赛琅泰克集团多功能陶瓷事业部

Multifunctional Ceramics Division

高性能陶瓷在
压电领域的应用

Advanced Ceramics
in Piezo Applications

MF130026 • CN/EN • 1.000 • 1301 • atio (3328) • 德国印刷

CeramTec GmbH
CeramTec-Platz 1-9
73207 Plochingen
Germany

CeramTec Suzhou Ltd.

苏州赛琅泰克高技术陶瓷有限公司
中国苏州工业园区钟南街428号
215000 苏州 中国
电话: +86 512 6262 0970
sales@ceramtec.com.cn

T H E C E R A M I C E X P E R T S www.ceramtec.cn T H E C E R A M I C E X P E R T S
以上提及的测试结果作为标准值，都是被测样品的结果。在有适用的 DIN-/DIN-VDE 标准情况下，测试结果依据此类标准得出，如无适用标准，则测试结果依据赛琅泰克企业标
准得出。所标示的数值不得用于仲裁，零部件的表面特性也不尽相同。这些数据不得被理解为某种特性的保证。赛琅泰克保留技术变更的权力。

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 强有力的事实----陶瓷在压电领域的应用 备注：
A powerful presence – ceramics in piezo Notes
applications

压电陶瓷能够有效地把机械能比如压
力、加速度等转化成电能，反之也可把 压电陶瓷传感器
电信号转化成机械运动或振动。 Piezoceramic sensors
压电陶瓷元件应用于涵盖宽频的广谱机 •
电传感器。在传感器应用中，压电陶瓷 大功率超声波换能器
把力、压力和加速度等转换成电信号。 High-power ultrasonic
在声音发生器和超声换能器中他们把电 transducers
压转换成振荡信号或变形量。 •
在汽车工程中，传感器系统保证了乘客 执行器机构
的安全并提供智能化的发动机控制管 Actuators
理。
点火器作为压电陶瓷的一项应用，已经
使用很多年了--作为批量生产的产品应用
于供暖系统和燃气点火器装置。
在超声波应用中，压电陶瓷元件产生的
大功率超声波可用于超声波清洗、钻
孔、焊接以及激活化学过程。另一方
面，压电陶瓷也作为超声波接收器或发
射器被应用于信号和信息处理方案中。
它们也在各种先进声纳定位、测距、材
料无损检测和医疗诊断设备中发挥关键
作用。
压电陶瓷执行器的工作依赖于压电元件
在微米级范围内产生的可控变形的能
力。这种特性使机电换能器有了新的应
用：作为驱动元件应用在液压和气动阀
门、定位系统、微型机器人和液体、气
体介质的配料器中。
鉴于其广泛的应用领域，我们建议您在
新产品或系统的开发阶段就与赛琅泰克
的专家进行讨论。我们经验丰富的专家
很乐意协助您。通过与客户端专家的对
话，赛琅泰克能够帮助确定您的应用条
件、需求指标和设计条件并提出经济有
效的方案。先进的制造方式使得赛琅泰
克可以大批量生产质量卓越的压电陶瓷
产品。赛琅泰克全公司范围的质量管理
体系确保我们的产品和服务质量能满足
客户的期望。

用于汽车的主动元件—倒车传感器

Active in automotive systems: back-up sensor

hcirüZ pyT
57

mm 0 ehöhllüF
neßua thcisnatmaseG

Piezoceramics are capable of converting
mechanical quantities such as pressure
and acceleration into electrical quantities
or, conversely, of transforming electri-
cal signals into mechanical movement or
­oscillations.
Piezoceramic components are used in
a broad spectrum of electromechanical
transducers covering a wide frequency
range. In sensors, they enable the conver-
sion of forces, pressures and accelerations
to electrical signals. In sound generators
and ultrasonic transducers, they transform
voltages into oscillations or deformations.
In automotive engineering, sensor sys-
tems assure the safety of occupants and
provide intelligent engine control capabili-
ties.
A piezoceramic application known
for many years – the ignition of gases –
is ­
manufactured as a mass product for
­heating installations and gas igniters.
In ultrasonic applications, piezoceramic
components generate high-power ultra-
sonic waves for ultrasonic cleaning, drilling
and welding and for stimulating of
­chemical processes. On the other hand,
piezoceramics are found in many signal
and information processing solutions in
the form of ultrasonic receivers and
­transmitters. They also play a key role in
advanced sonar locating and ranging,
non-destructive material testing, and me-
dical ­diagnostic equipment.
3
The operation of piezoceramic actua-
tors relies on the ability of piezo elements
to produce controlled deformation in the
micrometer range. This characteristic en­
ables new applications for electromecha­
nical transducers as drivers in hydraulic and
pneumatic valves, positioning systems,
micromanipulators, and proportioning
systems for liquid and gaseous media.
Given this broad diversity of applica-
tions, it is recommended to discuss with
CeramTec´s experts at the development
stage of a new product or system. Our
experienced staff will gladly assist. In di-
alogue with your company‘s experts, Cer-
amTec can help to specify application con-
ditions, requirement criteria and design
prerequisites, and to propose costeffec-
tive solutions. Advanced manufacturing
methods enable CeramTec to produce
piezoceramic components of unsurpassed
quality in large volume. CeramTec´s com-
panywide quality management system
­assures that its products and services will
be fully in line with customer‘s expecta-
tions.
 压电陶瓷基础知识
Fundamentals of piezoceramics
正向压电效应
Direct piezoelectric effect
压电材料：
受力后的性能表现
压电性的基础是某些晶体受到机械压
力或拉力时具有生成电荷的能力（正向
压电效应）。反过来，把这些晶体置于
电场中时会发生可控的变形--这种现象称
作逆向压电效应。
产生的电极化方向性取决于晶体与相应
压力的方向。
逆向压电效应
Inverse piezoelectric effect
Piezoelectrics: performance under
strain
Piezoelectricity is based on the ability of
certain crystals to generate an electrical
charge when mechanically loaded with
pressure or tension (direct piezo effect).
Conversely, these crystals undergo a con­
trolled deformation when exposed to an
electric field – a behavior referred to as the
inverse piezo effect.
The polarity of the charge depends on
the orientation of the crystal relative to
the direction of the pressure.

压电材料
具有压电特性的陶瓷属于铁电体材料，
现今的系统大多基于锆钛酸铅材料 (PZT)
，是由锆酸铅 (PbZrO3) 和钛酸铅 (Pb-
TiO3).晶体构成的混合物。
压电陶瓷元件具有多晶结构，它是由许
多个微晶单元（域）构成的，而每个微
晶单元又由多个晶胞组成。
这些铁电体陶瓷的晶胞具有钙钛矿晶
体结构，这种结构通常可以用结构
A B O3 来表示。
2+ 4+ 2-
为使大家更易于理解，下页的示意图将
从不同视角展现晶胞的晶格结构。图中
显示的结构经过旋转，所以阴离子位于
立方表面的中心而四价阳离子位于晶格
中心，二价阳离子则位于立方结构的角
上。当温度在居里点之上 (Tc) 时这个晶
格属于“体立方”型（左下图）。
在低于居里点的温度时，晶格发生扭
曲，电荷中心漂移，因此产生永久性偶
极动量（右下图）这种现象被称作“自
发极化”。对于锆钛酸铅材 (PZT), 根据
锆/钛 (Zr/Ti) 的摩尔比，晶格扭曲可能是
四角形的或菱形的。
5
The perovskite structure
Ceramics exhibiting piezoelectric pro-
perties belong to the group of ferroelec-
tric materials. Today‘s systems are based
mostly on lead zirconate titanate (PZT),
i.e., they consist of mixed crystals of
lead zirconate (PbZrO3) and lead titanate
(PbTiO3).
Piezoceramic components have a poly-
crystalline structure comprising numerous
crystallites (domains) each of which con-
sists of a plurality of elementary cells.
The elementary cells of these ferroelec-
tric ceramics exhibit the perovskite crystal
structure, which can generally be descri-
bed by the structural formula A2+B4+O32-.
For greater clarity, the following graphics
show the alternative view of an elementa-
ry cell of this lattice structure. The struc-
ture has been rotated out of its previously
shown position, so that now the anions
lie in the center of the cube faces and the
tetravalent cation is body-centered, while
the bivalent cations are located at the cor-
ners of the cube. At temperatures above
the Curie point (Tc), this lattice is of the
“body-centered cubic“ type (top diagram
p.6).
At temperatures below the Curie
point, the lattice becomes distorted and
the center of charge gets shifted which
­gives rise to a permanent dipole momen­
tum (right diagram p.6). This pheno-
menon is referred to as “spontaneous
polarization“. In the case of PZT, the
lattice distortion may be either tetrago-
nal or rhombohedral, depending on the
Zr/Ti molar ratio.
 压电陶瓷基础知识
Fundamentals of piezoceramics

