2 mm, IDS = 0.5 mA, VDS = 0.8 V, VBS = 0 V
1.E-07
L = 0.36um
L = 0.5um
L = 0.64um
L = 0.78um
Noise [ V/sqrt(Hz) ]
L = 1.2um
1.E-08
1.E-09
1.E+02 1.E+03 1.E+04 1.E+05 1.E+06 1.E+07 1.E+08
Frequency [ Hz ]
Puebla, December 2004 Giovanni Anelli, CERN
P-channel noise spectra
W = 2 mm, IDS = 0.5 mA, VDS = 0.8 V, VBS = 0 V
1.E-07
L = 0.36um
L = 0.5um
L = 0.64um
L = 0.78um
Noise [ V/sqrt(Hz) ]
L = 1.2um
1.E-08
1.E-09
1.E+02 1.E+03 1.E+04 1.E+05 1.E+06 1.E+07 1.E+08
Frequency [ Hz ]
Puebla, December 2004 Giovanni Anelli, CERN
Noise vs inversion conditions
NMOS, W = 2 mm, L = 0.5 µm, VDS = 0.8 V, VBS = 0 V
1.E-07
Weak Inversion
Moderate Inversion
Strong Inversion
Noise [ V/sqrt(Hz) ]
1.E-08
1.E-09
1.E-10
1.E+02 1.E+03 1.E+04 1.E+05 1.E+06 1.E+07 1.E+08
Frequency [ Hz ]
2.5
1.5
0.5
0
0.2 0.4 0.6 0.8 1 1.2
Gate Length [ µm ]
2.5
1.5
1
0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 1.1 1.2
Gate Length [ µm ]
Puebla, December 2004 Giovanni Anelli, CERN
White noise “visual estimation”
M.J.M. Pelgrom et al., “Matching Properties of MOS Transistors”, IEEE Journal of Solid-State Circuits (IEEE JSSC), vol. 24, no. 10, 1989, p. 1433.
M.J.M. Pelgrom et al., “A 25-Ms/s 8-bit CMOS A/D Converter for Embedded Application”, IEEE JSSC, vol. 29, no. 8, Aug. 1994 , pp. 879-886.
DEFINITION:
Matching is the
statistical study of the
differences between
identically designed
components placed at a
small distance in an
identical environment
and used with the same
bias conditions
D1
L1
D2
L2
∆L L2 − L1 ∆ D = ∆ D1 − ∆ D 2 [µ m]
= 200 ⋅ [%]
L L2 + L1
n+ n+ DEPLETED
SUBSTRATE GATE
S&D
p-substrate (Na) DIFFUSIONS OXIDE
INTERCONNECTION
(METAL) Mismatch is given by
differences in physical
GATE
L (POLYSILICON) parameters (such as tox,
Na, µ) as well as layout
ACTIVE AREA
(S & D DIFFUSIONS) dimensions (W, L)
W CONTACT
Mismatch in
Na, µ, Tox
+
Mismatch in
W and L
Parameter ∆β
∆VT and
IDS1 IDS2
mismatch β
I mismatch ∆ID
VGS1 β ∆VGS and
IDS = ( VGS − VT )2 VGS2 and V offset ID
2n
Puebla, December 2004 Giovanni Anelli, CERN
What causes mismatch?
Differences between (supposed) identically designed
components can be attributed to two classes of effects.
We will see that the real mismatch is given by stochastic
effects. Systematic effects give origin to offsets.
∆VT ≈ 10 - 50 mV
∆β
≈ 5 - 15 %
β
Puebla, December 2004 Giovanni Anelli, CERN
Variations within a chip
2 – 20 mm
∆VT ≈ 2 - 20 mV
∆β
≈ 1 - 10 %
β
1 – 100 µm
∆VT ≈ 0.1 - 10 mV
∆β
≈ 0.1 - 5 %
β
Electrical
H. P. Tuinhout, "Design of Matching Test Structures", Proceedings IEEE 1994 International Conference on Microelectronic Test Structures,
vol. 7, March 1994, pp. 21-27.
I VDS1 VDS2
∆I
1 2 ≈ λ ⋅ ∆VDS
I
R. W. Gregor, "On the Relationship Between Topography and Transistor Matching in an Analog CMOS Technology", IEEE Transactions on
Electron Devices, vol. 39, no. 2, February 1992, pp. 275-282.
H. P. Tuinhout, M. Pelgrom, R. P. de Vries and M. Vertregt, "Effects of metal coverage on MOSFET matching", Technical Digest of the IEEE
International Electron Device Meeting 1996, pp. 735-738.
H. P. Tuinhout and M. Vertregt, "Test Structures for Investigation of Metal Coverage Effects on Mosfet Matching", Proceedings IEEE 1997
International Conference on Microelectronic Test Structures, vol. 10, March 1997, pp. 179-183.
H. P. Tuinhout and W. C. M. Peters, "Measurement of Lithographical Proximity Effects on Matching of Bipolar Transistors", Proceedings IEEE
1998 International Conference on Microelectronic Test Structures, vol. 11, March 1998, pp. 7-12.
A P2
σ 2∆P = + SP2 ⋅ D2
WL
D is the distance between the components. SVth and Sβ can be of the
order of 1 µV / µm and 1 ppm / µm respectively, i.e. for a distance of 1
cm we have an offset in threshold voltages of 10 mV or a mismatch in
currents of 1%.
SP depends also a lot on the “maturity” of the process. Processes used
for mass production (very mature) have generally lower SP’s.
M. J. M. Pelgrom, A. C. J. Duinmaijer, A. P. G. Welbers, "Matching Properties of MOS Transistors", IEEE JSSC, vol. 24, Oct. 1989, pp. 1433-1440.
σ ∆P
AP
σ ∆P =
WL AP
1/ WL [1/µm]
K. R. Lakshmikumar, R. A. Hadaway and M. A. Copeland, "Characterization and Modeling of Mismatch in MOS Transistors for Precision Analog
Design", IEEE Journal of Solid-State Circuits, vol. 21, no. 6, December 1986, pp. 1057-1066.
100 100
µ
90 90
80 80
70 70
Counts
Counts
60 60
50 50
40
30
40
30
σ
20 20
10 10
0 0
-8 -6 -4 -2 0 2 4 6 8 10 -8 -6 -4 -2 0 2 4 6 8 10
A 2
µ A C2 ox
A 2W A L2 Aβ
σ 2
∆β / β = + + 2 + σ ∆β / β =
W L W L W L W L2 WL
2.5
The same
2 7.2 / 1
23.2 / 5 behavior is found
1.5
for the β
1
mismatch
0.5 A Vth = 4 mV ⋅ µ m
0
0 0.2 0.4 0.6 0.8 1 1.2
-1/2
(Gate Area) [1/µ m]
Puebla, December 2004 Giovanni Anelli, CERN
Common centroid transistor pair
G24
2 3
GATE
(POLYSILICON)
ACTIVE AREA
(S & D DIFFUSIONS)
D24 INTERCONNECTION
(METAL1)
S
CONTACT
D13
INTERCONNECTION
(METAL2)
M1 - M2 Via
1 4
G13
Puebla, December 2004 Giovanni Anelli, CERN
Matching: only for analog?
Low supply voltage and small devices increase the impact of
transistor property variations on chip performance not only for
analog circuits
Examples of digital circuits sensitive to mismatch are memory
cells and clock distribution circuits.
Mismatch in general reduces the immunity to noise of digital
circuits.
In the case of memories, the difference in the threshold voltages
of two transistors of the same memory can be of the order of 100
mV or more.
As we will see in the next lecture, this can become a problem
especially in more advanced technologies.