actuators
Article
Enhancing Dynamic Bandwidth of Amplified Piezoelectric
Actuators by a Hybrid Lever and Bridge-Type
Compliant Mechanism
Mingxiang Ling 1,2 , Lei Yuan 1 , Zhihong Luo 3 , Tao Huang 3, * and Xianmin Zhang 1, *
Citation: Ling, M.; Yuan, L.; Luo, Z.;
Huang, T.; Zhang, X. Enhancing
Dynamic Bandwidth of Amplified
Piezoelectric Actuators by a Hybrid
Lever and Bridge-Type Compliant
Mechanism. Actuators 2022, 11, 134.
https://doi.org/10.3390/act11050134
Academic Editor: Qingsong Xu
Received: 24 April 2022
Accepted: 11 May 2022
Published: 12 May 2022
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4.0/).
Actuators 2022, 11, 134. https://doi.org/10.3390/act11050134
1 School of Mechanical and Automotive Engineering, South China University of Technology,
Guangzhou 510641, China; ling_mx@163.com (M.L.); yl18374459889@163.com (L.Y.)
2 Institute of Systems Engineering, China Academy of Engineering Physics, Mianyang 621999, China
3 The College of Mechanical Engineering, Chongqing University, Chongqing 400044, China;
202007021012@cqu.edu.cn
* Correspondence: thuang@cqu.edu.cn (T.H.); zhangxm@scut.edu.cn (X.Z.)
Abstract: Ongoing interests in high-speed precision actuation continuously sparks great attention on
developing fast amplified piezoelectric actuators (APAs) with compliant mechanisms. A new type of
APA with enhanced resonance frequency is herein reported based on a hybrid compliant amplifying
mechanism. A two-stage displacement flexure amplifier is proposed by synthesizing the lever-type
and semi bridge-type compliant mechanisms in a compact configuration, promising to a well tradeoff
between the displacement amplification ratio and dynamic bandwidth. The static and dynamic
performances are experimentally evaluated. The resonance frequency of 2.1 kHz, displacement
amplification ratio of 6, and step response time of around 0.4 ms are realized with a compact size of
50 mm × 44 mm × 7 mm. Another contribution of this paper is to develop a comprehensive two-port
dynamic stiffness model to predict the static and dynamic behaviors of the compliant amplifier. The
modeling approach presented here differs from previous studies in that it enables the traditional
transfer matrix method to formulate both the kinetostatics and dynamics of compliant mechanisms
including serial-parallel branches and rigid bodies.
Keywords: compliant mechanisms; piezoelectric actuator; displacement amplifier; flexure hinges;
transfer matrix method
1. Introduction
Piezoelectric actuators consisting of a stack of piezoceramic layers electrically con-
nected in parallel are characterized by fast dynamic response, nano-scale resolution, and
large blocking force. However, the stroke of many commercially available piezoelectric
stacks is limited to dozens of microns with the strain of around 0.1%. Such a drawback
should be addressed since plenty of precision actuation applications, including position-
ing [1–3], gripping [4–6], scanning [7], manufacturing [8], switching [9], manipulating [10],
etc., often require sub-millimeter or even larger strokes. Therefore, much research has
been devoted to mechanically amplifying the micro stroke of piezoelectric stacks [11–13].
Such a technique is usually termed as ‘amplified piezoelectric actuators’ (APAs) [14], as
exemplarily illustrated in Figure 1.
Recently, more and more requirements toward the high actuation speed have come of
age, such as scanning probe microscopy, high-throughout micro/nano manufacturing, high-
speed jet dispensing, and fast mechanical switches [15,16]. The motion rate of amplified
piezoelectric actuators is inherently restricted by their resonance frequencies, and the
dynamic response bandwidth of amplified piezoelectric actuators will generally be reduced
as their travel range is amplified. The amplitude of motion will become larger and larger
with the increase of working frequencies until reaching the fundamental resonance mode,
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Actuators 2022, 11, 134 2 of 18

