Flow sensor for compressed air Refrigerating

type dryer
Desiccant
type dryer
High polymer

PF-F/PFU (display integrated type flow sensor) membrane

type dryer

Air filter

 Sensor / flow sensor Auto. drain

/ others
F.R.L.
(Module unit)
F.R.L.
Overview (Separate)
Compact
Compressed air consumption F.R.

could reach 1/5 of energy used Precise

regulator
in manufacturing plant. F.R.L.
(Related
Controlling air is very important products)
for energy saving. This flow rate Clean
F.R.
sensor enables air control Electro
pneumatic
easily. regulator
Air
booster
Speed
Features control valve

Pressure/tempreture Silencer

compensation not required Check valve

/ others
Bothering compensation is
Joint
not required. Flow rate can / tube
be directly read with digital Vacuum
filter
display (L/min. (normal)
Vacuum
display). regulator
Suction
Precision with practical C O N T E N T S plate
accuracy ±3%F.S. Magnetic
Product introduction 1406 spring buffer
Integrating function provided as
standard Applications 1408 Mechanical
pressure SW
Air consumption per device is Safety precautions 1410 Electronic
pressure SW
easily measured.  Medium flow (PF500F to PF4000F) 1414 Contact / close
contact conf.
Integrated pulse output  Large flow (PF8000F/PF16000F) 1418 SW

provided (option)  Module design type (PFU500F to PFU2000F) 1422 Air sensor

Convenient function are Electric wiring 1425

Pressure SW
for coolant
provided for integrated flow
Monitor function and operation explanation 1428 Small
control or network control flow sensor

using personal computers Small

flow controller
and programmable
Flow sensor
controllers. for air
Flow sensor
Heavy-duty design for water

The sturdy design is robust Total air

system
against drainage (water drops). Total air
system
(Gamma)
Free intallation attitude
Compact without straight Ending

piping section.
Display integrated type for compressed air

Both vertical and horizontal

installation are available.
Flow sensor

1405
 Strongly supporting energy conservation
Flow sensor PF Series
Refrigerating
type dryer
Desiccant
type dryer Useful for understanding and confirmin.g current energy consumption
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others  Measure current flow
 Review corrective action
Plan
Understand
 Stop air pressure
supply when idle
F.R.L.
(Module unit) current state Do
Implement  Shorten blow time
F.R.L. corrective  Use energy-saving
(Separate) action nozzle
Compact  Lower pressure
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro  Standardize consumption
pneumatic
rate in system and line Action
regulator
Air  Horizontally develop to
Correct or
continue
Check  Measure with flow sensor
booster other lines Confirm  Calculates costs with
effect integrating function
Speed
control valve

Silencer

Check valve
/ others
Joint
High performance Reliability
/ tube
Vacuum
filter
Vacuum
regulator
High practical precision at ±3%F.S. Heavy-duty design
Suction A practical precision of 3%F.S. is realized without  The sturdy design is robust against drainage
plate
correction at temperatures from 0 to 40˚C and  (water drops).
Magnetic
spring buffer pressures from 0.1 to 1.0MPa.
(Environment resistance doubled over
Mechanical
pressure SW Pressure loss 0.005MPa (primary pressure: 0.7MPa) is realized *1 conventional models)
Electronic
The laminated rectifier filter suppresses pressure loss • Platinum membrane sensor water resistance
pressure SW
Contact / close to 0.005 MPa. is increased with a special coating.
contact conf.
SW (*1. Excluding some models) • Abnormal sensor overheating is prevented
Air sensor with a protection circuit.
Pressure SW
for coolant
Small
Straight piping not required *2 Equivalent to protective structure IP64
flow sensor
Functions of the rectifier filter are not affected This series is used safely in an adverse
Small
flow controller even if an elbow or T-shape socket is piped environment with high levels of dust or water
Flow sensor immediately before the sensor. sprayed from different directions.
for air
(*2: Excluding PF8000/PF16000F)
Flow sensor
for water
Total air
system
Total air
system Filter for
(Gamma)
rectification
Ending
Sensor

Air Constant flow distribution

Flow distribution deviates outside due to elbow.

1406
 Refrigerating
type dryer
Series Desiccant
type dryer
Port size Rc Flow rate range L/min.(normal) High polymer
membrane
Model 3/8 1/2 3/4 1 11/2 2 type dryer
-10 (15) (20) -25 -40 (50) 0 10 100 1000 10000 100000
Air filter
PF500F 25 500
Auto. drain
PF1000F 50 1000 / others
F.R.L.
PF2000F 100 2000 (Module unit)
Standard type
PF4000F 200 4000 F.R.L.
(Separate)
PF8000F 400 8000 Compact
F.R.
PF16000F 800 16000
Precise
regulator
PFU500F 25 500
F.R.L.
Module type (Related
PFU1000F 50 1000 products)
Clean
PFU2000F 100 2000 F.R.
Electro
pneumatic
regulator
Air
booster
Speed
control valve

Silencer

Check valve
Easy to use / others
Joint
/ tube
Vacuum
filter

Eliminate compensation - read directly with a digital gauge Different installation styles Vacuum
regulator
Bothersome pressure compensation and temperature Suction
• This unit is installable vertically, horizontally, plate
correction are not required.
or otherwise.
• Mass detection prevents reading from being Magnetic
• The display is freely rotated 270˚. spring buffer
adversely affected by changes in pressure,
• Connector wiring follows piping and does not Mechanical
and pressure compensation is not needed. pressure SW
need extra space.
Flow converted to atmospheric pressure (1 atm) Electronic
• Switching the connector case to 180˚ lets pressure SW
is displayed.
connector wiring be led from either in or out. Contact / close
• Temperature compensation not required. The contact conf.
SW
platinum membrane temperature sensor detects
Air sensor
the fluid temperature, and converts the reading
to the flow at 0˚C at all times. Pressure SW
for coolant
O
UT

Small
H
L

flow sensor
Compact, integrated display and sensor
F
TO EN

LU
F

TA
LO

L/m
L

E
WS

R
in

E
.

X
SR
O

P
F
S

Connector case
E

Small
R
IE
S

Easy-to-read 5-digit LED showing integrated flow. flow controller

The display can be switched between integrated Flow sensor

for air
flow and instant flow in one touch. Flow sensor
for water
Flow sensor PF Series
L/min.(normal) Total air
OUT system
Total air
system
(Gamma)
H
TOTAL
L
FLOW SENSOR Ending
Module design uses a filter and regulator
Display integrated type for compressed air

(PFU500F, PFU1000F, PFU2000F)

Ample output variations
• Air quality is maintained, controlled,
Switch output Standard
and measured with a single unit.
0 to 5 VDC Standard • Piping space and piping work
hours are reduced.
4 to 20mA DC Option
Analog output
1 to 5 VDC Option
Flow sensor

0 to 10 VDC Option

Pulse output Option

1407
 PF-F Series
Refrigerating
Applications
type dryer
Desiccant
type dryer For flow control of paint lines For flow control in automobile manufacturing lines
High polymer
membrane  For flow controls per each line!
type dryer
 Cost conversion by integrating flow rate display
Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
For semiconductor manufacturing equipment Flow control of loom plant
regulator  Flow control of expensive air at low dew point!
Air Ready detection of trouble such as "overflow", etc.
booster
Speed
control valve

Silencer

Check valve
/ others
Joint
/ tube
Vacuum
filter
Vacuum
regulator
For low pressure casting devices
Suction
 For die cooling temperature
plate control! Ejection cylinder
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW Die
Contact / close
contact conf.
SW

Air sensor Compressed air

Pressure SW
for coolant Molten
metal Stoke
Small
flow sensor
Small Crucible
flow controller
Flow sensor
for air
Flow sensor
for water Functional explanation
Total air
system
Total air
system
(Gamma) The flow sensor consists of a rectifier passing even amounts of compressed air
and a platinum membrane resistor that detects flow. Inserting a bent pipe such as
Ending an elbow just before the sensor evens the rectifier flow. Using multiple rectifier
plates suppresses pressure loss, enabling a rectifier effect.
When compressed air is not flowing, the platinum membrane sensor that detects
flow is heated to a set temperature by the fluid temperature. When compressed
Piping adapter
air flows, heat is lost proportional to air, so a current flows to the platinum
membrane sensor circuit that detects flow. The display receives this current as the
flow signal and indicates the practical atmospheric pressure, instant flow of air
converted to 0˚C, and integrated flow.
Compressed air temperature is measured and compensated for by the platinum
membrane sensor that detects the fluid temperature.