Pb2+ Ti4+

O2- Zr4+

上图是理想的锆钛酸铅结构示意图，此图中我们 Schematic diagram of an ideal perovskite structure,

忽略低于居里点温度时发生的由自发极化引起的变 neglecting distortions due to spontaneous polarization

形。二价阳离子位于立方中心，四价阳离子构成立 below Curie temperature. The bivalent cation is loca-

方的角，二价阴离子位于每个立方面边缘的中心。 ted in the center of the cube, while the tetravalent

锆钛酸铅 (PZT) 混合晶体的方程式是 A: Pb2+, B: Ti4+ / cations form the cube corners. The bivalent anions

Zr4+
are located in the center of each cube edge in this

illustration. For the PZT (lead zirconate titanate) mixed

crystal, the formula is A: Pb2+, B: Ti4+ / Zr4+

Pb2+

O2-

Ti4+ / Zr4+

体心立方态 (Tc 之上) 四角扭曲 (T 之下c )

Body-centered cubic state (above Tc ) Tetragonally distorted (below Tc )
 7

极化是关键 The key is polarization

烧结后，陶瓷体内部即（由方向一致 Immediately after sintering, the do­
的偶极构成的晶胞）呈现出无规律的排 mains of a ceramic body (i.e., the areas
列分布（随机分布），从微观上看材料 ­consisting of elementary cells of uniform
是各向同性的，没有压电特性。 dipole direction) will show an arbitrary
(statistically distributed) orientation, i.e.,
压电特性必须要经过“极化”才能产 the macroscopic body is isotropic and
生，在这个过程中，陶瓷体被置于强直 shows no piezoelectric properties.
流电场中，从而使内部电偶极按照电场
方向趋于一致，即使电场取消后，陶瓷 These piezoelectric properties have to
也可以继续保持一致的极性（残留极 be originated by “polarization“. In this
性） ---- 这是铁电体陶瓷具有压电特性 process, the ceramic body is exposed to
的必要条件。 a strong electric DC field that causes the
electric dipoles to become aligned in the
direction of field. They will maintain this
orientation even when the DC field is no
longer applied (remanent polarization) – a
necessary condition for the piezoelectric
behavior of ferroelectric ceramics.

极化前 极化中 极化后

Before polarization During polarization After polarization

 压电陶瓷基础知识
Fundamentals of piezoceramics

下图说明了这个过程生成的残余极 The remanent polarization produced In other words, the material exhibits pie-
化。图中标明了施加不同电场强度E时 by this process is illustrated by the graph zoelectric properties. When an opposed
产生的电位移密度D。当施加一个电场 below. The dielectric displacement density field is applied, D will decrease and disap-
时，D沿着“初始曲线”随着E的增加而增 D is plotted over the applied electric field pear at a given field strength the coercive
加（从零开始）直至达到饱和。当达到 strength E. When a field is applied, D in field strength -Ec.
饱和点时如果开始减低，则D将会跟着缓 creases with E along the “initial curve“ As E becomes more negative, D will
慢下降，在E=0的残余点它达到一个对应 (starting from 0) until saturation is achieved. reach a negative saturation point. If the
于残余极化水平Pr的固定值，换言之， If E is reduced at this point, D will decrease material goes through several positive and
材料具有了压电性。当施加反向电场 insignificantly; at the remanence point it negative field cycles, it becomes apparent
时，D将继续下降直到电场强度达到矫顽 retains a finite value for E = 0 which corres- that the forward and return graphs do
磁场强度-EC时消失。 ponds to the remanent polarization level Pr. not coincide. The resulting forward/return
随着E的负值增大，D将达到负饱和点。 loop is called the hysteresis curve.
如果材料经过多次正负电场循环，就会
发现显然往复的曲线不一致。这个由往
复曲线构成的图形叫做磁滞曲线。

P, D [C/cm2]

Pr

-Ec
0 Ec E [kV/mm]

-Pr

磁滞曲线

Hysteresis curve

D [C/cm2]
 9

如果我们绘制出陶瓷体拉伸变形S随电 If we plot the strain S of the ceramic

场强度E变化的曲线，我们就得到下图 body over the field strength E, as in the
的“蝴蝶曲线”。最初拉伸量S在达到饱 next illustration, we obtain a “butterfly
和点前沿着初始线（从零开始）上升， curve“. The strain S initially grows fol-
当E减为零时，陶瓷将保留其残余变形， lowing the “initial curve“ (starting from
就是说极化过程引起陶瓷的永久变形Sr。 0) before it reaches a saturation point. At
施加负电场后变形S减小直到在-Ec 点消 the remanence level, the ceramic will re-
失，然后又再次增大，而且这种变形也 tain its residual strain, i.e., the polariza-
有滞后性。材料的残余变形决定了压电 tion process causes a lasting deformation
元件的工作点，在Sr点附近压电陶瓷体长 Sr of the ceramic. The strain S decreases
度会随着电场强度发生成比例变化，实 with negative E and disappears at -Ec be-
际应用的就是这一特性。 fore beginning to rise again. Also, the de-
formation effect shows a hysteresis. The
remanent deformation imparted to the
material defines the operating point of the
piezoceramic component. In the vincinity
of Sr the piezoceramic body will respond
to field strength variations by undergo-
ing a proportional length change that is
utilized for application purposes.

S [µm]

Sr

-Ec Ec
0 E [kV/mm]

蝴蝶曲线

Butterfly curve
10

极化过程中（退极化）晶胞排列如果 A full or partial elimination of the do-

出现全部或部分消除将减弱材料的压电 main alignment achieved by the polarizing
特性。退极化可能由如下三个因素造 process (depolarization) will degrade the
成： piezoelectric properties of the material.
Depolarization may be the result of
• 由于暴露于高温环境中而造成热退 three factors:
极。在使用环境下元件的温度不应超
过材料数据表中给出的居里温度的 • Thermal depolarization due to heat
1/2，元件的存储温度也不能明显超 exposure. In application environments,
过这个温度。 the component temperature should
not exceed one-half the Curie temper-
• 由于处于与初始极化电场反向的电场 ature stated in the data sheet. Storage
中而造成电场退极。 temperatures should also not exceed
this temperature by a significant margin.
• 由于材料受到较高的压力负荷而造成
机械退极，特别是短路电极。 • Electric depolarization due to electric
最大承受压力因材料不同而呈现明 fields acting against the original polari-
显的差异。 zation direction.

由于大部分应用都会存在某种附加载 • Mechanical depolarization caused by

荷（比如在较高温度下暴露于反极化电 high-pressure loads, especially with
场中）并且无法预估退极化情况，建议 short-circuited electrodes. The maxi-
在项目设计阶段进行与应用环境相近条 mum permissible pressure level varies
件下的寿命测试。 largely according to the material used.

Since most applications will involve

some form of superimposed loading (e.g.,
exposure to an electric field opposed to
the polarizationdirection at elevated ope-
rating temperatures) and the depolariza-
tion behavior cannot be estimated in this
case. It is recommended to run lifetime
tests under close-to-application conditions
at the project planning stage.

S [µm]
压电应用的高性能材料
High-performance materials for piezo
applications

11

虽然压电元件有时会承受较高的压 传感器材料： 执行器材料：

力，但是其必须还是能够有效可靠地实 SONOX® P5, SONOX® P502, SONOX® P505 和 SONOX® P53
现其功能，因此赛琅泰克研发出专门适 SONOX® P504, SONOX® P508 • 非常高的位移量 (1,4 –1,7‰)
用于压电应用的高性能材料。因为其不 • 介电常数 1000 到 2000
同的材质和应用组合，在传感器、执行 • 高压电活性 (d33 ≥ 400 * 10-12 C/N) 这两种材料除了用干压工艺，还可以
器和换能器领域里 SONOX 品牌材料成 ®
• 低机械质量因数 (≤100) 制成陶瓷带，可以实现 30 μm 到 300 μm
为高性能和高可靠性的代名词。 的厚度。
传感器应用通常是一个集成的系统， SONOX® P53专门优化用于离散设置技
材料类别 压电陶瓷一方面用作超声转换器，同时 术， SONOX® P505则用于一体化多层技
压电陶瓷材料可按照其化学成分分 又用作接收器。 术。
类，同时也可按照特定的应用场合分 SONOX P502 和 SONOX P504 是专门
® ®

类。除了常规参数（见数据表）外，可 开发的具有长时间高效热稳定性特点的 特殊材料

选参数还包括高机械及电负荷下的特 材料。因此他们特别适合温度范围在-40 SONOX® P6 – 适用于可达 200º C的高
性。各种分类如下： 面 +160º C的汽车应用领域中。 温场合。
SONOX® P51 – 具有高压电活性的薄型
功率转换器材料： 片材(d33 > 500 pC/N).
SONOX P4, SONOX P8
® ®

