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IEEE SENSORS JOURNAL, VOL. XX, NO. XX, MONTH X, XXXX 1
Index Terms— Complex permittivity, parallel interdigital capacitor, planar microwave sensor, resolution, resonant
frequency, sensitivity, solid materials.
R
[5]-[7]. Such methods can be performed by using antenna [8] or
ecent years have witnessed a tremendous interest toward
filter [9], also known as sensor, because it is used to detect the
developing high-performance microwave sensors for
dielectric characteristics of solid materials. An important
complex permittivity characterization of all-phase materials.
HIS characteristic of a sensor are high sensitivity and low loss [10].
Permittivity characterization of solid materials at microwave
The properties of solid material can be demonstrated with a
regime has many applications in the field of aerospace,
high sensitivity by using structure with a strong field location
agriculture, defense industry, biomedical, and millimeter
[11].
microwave devices [1]-[3]. Enhancing sensitivity and
The planar microwave sensor can be designed by using
generating high-accuracy measurement results are the main
different structures such as, split ring resonator (SRR),
challenges in this field. To overcome these challenges, various
complementary split ring resonator (CSRR), coplanar
methods have been investigated [4] for characterizing the
waveguide (CPW), and substrate integrated waveguide (SIW)
permittivity of solid materials including metamaterial-based
[12]-[14]. These structures feature advantages of compactness,
interface easily between each other and with the circuit of
Manuscript received ABC 00, 0000; revised DEF 11, 1111; accepted lumped elements [15]. In a planar microwave sensor field
GHI 33, 3333. Date of publication JLK 0, 0000; date of current version
MNO 44, 4444. “ This work was supported by the General Financial
interaction lead to the changes in resonance frequency of a
Grant from the China Postdoctoral Science Foundation sensor which reveals properties of solid materials [16]. In such
(2017M611367), Heilongjiang Postdoctoral Science Foundation sensor, a zone of high intensity electric field and magnetic field
(LBH-Z17056), and Zhejiang Lab (2019MC0AB03).” is required for a sample position to demonstrate the
C. Wang, L.Ali, F-Y. Meng, K. K. Adhikari, Z-L. Zhou, Y-C. Wei, D-Q.
Zou, and H. Yu are with School of Electronics and Information
characterizations of permittivity and permeability [11].
Engineering, Harbin Institute of Technology, Heilongjiang, However, the dielectric characterization of solid materials can
150001,China (*Corresponding authors’ e-mail: kevinwang@hit.edu.cn, be performed by using a structure with a maximum electric
kishor@hit.edu.cn).
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field, a sensor exhibits a high sensitivity with a strong field approach of dual wide gap resonator with parallel inter-digital
[11]. capacitor (P-IDC) structure is used to create the high intensity
The field can be enhanced in a planar microwave sensor by electric field. The gaps between fingers of P-IDC structure
using a meandered micro-strip line (MML) [16] and generate a high electric field, which enhances the coupling and
inter-digital structure [15]. A high coupling can be achieved by field interaction, causing the increase in sensitivity. A planar
using a gap between the strip lines, which exhibits a strong microwave sensor has been designed based on P-IDC structure
field. Using this technique, the field can be enhanced further by for determining the complex permittivity of dielectric
leaving a gap between the strip lines, as a result all these gaps materials. The P-IDC structure has been fabricated on RF-35
are coupled with the strip lines and strong electric field is substrate (Ɛr = 3.5) with 0.76 mm thickness. The principle of
achieved. The SRR based planar microwave sensor are widely operation for detection of dielectric characterization of material
used due to its establishment of strong field, easy fabrication, is illustrated in section II. The design and simulation of the
low cost, and robust design. The SRR type structures have been proposed planar microwave sensor are explained in section III.
used to design the microwave sensor for the characterization of A system to measure the permittivity of dielectric materials
microfluidic liquid [13], magneto dielectric sample [16], under test using P-IDC sensor is described in section IV.
medical purposes [17], and for humidity sensing [18]. The Section V explains and justifies the numerical equations used to
interfacing of SRR with MML and inter-digital structure is used evaluate the real and imaginary permittivity of solid materials
to maximize the field intensity [19]. In [20], the via the real time measurement results.