Platinum membrane sensor

Flow path

Rectifier
Flow direction

1408
MEMO Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
regulator
Air
booster
Speed
control valve

Silencer

Check valve
/ others
Joint
/ tube
Vacuum
filter
Vacuum
regulator
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
Display integrated type for compressed air
Flow sensor

1409
 Pneumatic components (sensors)

Safety precautions
Refrigerating Always read this section before starting use.
type dryer
Refer to Intro 67 for general precautions, and to " Safety Precautions" in this section for
Desiccant
type dryer details on each series.
High polymer
membrane
type dryer
Flow sensor for compressed air PF-F/PFU Series
Air filter

Auto. drain
/ others
Design & Selection
F.R.L.
(Module unit)
F.R.L. 1. Specifications confirmation 3. Design per applications
(Separate)
Compact
F.R. DANGER CAUTION
Precise
regulator  Do not use this product for flammable fluids.  This product is designed for compressed air, and
F.R.L. will tolerate small amounts of leakage. Contact CKD
(Related
products) WARNING when no leaks are tolerable.
Clean
F.R.  Use this product in accordance with the specifica-
Electro
pneumatic tions range.  The separated display PFD Series monitor cannot
regulator
Air
Products in this catalog are for use only in a com- be connected to the PF-F or PFU Series. Other-
booster pressed air system. Using this product at a pres- wise, damage could occur.
Speed
control valve
sure or temperature exceeding specifications could
cause ruptures or malfunctions.  Precautions for analog output “A1”
Silencer

Check valve
/ others  This product cannot be used as a business meter. 24 VDC DC +
High-order input circuit
DC +
Joint This product does not comply with Measurement Sensor 1
4-20mA
/ tube Internal + V1+ 250Ω
Laws, and cannot be used for commercial business. circuit
-
4-20mA I1+
COM1
ch1
Vacuum 240Ω
filter Use this as an industrial sensor. DC -
A
Sensor 2 DC +
Vacuum 4-20mA B
regulator Internal + V2+ 250Ω

Suction
 Compressed air or nitrogen can be used. Do not circuit
240Ω -
4-20mA I2+
COM2
ch2
DC - AG
plate use other fluids or the precision cannot be guaran- Power supply
+15V
24+
Magnetic
spring buffer
teed. 24-
DC/DC AG
-15V
Insulation type
Mechanical Note the
pressure SW connection.

Electronic
2. Design for Safety If more than one analog output 4-20mA sensor is
pressure SW
Contact / close
connected to the same common input circuit (host
contact conf.
SW
WARNING computer, programmable controller, etc.) as shown
Air sensor  Take measures to protect personnel and equipment above, signals will interfere and operation will not
against injury or damage if this product fails. be correct. In this case, use voltage output type
Pressure SW
for coolant (standard, A2, A3).
Small CAUTION * A and B point voltage are connected inside the
flow sensor
Small  Understand compressed air features before design- input circuit, and have the same potential. This will
flow controller
ing a pneumatic circuit. cause an error in analog output.
Flow sensor
for air  Pop-out, air discharge, or leakage due to air compression If the host input circuit power supply (24 VDC) is
Flow sensor and expansion could occur. not insulated, separate the input circuit and sensor
for water
 Design the circuit so that compressed air in the system is power.
Total air
system exhausted.
Total air
system
(Gamma)  Check the leakage current to prevent malfunction 4. Working environment
Ending caused by current leaking from other controllers.
 When using a programmable controller, etc., the leakage
DANGER
current could cause this product to malfunction.  Do not use this product in flammable atmosphere. It
does not have an explosion-proof structure, so flame
 The flow sensor has no moving parts but if the sole- or fires could occur.
noid valve is repeatedly turned on or off, the
rectifier's mesh or fixed section could move slightly  There is a risk of oxygen deficiency if nitrogen gas
and generate particles. Be sure to provide a filter is used for the applicable fluid. Observe the follow-
on the secondary side (downstream) of the flow ing points when handling:
sensor for applications susceptible to particle gen- (1) Use this product in a well-ventilated place
eration. (2) Ventilate the area while using nitrogen gas.
(3) Regularly check nitrogen gas piping for leaks.

1410
 PF-F/PFU Series
WARNING CAUTION Refrigerating
type dryer
 Do not use the product where the product is ex-  Confirm that the product will withstand the working Desiccant
posed to direct-sunlight or may come in contact with environment. type dryer
High polymer
water or rain.  This product cannot be used in environments where func- membrane
type dryer
tional obstacles could occur. Such environments include
 Do not use in a corrosive environment. Use in the Air filter
high temperatures, a chemical atmosphere, or where
environment like this could result in damage or chemicals, vibration, moisture, water drip, coolant or gas Auto. drain
/ others
malfunction. are present; Where ozone is generated. F.R.L.
(Module unit)
 Consult with CKD if ozone could occur in supplied air.  Use within an ambient temperature range 0 to 50˚C. F.R.L.
(Separate)
 Avoid use in ozone occurring environments.  Avoid using in areas where vibration exceeds 49m/s 2
Compact
F.R.
and impact 294m/s2.
 Keep the fluid temperature within 0 to 40˚C. Precise
regulator
Even if the temperature is within the specified range, 5. Securing of space F.R.L.
(Related
do not use this product if the temperature could products)
suddenly change and cause dew to condense. CAUTION
Clean
F.R.
Electro
 This product fails if pressure exceeding the maxi-  Ensure space around the pneumatic component for pneumatic
regulator
mum working pressure is used. Check that the pres- installation, removal, wiring, and piping work. Air
booster
sure is less than the maximum working pressure.
Speed
control valve
 The sensor is dust-proof and drip-proof, so prob-
Silencer
lems do not occur if water gets on the sensor dur-
ing maintenance or cleaning. The sensor should not Check valve
/ others
be exposed to water for long periods or used in Joint
places where water and oil scatter with force. / tube
Vacuum
filter
Installation & Adjustment Vacuum
regulator
Suction
1. Installation CAUTION plate
Magnetic
 Do not remove air compressor packaging or the dust- spring buffer
DANGER proof cap on the piping port until just before the prod- Mechanical
pressure SW
 Use power voltage and output within the specified uct is piped. Electronic
voltage. If voltage exceeding the specified voltage  If the piping port cap is removed from the piping port be- pressure SW
Contact / close
is applied, the sensor could malfunction or be dam- fore piping work is started, foreign matter could enter the contact conf.
SW
aged, or electrical shock or fire could occur. pneumatic component from the piping port and result in
Air sensor
faults or faulty operation.
Pressure SW
 Do not install pneumatic components with a method for coolant
WARNING that supports with pipes. Small
flow sensor
 Check the wire color and terminal numbers when Small
flow controller
wiring. Incorrect wiring connections could result in 2. Operation pre-confirmation
Flow sensor
sensor damage, problems, and malfunctions. Check for air
wire color and terminal numbers against the instruc- CAUTION Flow sensor
for water
tion manual before wiring.  When supplying compressed air after connecting Total air
Insert a noise filter if required. piping, be sure to check for air leaks at all sections system
Total air
where piping is connected. system
(Gamma)
 Check wiring insulation.  Apply a leakage detection agent on pipe connections with
Check that wires do not contact other circuits and a brush, and check for air leaks. Check that leak detec-
Ending

that there are no ground faults or insulation faults tion fluid does not get on resin parts. Otherwise resin could
Display integrated type for compressed air

across terminals. Overcurrent could flow in and be damaged.