这些材料可以承受高电压和机械载荷 根据特殊使用要求还有更多的专用材
（压力）并具有以下特性： 料。
• 低介质损耗
• 介电常数 900 到 1400
• 高机械品质因数 500 到 2000
• 高居里温度
• 高矫顽磁场强度

这类材料特别适合于频率从 20 kHz 到 典型应用范围 适用的材料

数 MHz 的高性能超声应用领域。 超声波清洗 SONOX® P4
声纳技术
传感器技术 SONOX® P5
材料测试 SONOX® P502
医疗诊断和治疗 SONOX® P504
SONOX® P508
超声波加工和连接技术（焊接、 SONOX® P8
钻孔）
执行器 SONOX® P505
压电发生器 SONOX® P53
 压电应用的高性能材料
High-performance materials for piezo
applications
12
CeramTec has developed special high-
performance materials for implementa-
tion in Piezo Applications, as piezoceramic
components are sometimes exposed to
high stresses, and must still fulfil their
functions with maximum reliability. With
their different qualities and application
options, SONOX® brand materials are
synonymous with premium efficiency and
maximum reliability in the world of sen-
sors, actuators and transducers.
Material categories
Piezoceramic materials are categorised
according to their chemical composition
and, on the other hand, by the specific
application conditions. Besides the typical
parameters (see data sheets), selection
criteria include behaviour under high elec-
trical and mechanical loads. The following
material categories are differentiated:
Materials for power transducers:
SONOX® P4, SONOX® P8
These materials withstand both high
electrical driving voltages and intense
mechanical (pressure) loads and are
characterised by:
• Low dielectric loss
• Permittivity in between 900 and 1400
• High mechanical quality factor in bet-
ween 500 and 2000
• High Curie temperature
• High coercive field strength
Materials of this type are specifically well
suited for high-performance ultrasonic
applications in the range from 20 kHz to
several MHz.
Materials for sensors:
SONOX® P5, SONOX® P502,
SONOX® P504, SONOX® P508
• Permittivity in between 1000 and 2000
• High piezoelectric activity Both materials can, in addition to the
(d33 ≥ 400 * 10-12 C/N)
• Low mechanical quality factor (≤100)
Sensor applications are mainly combined
systems in which the piezo ceramic is used
as ultrasonic-transducer on the one hand
and as a receiver on the other hand.
SONOX P502 and SONOX P504 are
® ®
specially developed materials with a high
rate of thermal and temporal stability. For
this reason, they are very suitable for au-
tomotive applications in the area ranging
from –40 to +160º Celsius.
Typical applications
Ultrasonic cleaning
Sonar technique
Sensor technique
Material testing
Medical diagnostics and therapy
Ultrasonic machining and joining
techniques (welding, drilling)
Actuators
Piezo electric generators
Materials for actuators:
SONOX® P505 and SONOX® P53
• Very high displacement (1,4-1,7‰)
dry-pressing process, also be manufactu-
red as a ceramic tape. As a result thereof,
a layer thickness of 30 μm to 300 μm can
be realized.
SONOX® P53 is optimized for discrete
set-up technology, SONOX® P505 for mo-
nolytic multilayer technology.
Special materials
SONOX® P6 – suitable for high tempera-
ture applications up to 200º C.
SONOX® P51 – very thin plates with high
piezoelectric activity (d33 > 500 pC/N).
Additional special materials are availab-
le upon request.
Suitable material
SONOX® P4
SONOX® P5
SONOX® P502
SONOX® P504
SONOX® P508
SONOX® P8
SONOX® P505
SONOX® P53
 13

ROHS ROHS
(有害物质在电气电子设备中使用的限 (Restriction of the use of certain Hazar-
制） dous Substances in electrical and electro-
nic equipment)
在电气电子设备中应当避免使用危险
或有害的物质。虽然这个规定对于多功 This directive describes the avoidance
能陶瓷事业部生产和销售的陶瓷元件是 of dangerous or hazardous substances in
不受影响的，但是这个规定可能会影响 electrical or electronical equipment. The
我们的客户。压电陶瓷元件的主要成分 Business Unit Multifunctional Ceramics
是铅化合物--锆酸铅或钛酸铅，而且这 produces and sells ceramic components
是无法避免的，因此欧盟委员会同意在 which means that we are not affected by
RoHS法规中豁免报废汽车指令中的含铅 this directive but possibly our customers.
的陶瓷元件。 The main ingredients of piezo-ceramic
尽管如此，我们仍然希望在这方面能够 parts are lead – compounds as leadzirco-
协助我们的客户： nate or leadtitanate. Unfortunately this
我们承诺回收压电陶瓷元件并循环使用 cannot be avoided which is as well the
其材料以保护环境。条件是这些元件不 conclusion of the European Commission.
被其他外界物质污染（没有外壳，浇注 Therefore electrical components which
或模压成型） contain lead in a ceramic matrix compound
如果有兴趣请打电话给我们，我们将很 have an exemption from the restriction in
乐意为您提供服务。 the ­End-Of-Life Vehicles directive.
Despite of this respectively due to this
we want to assist our customers in this
matter:
We offer to redeem piezoceramic com-
ponents and to recycle the materials in
processes which will protect the environ-
ment. Precondition is, that the piezocera-
mic parts will be delivered without conta-
mination respectively foreign substances
(not in a housing, casted or moulded).
Please give us a call, should you be inte-
rested. We will be happy to make you an
offer.
 经过验证的专业制造技术
Proven manufacturing expertise

14

几十年来赛琅泰克完善了诸多工艺制程 CeramTec has perfected a broad range Notwithstanding the diversity of mate-
和加工方法。我们按照TS16949标准要 of processes and methods over many de- rial compositions formulated to meet the
求进行系统化的管理并能够满足汽车业 cades. Systems managed in compliance requirements, the piezoceramic manufac-
和安保系统极为严格的质量要求。我们 with TS 16949 standard specifications turing process follows a basic scheme:
90%以 上 的 产 品 均 为 客 户 定 制 件 ， 这 form the basis of a production system that
也证明了赛琅泰克制造系统的可靠灵活 meets even the most exacting quality re-
性，同时我们不但对于单个样片还是标 quirements, e.g., of the automotive and
准化大生产都能实现同样的精确度。 safety systems industries. A product mix of
尽管为了满足各种需求会使用不同的材 over 90% customerspecific components
料配比，但压电陶瓷的生产过程始终遵 testifies to the flexibility of CeramTec´s
循着基本的制作流程： manufacturing systems, which produces
single specimens with the same precision
as standardized volume parts.

氧化铅 氧化钛 氧化锆 添加剂 Dopants

混料 Mixing

煅烧 Calcining 800…900º C

压制元件 Pressed Components 混炼 Mixing/Milling 多层元件 Multilayer Components

聚醋酸乙酯 塑化 备浆 溶剂，粘结剂
e.g. Polyvinylacetate Plastification Preperation of slurry Solvents, binder

喷雾 – 干燥 流延
Spray-drying Tape casting

压制 打印/ 绕叠
Pressing Printing/Stacking

覆层/ 切片
Laminating/Dicing

1000…1300º C 烧结 Sintering 烧结 Sintering 1000º C

研磨 Grinding

金属化 Metallizing
制造锆钛酸铅陶瓷元件的典型工艺流程

Typical process sequence for the fabrication

极化 Polarizing
of lead zirconate titanate ceramic components

检测 Measuring
精密技术
Precision sophisticated technology

15

生产中通常含有粉末制备环节，其作 Production normally involves a powder In the final outgoing product inspec-
用是将各种氧化物原料按一定比例混合 preparation process in which oxide raw tion, the component is tested for a wide
以获得需要的化学组分。接下来要将预 materials are mixed to obtain the defined range of parameters (e.g., geometrical di-
混的粉料压实和成型，成型工艺有干压 chemical product composition. Further mensions, adhesion strength of the silver
等，然后将瓷坯在连续隧道式电炉里以 steps include the compaction of the con- metallization layer). Its piezoelectric data
1000 °C 到 1300 °C 的温度进行烧结， ditioned powder and a forming stage are recorded prior to shipping.
在这个烧结过程中产品形成多晶陶瓷结 such as dry-pressing. The ceramic blank is
构，然后是对烧结好的压电陶瓷元件进 then sintered at temperatures between The parameters to be inspected and the
行表面加工处理比如打磨、研磨、抛光 1000 °C and 1300 °C in a continuous tun- severity of the test conditions are agreed
和切割，以保证其几何尺寸和表面质量 nel style electric furnace. In the course of with the customer on an individual basis.
在规定的公差范围内。除了材料参数 this sintering step the product develops In-process inspections and an TS 16949
外，产品的几何尺寸也决定诸如电容和 compliant manufacturing process assure a
共振频率等特性。导电连接通常是通过 high quality level even in volume produc-
丝网印刷银电极然后再通过约 600 °C 烧 tion.
结来制成。随后的步骤是极化，极化时
产品被放在环境温度为 80 
°C – 140 
°C
且强度为 2-3 kV/mm 的直流电场中进
行。