and larger with the increase of working frequencies until reaching the fundamental reso-
nancethe
then mode, thenresponse
dynamic the dynamic
will response
be attenuatedwill be
andattenuated and become uncontrollable
become uncontrollable at the domain of at
the domain
high vibrationof modes
high vibration modes [17].
[17]. Moreover, when Moreover, whenexcited,
inadvertently inadvertently excited,signals
input electric input
electric
with signals with high-frequency
high-frequency components willcomponents will excite
excite the natural theoscillation,
motion natural motion oscillation,
causing the loss
causing
of the loss
precision and of precision
stability. and stability.
Thereby, limitingThereby, limiting
the operating the operating
frequencies frequencies
to below one thirdto
below
of one third
the lowest of the lowest
vibration modevibration mode orscopes
or even smaller even smaller scopesin
are common areactual
common in actual
engineering
engineering applications.
applications. Feedback and Feedback and feedforward
feedforward control strategies
control strategies [18,19],
[18,19], such such
as the as the
positive
positive feedback,
position position feedback, integral and
integral resonant, resonant,
shuntand shunt controllers,
controllers, have beentoproposed
have been proposed dampen
vibration
to dampen modes enabling
vibration modes higher actuation
enabling higherrates. Nevertheless,
actuation inherently increasing
rates. Nevertheless, inherently the
in-
mechanical
creasing thebandwidth
mechanicalfrom the viewpoint
bandwidth from theofviewpoint
mechanism design is a primary
of mechanism design isconcern.
a primary It
involves
concern. careful considerations
It involves of the mechanical
careful considerations of theproperty
mechanicalof flexure
propertyhinges, the synthesis
of flexure hinges,
of
theoptimal
synthesisconfigurations as well as the as
of optimal configurations interfacial
well as thetreatment between
interfacial piezoelectric
treatment stacks
between piezo-
and compliant mechanisms.
electric stacks and compliant mechanisms.