damage the sensor.
 Separate the cable from sources of noise such as
 Separate the monitor from high-voltage wires, high power distribution wires. Failure to do so could re-
voltage devices, and powered devices such as sult in malfunctions caused by noise.
motors.
 Do not short-circuit the output contact
Flow sensor

 Check that there are no swarf or wire scraps on the
monitor's gland and sensor connectors before wir-
ing.
If the load is short-circuited, the overcurrent protec-
tion circuit protects the output transistor. If left as is
too long, the output transistor could break.
Over current protection: Approximate 70mA
1411
 PF-F/PFU Series
 
Refrigerating
type dryer
Installation & Adjustment
Desiccant
type dryer CAUTION  Always flush just before piping pneumatic compo-
High polymer nent.
membrane
type dryer
 Do not use this product for loads generating surge
voltage.  Check that foreign matter entering during piping does not
Air filter
When directly driving a load that generates a surge, get into the air compressor.
Auto. drain
/ others such as a relay or solenoid valve, use a sensor with  Apply adequate torque when connecting pipes.
F.R.L. integrated surge absorbing element. Similarly, use  To prevent air leakage and screw damage.
(Module unit)
surge countermeasures if there is a source of surge  First tighten the screw by hand to prevent damage to screw
F.R.L.
(Separate) in the power supply line. threads, then use a tool.
Compact
F.R.  This product cannot withstand lightning surges. (Recommended value)
Precise This product complies with CE Marking, but is not Port thread Tightening torque N·m
regulator
F.R.L. resistant to lightning surges. Protection must be pro- Rc3/8 22 to 24
(Related
products) vided on the system side. Rc1/2 28 to 30
Clean
Rc3/4 31 to 33
F.R.
Electro
 Do not repeatedly bend or tension to leads or wires
pneumatic
Rc1 36 to 38
regulator could disconnect.
Rc11/2 48 to 50
Air
booster  Use the enclosed cable (3 m). Check with CKD when Rc2 54 to 56
Speed a longer cable is required.
control valve  When adjusting the flow with a metering valve (globe
Silencer valve, ball valve, etc.), install the metering valve on
Check valve
the secondary side of the sensor (downstream). If
/ others 3. Piping the metering valve is installed on the primary side,
Joint
/ tube drift (turbulent flow) could occur and result in an
CAUTION error.
Vacuum
filter
 When connecting pipes, wrap sealing tape in the
Vacuum
regulator opposite direction from threads starting 2 mm in-
Suction side from the end of piping threads.
plate
 If sealing tape protrudes from pipe threads, it could be cut
Magnetic
spring buffer when screwed in. This could cause the tape to enter the
solenoid valve and lead to faults.
Mechanical
pressure SW  Do not install a regulator before the sensor. Incor-
Electronic rect flow could cause errors.
pressure SW
Contact / close  When installing a pressure reduction valve on the primary
contact conf.
SW side, be sure to include straight piping having an inner
Air sensor diameter of 10 D or more.
* D indicates the pipe's inner diameter.
Pressure SW
for coolant  Select a pressure reduction valve having sufficient flow
Small for maximum sensor flow.
flow sensor
 When using a liquid sealing agent, check that it does not
Small
get on resin parts. Otherwise resin could be damaged.
 Check that the fluid direction and the direction indi-
flow controller
cated on the sensor are the same when piping. Oth-
Flow sensor
for air
 Check that the pipe connected to the pneumatic erwise reading will not be correct.
Flow sensor
for water component is not dislocated due to vibration, loos-  When using an elbow or bushing in piping, install 10
Total air ening, or pulling. D or larger straight piping on the primary side and 5
system
Total air  Dislocation of piping will cause hazards. D or larger straight piping on the secondary side.
system
(Gamma)  Be sure to provide straight piping when using the PF8000F/
Ending
 Observe the following precautions when using ny- PF16000F Series.
lon tubes or urethane tubes for piping material.  Note that the bore can be changed up to one rank upward
 Use a flame resistance tube or steel pipe when using in with the bushing.
an environment where spatter could scatter.
 When using the standard pushin joint for spiral tubing, fix
10D 5D
the base of tubing in place with a hose band. Holding will
drop if tubing rotates. Using an elbow

 Connect piping so that connections are not dislo-

cated by system movement, vibration, or tension. 10D 5D

Using a bushing
Model no. D dimension
PF8000F 40mm
PF16000F 50mm

1412
 PF-F/PFU Series
 Check that force is not applied to resin parts when  Quality of air
Refrigerating
piping.  Use a CKD clean air system depending on the applica- type dryer
tion. Desiccant
type dryer
 Use compressed air free of oxidized oil, tar, or carbon High polymer
4. Pneumatics pressure source from the air compressor. membrane
type dryer
 Use compressed air free of solid foreign matter. Air filter
CAUTION  Install a filter, air dryer, and oil mist filter on the primary
Auto. drain
 Install an air filter just before the pneumatic compo- side (upper stream side) of the sensor. The sensor's mesh- / others

nent in the circuit. ing rectifies flow in the pipe. It does not filter out foreign F.R.L.
(Module unit)
substances, so provide a filter.
 When supplying compressed air for the first time F.R.L.
(Separate)
after connecting pipes, do not apply high pressure Compact
F.R.
suddenly.
Precise
 Piping connection could deviate and cause piped tubing regulator
to pop off and lead to accidents. F.R.L.
Filter Air Oil mist Flow sensor Valve (Related
products)
dryer filter PFDseries
Clean
F.R.
Electro
• When requiring ultra clean air pneumatic
regulator
Air
booster
Speed
control valve

Filter Air Oil mist Flow sensor Valve Precise Silencer

dryer filter PFDseries filtration filter
Check valve
/ others

During Use & Maintenance Joint

/ tube
Vacuum
filter

1. During use 2. Maintenance and inspection Vacuum

regulator
Suction
WARNING CAUTION plate
Magnetic
 A flow several times higher than the rated flow oc-  Do not apply excessive torque to the display. spring buffer
curs if the valve connected to the sensor is sud- The display can be freely rotated 270˚ so turn it to Mechanical
pressure SW
denly opened. This can damage the platinum mem- an easy-to-see position. The stopper could be dam-
Electronic
brane sensor or rectifying unit and cause fluid to aged if the display is rotated with excessive force. pressure SW
flow to the secondary side. Gradually open the valve Contact / close
contact conf.
connected to the sensor while checking that the  Be sure to turn power off, stop supplied compressed SW

monitor display does not exceed the rated flow. air, and check that there is no residual pressure Air sensor

before starting maintenance. Pressure SW

for coolant
 This is required to ensure safety.
CAUTION Small
flow sensor
 Inspect the sensor at least once a year and confirm
 If a problem occurs during operation, immediately Small
that it operates correctly. flow controller
turn power off, stop use, and contact your dealer.
Flow sensor
Slight heating (40˚C) of the display section is not  Do not disassemble or modify this product. Doing for air

problem. so could result in faults. Flow sensor

for water

 Internal settings, such as the hardware check, are Total air

system
made in the first 10 seconds after power is turned Total air
system
ON. The display and output do not function correctly (Gamma)

during this time. If an interlock circuit is established Ending

with control system devices using switch output, an
Display integrated type for compressed air

abnormal stop could occur, so mask the output dur-

ing this time.
 If the output setting value is changed, control sys-
tem devices could operate unintentionally. Stop
devices before changing settings.
 When an interlock circuit is used, use a double in-
Flow sensor

terlock circuit and regularly check that operations

are correct.