最后是进行出厂检验，将对元件进行多
项参数测试（例如几何尺寸、银涂层的
附着强度），出货前还要记录其压电性
能数据。 材料检测 Material testing

检验的参数和测试条件的是通过与客户
协商后确定。 以 TS 16949 为标准的过程
its polycrystalline ceramic structure. The
检验将确保大生产中的产品质量。
sintered piezoceramic component is me-
chanically finished by grinding, lapping,

polishing, and sawing to assure its geo-

metrical dimensions and surface finish
remain within the specified narrow tole-
rances. The geometrical dimensions of the
product, apart from material coefficients,
determine its functional characteristics
such as capacitance or resonant frequen-
研磨 Lapping
cy. Electrical connections are usually made
by applying silver electrodes in a screen
printing process with subsequent sintering
at approx. 600 °C. This is followed by the
polarization step in which the product is
exposed to an electric DC field (2 to 3 kV/
mm) at temperatures between 80 °C and
140 °C to achieve the appropriate dipole
orientation within the ceramic.
 压电陶瓷 -- 形状的多样性
Piezoceramics – diversity in shape

16

压电陶瓷元件的生产和成型工艺和他 形状 典型尺寸 1)
们的应用一样具有多样性，并具有相应 环型和碟型 直径 5 mm – 120 mm
的标准。 厚度 0,2 mm – 30 mm
典型的产品形状包括碟形、矩形、柱
柱型 直径 5 mm – 120 mm
形、环形、圆柱形、管形、球形和半球
高度 < 30 mm
形。
矩形 长度 3 mm – 120 mm
宽度 2 mm – 120 mm
高度 0,2 mm – 30 mm
一体化多层执行器（有单独的产 长度 5 mm – 10 mm
品介绍） 宽度 2 mm – 10 mm
高度 10 mm – 40 mm
陶瓷层数 100 – 400
半球体 半径:最大半径 25 mm
标准公差 相应尺寸的 ± 1 %
平面产品的厚度公差 ± 0,05 mm
厚度不超过10 mm 的未加工产品公差为
± 0,1 mm
如果要求，共振频率偏差± 10 %2)
压电陶瓷元件
1)
基于与客户的协议，参考数据在实际产品中可能高于或低于此数据
Piezoceramic components
2)
在一些谐振应用中，通常定义共振频率来取代机械尺寸作为标准（通过定义频率常数）
例如：碟形SONOX® P4 Ø 20 mm ± 0,2 mm x 1 MHz ± 10 %
1 MHz 是碟片厚度振动模式的共振频率，对应的瓷片厚度为约 1 mm （参见数据表和词汇一节的注释)

执行器元件

Actuators

压电陶瓷带

Piezoceramic tapes
 17

Shape Typical dimensions1) The production and forming processes

used in the manufacture of piezoceramic
Rings and disks Diameter 5 mm – 120 mm
parts are as diverse as their applications
Thickness 0.2 mm – 30 mm
and the associated suitability criteria.
Cylinders Diameter 5 mm – 120 mm
Typical shapes include disks, rectangular
Height < 30 mm
plates, rods, rings, cylinders, tubes, sphe-
Rectangular plates Length 3 mm – 120 mm
res and semi-spheres.
Width 2 mm – 120 mm
Height 0.2 mm – 30 mm
Monolithic multilayer actuators Length 5 mm – 10 mm
( special brochure available ) Width 2 mm – 10 mm
Height 10 mm – 40 mm
Number of cera- 100 – 400
mic layers
Semispherical bodies Radius: up to about 25 mm
Standard tolerances ± 1 % of the respective dimension
± 0.05 mm thickness tolerance onground
products
± 0.1 mm on unmachined products not
exceeding 10 mm in thickness
± 10% in case of specified
resonance frequency2)

1)
Reference values which may be higher or lower on actual product, depending on agreement with
the customer.
2)
In some resonant applications it has become standard practice to specify the resonance frequency
(defined via the frequency constant) instead of a mechanical dimension.
Example: Disk made of SONOX® P 4 Ø 20 mm ± 0.2 mm x 1 MHz ± 10 %.
1 MHz is the resonance frequency of the thickness-mode oscillation of the disk, corresponding to a disk
thickness of approximately 1 mm (refer also to the data charts and glossary section for explanations).
 压电陶瓷的动态特性
Dynamic behavior of piezoceramics

18

当压电陶瓷元件被加上交流电压时， 交流电阻Z随频率变化的关系曲线 By plotting the AC resistance Z over the

其尺寸就会根据电信号的频率变化而发 frequency, the following curve results:
生周期性的变化。
由于震荡元件的刚性和质量，我们可以
观察到与几何形状相关的共振频率，在
共振频率下即使控制电压保持不变，振 log Z
幅仍然陡峭上升。在这个频率附近，压
电陶瓷震荡元件可以用下面的等效电路
图来表示：

When a piezoceramic component is

connected to an AC voltage, it undergoes
a periodic change in dimension according
to the frequency of the control signal.
Due to the stiffness and mass of the
oscillating component, we can observe
geometry related resonance frequenci- fs fp f
es at which the amplitude rises steeply
although the control voltage remains un-
changed. In the vicinity of that frequency,
the oscillating piezoceramic component
can be described by the following equi-
valent circuit diagram: 等效电路如下
The analogies are as follows:

C1 L1 R1

C2

C1: 逆弹簧钢度
inverse of spring stiffness
C2: 绝缘能力
dielectric capacity
L1: 惯性质量 inert mass
R1: 内部损耗 interior loss
 19

大致来说，在最小阻抗时得到串联共 Roughly speaking, you obtain the se-

振频率fs，而最大阻抗点是并联共振频率 ries resonance frequency fs at minimum
fp。如果压电陶瓷体被其串联共振频率信 impedance and the parallel resonance fre-
号驱动，其电流损耗将达到极值，而其 quency fp at maximum impedance. Thus,
振幅将依照机械品质因子（Q）增加（忽 if a piezoceramic body is driven with its
略外部阻尼）。 series resonance frequency, its current
借助于频率常数，数据表中给出的 con­sumption will peak and its oscillation
N（N=串联共振频率 x 测定频率的尺寸） amplitude will increase (in the absence of
，我们就可以确定压电陶瓷体的共振频 external damping) by the mechanical qua-
率（参见下页的示意图）。 lity factor (Q).
With the aid of the frequency constants,
N, given in the data tables (N = series re-
sonance frequency times the frequency-
determining dimension), the resonance
frequencies of a piezoceramic body can
be readily determined (refer also to the
illustrations on the following pages).
 压电陶瓷谐振器的震荡模式
Basic oscillating modes of piezoelectric
resonators

20

矩形薄片的纵向震荡
Longitudinal oscillation of
a thin rectangular plate

圆形薄片的平面震荡
Planar oscillation
of a thin circular disc

薄碟片沿厚度方向的震荡
Thickness mode
oscillation of a thin disc

圆柱体的纵向震荡
Longitudinal oscillation
of a cylinder

剪切震荡
Shear oscillation

= 极化方向 Direction of polarization

= 位移方向 Direction of displacement
 21

几何比 计算的共振频率 机械耦合因子 电荷常数 电压常数

Geometrical Calculated reso- Mechanical Charge constant Voltage
ratio nance frequency coupling factor constant

k31 d31 g31

I N1 N1 k312 π fp π fp - fs d31
>5 fS = , fS = = tan ( ) d31 = k31 ε33T · S11E g31 =
t,b I b 1-k31 2
2 fS 2 fp ε33T

kp

d Np fp - fs fp - fs
> 10 fS = kp2 ≈ {2.5 -( )2}
t d fp fp

kt

d Nt π fs π fp - fs
> 10 fS = kt2 = tan ( )
t t 2 fp 2 fp

k33 d33 g33

I N3 π fs π fp - fs d33
> 2.5 fS = k332 = tan ( ) d33 = k33 ε33T · S33E g33 =
d I 2 fp 2 fp ε33T

k15 g15

I NS π fs π fp - fs d15
> 3.5 fS = k152 = tan ( ) g15 =
t,b t 2 fp 2 fp ε11T

I = 长度 Length b = 宽度 Width t = 厚度 Thickness d = 直径 Diameter

 压电陶瓷的应用
Piezoceramic applications

22

汽车领域 Automotive
包括爆震传感器，倒车传感器，加速 Knock sensors, back-up sensors, accele-
传感器，陀螺仪传感器，用于目标识别 ration sensors, gyrometric sensors, ­sonar
的声纳换能器，用于定位/导航的声纳换 transducers for object identification, ­sonar
能器，水平传感器，气体传感器，用于 transducers for locating / navigation func-
胎压传感器的能量收集器等。 tions, level sensors, air-mass sensors, ener-
gy harvesting for tire pressure sensors.