Figure 1.
Figure 1. Picture
Picture of
of piezoelectric
piezoelectric stacks
stacks and
and schematic
schematic diagram
diagram of common
common types of of mechanically
mechanically
amplified piezoelectric actuators by compliant mechanisms.
amplified piezoelectric actuators by compliant mechanisms. (a) Piezoelectric stacks; (b) Lever-type;
(c) Scott-Russell; (d) Moonie-type; (e) Rainbow-type; (f) Bridge-type; (g) Rhombus-type.
A number of designs for amplifying the micro displacement of various actuators
have Abeen
number of designssuccessfully
demonstrated for amplifying in thetheliterature,
micro displacement
these include of the
various
earlyactuators
rainbow
haveMoonie-type
and been demonstrated successfully
flextensional mechanismsin the literature,
[20], the nowthese include thebridge-type
mainstream early rainbow and
[21,22],
Moonie-type flextensional mechanisms [20], the now mainstream
lever-type [23], Scott-Russell [24] complaint mechanisms, and more recently composite bridge-type [21,22],
lever-type [23],
amplifying Scott-Russell
mechanisms [24] complaintofmechanisms,
with configurations nested cellularand andmore recently
multi-stage composite
ones [25–27],
amplifying
to name a few. mechanisms with configurations
These techniques, as a whole, can of nested cellularamplify
successfully and multi-stage
the microones stroke[25–
of
27], to name astacks
piezoelectric few. These techniques,
and other actuators aswith
a whole,
variedcanload
successfully
capacity and amplify the micro
dynamic stroke
bandwidth
in
of different sizes.stacks
piezoelectric Manyand investigations
other actuators also reported designs
with varied load ofcapacity
hybrid compliant
and dynamic amplifying
band-
mechanisms
width in differentto realize a large
sizes. Manydisplacement
investigations amplification
also reported ratio by combining
designs of hybridthe bridge-
compliant
type and leveraged
amplifying mechanisms mechanisms
to realize [28,29],
a large Scott-Russell
displacement andamplification
bridge-type mechanisms [30,31],
ratio by combining
Scott-Russell
the bridge-type andandleveraged
leveragedmechanisms
mechanisms[32,33], [28,29],and other types
Scott-Russell andofbridge-type
hybrid compliant
mecha-
mechanisms
nisms [30,31],[34]. For example,
Scott-Russell Kim et al.mechanisms
and leveraged [35] proposed a three-dimensional
[32,33], and other typesamplified
of hybrid
piezoelectric actuator based
compliant mechanisms [34]. onForaexample,
two-stageKim bridge-type
et al. [35]compliant
proposedmechanism with the
a three-dimensional
output
amplifieddisplacement
piezoelectric ofactuator
80 µm and the on
based resonance frequency
a two-stage of 190compliant
bridge-type Hz. By contrast Ding
mechanism
et al. [31] combined bridge-type and Scott-Russell compliant mechanisms
with the output displacement of 80 μm and the resonance frequency of 190 Hz. By contrast to amplify the
micro stroke of piezoelectric actuator with the output displacement
Ding et al. [31] combined bridge-type and Scott-Russell compliant mechanisms to amplify of 69 µm and the
resonance frequency
the micro stroke of 457 Hz. Some
of piezoelectric actuator other
withdesigns of amplified
the output piezoelectric
displacement of 69 μm actuators
and the
can be found in literature such as those with the output displacement
resonance frequency of 457 Hz. Some other designs of amplified piezoelectric actuators and resonance
frequency
can be found of 30 µm and 1152
in literature suchHz as in [7] as
those withwell
theasoutput
200 µm and 189 Hzand
displacement in [36], to name
resonance a
fre-
few. As discussed, pursuing a higher displacement amplification
quency of 30 μm and 1152 Hz in [7] as well as 200 μm and 189 Hz in [36], to name a few. efficiency with a compact
configuration
As discussed,and importantly
pursuing a higherenhancing the dynamic
displacement bandwidth
amplification is still a challenging
efficiency with a compactissue.
Attempts on equilibrating such a tradeoff are attractive for
configuration and importantly enhancing the dynamic bandwidth is still a challenginghigh-speed and small-space
engineering
issue. Attempts applications.
on equilibrating such a tradeoff are attractive for high-speed and small-
The design
space engineering presented in the current study differs in that it optimally configure the
applications.
lever-type and semi bridge-type compliant mechanisms to design a hybrid two-stage
amplified piezoelectric actuator with enhanced dynamic bandwidth and displacement
Actuators 2022, 11, x FOR PEER REVIEW 3 of 18

Actuators 2022, 11, 134 The design presented in the current study differs in that it optimally configure 3 ofthe
18
lever-type and semi bridge-type compliant mechanisms to design a hybrid two-stage am-
plified piezoelectric actuator with enhanced dynamic bandwidth and displacement am-
plification efficiency
amplification in ain
efficiency mucha muchcompact configuration.
compact Another
configuration. contribution
Another of thisof
contribution paper
this
is to predict the static and dynamic performances of the flexure amplifier
paper is to predict the static and dynamic performances of the flexure amplifier with a with a compre-
hensive two-port
comprehensive dynamic
two-port stiffness
dynamic model.model.
stiffness The modeling approach
The modeling presented
approach here differs
presented here
from the previous ones in that it enables the traditional transfer matrix method
differs from the previous ones in that it enables the traditional transfer matrix method to formu- to
late both the
formulate kinetostatics
both and dynamics
the kinetostatics of compliant
and dynamics mechanisms
of compliant with complex
mechanisms with branches
complex
and rigidand
branches bodies
rigidinbodies
serial-parallel configurations.
in serial-parallel configurations.
The rest of this paper is organized as follows:
The rest of this paper is organized as follows: The The structural
structural design
design isis introduced
introduced in in
Section 2. Comprehensive two-port dynamic stiffness modeling is carried
Section 2. Comprehensive two-port dynamic stiffness modeling is carried out in Section 3, out in Section
3, followed
followed byby parameter
parameter influence
influence analysisininSection
analysis Section4.4.The
Theprototype
prototype isis experimentally
experimentally
tested in
tested in Section
Section 5.5. This
This paper
paper concludes
concludes inin Section
Section 66 with
with aa summary
summary of of results.
results.