1413
 Flow sensor for compressed air
Medium flow type
Refrigerating
type dryer
Desiccant
type dryer
PF500F to PF4000F series
High polymer • Flow rate range: 25 to 500, 50 to 1000,
membrane
type dryer 100 to 2000, 200 to 4000 L/min. (normal)
Air filter

Auto. drain
/ others
F.R.L.
Specifications
(Module unit)
Descriptions PF500F- PF500F- PF1000F- PF1000F- PF2000F- PF2000F- PF4000F- PF4000F-
F.R.L. 10 15 10 15 15 20 20 25
(Separate)
Specifications

Compact Flow rate range L/min.(normal) 25 to 500 50 to 1000 100 to 2000 200 to 4000
F.R.
Port size Rc3/8 Rc1/2 Rc3/8 Rc1/2 Rc1/2 Rc3/4 Rc3/4 Rc1
Precise
regulator Working fluid Compressed air, nitrogen
Working conditions

F.R.L. Working air quality Atmospheric dew point -17˚C or less, no dew condensation (Note 1)
(Related
products)
Max. working pressure MPa 1.0
Clean
F.R. Min. working pressure MPa 0.1
Electro
pneumatic Withstanding pressure MPa 1.5
regulator
Air Ambient temperature and humidity 0 to 50˚C , 85%RH or less
booster
Fluid temperature ˚C 0 to 40
Speed
±1.5%FS (0.7MPa, 20˚C)
Precision

control valve Linearity

Silencer Pressure characteristics ±1.5%FS (0.1 to 1.0MPa, 0.7MPa reference)

Check valve
Temperature characteristics ±2.0%FS (0 to 40˚C, 20˚C reference)
/ others Pressure loss MPa 0.005 or less (maximum flow rate, 0.7MPa)
Joint
/ tube Responsiveness sec 2.5
Vacuum Indicator 5 digit LED display unit: L/min. (normal)
filter
Min. display flow (Note 2) 10 20 30 50
Vacuum
regulator Display resolution 1 10
Suction Integrated flow Max. 9 digits (H and L separately displayed)
plate
Analog output Standard: 0 to 5 VDC Option: 4DC to 20mA, 1 to 5 V, 0 to 10 V
Output

Magnetic
spring buffer
Switch output (Note 3) 1 point (transistor open collector) green LED lighting during operation
Mechanical
pressure SW Pulse output (option) (Note 4) 10L (normal)/pulse
Electronic Power voltage V 24DC (8W or less)
pressure SW
Contact / close Cable Enclosed (with 3m connector, 0.5mm2 conductor)
contact conf.
SW Set value holding function (Note 5) Semi permanent due to EEPROM
Installation

Air sensor Installation attitude Horizontal or vertical

Pressure SW Strait piping section Not required
for coolant
Protective structure IP64 or equivalent
Small
flow sensor Weight kg 0.85 1.4
Small Note 1: If foreign matter, moisture or oil is contained in the compressed air, detecting flow rate is failed, so "sensor error" is displayed.
flow controller
Install a filter, refrigerating type dryer and oil mist filter before a flow sensor.
Flow sensor Note 2: If lower than min. flow rate range, 0 is indicated. Also, for indicated value under flow rate range, accuracy is not guaranteed.
for air
Note 3: If option "A1" (4 to 20mA DC) or "A6" (integrating pulse) is selected, switch output cannot be used.
Flow sensor Note 4: Refer to descriptions of integrated pulse output on page 1425 for details of pulse output.
for water
Note 5: The integrated flow value is reset when power is turned OFF.
Total air
system
Total air
system
(Gamma)

Ending

1414
 PF500F to PF4000F Series
How to order
How to order Refrigerating
type dryer
Model no. Desiccant
PF 2000F 15 A1 B type dryer
High polymer

PF4000F
PF1000F

PF2000F
membrane

PF500F
type dryer

Air filter

Auto. drain
Symbol Descriptions / others

A Flow rate range F.R.L.

(Module unit)
A Flow rate range 500F 25 to 500 L/min.(normal) 
F.R.L.
1000F 50 to 1000 L/min.(normal)  (Separate)
2000F 100 to 2000 L/min.(normal)  Compact
F.R.
4000F 200 to 4000 L/min.(normal) 
Precise
B Port size regulator
B Port size 10 Rc3/8   F.R.L.
(Related
15 Rc1/2    products)
Clean
20 Rc3/4   F.R.
25 Rc1  Electro
pneumatic
regulator
C Output
C Output Blank Analog output 0 to 5 VDC (standard)    
Air
booster
Note 1    
A1 Analog output 4 to 20mA DC Speed
A2 Analog output 1 to 5 VDC     control valve

A3 Analog output 0 to 10 VDC     Silencer

A6 Integrated pulse output    
Check valve
/ others
D Bracket
D Bracket Blank Without bracket     Joint
/ tube
B With bracket (with screw)    
Vacuum
filter
Vacuum
Note on model no. selection Discrete bracket model no. regulator
Note 1 Model no. Bracket model no. Suction
plate
(Option) PF500F/PF1000F/PF2000F PF-FL307499
Symbol Standard Magnetic
A1 A2 A3 A6 spring buffer
PF4000F PF-FL307500
 
Analog output

Blank (0-5V)
Mechanical
A1(4-20mA)  pressure SW
A2(1-5V)  Electronic
pressure SW
A3(0-10V) 
Contact / close
A6 (pulse output)  contact conf.
SW
Switch output   
Air sensor
* Consult with CKD for other combinations.
Pressure SW
for coolant
Small
flow sensor
<Example of model number>
Small
flow controller
PF2000F-15-A1B
Flow sensor
Model : PF2000F for air
A Flow rate range : 100 to 2000 L/min.(normal) Flow sensor
for water
B Port size : Rc1/2
Total air
C Output : Analog output 4 to 20mA DC system
D Bracket : With bracket (with M4 screw) Total air
system
(Gamma)

Ending
Display integrated type for compressed air
Flow sensor

1415
 PF500F to PF4000FSeries
Refrigerating
Internal structure and parts list
type dryer
Desiccant
type dryer
High polymer  PF500F to PF4000F
membrane
type dryer No. Parts name Material
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
Air filter 1 Piping adapter A6063 Aluminum alloy
Auto. drain 2 Body A6063 Aluminum alloy
/ others
3 Collar A5056 Aluminum alloy
F.R.L.
(Module unit) 4 Mesh SUS304 Stainless steel
F.R.L. 5 Packing seal NBR Nitrile rubber
(Separate)
6 Case A ABS ABS resin
Compact
F.R. 7 Display circuit board
Precise 8 CPU circuit board
regulator
F.R.L.
9 O ring NBR Nitrile rubber
(Related
products) IN OUT 10 O ring NBR Nitrile rubber
Clean 11 Sensor circuit boar
F.R.
Electro 12 Connector case 2 ABS ABS resin
pneumatic
regulator 13 Sensor assembly PPS Polyphenylene sulfide
Air 14 Gasket NBR Nitrile rubber
booster
15 O ring NBR Nitrile rubber
Speed
control valve 16 Platinum thermo sensor
16 17
Silencer 17 Platinum flow sensor