压电陶瓷

Piezoceramic

震动模块

Seismic mass 震动

Vibration

爆震传感器 Knock sensor

医疗领域应用 Medical applications
碎石机，洁牙机，超声手术刀，超声 Lithotripters, dental plaque removers,
喷雾器，超声检查和治疗。 ultrasonic scalpels, ultrasonic nebulizers,
ultrasonic diagnostics and therapy.

超声碎石机

Lithotripter
 23

压电陶瓷传感器 执行装置
发射器/接收器 光纤排列，精确定位装置，气动/液
Piezoceramic transducer 压阀门，主动式震动阻尼，声音发射器
(transmitter/receiver) 等。

Actuators
Optical fiber alignment, precision po-
sitioning devices, pneumatic / hydraulic
valves, active vibration damping, sound
emitters.

水平传感器

Level transducers (reflection type)

机械工程 消费品应用
超声波距离传感器，水平传感器，流 家用燃气点火器，压电点烟器，吉他拾
量计（液态和气态介质），超声波清 音器，防盗报警传感器，用于药品和化妆
洗，超声波焊接（塑料和金属），超声 品的雾化器等。
波加工，材料无损检测，主动式震动控
制。 Consumer applications
Household gas lighters, piezo cigarette
Mechanical engineering lighters, guitar pickups and burglar alarm
Ultrasonic distance sensors, level sen- sensors, nebulizors for medicine and cos-
sors, flow rate measurement (liquid and metic applications.
gaseous media), ultrasonic cleaning, ultra-
sonic welding (plastics and metal), ultra-
sonic machining, non-destructive testing,
active vibration control.
一体化多层件

Monolithic multilayer actuato

多层致动器有单独的宣传册
Separate broschure “Monolithic Multilayer Actuators“
available.
24
压电陶瓷终端连接推荐
赛琅泰克压电陶瓷的金属化电极表面
可以采用导电橡胶或压簧式连接系统，
也可以进行焊接。在小信号传感器应用
中，它也可以用导电粘结剂比如专用柔
性PCB连接到金属电极的表面。
在端子焊接过程中，必须符合几个特殊
要求以达到最佳的效果。首先是温度—
应 当 用 输 出 约 30W的 温 度 可 控 电 子 烙
铁，烙铁头的最佳温度是320℃。因为电
极的厚度只有几微米，必须使用含银的
焊料来进行银电极表面的焊接以防止银
融到焊剂里。赛琅泰克推荐使用下面的
锡焊：
L-Sn 96.5 Ag 3.5 DIN 29453
焊接通常分两步操作：
a) 在焊点上镀锡；
b) 把柔性引线焊在焊点上。
每个步骤的时间必须尽量短，不得超
过1秒钟，为此必须用预锡化的柔性引
线。为了加速焊接过程，对压电陶瓷进
行预热也是有好处的，推荐的预热温度
是60 °C。
Recommendations for Terminal con-
nections of piezoceramics
The metallized electrode surfaces of
CeramTec piezoceramics are suitable for
conductive rubber or spring-type contact
systems, as well as for soldered connec-
tions. In sensor applications involving
small power levels, it is also possible to
attach flexible PCB type conductors to the
metallized surface with a conductive bon-
ding agent such as specialized epoxies.
Where terminals are to be soldered, a
number of special requirements have to
be observed in order to achieve optimized
results. First, a temperature - controlled
electronic soldering iron with an output
of approximately 30 W should be used.
The optimum soldering tip temperature is
320 °C. Since the electrode is only sever-
al micrometers thick, a solder containing
silver must be used on silver electrodes to
prevent the silver from diffusing into the
solder. CeramTec recommends the use of
the following solder:
L Sn 96.5 Ag 3.5 DIN 29453
Soldering is generally performed in two
steps:
a) tinning the soldering point
b) soldering the flexible connecting lead
into position
The duration of both steps should be
minimized and should not exceed 1 se-
cond. To achieve this, the use of pretin-
ned flexible leads is required. It is often
beneficial to preheat the piezoceramic to
facilitate and/or accelerate the soldering
process. The recommended preheating
temperature is 60 °C.
用于传感器系统和执行器的压电陶瓷
Piezoceramics for sensor systems and actuators

25

材料 Materials 干压法
传感器应用可以选用 SONOX® P5, SO- For sensor applications, SONOX® P5, 赛琅泰克开发的适用于干压工艺的材
NOX P502, SONOX P504,它们具有高耦
® ®
SONOX ®
P502, SONOX ®
P504 are the 料有 SONOX® P5, SONOX® P502, SON-
合因数，高充电常数和低机械品质因数 materials of choice, given their high cou- OX® P504 干压法是大批量生产厚度超过
Q（详细请参见数据表）。它们的高敏感 pling factors, high charge constants, and 0.5mm的元件的有效方法。常规的产品
性和压电活性使其广泛适用于低功率， low mechanical Q values (detailed spe- 形状包括蝶形、环形，矩形/方形（尺寸
特别是脉冲模式领域。 cifications are provided in detail in the 见第11页的数据表）。
之所以有这么多的传感器型号的原因很 data sheets). Their high sensitivity and
简单：因为在压电生产工艺中，我们会 piezoelectric activity makes these mate- Dry pressing
采用两种不同的工艺来加工厚度不同的 rials highly suitable for a broad range of With the dry pressing process in mind,
产品。 low-power applications, particularly for CeramTec developed the SONOX® P5,
pulsed-mode operation. SONOX® P502 and SONOX® P504 mate-
The reason there are so many sensor rials. Dry pressing is an efficient method
materials is simple: in piezo engineering, for producing high-volume components
two different manufacturing techniques measuring over 0.5 mm in thickness. Typical
are used depending on the component product shapes include disks, rings, and
thickness. rectangular or square plates. (Dimensions
are from the table located on page 17).

Damping material

压电陶瓷

Piezoceramic
适配层

Adaptation layer

空气型超声波转换器

Air-type ultrasonic transducer

26

流延法 Tape casting 金属化

SONOX® P53, SONOX® P505 和 SON-
OX P508 是适用于流延法生产。通常其
®
厚度介于 30 μm 到 300 μm, 标准厚度
公差为 ±15 μm, 如有特别要求还可以更
低。但是这种圆形、方形或长方形片材
的最大尺寸只能做到约50mm（边长或直
径，参见第11页）。
特殊电极设计示范
Examples of special electrode designs
The materials SONOX® P53, SONOX®, 标准的电极材料是银或镍-金。为了实
P505 and SONOX P508 were optimized
®
现扩展功能也可以采用特别的电极配置
for the tape casting process. Very thin （如反馈式或缠绕式，客户定制等）。
plates in the 30 to 300 μm range can be 在进行金属化处理过程中可以选择留有
reliably manufactured. The standard thick- 或不留绝缘边，但通常而言标准绝缘边
ness tolerance of ± 15 μm can be reduced 距离应 ≤ 0,3 mm。
where special requirements apply. How- 在大多数应用中极化方向具有关键作
ever, the maximum dimensions of such 用，因此我们通常会在压电陶瓷元件的
round, square or rectangular plates are 正极面进行标识。
limited to approx. 50 mm (edge length or
diameter, see page 17). Metallization
Standard electrode materials include sil-
ver or nickel-gold. Special electrode confi-
gurations (e.g., feedback or wrap-around
electrodes, custom designs) are feasible to
achieve expanded functionalities. The me-
tal plating can be applied with or without
insulating margin. Standard insulation
margin is ≤ 0.3 mm.
Since the polarization direction is of
decisive importance in many applications,
the positive side of the piezoceramic ele-
ment is usually marked.
压电陶瓷在大功率超声波领域的应用
Piezoceramics for high-power
ultrasonic applications