2.
2. Operational
Operational Principle
Principle and
and Configuration
Configuration
As
As has already been demonstrated inin[37],
already been demonstrated [37],a large
a large ratio
ratio of output
of output stiffness
stiffness of for-
of the the
former stage
mer stage to to theinput
the inputstiffness
stiffnessofofthe
thenext
next stage
stage in multi-stage compliantcompliant amplifying
amplifying
mechanisms
mechanismswill will ensure
ensure aa large
large composite
composite displacement
displacement amplification
amplificationratio.
ratio. This
This indicates
indicates
that
that synthesizing
synthesizing aa flexure
flexure amplifying
amplifying modular
modular having
having high high output
output stiffness
stiffness with
with the
the one
one
having low input stiffness is beneficial to enhance the achievable
having low input stiffness is beneficial to enhance the achievable output displacement ofoutput displacement
of a multi-stage
a multi-stage compliantamplifying
compliant amplifyingmechanism.
mechanism.Based Basedon onthe
the above,
above, we we combine
combine the the
lever-type
lever-type and semi bridge-type compliant amplifying mechanism to develop aa two-stage
and semi bridge-type compliant amplifying mechanism to develop two-stage
displacement
displacementamplification
amplificationmechanism,
mechanism,asasschematically
schematically illustrated
illustratedin in
Figure 2. The
Figure output
2. The out-
ports of two
put ports of mirror-symmetric
two mirror-symmetric levers are rigidly
levers connected
are rigidly to thetoinput
connected ports ports
the input of theofsemi
the
bridge-type amplifier. V-type flexure hinges with the merits of high bending
semi bridge-type amplifier. V-type flexure hinges with the merits of high bending stiffness stiffness and
small parametric
and small motionmotion
parametric errors are adopted
errors to enhance
are adopted the output
to enhance thestiffness
outputofstiffness
the leveraged
of the
amplifier at the first amplifying stage. Micro stroke of the internal piezoelectric
leveraged amplifier at the first amplifying stage. Micro stroke of the internal piezoelectric actuator is
mechanically amplified twice,
actuator is mechanically serially
amplified by the
twice, leverby
serially principle
the lever and flextensional
principle effect with
and flextensional
the loss of a certain level of blocking forces.
effect with the loss of a certain level of blocking forces.

Figure 2.
Figure 2. Schematic
Schematic diagram
diagram ofof the
the presented
presented hybrid
hybrid two-stage
two-stage displacement
displacement amplification
amplification mecha-
mecha-
nism by synthesizing lever-type and semi bridge-type compliant mechanisms.
nism by synthesizing lever-type and semi bridge-type compliant mechanisms.

The key
The keyfeatures
featuresofofour
ourdesign
designlielie
inin
itsits compact
compact configuration
configuration andand minimized
minimized para-
parasitic
sitic motion
motion errorserrors
due todue
thetomonolithic
the monolithic and symmetric
and symmetric structure.
structure. It is easy
It is also also easy to inte-
to integrate
agrate a displacement
displacement sensor without
sensor without the requirement
the requirement of additional
of additional spaces, asspaces,
clearly as clearly
shown in
shown in Figure 3. The design of embedded displacement sensor also contributes
Figure 3. The design of embedded displacement sensor also contributes to the miniatur- to the
miniaturization
ization of theapplication
of the whole whole application
system. system. In addition,
In addition, using modules
using flexure flexure modules
as few asas
possible is helpful to keep a high transfer efficiency of electric–mechanical energy from
piezoelectric stacks to the output port of the compliant amplifying mechanism. The loss
of blocking force can be relieved to a certain level with a smaller number of used flexure
Actuators
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FOR PEER
PEER REVIEW
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Actuators 2022, 11, 134 few 4 of 18