Check valve
/ others
Joint
/ tube
Vacuum
filter Pressure loss
Vacuum
regulator
Suction
plate  PF500F  PF1000F
Magnetic
spring buffer 0.005 0.010
Mechanical
pressure SW
Electronic
0.004 PF500F-10 (at0.7MPa) 0.008 PF1000F-10 (at0.7MPa)
pressure SW PF500F-10 (at0.3MPa) PF1000F-10 (at0.3MPa)
Contact / close PF500F-15 (at0.7MPa) PF1000F-15 (at0.7MPa)
Pressure loss (MPa)

Pressure loss (MPa)

contact conf. 0.003 0.006

SW PF500F-15 (at0.3MPa) PF1000F-15 (at0.3MPa)
Air sensor
0.002 0.004
Pressure SW
for coolant
Small 0.001 0.002
flow sensor
Small
flow controller 0.000 0.000
0 100 200 300 400 500 0 200 400 600 800 1000
Flow sensor
for air Flow (L/min. (normal)) Flow (L/min. (normal))
Flow sensor
for water
Total air  PF2000F  PF4000F
system
Total air
system 0.025 0.025
(Gamma)

Ending PF4000F-20 (at0.7MPa)

0.020 PF2000F-15 (at0.7MPa) 0.020
PF4000F-20 (at0.3MPa)
PF2000F-15 (at0.3MPa) PF4000F-25 (at0.7MPa)
PF2000F-20 (at0.7MPa)
Pressure loss (MPa)

Pressure loss (MPa)

0.015 0.015 PF4000F-25 (at0.3MPa)

PF2000F-20 (at0.3MPa)

0.010 0.010

0.005 0.005

0.000 0.000
0 500 1000 1500 2000 0 1000 2000 3000 4000
Flow (L/min. (normal)) Flow (L/min. (normal))

1416
 PF500F to PF4000F Series
Dimensions
Dimensions Refrigerating
type dryer
Desiccant
type dryer
 PF500F to PF4000F High polymer
membrane
type dryer
A
Air filter
Model no. Port size
60 F
PF*00F-10 Rc3/8 Auto. drain
/ others
Cable 3 m (accessories) PF*00F-15 Rc1/2
F.R.L.

ø6
PF*00F-20 Rc3/4 (Module unit)

PF*00F-25 Rc1 F.R.L.

(Separate)
Compact
Inlet Outlet F.R.
Precise
Bracket (option) 6.5 regulator

4.5
F.R.L.
G (Related
B H products)
47 E Clean
F.R.
Electro
pneumatic
regulator
41

Air
booster
Speed
C

control valve

Silencer
D

Check valve
/ others
I
3

4-L 24
8

Joint
J / tube
K 2-Port size Vacuum
filter
Vacuum
regulator
Suction
Model no. A B C D E F G H I J K L plate
M4 screw
PF500F/PF1000F 135 52 85 22 67.5 26 26 36 33 64 72 depth 4.5 Magnetic
M4 screw spring buffer
PF2000F 135 55 96 27.5 67.5 26 26 36 33 64 72 depth 4.5
M5 screw Mechanical
PF4000F 176 65 109 34 88 46.5 28 40 42 74 84 depth 5.5 pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
Display integrated type for compressed air
Flow sensor

1417
 Flow sensor for compressed air
Large flow rate type
Refrigerating
type dryer
Desiccant
type dryer
PF8000F to PF16000F series
High polymer
• Flow rate range: 400 to 8000, 800 to 16000 L/min. (normal)
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L. Specifications
(Module unit)
F.R.L. Descriptions PF8000F-40 PF16000F-50
(Separate)
Specifications

Compact Flow rate range L/min.(normal) 400 to 8000 800 to 16000

F.R.
Port size Rc1 1/2 Rc 2
Precise
regulator Working fluid Compressed air, nitrogen
Working conditions

F.R.L.
(Related Working air quality Atmospheric dew point -17˚C or less, no dew condensation (Note 1)
products)
Clean Max. working pressure MPa 1.0
F.R.
Electro
Min. working pressure MPa 0.1
pneumatic
regulator Withstanding pressure MPa 1.5
Air Ambient temperature and humidity 0 to 50˚C , 85%RH or less
booster
Speed
Fluid temperature ˚C 0 to 40
Precision

control valve Linearity ±2.5%FS (0.7MPa, 20˚C)

Silencer Pressure characteristics ±1.5%FS (0.1 to 1.0MPa, 0.7MPa reference)
Check valve Temperature characteristics ±2.0%FS (0 to 40˚C, 20˚C reference)
/ others
Pressure loss MPa 0.005 or less (maximum flow rate, 0.7MPa)
Joint
/ tube Responsiveness sec 2.5
Vacuum Indicator 5 digit LED display unit: m3/min. (normal)
filter
Vacuum Min. display flow (Note 2)m3/min.(normal) 0.1 0.2
regulator
Display resolution 0.01 0.10
Suction
plate Integrated flow Max. 9 digits (H and L separately displayed)
Magnetic Analog output Standard: 0 to 5 VDC Option: 4DC to 20mA, 1 to 5 V, 0 to 10 V
Output

spring buffer
Switch output (Note 3) 1 point (transistor open collector) green LED lighting during operation
Mechanical
pressure SW Pulse output (option) (Note 4) 100L (normal)/pulse
Electronic
pressure SW Power voltage V 24DC (8W or less)
Contact / close Cable Enclosed (with 3m connector, 0.5mm2 conductor)
contact conf.
SW Set value holding function (Note 5) Semi permanent due to EEPROM
Installation

Air sensor
Installation attitude Horizontal or vertical
Pressure SW Strait piping section Upstream 10D/down stream 5D
for coolant
Small
Protective structure IP64 or equivalent
flow sensor
Weight kg 3.8 4.0
Small
Note 1: If foreign matter, moisture or oil is contained in the compressed air, detecting flow rate is failed, so "sensor error" is displayed.
flow controller
Install a filter, refrigerating type dryer and oil mist filter before a flow sensor.
Flow sensor
for air Note 2: If lower than min. flow rate range, 0 is indicated. Also, for indicated value under flow rate range, accuracy is not guaranteed.
Note 3: If option "A1" (4 to 20mA DC) or "A6" (integrating pulse) is selected, switch output cannot be used.
Flow sensor
for water Note 4: Refer to descriptions of integrated pulse output on page 1425 for details of pulse output.
Note 5: The integrated flow value is reset when power is turned OFF.
Total air
system
Total air
system
(Gamma)

Ending

1418
 PF8000F / PF16000F Series
How to order
How to order Refrigerating
type dryer
Desiccant
PF 8000F 40 A1 type dryer
High polymer
membrane
type dryer

Air filter
Model no.
Auto. drain
/ others

PF16000F
F.R.L.