27

能量转换复合换能器，又称作朗盖文 Power conversion compound trans-

螺栓转换器 (Langevin-Bolt transducers, ducers, also referred to as Langevin-Bolt
LBT) 是用专门开发的具有低介质损耗， transducers (LBT), are made from specially
高机械品质因子特性的压电陶瓷材料。 developed piezoceramics characterized by
赛琅泰克针对不同的应用属性可提供两 low dielectric loss and high mechanical Q
类材料。 factors. For these applications, CeramTec
supplies two material types distinguished
材料 by different attribute profiles.
SONOX ®
P4 适用于超声波清洗和无损
检测转换器，它具有高耦合系数，中等 Materials
的机械品质因素和优异的机械稳定性， SONOX® P4 is suitable for ultrasonic
并可以承受共振时产生的较大振幅。 cleaning and non-destructive testing trans-
转换器的能量输出（在水下单向输出） ducers. Its high coupling factors, medium- 金属末端模块

范围可介 7-10 W/cm2。陶瓷元件的最 range Q factors, and excellent mechanical Metallic end mass

高操作温度不得超过125 °C, 其抗压强 stability permit high oscillation amplitudes

度取决于安装条件（负荷应均匀分布） at resonance.
，在连续受压模式下通常最大可以达到 The achievable active power output
压电陶瓷片
70MPa。 in transducer configurations (emitting
Piezoceramic disk
unilaterally in water) varies between ap-
SONOX® P8 是为那些需在单位面积下 proximately 7 and 10 W/cm2. The maxi-
金属前端模块
承受大载荷的转换器设计的，这种材料 mum operating temperature of the ce-
Metallic front mass
结合了高机械品质因素、高耦合系数及 ramic element must not exceed 125 °C.
低介质损耗。它还具备较好的抗退极化 Its compressive-strength depends on the
特性，所以 SONOX® P8 特别适合大功率 mounting conditions (homogeneous load
换能器。 distribution) but will usually reach 70 MPa
maximum in continuous mode.

SONOX® P8 is designed for power trans-

ducers handling maximum loads per unit
area. This material combines high mecha-
大功率超声转换器
nical Q values with high coupling factors
High-power ultrasonic transducer
and low dielectric loss. Since it also fea-
tures a high depolarization resistance, SO-
NOX® P8 is particularly suitable for high-
power transducers.
28

通过适当的设计，转换器可以实现超 With an appropriate transducer de-

过2kw的主动功率输出。这种转换器主 sign, active power outputs in excess of
要用于超声波焊接和超声波加工设备 2 kW can be achieved. Such transducers
中，也可用于高性能清洗设备中。基于 are used chiefly in ultrasonic welding
转换器的设计和耦合方法，超声波清洗 and machining equipment, but also in
系统的配置范围为主动功率输出介于10- high-performance cleaning. Depending
20W/cm2（水下单向发射），最高工作 on the transducer design and coupling
温度为125 °C, 最大连续抗压强度（假定 method, ultrasonic cleaning systems
负荷均分布）约为125MPa。 may be configured with active pow-
er outputs between 10 and 50 W/cm2
电极是在材料表面用丝网印银涂层并 (unilateral emission in water). The maxi-
刷烧结后得到的，对于环状的产品外径 mum operating temperature is 125 °C,
最大可达50mm，内外环同轴度的最大偏 while the maximum continuous compres-
差为0.1mm。 sive strength (assuming a homogeneous
表面平整度和金属化涂层的平行度偏差 load distribution) is approx. 125 MPa.
≤ 20 μm, 如有特殊要求则偏差度还可以
更低。 The electrodes are made of sintered silver
screen printed onto the material. On rings
对于蝶形元件，厚度公差超出金属化表 up to 50 mm outside diameter, the maxi-
面为±0.1mm，如有特殊需求，还可以提 mum inside/outside diameter concentrici-
供专门设计的焊接引线或机器开槽等。 ty is 0.1 mm.
The surface flatness and parallelism over
the metallized layer is ≤ 20 μm. By special
arrangement, parts can be produced to si-
gnificantly smaller tolerances.

For disks, the thickness tolerance over

the metallized surface is ± 0.1 mm.
Flatness and parallelism values lie within
the same tolerance band. Special designs
with soldered connecting wires or machi-
ned grooves can be produced upon re-
quest.

产品的形状 Product shapes

标准的产品是碟状或环状的。 Standard products are in the form of
disks or rings.
 29

下表汇总了环形产品的推荐直径和厚
度组合：:

The following table summarizes the

preferred diameter and thickness combi-
nations for rings:

ID T AD (mm) T (mm)
AD (mm)
(mm) (mm)
25 1
10 4 2 38 3
5 2 6.35
15 8 2 50 2.50
25 10 4 3
5 6
6
6.35 下表是碟形产品的推荐尺寸组合：
Other shapes and dimensions available upon
35 15 4
request
5
6
6.35
38 13 4
15 5
20 6
6.35
50 15 5
20 6
6.35

AD: 外径
OD: Outside diameter
ID: 内径
ID: Inside diameter
T: 厚度
T: Thickness
 压电术语：词汇表

30

老化率 c 频率常数 N 指数
老化率用来表示某个特性指标单位时 是机械共振频率和决定这个频率的尺 在压电陶瓷材料中，正向极化的方向通
间的相对变化，用以十为底的指数来表 寸的乘积。这个指数表示震荡形式。 常选择与以晶轴形成的直角坐标系的z轴
示时间间隔（“十年”）。 相一致。这些坐标轴通常用数字1，2，3
常用的有下列变量 ： Np: 
表示圆形碟片的平面震荡频率常数 标识，3表示极化的方向。作用在任一方
Nt: 表示薄的平板沿厚度方向的振荡频率 向上的机/电效应用相应的指数标识。一
cε: 电容老化率 常数 般压电陶瓷元件都已经按照一定的方向
cf: 共振频率老化率 N1: 表示矩形平板沿横向方向的振荡频率 （方向3）极化，因此表现出各向异性特
ck: 机电耦合因子老化率 常数 征，材料特性表里给出的参数都是与方
N3: 表示圆柱体或细圆棒沿纵向的振荡频 向相关的，常带有两个下标（偶尔也有
例如，如果说SONOX ®
陶瓷的电容老 率常数 一个下标的）。
化率是每十年- 4,5 %, 其老化曲线为： 下标表示变量保持恒常，两个下标则表
由于几何诱导的耦合振动在上述的各 示相应两个方向的变量（电场、电位
极化1天后 ：100 nF 种情况下都可能发生，所以当用频率常 移、机械应力和伸张量）相关。
极化10天后：96,6 nF (-3,4 %) 数计算共振频率时需要考虑特定振动体
极化100天后：93,3 nF (-3,4 %) 的几何配置（请参考“压电陶瓷谐振器的 上标
极化1000天后：90,1 nF (-3,4 %) 基本震荡模式”一节）。 T:  指恒定的机械应力
除Np,频率常数等于声音在压电陶瓷材料 S: 指恒定的应变
居里温度 Tc 里传播速度的一半。 E: 指恒定的电场强度
在此温度点，铁电体压电陶瓷的绝缘 D: 
指恒定的电位移
介电常数将达到极值。 机械品质因子 Qm
在此温度下，压电陶瓷丧失极化。因此 发生共振时压电元件振幅放大，定义为 下标
工作温度通常不应超过居里温度的一 每个震荡循环输入的能量与消耗的能量 1, 2: 垂直于极化方向的方向 — 方向1
半。 （耗散）的比值。机械品质因子可以用 和2相互垂直而且是等效的（具有相同的
下面的方法计算： 陶瓷特性）
相对介电常数 εr fp 2 3: 极化的方向
是绝对介电常数和自由空间介电常数 Qm = 举例
2 · π · fs · Zs · C · (fp2 - fs2)
的比值 (εO= 8.85 x 10-12 F/m)。 压电电荷常数 d33 （参见参数表）表示
fp: 并联共振频率 测量时施加的机械应力方向为3（极化
fs: 串联共振频率 方向），因而产生的电位移也发生在方
C: 电容 向3。
Zs: 共振阻抗