characterization of aqueous materials can be determined by
using a combination of combiner or splitter with SRR to II. OPERATION PRINCIPLE
establish a strong field. The interfacing of inter-digital structure The parallel combination of interdigital structure with a wide
with SRR and spiral structure have been used to enhance the dual gap of resonator is the fundamental part of the proposed
field [8], [21]. The sensitivity of such sensor enhances, because sensor as shown in Fig. 1b. A circuit model is designed for the
such alignment maximizes the collaboration of sensor with proposed sensor structure using Advanced Design System
samples. In [22], the electric field can be maximized by using a software. A good agreement was found between the simulated
gap between double SRR. By placing a sample on a maximum transmission coefficient (S21) of the layout structure and circuit
electric field location, causing a field of high interaction and in model as shown in Fig. 1c. The two important parameters that
the result increased sensitivity. The SRR array, MML, and play a basic role in a planar microstrip resonator are resonant
interdigital structures are used to maximize the electric field, frequency and quality factor. A simple resonator can be
because in these structures the gaps between strip lines creates a represented through a modelled RLC circuit having a resonant
high coupling and field interaction [23]. The microwave frequency as given in Eq. (1):
sensors for the demonstration of dielectric property of liquid
sample have been designed based on metamaterial resonator 1
[24]-[27]. fr (1)
2 LC
It is inferred from the above argument that an accurate
electric characterization of solid material is necessary, to
determine the permittivity of unknown materials. A simple
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Kk
Cc c 4 (2)
Kk
K
s 1 K 2 1
C 2 K (m)
CIDC (3)
F
W SUB
FG
l ( N E 1) (c) (d)
Fig 2. A schematic view of electric fields lines in inter-digital structure for
detection of dielectric MUTs, a) parallel plate capacitor whose, b)
where l represents the coupled length of the IDC electrode, NE electrodes are opened to afford, c) one sided access to the MUT, and d)
indicates total number of fingers, ƐSUB defines the substrate increasing gap between the electrodes for better assessment with
permittivity, FW represents the finger width, FG defines the sensing MUT to detect it more precisely.
finger gap, and K is the first elliptical integral. In the above Fig.
1b, a back view inside the circuit diagram represents Table I
interdigital capacitor which is associated with a wide dual gap Parameters of the proposed design
of resonator. Cp and Cs represent the shunt capacitors and series Abbreviation Parameters P-IDC-1 P-IDC-2
FL Finger length 4.07 mm 3.57 mm
capacitor of the IDC structure as shown in Fig. 1b, respectively. FW Finger width 0.3 mm 0.5 mm
The proposed design structural analysis is very important on FG Finger gap 0.3 mm 0.5 mm
the basis of wide area between electrodes of interdigital NE Number of fingers 21× 2 12 × 2
structure for dielectric characterization of solid materials. Such h Height of the substrate 0.76 mm 0.76 mm
Ɛsub Dielectric constant of a substrate 3.5 3.5
type of structure provides a periodic electric potential at the
surface of a testing sample and measures the electric field line
capacitance as shown in Fig 2. Interdigital structure exploits the FW and FG. The capacitance of such structure can be varied by
same operation principle like a traditional parallel plate attuning the FW and FG and, in response, such design generates
capacitor as shown in Fig 2a. The main advantage of a high electric field. When the design structure is exposed to
interdigital capacitor electrodes lies in its open area, due to the proximity of a testing dielectric material, the resonance
which distance between adjacent electrodes are wide and the frequency of the design sensor shifts downward. The effective
total electric field area increases in a sample. When a sample is permittivity of testing dielectric sample affects the capacitance
placed on fingers of IDC with a larger gap between them, it and interrupts the electric field of a sample perturbing the field
detects the proximity of sample with a high sensitivity, because distribution intensity of design structure which can be
such structure electric field area is larger which detects physical evaluated from Eq. (4) [2].
changes inside a material through reflection more accurately.