PF8000F
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Symbol Descriptions
Precise
A Flow rate range regulator
A Flow rate range 8000F 400 to 8000 L/min.(normal)  F.R.L.
(Related
16000F 800 to 16000 L/min.(normal)  products)
Clean
B Port size F.R.
B Port size 40 Rc1 1/2  Electro
pneumatic
50 Rc2  regulator
Air
C Output booster
C Output Blank Analog output 0 to 5 VDC (standard)   Speed
Note 1  
control valve
A1 Analog output 4 to 20mA DC
A2 Analog output 1 to 5 VDC   Silencer

A3 Analog output 0 to 10 VDC   Check valve

Note on model no. selection A6 Integrated pulse output   / others
Joint
Note 1 / tube
(Option)
Symbol Standard Vacuum
A1 A2 A3 A6 filter
 
Analog output

Blank (0-5V) Vacuum

A1(4-20mA)  regulator

A2(1-5V)  Suction
plate
A3(0-10V) 
Magnetic
A6 (pulse output)  spring buffer
Switch output    Mechanical
pressure SW
* Consult with CKD for other combinations.
Electronic
pressure SW
<Example of model number> Contact / close
contact conf.
SW
PF8000F-40-A1
Air sensor
Model : PF8000F
Pressure SW
A Flow rate range : 400 to 8000 L/min.(normal) for coolant
B Port size : Rc1 1/2 Small
C Output : Analog output 4 to 20mA DC flow sensor
Small
flow controller
Flow sensor
for air
Pressure loss Flow sensor
for water
Total air
system
 PF8000F-40  PF16000F-50
Total air
system
(Gamma)
0.010 0.005
Ending
(0.7MPa) (0.7MPa)
0.008 0.004
Display integrated type for compressed air

(0.4MPa) (0.4MPa)
Pressure loss (MPa)

Pressure loss (MPa)

0.006 0.003

0.004 0.002

0.002 0.001
Flow sensor

0.000 0.000
0 1000 2000 3000 4000 5000 6000 7000 8000 0 2000 4000 6000 8000 10000 12000 14000 16000
Flow (L/min. (normal)) Flow (L/min. (normal))

1419
 PF8000F / PF16000FSeries
Refrigerating
Internal structure and parts list
type dryer
Desiccant
type dryer
High polymer  PF8000F/PF16000F
membrane
type dryer 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
Air filter

Auto. drain
/ others
F.R.L. 25 16
(Module unit)
F.R.L. 24 17 18
(Separate)
19
Compact
F.R.
20
Precise
regulator 21
F.R.L.
(Related 22
products)
Clean 23
F.R.
Electro IN
pneumatic
regulator OUT
Air
booster
Speed
control valve

Silencer
No. Parts name Material No. Parts name Material
Check valve 1 Attachment A6063 Aluminum alloy 14 Gasket NBR Nitrile rubber
/ others
Joint 2 Body A6063 Aluminum alloy 15 O ring NBR Nitrile rubber
/ tube
3 Collar A5056 Aluminum alloy 16 Platinum thin membrane thermo sensor
Vacuum
filter 4 Mesh SUS304 Stainless steel 17 Platinum thin membrane flow sensor
Vacuum 5 Packing seal NBR Nitrile rubber 18 Sub-attachment SCS13 Stainless steel
regulator
6 Case A ABS ABS resin 19 O ring NBR Nitrile rubber
Suction
plate 7 Display circuit board 20 Aspirator C3604 Free cutting brass
Magnetic 8 CPU circuit board 21 Main body 2 A6063 Aluminum alloy
spring buffer
9 O ring NBR Nitrile rubber 22 Orifice C3604 Free cutting brass
Mechanical
pressure SW 10 O ring NBR Nitrile rubber 23 O ring NBR Nitrile rubber
Electronic 11 Sensor circuit boar 24 Main body 1 A6063 Aluminum alloy
pressure SW
12 Connector case 2 ABS ABS resin 25 O ring NBR Nitrile rubber
Contact / close
contact conf. 13 Sensor assembly PPS Polyphenylene sulfide
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending

1420
 PF8000F / PF16000F Series
Dimensions
Dimensions Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
WIRING
F.R.
BROWN 24 VDC
WHITE
BLUE
BLACK
ANALOG 0-5V(0-16000 NL/min.)
GND
OUT NPN MAX. DC30V 50mA
Electro
pneumatic
PF16000F-50
MADE IN JAPAN
regulator
RANGE 800-16000 NL/min.
PRESSURE MAX. 1.0MPa SERIAL
FLUID TEMP. 0-40˚C ******
Air
booster
Speed
control valve

B
Silencer

Check valve
/ others

C
Joint
/ tube

D
Vacuum
filter
Vacuum
300 A regulator
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
Model no. A B C D Port size contact conf.
SW
PF8000F-40 74 148 65 32.5 Rc1 1/2
Air sensor
PF16000F-50 79 158 75 37.5 Rc2
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
Display integrated type for compressed air
Flow sensor

1421
 Flow sensor for compressed air
Modular design type
Refrigerating
type dryer
Desiccant
type dryer
PFU500F to PFU2000F series
High polymer
• Flow rate range: 25 to 500, 50 to 1000, 100 to 2000 L/min. (normal)
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L. Specifications
(Module unit)
F.R.L. Descriptions PFU500F-10 PFU1000F-10 PFU2000F-15
(Separate)
Specifications

Compact Flow rate range L /min. (normal) 25 to 500 50 to 1000 100 to 2000
F.R.
Precise
Port size Rc3/8 Rc1/2
regulator Working fluid Compressed air, nitrogen
Working conditions

F.R.L.
(Related Working air quality Atmospheric dew point -17˚C or less, no dew condensation (Note 1)
products)
Clean Max. working pressure MPa 1.0
F.R.
Electro
Min. working pressure MPa 0.1
pneumatic
regulator Withstanding pressure MPa 1.5
Air Ambient temperature and humidity 0 to 50˚C, 85%RH or less
booster
Speed
Fluid temperature ˚C 0 to 40
Precision

control valve
Linearity ±1.5%FS (0.7MPa, 20˚C)
Silencer Pressure characteristics ±1.5%FS (0.1 to 1.0MPa, 0.7MPa reference)
Check valve Temperature characteristics ±2.0%FS (0 to 40˚C, 20˚C reference)
/ others
Pressure loss MPa 0.005 or less (maximum flow rate, 0.7MPa)
Joint
/ tube Responsiveness sec 2.5
Vacuum
filter Indicator 5 digit LED display unit: L/min. (normal)
Vacuum Min. display flow (Note 2) 10 20 30
regulator
Display resolution 1 10
Suction
plate Integrated flow Max. 9 digits (H and L separately displayed)
Magnetic Analog output Standard: 0 to 5 VDC Option: 4DC to 20mA, 1 to 5 V, 0 to 10 V
Output

spring buffer
Mechanical
Switch output (Note 3) 1 point (transistor open collector) green LED lighting during operation
pressure SW
Pulse output (option) (Note 4) 10L (normal)/pulse
Electronic
pressure SW Power voltage V 24DC (8W or less)
Contact / close
contact conf.
Cable Enclosed (with 3m connector, 0.5mm2 conductor)
SW
Set value holding function (Note 5) Semi permanent due to EEPROM
Air sensor
Installation

Installation attitude Horizontal or vertical

Pressure SW Strait piping section Not required
for coolant
Small Connection module W3000-10 W4000-15
flow sensor
Protective structure IP64 or equivalent
Small
flow controller Weight kg 1.5 1.8
Flow sensor Note 1: If foreign matter, moisture or oil is contained in the compressed air, detecting flow rate is failed, so "sensor error" is displayed.
for air Install a filter, refrigerating type dryer and oil mist filter before a flow sensor.
Flow sensor Note 2: If lower than min. flow rate range, 0 is indicated. Also, for indicated value under flow rate range, accuracy is not guaranteed.
for water Note 3: If option "A1" (4 to 20mA DC) or "A6" (integrating pulse) is selected, switch output cannot be used.
Total air Note 4: Refer to descriptions of integrated pulse output on page 1425 for details of pulse output.
system
Note 5: The integrated flow value is reset when power is turned OFF.
Total air
system
(Gamma)

Ending

1422
 PFU Series
How to order
How to order Refrigerating
type dryer
Model no. Desiccant
PFU 2000F 15 4W A1 X type dryer
High polymer