机械品质因子是一个衡量元件在动态驱
动模式下机械损耗的无量纲因数。
 31

电容 C 机电耦合系数 k 弹性依从度 s
压电陶瓷的电容，是在远低于其最小 用来衡量从电能到机械能的能量转换 弹性依从度s反映了元件伸张量S和机械
共振频率的频率（通常为1kHz）下测量 效率。 应力T的比值，是弹性模量（杨氏模量）
的。 的倒数。
利用下面的公式和相对介电常数，可以 对于电“驱动”元件，有以下方程式：
计算出数据表中给定几何尺寸和材料的 存储的机械能 压电电压常数 g
元件的电容量： k2 = 表示所产生的电场强度和施加的机械
存储的总能量
应力之间的比值，用伏特/牛顿（正压电
C = εr · εO · (A/d)
T
对于机械“驱动”元件，我们可以写成： 效应）表示。或者是产生的伸张量和施
加的电荷密度之比，用库伦/平方米（逆
存储的电能
A: 电极面积 k2 = 压电效应）表示。
存储的总能量
d: 电极间距离 电压常数和电荷常数之间通过元件的电
根据不同的边界条件，共有五个偶合 容而内在联系起来。其关系可以用下面
用下面的简化方程可以得出一个压电 因子反应元件的形状和和震荡模式。在 的公式表示：
陶瓷体电容很好的近似值（单位为pF） 没有假设边界条件比如特定的直径/厚度
： 比的时候通常用有效耦合因子做标准。 d = εr · εo · g
可以用下面的公式计算近似值：
圆柱体：
fp2 - fs2
εr : 相对介电常数
k2eff. = εo: 自由空间的介电常数
εr · d2 fp2
C= [pF]
t ·144
fS : 串联共振频率 下面的例子可以说明如何利用电压常
t: 厚度/高度，mm fp: 并联共振频率 数来计算压电元件上的电压。
d: 直径，mm
充电常数 d
压力p
矩形片： 是产生的电荷和施加的力之间的比
值，用库伦/牛顿表示（正压电效应）。
εr · I · w SONOX
®

C= [pF] 或者是产生的伸张量和施加的电压之间
t ·113 U h
比值，用米/伏表示（逆压电效应）。
区域A
l: 长度，mm 对于一个短路的压电陶瓷单(E = 0) 适合
w: 宽度，mm 下面的方程：
t: 厚度，mm Q=d·F U = g33 · h · p F

Q: 电量（产生的） ®
SONOX
F: 力（施加的） U h
在无机械负荷（T=0）的条件下，可以得
出下面的方程式：
S=d·U

S: 伸张量（产生的）
U: 电压值（施加的） SONOX
®

U h
 ®
SONOX
U h

®
32 SONOX
U h
力F F 温度系数 αk
表示温度每变化1K机电耦合因子的相
®
对变化量。
SONOX
F
U h
区域A 电介质的耗散因子 tan δ
SONOX
® 是当元件被一个远低于其最低共振频
U h 率的正弦波信号（通常用1kHz）激发时
F 其功率损失和无功功率之间的比值。对
U = g33 · h ·
A 于功率转换应用，建议采用适当低的耗
SONOX
®
损因子的压电陶瓷。
U h
质量M
® 压电陶瓷的特性
SONOX
U 质量m h 压电材料特性可以用专门的参数来
区域A 描述，其中的一些汇总在材料数据表
中。根据标准 EN 50324, 这些参数是
用标准样本在小信号条件下测得的，
并且与温度和时间有关。
加速度 a
由于这个原因，通常是在极化后24小
时、温度20 到 25 °C条件下测量，性
a (M + ½ · ζ · h · A)
U = g33 · h · 能会依样品的不同尺寸和制造工艺而
A
变化，使用其它尺寸和生产工艺会得
d33
= · (M + m2 ) · a 到不同的参数。
C
由于压电陶瓷的晶体特质，同时也是
因为材料成分和生产中影响因素的统
M: 附加大震动的质量
计变化，这些数据都应当看作仅仅是
ζ: 压电材料的密度
典型值，目的是给设计压电陶瓷产品
h: 压电元件的高度
提供指导。标准偏差范围是± 20 %.
A: 压电元件的面积

m: 压电元件的质量
注释：每组材料的特性数据在另外的
数据表里详细提供。
Piezo Terminology: A Glossary
Aging rate c
The aging rate indicates the relative
change in a given property per unit time,
over intervals expressed on a decimal ex-
ponent basis (“decades“).
The following variables are used:
cε: capacitance aging rate
cf: resonance frequency aging rate
ck: aging rate of the electromechanical
coupling factor
Thus, if the capacitance aging rate of
SONOX® P4 ceramics is given as -4.5 %
per decade, the aging curve is as for ex-
ample:
1 day after polarization: 100 nF
10 days after polarization:
96.6 nF (-3.4 %)
100 days after polarization:
93.3 nF (-3.4 %)
1000 days after polarization:
90.1 nF (-3.4 %)
Capacitance C
Capacitance of a piezoelectric trans-
ducer, measured at a frequency far
below its minimum resonance frequency
(usually 1 kHz).
By using the relative dielectric permitti-
vity, this parameter can be computed from
the data sheet for a defined component
geometry and material by means of the
following formula:
C = εr · εO · (A/d)
T
A: electrode area
d: electrode spacing
A good approximation of the capaci-
tance (in pF) of a piezoceramic body can
be achieved by means of the following
simplified equations:
33
Round disk/cylinder: Coupling factor, electromechanical k
Measures for the efficiency of the elec-
εr · d2
C= [pF] trical-to-mechanical energy conversion.
t ·144
t: thickness / height in mm For electrically “driven“ components, the
d: diameter in mm following equation applies:
stored mechanical energy
Rectangular plate: k2 =
total energy stored
εr · I · w
C= [pF] For mechanically “driven“ components,
t ·113
we may write
l: length in mm
stored electrical energy
w: width in mm k2 =
total energy stored
t: thickness in mm
Depending on the boundary conditions,
Charge constant, piezoelectric d there exist five different coupling factors
Denotes the ratio between charge ge- reflecting the form factors and oscillation
nerated and the force applied, indicated mode of the component. Where bounda-
in Coulomb per Newton (direct piezo ef- ry conditions like a specific diameter/thick-
fect), or the ratio between the strain pro- ness ratio are not granted, the effective
duced and the electrical voltage applied, coupling factor is normally used as a stan-
indicated in meters per volt (inverse piezo dard. It can be approximated by means of
effect). the following simplified formula:
fp2 - fs2
For a short-circuited piezoceramic ele- k2eff. =
fp2
ment (E = 0), the following equation ap-
plies: fS : series resonance frequency
Q=d·F fp: parallel resonance frequency
Q: charge (generated) Curie Temperature, Tc
F: force (applied) This is the temperature at which the di­-
electric permittivity of ferroelectric ceramics
For a mechanical no-load condition will reach its maximum.
(T=0), the following equation can be ex- At this temperature, a piezoelectric ce-
pressed: ramic will lose its polarized state. For this
S=d·U reason, operating temperatures normally
should not exceed half the Curie tempe-
S: strain (generated) rature.
U: electrical voltage (applied)
Dielectric permittivity, relative εr
Compliance, elastic s Denotes the ratio between the absolute
The elastic compliance s reflects the ra- dielectric constant and the permittivity of
tio between the strain S and the mechani- free space (εO= 8.85 x 10-12 F/m).
cal stress T and is equal to the inverse of
the modulus of elasticity (Young‘s modu-
lus).
34
Dissipation factor, dielectric tan δ
Denotes the ratio between power loss
and reactive power when the component
is excited with a sine-wave signal at a fre-
quency far below its lowest resonant fre-
quency (usually measured at 1 kHz). For
power conversion applications it is recom-
mended to use piezoceramics with suitab-
ly low dissipation factor.
Frequency constant N
Product of the mechanical resonance fre-
quency and the dimension determining
that frequency. The index indicates the
oscillation form.
Np: Frequency constant for the planar
oscillation of a circular disk
Nt: Frequency constant for the thick-
ness-mode oscillation of a thin plate
N1: Frequency constant for the longitu-
dinal or transverse oscillation of a
thin rectangular plate
N3: Frequency constant for the longi-
tudinal oscillation of a slender rod
or cylinder polarized in that direction
Since geometrically induced coupled-
mode vibrations may occur in all of the
above oscillation forms, the geometrical
configuration of the specific oscillating
body must be taken into account when
using the frequency constant for calcula-
ting resonance frequencies (refer also to
the section “Basic Oscillation Modes of
Piezoelectric Resonators“).
Apart from Np, the frequency constants
indicated equal one-half the sound propa-
gation velocity in the piezoceramic mate-
rial.
Indices
In piezoelectric materials, the direction
of positive polarization is usually made to
coincide with the z-axis of a rectangular
system of crystallographic axes. These co-
ordinates are normally designated 1, 2, 3,
with direction 3 indicating the polarization
direction. Mechanical and electrical influ-
ences acting in any of these directions are
identified with the corresponding index.
Since piezoelectric components are alrea-
dy polarized in a given direction (i.e., 3)
and will therefore show an anisotropic be-
havior, the coefficients given in the mate-
rial property data charts are direction-rela-
ted and will often comprise two subscripts
(plus, occasionally, one superscript).
The superscript indicates the variab-
le that remains constant, while the two
subscripts identify the direction in which
the different variables (electric field, elec-
tric displacement, mechanical stress and
strain) are linked.
Superscripts
T: at constant mechanical stress
S: at constant strain
E: at constant electrical field strength
D: at constant dielectric displacement
Subscripts
1,2: perpendicular to the direction of
polarization – directions 1 and 2
are orthogonal to each other and
equivalent (isotropic behavior of
ceramics)
3: in the direction of polarization
Example:
A piezoelectric charge constant d33 (re-
fer also to the data sheet) indicates that
the mechanical stress applied during the
measurement acts in direction 3 (pola-
rization direction), whereas the electric
displacement produced will also occur in
direction 3.
Quality factor, mechanical Qm
Amplitude magnification of an oscil-
lating piezoelectric component at reso-
nance. Defined as the ratio of energy in-
put per oscillation cycle over the amount
of energy consumed (i.e., dissipated) per
oscillation cycle. The mechanical quality
factor can be computed as follows:
fp2
Qm =
2 · π · fs · Zs · C · (fp2 - fs2)
fp: parallel resonance frequency
fs: series resonance frequency
C: capacitance
Zs: impedance at resonance
Thus, the mechanical quality factor is a
dimensionless measure for a component‘s
mechanical losses in dynamic driving
mode.
Temperature coefficient αk
Indicates the relative change of the elec-
tromechanical coupling factor per Kelvin
of temperature change.
Voltage constant, piezoelectric g
Denotes the ratio between the electric
field strength produced and the mecha-
nical stress applied, indicated in voltme-
ters/Newton (direct piezo effect), or the
ratio between the strain produced and
the charge density applied, indicated in
square meters per Coulomb (inverse piezo
effect).
The voltage constant and charge con-
stant are interrelated via the capacitance
of the component. This relationship is ex-
pressed by the following formula:
d = εr · εo · g
εr : relative permittivity
εo: permittivity of free space
The following examples illustrate how
the voltage across the piezoelectric com-
ponent can be calculated by means of the
voltage constant.
 35
Pressure p
Characteristics of piezoelectric
­ceramics
®
SONOX p
Pressure Piezoelectric materials are characte-
U h
rized by specific parameters, some of
Area A
SONOX
® which are summarized in the adjacent
U Pressure p h table. The values of these parameters
U = g33 · hForce
· p AF
Area are determined on standardized speci-
® mens in the form of small-signal mea-
SONOX
U h surements according to EN 50324 and
Force F®
SONOX
Area A exhibit a dependence on temperature
U h
and time.
Area A
SONOX
®
For this reason, measurements are
U Force F h usually taken at temperatures between
Area A 20 °C and 25 °C 24 hours after polari-
Mass M
SONOX
® zation. Properties can deviate in using
U
SONOX
® h different dimensions and production
U Mass Fm A
Area h technologies. With other dimensions
U = g33 · hMass
· M
AreaAA and production methods properties
®
SONOX
can be different.
U Mass m h
Due to the polycrystalline nature of
Area
MassAM
piezoceramics, but also as a result of
Acceleration ®a
SONOX statistical variations in their composi-
U Mass m h
tion and productionrelated influences,
Area A a
Acceleration the data stated should be viewed as ty-
pical values only. They are intended as
a guide for the design of piezoceramic
Acceleration a applications. The standard tolerance
range is ± 20 %.