Higher a gap between electrodes, a larger will be the interaction
of electric field area, which means more interaction layer will
f r
vs ( E1.E0 )dv
(4)
penetrate the surface of MUT as mentioned in [29], [30]. The fr vc ( 0 | E0 |2 )dv
sensing zone of a proposed design is based on parallel
combination of IDC type structure with a wide gap of resonator In Eq. (4), Δfr represents a shift in a resonance frequency of the
as shown in Fig. 1. The different parameters of IDC type of resonator when a sample of dielectric material is placed on the
structure is shown in Table I. The coupling capacitance and sensing spot of a sensor. fr indicates the resonance frequency of
parallel combination of IDC type of structure is dependent on a resonator with the unloaded sample, Ɛo indicates the
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(a)
(a)
(b) (c)
Fig. 4. a) Geometry shape and 3D view of P-IDC-1 structure, j = 20 mm,
(b) (c) k = 22 mm, l = m =2.0 mm, n = 11 mm, o = 9.63 mm, p = 4.07 mm, q = r
Fig. 3. a) Geometry shape and 3D view of SRR structure, s = 20 mm, t = = 0.3 mm, b) resonance frequency of P-IDC-1, and c) electric field
22 mm, v = u = 18.43 mm, w = 0.3 mm, b) resonance frequency of SRR, distribution (1.0×105 V/m).
and c) electric field distribution (1.5×104 V/m).
package of Computer Simulation Technology 2019 (CST). The
free space permittivity, ΔƐ defines the change permittivity, width and length of a microstrip line for the designed sensor is
respectively. While Eo is the electric field without loading the wm=1.68 mm and lm=22 mm in order to get a 50Ω matching
sample of MUT, E1 defines the field with loading MUT on the characteristic input impedance as shown in Fig. 1a. The
zone of a strong field of resonator. It represents that by loading designed sensor is based on the combination of P-IDC with a
the proposed design with a dielectric sample on the location of wide dual gap resonator etched on the ground layer to
maximum electric field, it perturbs the field distribution which maximize the electric field of a structure. Because the fingers of
is identified through a change in resonance frequency and P-IDC structure and gaps between them are coupled as a
quality factor. spur-line, which enhance the coupling and field interaction as a
The structure with a high electric field intensity enhances the result increased sensitivity of a proposed design. Initially, the
coupling and field interaction with a testing sample, when it is
SRR has been designed with a gap of 0.3 mm etched on the
pointed out on a sensing area of a design and in response a high
ground plane of a micro-strip line. The dimension of SRR is
sensitivity. The normalized sensitivity of a design sensor can be
given in Fig. 3a. Fig. 3b shows the simulated (1.41 GHz) and
calculated using Eq. (5) below [31]:
measured (1.43 GHz) resonance frequencies of SRR as a
transmission coefficient. The magnitude of electric field on the
1 fUnloaded f Loaded ground layer at the resonance frequency of SRR is 1.5×104 V/m
NS (%) (5)
r fUnloaded as shown in Fig. 3c. The intensity of electric field is represented
in the SRR slot of copper. Such condition is required to
In Eq. (5), the ratio of resonant frequency of unloaded sample characterize the permittivity of dielectric materials.
and loaded sample on the sensing zone of design structure to the The electric field is localized very small in the SRR slot. To
change in permittivity of testing dielectric material. In the increase the electric field of a resonator, the IDC type of
proposed work the gap between fingers of P-IDC-1 and structure can be used with a wide dual gap of resonator. The
P–IDC-2 is 0.3 mm and 0.5 mm as shown in Table 1. Due to a P-IDC-1 has been designed by interfacing a parallel
large gap between the fingers of P-IDC-2 structure, the combination of IDC structure with a dual wide gap of resonator
resonance frequency of such structure shifts downward, to increase the zone of electric field. The dimension of P-IDC-1
because such structure detects proximity of MUT through is given in Fig. 4a. Fig. 4b shows the simulated (1.72 GHz) and
electric field lines, which penetrates inside a solid material measured (1.8 GHz) resonance frequencies of a P-IDC-1
more accurately and in response a high sensitivity. structure. The magnitude of electric field at the resonance
frequency of P-IDC-1 is 1.0×105 V/m on the ground plane. The
III. PLANAR MICROWAVE SENSOR: DESIGN AND SIMULATION zone of the electric field increases due to interfacing of
The proposed P-IDC sensor has been designed on a RF-35 P-IDC-1 with a wide dual gap of resonator as shown in Fig. 4c.