PFU2000F
PFU1000F
membrane

PFU500F
type dryer

Air filter

Auto. drain
Symbol Descriptions / others
A Flow rate range F.R.L.
A Flow rate range (Module unit)
500F 25 to 500 L/min.(normal) 
F.R.L.
1000F 50 to 1000 L/min.(normal)  (Separate)
2000F 100 to 2000 L/min.(normal)  Compact
F.R.
B Port size
B Port size Precise
10 Rc3/8   regulator
15 Rc1/2  F.R.L.
(Related
products)
C Connection module Clean
C Connection module  
3W W3000-10 F.R.
Note 1
4W W4000-15  Electro
pneumatic
regulator
D Output Air
D Output Blank Analog output: 1 to 5 VDC (standard)    booster
Note 2
A1 Analog output: 4 to 20mA DC    Speed
control valve
A2 Analog output: 1 to 10 VDC   
A3 Analog output: 1 to 10 VDC    Silencer

A6 Integrated pulse output    Check valve

/ others
E Option
E Option Joint
Blank No option / tube
Note 1
X IN/OUT reverse flow (left from right)   
Note on model no. selection   
Vacuum
filter
N Nonrelief
Note 1: Combined with CKD F.R.L. module filter Vacuum
regulator W*000 Series. Consult with CKD regulator
for combinations with other F.R.L. units. Suction
Note 2 plate

(Option) Magnetic
Symbol Standard spring buffer
A1 A2 A3 A6
  Mechanical
Analog output

Blank (0-5V) pressure SW

A1(4-20mA) 
Electronic
A2(1-5V)  pressure SW

A3(0-10V)  Contact / close

contact conf.
 SW
A6 (pulse output)
Switch output    Air sensor

* Consult with CKD for other combinations. Pressure SW

for coolant
Small
flow sensor
Small
<Example of model number> flow controller

PFU2000F-15-4W-A1X Flow sensor

for air
Model : PFU2000F modular design type Flow sensor
A Flow rate range : 100 to 2000L/min. (normal) for water

B Port size : Rc1/2 Total air

system
C Connection module : W4000-15 Total air
D Output : Analog output 4 to 20mA DC system
(Gamma)
E Option : IN and OUT reverse flow (left from right)
Ending
Display integrated type for compressed air

Internal structure and parts list

Refer to page 1416.

Flow sensor

1423
 PFU500F to PFU2000F Series
Refrigerating Dimensions
type dryer
Desiccant
type dryer
High polymer  PFU500F to PFU2000F
membrane
type dryer

Air filter
A
Auto. drain 22
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
B
Compact 68.5
F.R.
Precise F G
regulator
E
F.R.L.
(Related
products) Display direction changeable
Clean 7
F.R.

7
Electro
C

pneumatic
regulator
55

Air
45

ø6
booster
Speed
control valve
60
70

Silencer Cable 3 m (accessories)

PRESS
TURN

Check valve
/ others
D

Joint 2-H
/ tube
Vacuum
filter
No. Parts name Remarks
Vacuum 2 3
regulator 1 Filter / regulator W3000-10/W4000-15
Suction 1 ø7 Drain port 2 T type bracket set B310/B410
plate
3 Flow meter PFU500F/PFU1000F/PFU2000F
Magnetic
spring buffer
Mechanical
pressure SW
Electronic Model no. A B C D E F G H
pressure SW
PFU500F/PFU1000F 189 113.5 104 147 63 45 34.5 Rc3/8
Contact / close
contact conf. PFU2000F 206 123.5 110 172 80 55 42.5 Rc1/2
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending

1424
 PF Series
Electric wiring
PF series electric wiring Refrigerating
type dryer
1 Analog output (option symbol: blank, -A1, -A2, -A3) Desiccant
type dryer
High polymer
Load resistance of analog output membrane
0~5VDC (blank) 4 to 20mA (-A1) DC Descriptions
type dryer
Analog output Load resistance
Air filter
0 to 5 VDC 50KΩ and over
Auto. drain
4 to 20mA DC 500Ω or less / others

Analog output (mA)

Analog output (V)

1 to 5 VDC 50KΩ and over F.R.L.

(Module unit)
0 to 10 VDC 50KΩ and over
F.R.L.
(Separate)
Model no. Min. L/min. (normal) FS L/min.(normal)
PF500F/ Compact
PFU500F 25 500 F.R.
PF1000F/
PFU1000F 50 1000 Precise
PF2000F/ regulator
PFU2000F 100 2000 F.R.L.
PF4000F (Related
200 4000 products)
Min. F.S Min. F.S
PF8000F 400 8000 Clean
Flow L/min. (normal) Flow L/min. (normal) F.R.
PF16000F 800 16000 Electro
pneumatic
1 to 5V (-A2) DC 0 to 10V (-A3) DC regulator

䢇 The relation of the flow and analog output Air

booster
is shown in the graph at left. Analog output Speed
control valve
is not output correctly when lower than the
Analog output (V)

Analog output (V)

minimum. Note that flow is displayed on the Silencer

monitor even when less than the minimum. Check valve

/ others
䢇 Do not short-circuit the analog output ter-
Joint
minal (ANO) with other terminals. Failure / tube

to observe this could result in problems. Vacuum

filter
䢇 Keep wiring short to prevent the effect of Vacuum
regulator
Min. F.S Min. F.S noise. Separate the wire from sources of
Suction
Flow L/min. (normal) Flow L/min. (normal) noise such as power distribution cables. plate
䢇 Use the following cable when extensions Magnetic
spring buffer
are required:
Mechanical
Part name: Extension cable pressure SW

Model no.: PF-FL-280775. Electronic

pressure SW
Length: 3 m Contact / close
contact conf.
Length must be 10 m or less. SW

Air sensor

2 Integrated pulse output (option symbol: -A6) Pressure SW

for coolant
䢇 The integrated pulse outputs the pulse at the following integrated value. L (normal) 䢇 Electric specifications Small
flow sensor
Model no. PF500F PF1000F PF2000F PF4000F PF8000F PF16000F ⽧Output circuit
Small
flow controller
Integrated flow
per pulse 10 100 Transistor PULSE OUT Flow sensor
output for air
Internal circuit

(Example) The pulse waveform for the PF8000F is shown below. Flow sensor
Transistor output rated
for water
When displaye integration exceeds When displaye integration exceeds Max. rated voltage 30 VDC
100 L (normal) 200 L (normal) Max. rated current 50mA Total air
25msec. 25msec. 25msec. system
Total air
system
GND (Gamma)
ON ON 25
msec. GND common
Ending
Display integrated type for compressed air

OFF OFF
Time Time

Note that the integrated display is updated at 1 sec. intervals.