a (M + ½ · ζ · h · A)
U = g33 · h · Note: The characteristic values of the
A
material groups are provided in detail
d33
= · (M + ) · a
m in separate data sheets.
C 2

M: Mass of the attached seismic mass

ζ: Density of the piezoceramic material

h: Height of piezoceramic component

A: Area of piezoceramic component

m: Mass of the piezoceramic component

 参考书目 — 压电陶瓷，基础知识，
应用（按作者姓名排序）
Bibliography – Piezoceramics, Fundamentals,
­Applications (sorted by author)
36
Piezokeramik, Grundlagen, Anwen-
dungen; nach Autoren sortiert
Bauer und Mitautoren: Technologie und
Anwendung von Ferroelektrika, Akade-
mische Verlagsgesellschaft Geest & Portig
K.-G., Leipzig, 1976
Cady, W. C.: Piezoelectricity, McGraw-Hill
Book Co. Inc., New York, London, 1946
Holland, R., EerNisse, E. P.: Design of Re-
sonant Piezoelectric Devices, Cambridge
(MA), London, 1969
Ikeda, Takuro: „Fundamentals of Pie-
zoelectricity“, Oxford, New York, Tokio,
1990
Jaffe und Mitautoren: Piezoelectric Ce-
ramics, Academic Press, London, 1971
Katz, H. W.: Solid State Magnetic and
Dielectric Devices, John Wiley and Sons,
New York, 1959
Martin: Die Ferroelektrika, Akademische
Verlagsgesellschaft Geest & Portig K.-G.,
Leipzig, 1976
Mason, W. P.: Electromechanical Trans-
ducers and Wave Filters, D. Van Nostrand,
Princeton, 1948
Mason, W. P.: Physical Acoustics, voll, Part
A, Academic Press, New York, 1964
Mason, W. P.: Crystal Physics of Interac-
tion Processes, Academic Press, New York,
1966
Mattiat, O. E.: Ultrasonic Transducers,
New York, London, 1971
Millner, Cobet: Ultraschalltechnik, Grund-
lagen und Anwendungen, Physik Verlag,
Weinheim, 1987
„Monte Verita“: Ferroelectric Ceramics,
Birkhäuser Verlag, Basel, Boston, Berlin,
1993
Ruschmeyer, Karl und Mitautoren:
Piezokeramik, Expert Verlag, Renningen-
Malmsheim, 1995
Setter, N., Colla, E. L. (ed.): Ferroelectric
Ceramics, Basel, Boston, Berlin, 1993
Setter, N., (ed.): Piezoelectric materials
and devices, Eigenverlag N. Setter, Lau-
sanne 2002, ISBN: 2-9700346-0-3
Tichy, J., Gautschi, G.: Piezoelektrische
Meßtechnik, Berlin, Heidelberg, New
York, 1980
Uchino, Kenji: Piezoelectric Actuators
and Ultrasonic Motors, Kluwer Academic
Publishers, Boston, Dordrecht, London,
1997
Wilson, O. B.: Introduction to Theory and
Design of Sonar Transducers, Los Altos
(CF), 1988
Xu, Yuhuan: Ferroelectric Materials and
Their Applications, North- Holland, Ams-
terdam, London, New York, Tokyo, 1991
Zelenka, J.: Piezoelectric Resonators and
their Applications, Amsterdam, Oxford,
New York, Tokyo, 1986
备注：
Notes

37
 备注：
Notes

38
 强有力的事实----陶瓷在压电领域的应用 备注：
A powerful presence – ceramics in piezo Notes
applications

压电陶瓷能够有效地把机械能比如压
力、加速度等转化成电能，反之也可把 压电陶瓷传感器
电信号转化成机械运动或振动。 Piezoceramic sensors
压电陶瓷元件应用于涵盖宽频的广谱机 •
电传感器。在传感器应用中，压电陶瓷 大功率超声波换能器
把力、压力和加速度等转换成电信号。 High-power ultrasonic
在声音发生器和超声换能器中他们把电 transducers
压转换成振荡信号或变形量。 •
在汽车工程中，传感器系统保证了乘客 执行器机构
的安全并提供智能化的发动机控制管 Actuators
理。
点火器作为压电陶瓷的一项应用，已经
使用很多年了--作为批量生产的产品应用
于供暖系统和燃气点火器装置。
在超声波应用中，压电陶瓷元件产生的
大功率超声波可用于超声波清洗、钻
孔、焊接以及激活化学过程。另一方
面，压电陶瓷也作为超声波接收器或发
射器被应用于信号和信息处理方案中。
它们也在各种先进声纳定位、测距、材
料无损检测和医疗诊断设备中发挥关键
作用。
压电陶瓷执行器的工作依赖于压电元件
在微米级范围内产生的可控变形的能
力。这种特性使机电换能器有了新的应
用：作为驱动元件应用在液压和气动阀
门、定位系统、微型机器人和液体、气
体介质的配料器中。
鉴于其广泛的应用领域，我们建议您在
新产品或系统的开发阶段就与赛琅泰克
的专家进行讨论。我们经验丰富的专家
很乐意协助您。通过与客户端专家的对
话，赛琅泰克能够帮助确定您的应用条
件、需求指标和设计条件并提出经济有
效的方案。先进的制造方式使得赛琅泰
克可以大批量生产质量卓越的压电陶瓷
产品。赛琅泰克全公司范围的质量管理
体系确保我们的产品和服务质量能满足
客户的期望。

用于汽车的主动元件—倒车传感器

Active in automotive systems: back-up sensor

hcirüZ pyT
57

mm 0 ehöhllüF
neßua thcisnatmaseG
 赛琅泰克集团多功能陶瓷事业部
Multifunctional Ceramics Division

高性能陶瓷在
压电领域的应用

Advanced Ceramics
in Piezo Applications

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