few as
as possible
possible isis helpful
helpful toto keep
keep aa high
high transfer
transfer efficiency
efficiency of
of electric–mechanical
electric–mechanical energy
energy
from
from piezoelectric
piezoelectric stacks
stacks to
to the
the output
output port
port of
of the
the compliant
compliant amplifying
amplifying mechanism.
mechanism. The The
loss
loss of blocking force can be relieved to a certain level with a smaller number of
of blocking force can be relieved to a certain level with a smaller number of used
used
flexure
flexure modules.
modules. Importantly,
Importantly,
modules. the inertial
Importantly, the inertial
themotion
inertialofmotion of
of piezoelectric
piezoelectric
motion stacks
stacks is
stacks is avoided
piezoelectric inavoided
is in
in the
the presented
avoided the
presented
design in design
contrast in
to contrast
the to
traditionalthe traditional
bridge-type bridge-type
compliant compliant
amplifiers amplifiers
[21,22].
presented design in contrast to the traditional bridge-type compliant amplifiers [21,22]. [21,22].
Based on
these
Basedconcerns,
Based on these aconcerns,
on these refined displacement
concerns, aa refined amplification
refined displacement
displacement efficiency efficiency
amplification
amplification and enhanced
efficiency and dynamic
and enhanced
enhanced
bandwidth
dynamic with
bandwidtha compact
with asize can
compact be expected.
size can
dynamic bandwidth with a compact size can be expected. be expected.

Figure
Figure3.3.
Figure Three-dimensional
3.Three-dimensional view
Three-dimensionalview of
viewof the
ofthe presented
thepresented hybrid
presentedhybrid two-stage
hybridtwo-stage displacement
two-stagedisplacement amplification
displacementamplification
amplification
mechanism with
mechanismwith
mechanism assembled
withassembled piezoelectric
assembledpiezoelectric stacks
piezoelectricstacks and
stacksand potential
andpotential displacement
potentialdisplacement sensor.
displacementsensor.
sensor.

Two
Two groups
Twogroups
groupsof of guiding
ofguiding flexure
guidingflexure beams
flexurebeamsbeamsare are designed
aredesigned
designed on on the
on the input
the input port
input port
port of
of the
the levers.
levers.
Based
Based
Basedon on the
onthe simulated
thesimulated deformation
simulateddeformation
deformation nephogram
nephogram
nephogram in in Figure
Figure
in Figure 4,
4, the
4, the parasitic
parasitic
the rotational
rotational
parasitic mo-
motion
rotational mo-
tion
of theof
tion the
oftwo two
two input
theinput portsports
input are
are avoided
are avoided
ports by
by designing
by designing
avoided guiding
designing guiding
flexure
guiding flexure
beams,
flexure beams,
which
beams, which pro-
protects
which pro-
piezoelectric
tects stacksstacks
tects piezoelectric
piezoelectric from lateral
stacks from and shear
from lateral
lateral andforces.
and shear More importantly,
shear forces.
forces. More
More importantly, the parasitic
importantly, the rotational
the parasitic
parasitic ro-
ro-
motion
tational of the
motion two
of input
the two ports
input without
ports guiding
without flexure
guiding beams
flexure will
beams
tational motion of the two input ports without guiding flexure beams will reduce the con- reduce
will the
reduce contact
the con-
stiffness
tact between
tact stiffness
stiffness between
betweenthe the
compliant
the compliant
compliant mechanism
mechanism
mechanism and and
andpiezoelectric
piezoelectric
piezoelectric stacks,
stacks,thus
stacks, thusattenuating
thus attenuating
attenuating
the
the overall output
the overall output displacement.
output displacement.
displacement. It It
It cancan
can be be clearly
be clearly
clearly seen seen
seen from from
from Figure Figure
Figure 4b 4b
4b that that
that the the input
the input
input ports
ports
ports
are are
are able
able to able to translationally
to translationally
translationally movemove alongmove
along thealong the
the horizontal horizontal
horizontal direction direction
direction without without
obvious obvious
without obvious parasitic
parasitic
parasitic
rotational
rotational rotational
motionsmotions
motions after after two
after adding
adding adding
two two
pairs
pairs ofpairs
of guiding
guidingof guiding
flexure flexure
flexure beams. beams.
beams. Furthermore,
Furthermore,
Furthermore, assem-
assem-
assembling
bling piezoelectric stacks into the compliant mechanism with an interference fit and and
bling piezoelectric
piezoelectric stacksstacks
into into
the the compliant
compliant mechanism
mechanism with with
an an interference
interference fit fit
and pre-
pre-
preload
load willwill ensure
ensure a a well
well interfacial
interfacial
load will ensure a well interfacial contact. contact.
contact.