Flow sensor

1425
 PF500F to PF16000F Series
Refrigerating
type dryer
配線方法
Electric wiring
Desiccant
type dryer
• Middle flow rate type FP500F/PF1000F/PF2000F/PF4000F
High polymer • Large flow rate type PF8000F/PF16000F
membrane Connector pin No
type dryer

Air filter

Auto. drain
/ others 3
F.R.L. 2
(Module unit)
F.R.L.
(Separate) 4
Compact Connector No
F.R. 1
Precise
 Standard/option A2 A3 A6 Enclosed cable (3m)
regulator Plug (male)
F.R.L.
(Related
products)
(1) +V (brown)
Clean
F.R. · · · Connecting to plus (+) of DC power supply: 24VDC ±10%
Electro
pneumatic
regulator (2) ANO (white)
Main circuit

Air · · · Analog output: Voltage output proportional to flow rate

booster
Speed (4) ALARM (black)
control valve · · · Switch output
Silencer Pulse for A6 : Max. 30 VDC/50mA
(3) GND(blue)
Check valve
/ others
· · · Connecting to minus (-) of DC power supply
Joint
/ tube
1) Example of connection with relay, resistance load and recorder
Vacuum
filter
Vacuum
+V (brown)
regulator
+
Suction
plate ANO (white)
Load
Main circuit

Magnetic
spring buffer + Power
Mechanical ALARM (black) supply DC
pressure SW
Electronic
pressure SW
Contact / close
GND(blue)
contact conf.
SW +
Air sensor Recorder
2) Example of connection with programmable controller
Pressure SW
for coolant
PC
Small +V (brown) 24+
flow sensor
Small Power
Internal circuit

flow controller ANO (white) + supply DC

Main circuit

Flow sensor
for air
Flow sensor ALARM (black) Input
for water
Total air
system
Total air
GND(blue)
system
(Gamma)

Ending
 Option A1 4-20mA output

+V (brown)
· · · Connecting to plus (+) of DC power supply: 24VDC ±10%
ANO + (white) +
Main circuit

· · · Connect to 4-20mA input unit

Receiver
ANO - (black)

GND(blue)
· · · Connecting to minus (-) of DC power supply

• Switch output cannot be used when 4-20mA output is selected.

1426
MEMO Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
regulator
Air
booster
Speed
control valve

Silencer

Check valve
/ others
Joint
/ tube
Vacuum
filter
Vacuum
regulator
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
Display integrated type for compressed air
Flow sensor

1427
 PF-F / PFU Series
Refrigerating
Operation explanation
type dryer
Desiccant
type dryer
High polymer  Output light  Unit light instantaneous flow
membrane Indicates the switch's output state.
type dryer • When ON, indicates that the 5-digit
digital display is showing the
Air filter instantaneous flow.

Auto. drain
 5 digit digital display
/ others
F.R.L.
CKD FLUEREX • Displays the instantaneous flow and
(Module unit) L / min.(nor) integrated flow.
OUT <WRITE MODE>
F.R.L. • Displays output setting value, etc.
(Separate)
Compact
F.R.  Change key
Precise <MEASURING MODE>
regulator H • Changes between instantaneous and
F.R.L. TOTAL integrated flows.
(Related L
 Unit light integrated flow <WRITE MODE>
products) • Use to enter the setting.
Clean <L> AIR FLOW SENSOR PF SERIES
F.R. • Indicates the low-order digit of
Electro the integrated flow. (Unit: L)  UP key  Shift key
pneumatic
regulator <H>
• Indicates the high-order digit of <MEASURING MODE> <MEASURING MODE>
Air the integrated flow. (Unit: L) • Toggles between H and L when • Changes to the WRITE MODE
booster the integrated flow is displayed. when held down for 2 seconds.
Speed <WRITE MODE> <WRITE MODE>
control valve • Increments the blinking digit. • Shifts the blinking digit to the right.
Integrated flow is expressed in up to 9 digits
Silencer (H) High-order digit : 09999
(L) Low-order digit : 99999

Check valve
/ others Note: The unit is different for PF500F to PF4000F, PFU500F to PFU2000F and PF8000F/PF16000F. The above explanation is for the PF500F to PF4000F
Joint models. Exchange the units when applying for the PF8000F/PF16000F.
/ tube PF500F to PF4000F, PFU500F to PFU2000F :L/min. (normal)
Vacuum PF8000F/PF16000F :m3/min. (normal) (1000-fold of L/min. (normal), with decimal point.)
filter
Vacuum
regulator  Switch output parameter
Suction
plate
Magnetic • Three types of parameters are selected based on the applications.
spring buffer
Mechanical Parameter 0 (zero) Parameter 1 Parameter 2
pressure SW
• Use this to detect errors in a disconnected state • Use this to detect flow errors • Output when the integrated flow reaches the
Electronic setting value
pressure SW
Contact / close
contact conf. ON ON ON
SW
Output Output Output
Air sensor (Alarm) (Alarm) (Alarm)

Pressure SW OFF OFF OFF

for coolant
Small L (Low) H (High) L (Low) H (High) Set value
flow sensor
Small Instantaneous flow L/min. (normal) Instantaneous flow L/min. (normal) Integrated flow L (normal)
flow controller
Flow sensor
for air
Flow sensor
for water
Total air  Hysteresis  Clear with integrated flow
system
Total air
system
(Gamma) • Set this when the flow pulses and the alarm chatters. 1) Clear the value by pressing keys in WRITE MODE.
2) Clear the value by turning power OFF.
Ending

h (hysteresis) h (hysteresis)

ON

Switch output Note)

1) Switch output ON state indicates that transistor power is ON.
OFF
2) For safety, set output while the upper stream device is stopped.
3) Satisfy the following conditions when setting parameters 0 and 1.
L(Low) H(High)
Operation is not be guaranteed when these conditions are not met.
0<L<H
Instantaneous flow L/min. (normal)  0 < (L-h) <= L < (H-h)
Note that output is always OFF when L = H = h = 0 (at shipment).

1428
 PF-F / PFU Series
Explanation of monitor functions and operation
MEASURING MODE Refrigerating
type dryer

 Instantaneous and integrated flows are measured. (When power is ON) Desiccant
type dryer
The constant display of integration appears High polymer
membrane
when held down for 2 seconds. Settings are type dryer
saved even when power is turned OFF, so
there is no need to reset these. Air filter
Hold down the key for 2 seconds again to
Auto. drain
redisplay the instantaneous flow. / others
Instantaneous flow display Temporary integrated flow display F.R.L.
(Module unit)
CKD FLUEREX CKD FLUEREX F.R.L.
L / min.(nor) L / min.(nor) (Separate)
OUT OUT
Compact
F.R.
Precise
regulator
H H
TOTAL TOTAL F.R.L.
L L (Related
products)
AIR FLOW SENSOR PF SERIES AIR FLOW SENSOR PF SERIES Clean
After 10 seconds, blinking changes to F.R.
continuously lit, and the instantaneous flow Blinking
Electro
returns automatically. Note) Decimal fractions are not displayed pneumatic
when the integrated flow is displayed. regulator
Air
booster
Speed
control valve
Hold down for 2 secs.
Silencer

Check valve
/ others
WRITE MODE
Note) In the following example, P (parameter) is set to 0, Joint
L (Low) is set to 100, H (High) to 200, and h / tube
 Set switch output. (hysteresis) to 10L/min. Vacuum
filter
L / min.(nor) Vacuum
OUT1 • Set parameter using the UP key. regulator

Parameter setting Suction

OUT2 Note) L, H and h are not displayed when parameter 2 is plate
selected. Refer to the instruction manual for details.
Magnetic
H spring buffer
TOTAL
L
Mechanical
pressure SW

L / min.(nor) Electronic
pressure SW
OUT1 • Set the L (Low) value using SHIFT/UP keys.
Contact / close
OUT2 L (low) setting contact conf.
SW

Air sensor
H
TOTAL
L Pressure SW
for coolant
Small
L / min.(nor) flow sensor
OUT1 • Set the H (High) value using SHIFT/UP keys.
Small
OUT2 H (high) setting flow controller
Flow sensor
for air
H
TOTAL Flow sensor
L
for water
Total air
L / min.(nor) system
OUT1 • Set the h (hysteresis) using SHIFT/UP keys. Total air
system
Hysteresis setting (Gamma)
OUT2

Ending
H
TOTAL
Display integrated type for compressed air

L / min.(nor)
OUT1 To clear the count, push shift key and up key at the same
OUT2 Integration cleared time for ten seconds.

H
TOTAL
L
Flow sensor

To measuring mode

1429