substrate with a dielectric constant of Ɛr=3.5, in a software The fingers of P-IDC-1 and gaps between them enhance the
electric field. The P-IDC-1 finger length is 4.07 mm, while the
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r r j r (6)
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(a) (b)
SPIDC 1 1.321102 ( r ( P IDC 1) ) 0.14494 (10a)
| Q1 8.21103 |
tan P IDC 1 (11a)
1.321102 ( r ( P IDC 1) ) 0.14494
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Fig. 9. The fabricated sensor results for measuring of dielectric material, a) top view of designed sensor, b) bottom view of P-IDC-1, c) bottom view of
P-IDC-2, and d) characterization of permittivity of dielectric material measuring setup.
Table II
Real permittivity characterization of solid materials
Frequency shifting (P-IDC-1) ∆fr Frequency shifting (P-IDC-2) ∆fr
Material ƐReal (Actual value) ƐP-IDC-1 (Fitted value) ƐP-IDC-2 (Fitted value)
(GHz) ± RSD (%) (GHz) ± RSD (%)
F4BM 0.16 ± 0.59 % 0.35 ± 0 % 2.2 2.104 2.292
F4BTM 0.25 ± 0.37 % 0.43 ± 0 % 4.0 4.015 4.076
F4BTM1 0.38 ± 0 % 0.65 ± 0 % 6.15 6.731 7.076
TP 0.48 ± 0 % 0.77 ± 0 % 9.6 8.786 9.073
TP1 0.58 ± 0.8 % 0.95 ± 0.49 % 10.5 10.81 10.728
Table III
Imaginary permittivity characterization of solid materials
Imaginary permittivity
Material tanδ actual tanδ fitted (P-IDC-1) (P-IDC-1) tanδ fitted (P-IDC-2) Imaginary permittivity (P-IDC-2)
F4BM 0.0001 0.000112 0.000235 0.000144 0.000330
F4BTM 0.00025 0.000272 0.001092 0.000250 0.001019
F4BTM1 0.00025 0.000247 0.001662 0.000247 0.001747
TP 0.0001 0.000169 0.001484 0.000131 0.001188
TP1 0.0001 0.000130 0.001405 0.000102 0.001094
individual sample. An RSD of 0.49% for a TP1 sample and increase the intensity of electric field location in a proposed
null RSD for other tested samples (F4BM, F4BTM, structure as shown in Fig. 9d. The high electric field
F4BTM1, and TP) as shown in Table II indicated the structure is used to enhance coupling and field interaction,
excellent reproducibility of our developed permittivity causing an increase in sensitivity.
sensor and negligible error due to air gap. The fitted real When a sample was positioned nearby the designed sensor
permittivity of five tested samples using P-IDC sensor is on a location of maximum electric field zone, changes in
given in Table II and the imaginary permittivity is resonance frequency and quality factor were observed. To
summarized in Table III. evaluate the permittivity sensing performance of the
proposed sensor, five different samples such as F4BM = Ɛr =
V. EXPERIMENTAL VALIDATION 2.2, F4BTM = Ɛr = 4.0, F4BTM1 = Ɛr = 6.15, TP = Ɛr = 9.6 and
TP1 = Ɛr = 10.5 were used. The thickness of each sample was
The proposed sensor has been fabricated on RF-35 1.5 mm, and each sample was cut down properly to locate its
substrate with a dielectric constant of Ɛr = 3.5 and images of position clearly on maximum electric field zone. A Keysight
the fabricated sensors are shown in Fig. 9. The SMA FieldFox Microwave Analyzer (N9916A) was calibrated
connectors are used to excite microstrip line as shown in Fig. using the short, open, load, through (SOLT) technique to
9a. The designed sensor is based on a P-IDC structure, ensure the accuracy and measure the sensor’s S-parameters
which is interfaced with a wide dual gap of resonator to in a constant frequency range (1-3 GHz). All measurements
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Table IV
Comparison table between the proposed work and the state of art
References FS (MHz) FDR (GHz) NS (%) Sensing element Sensing property and accuracy (%)