Figure
Figure4.4.
4. Parasitic
Parasitic motion errors with and without guiding flexure beams simulated by
by ANSYS soft-
Figure Parasitic motion
motionerrors
errorswith
withand
andwithout
withoutguiding
guiding flexure
flexurebeams simulated
beams simulated ANSYS
by ANSYS soft-
ware package. (a) Without the guiding flexure beams. (b) With the guiding flexure beams. It is no-
software package. (a) Without the guiding flexure beams. (b) With the guiding flexure beams. Itno-
ware package. (a) Without the guiding flexure beams. (b) With the guiding flexure beams. It is is
ticed that the finite element simulation presented here is only for illustrating the parasitic
ticed that the finite element simulation presented here is only for illustrating the parasitic motion motion
noticed
errors. that the finite element simulation presented here is only for illustrating the parasitic motion
errors. The
The detailed
detailed settings
settings for
for the
the numerical
numerical simulation
simulation cancan be
be found
found in
in Section
Section 4.4.
errors. The detailed settings for the numerical simulation can be found in Section 4.
 Actuators2022,
Actuators 2022,11,
11,134
x FOR PEER REVIEW 55 ofof1818

3.3.Parametric
ParametricFormulationFormulation
InInthis
thissection,
section,a acomprehensive
comprehensivetwo-port two-portdynamic dynamicstiffness stiffnessmodelmodel is is derived
derived toto par-
para-
ametrically characterize the kinetostatics and dynamics
metrically characterize the kinetostatics and dynamics of the displacement amplification of the displacement amplification
mechanism.The
mechanism. Thetwo-port
two-portdynamic dynamicstiffness
stiffnessmodel modelcapturescapturesthe thelinear
linearkinetostatics
kinetostaticsand and
dynamicsofofa acompliant
dynamics compliantmechanismmechanismfrom from thethe viewpoint
viewpoint of of input
input and and output
output ports
ports withwith
a
a pseudo-static
pseudo-static characteristic
characteristic on the on frequency
the frequency domain. domain. In contrast
In contrast to ourtoprevious
our previousstudystudy
[38],
a[38], a comprehensive
comprehensive two-port two-port
dynamic dynamicstiffness stiffness
modelmodel is developed
is developed here, here,
with with
which which
the
the traditional
traditional transfer transfermatrixmatrixmethodmethod is improved
is improved to to be beableable totoformulate
formulateserial-parallel
serial-parallel
flexure-hingemechanisms
flexure-hinge mechanismsincluding includingrigid rigidbodies.
bodies.
The
Theamplifier
amplifierisisdiscretized
discretizedinto intoflexure
flexurehinges/beams,
hinges/beams,rigid rigidbodies,
bodies,and andlumped
lumped
mass
massshownshownininFigure Figure5.5.The Theinput
inputand andoutput
outputports portsare areconcentrated
concentratedas aslumped
lumpedmasses.
masses.
The
Thelevers
leversare are denoted
denoted as rigid rigidbodies
bodieswhose whoserigid rigidmotionmotion should
should be be considered.
considered. TheTheflex-
flexure hinges/beams
ure hinges/beams areare numberedserially
numbered seriallyfrom fromelements
elements(1) (1) to
to (14) and
and connected
connectedwith with
nodes
nodeslabeled
labeledasasaacircle circleininFigureFigure5.5.During Duringthe thenumbering,
numbering, the theendendnode nodeofofflexure
flexure
hinges/beams
hinges/beams connected to a rigid body were shifted to the mass center ofrigid
connected to a rigid body were shifted to the mass center of rigidbody
bodyby by
including
includingthe thekinematic
kinematiceffect effect[39].
[39].Input
Inputforce forceand anddisplacement
displacementfrom frompiezoelectric
piezoelectricstacks
stacks
are denotedasasfinfinand
aredenoted andxxinin. .AAdummy
dummyforce forcefout fout is
is exerted
exerted on on the the output
outputport,port,andandthere
therehas:
has:
f in2
fin2 = −in1
= −f f in1= [f
=in[f; in
0;; 0], xin2x=in2−x=in1−=x[x
0; 0], in1in;=0;[x0],
in ; f0;
out0], f outfout=; 0],
= [0; [0; xfout [0;xxout
out ;=0], out= [0; xout ; 0].
; 0].