[1] 50 0.02 0.69 SRR Real (N/A) and Imaginary (N/A) Permittivity
[3] 240 0.05 2.7 SRR Real (N/A) and Imaginary (N/A) Permittivity
[6] 120 N/A N/A EBG Real (99.8) and Imaginary (96.6) Permittivity
[11] 320 0.1 2.2 SRR Real (N/A) Permittivity
[17] 250 N/A N/A CSRR Real (94.9) Permittivity
[31] 450 0.17 3.25 MLM Real (N/A) Permittivity
[32] 727 N/A 3.3 LC resonator Real (N/A) and Imaginary (N/A) Permittivity
[33] 557 N/A 1.2 SIR Real (N/A) and Imaginary (N/A) Permittivity
[34] 732 N/A 3.59 LC resonator Real (N/A) and Imaginary (N/A) Permittivity
[35] 300 N/A 1.7 CSRR Real (N/A) and Imaginary (N/A) Permittivity
[36] 900 N/A 2.1 SIR Real (N/A) and Imaginary (N/A) Permittivity
[37] 450 N/A 0.59 MTM Real (N/A) and Imaginary (N/A) Permittivity
[38] 243 N/A 0.169 DSRR Real (N/A) and Imaginary (N/A) Permittivity
[39] 1681 N/A 1.5 SRR Real (N/A) and Imaginary (N/A) Permittivity
This work 950 0.29 3.98 P-IDC Real (99.9) and Imaginary (99.7) Permittivity
* FS = frequency shifting, FDR = frequency detection resolution, and NS = normalized sensitivity.
were conducted at room temperature (25°C ± 0.01%) and The proposed design resonance frequency tuned at 2.51 GHz
humidity (62% ± 0.02%) as shown in Fig. 9. The for unloaded sample. By loading TP 1 (high permittivity
measurement results of loaded/unloaded samples condition sample) above sensing area of the proposed design, the
of P-IDC-1 and P-IDC-2 are represented through resonance frequency takes a shift to 1.56 GHz as expressed
transmission coefficient and a resonance frequency as in Fig. 11. The change in resonance frequency is due to
illustrate in Fig. 10 and Fig. 11. distracting field distribution of proposed design when
sample is perturbed above sensing zone. Such changes in a
resonance frequency reveal the dielectric characteristics of
solid material. The resonance frequency shift has been
evaluated using the following equation:
f1 f2 (14)
FDR
r
Fig. 10. |S21| measured results of P-IDC-1 when different samples
are placed on the sensing area.
where the terms f1 and f2 represent the upper and lower
detection frequency and Δεr represents the change in
permittivity due to the tested sample. The proposed sensor
exhibits an FDR of 0.29 GHz for variation in dielectric
constant of testing material by 2.2, which is significantly
higher as compared to FDR of previous work (FDR = 0.17
GHz) [31]. Fig. 12(c) shows FDR of the proposed sensor
realized by P-IDC-1.The proposed sensor based on P-IDC-2
exhibits a 3.98% change in resonance frequency for a high
permittivity sample (εr = 10.5), significantly higher than the
resonance frequency change obtained using P-IDC-1-based
sensor (3.39%). The normalize sensitivities of sensors based
on P-IDC-1 and P-IDC-2 for all tested samples are shown in
Fig. 12(d). As is evident from comparison Table IV for a
reference sample (εr = 10.5), our developed sensor produces
a significantly higher response (3.98%) compared to other
Fig. 11. |S21| measured results of P-IDC-2 when different samples works (3.25% in [31] and 3.59% in [34]), at least 1.5 times
are placed on the sensing area. higher than several recently reported similar works.
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Table V
Comparison between P-IDC-1 and P-IDC-2 on basis of error
S. N. Material Ɛr P-IDC-1 error P-IDC-2 error
1. F4BM 2.2 0.061 0.029
2. F4BTM 4.0 0.111 0.074
3. F4BTM1 6.15 0.166 0.079
4. TP 9.6 0.170 0.090
5. TP1 10.5 0.180 0.152
Fm Fs
error (%) (16)
Fu
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