Figure5.5.Geometric
Figure Geometricparameter,parameter,discretization,
discretization,and
andnumbering
numberingofofthe
thedisplacement
displacementamplification
amplification
mechanism.f finin,, ffout
mechanism. , ,
out in
xin, ,and
x andx x
out with
out
the
with subscripts
the 1
subscripts and
1 2
and denote
2 denotethe input/output
the forces
input/output andand
forces dis-
placements. Numbers from (1) to (14) denote the elements of flexure beams/hinges.
displacements. Numbers from (1) to (14) denote the elements of flexure beams/hinges. m with the m with the sub-
scripts 1, 2, and 3 are the mass of lumped mass and rigid bodies. Other variables denote the geo-
subscripts 1, 2, and 3 are the mass of lumped mass and rigid bodies. Other variables denote the
metric parameters of the displacement amplification mechanism.
geometric parameters of the displacement amplification mechanism.

Asshown
As shownininFigure
Figure6a,
6a,the
thekinetostatic
kinetostaticand
anddynamic
dynamicbehaviors
behaviorsofofnotch-type
notch-typeflexure
flexure
hinges/beams,can
hinges/beams, canbe
beuniformly
uniformlydescribed
described with
with thethe concept
concept of the
of the dynamic
dynamic stiffness
stiffness ma-
matrix
intrix in a similar
a similar form form of Hook’s
of Hook’s lawisbut
law but is frequency
frequency dependent
dependent [38]: [38]:

d1  1 0
d 0 0 d 0 0 
0 d55 0 0

−
 d2 2 −dd3 3
d 00 dd66 d 7d 
 7 
  d4d 4 00 −−dd7 d8d e
e
)) ·=xDe (e ω
fe (ω ) = Dfe ((ω ()) =x e
( ) =  7 8 x ( )e

(1)
  d11 00
d 0 0  · x (ω ) (1)
 Sym d3d3 
 
Sym dd22
 

 d 4d4

wherenodal
where forcef ef(ω)
nodalforce e(ω) = [Nj; Qj; Mj; Nk; Qk; Mk] includes the axial force, shear force and
= [Nj ; Qj ; Mj ; Nk ; Qk ; Mk includes the axial force, shear force and
bending moment. Nodal displacement xe (ω) = [uj ; wj ; ϕj ; uk ; wk ; ϕk ] includes the axial
 of rad/s. di (i = 1, 2, ..., 8) are the coefficients of dynamic stiffness matrix De(ω), the constant
values can be found in [38,39].
The dynamic stiffness matrix of flexure hinges/beams in the local coordinate frame
should be transformed into the reference frame o-xy. For flexure beams (1), (2), (6), (7), (8),
Actuators 2022, 11, 134 (9), (13), and (14) in Figure 5, their dynamic stiffness matrices in the reference coordinate 6 of 18
frame o-xy can be expressed as:

  cosi sin i 0
deformation, bending  Ri 0 and
deflection  rotation Ri angle.
0  ω is the dynamic 
frequency with the
Di ( ) =    D ( )   0 R  , Ri =  − sin i cosi 0 
e
e (2)
unit of rad/s. di (i = 1, 2, . .. 0, 8)Rare
i  the coefficients
 i  of dynamic stiffness matrix D (ω), the
 0 0 1 
constant values can be found in [38,39].

Figure 6.
Figure 6. Nodal
Nodal force
force and
and nodal
nodal displacement
displacement of
of flexure
flexurehinges/beams
hinges/beams connected
connected or
or not
not connected
connected
to a rigid body. (a) Nodal force and nodal displacement of the ith flexure hinge/beam in the reference
to a rigid body. (a) Nodal force and nodal displacement of the ith flexure hinge/beam in the reference
coordinate frame o-xy. (b) The j-end is connected to a rigid body. (c) The k-end is connected to a
coordinate frame o-xy. (b) The j-end is connected to a rigid body. (c) The k-end is connected to a
rigid body.
rigid body.
Orientation angle θi of the coordinate transformation matrix Ri with respect to the
The dynamic stiffness matrix of flexure hinges/beams in the local coordinate frame
reference coordinate frame o-xy in Equation (2) are listed in Table 1. V-type flexure hinges
should be transformed into the reference frame o-xy. For flexure beams (1), (2), (6), (7), (8),
(3), (4), (10), and (11) are connected to rigid bodies with their k end. As shown in Figure
(9), (13), and (14) in Figure 5, their dynamic stiffness matrices in the reference coordinate
6c, their dynamic stiffness matrices in the reference frame o-xy can be obtained by shifting
frame o-xy can be expressed as:
the k-end nodes to the mass center of rigid body including the rigid motion [39]:
 
T
cos θsin
i  sinθ i  0
 cos y
  
Ri R 0  R 0
 i 0· De (ωe ) ·  Rii 0  , Ri =  − sin θi cos θi  0 
i i i
Di ( ω ) = (2)
Di (0) = Ri   D ( )   0 Ri  , Rpi =  − sin i cosi −xi  (3)
 0 R pi   0 R pi  0 0 1
 0 0 1 
Orientation angle θ i of the coordinate transformation matrix Ri with respect to the
Flexure beams (5) and (12) are connected to rigid bodies with their j end. Their ex-
reference coordinate frame o-xy in Equation (2) are listed in Table 1. V-type flexure hinges
tended dynamic stiffness matrices can also be calculated in the reference frame o-xy:
(3), (4), (10), and (11) are connected to rigid bodies with their k end. As shown in Figure 6c,
their dynamic stiffness matrices in  the reference frame o-xy  cos
cani be sin i yiby
obtained  shifting the
 center
Rpi 0   Rpi including
0  
k-end nodes to the Di ( ) = 
mass   D ( )   0 R  , Rpi =  − sin i cosi −xi 
of rigid
e body the rigid motion [39]: (4)
 0 Ri   i
 0 0 1 
∆yi

 T   cos θi sin θi
Ri 0 e Ri 0
D ( ) = · D ( ) · , R = − i to ∆x
−
where i Δxi and Δy sin cos  (3)
0 i are
R pi the mass centre 0position R pi of a pi rigid body with i respect thei j-end or
ω ω  θ θ
k-end of the ith flexure hinge/beam in the local coordinate frame 0 j-xi0yi (their1 values are
listed in Table 2). It is noticed a plus or minus sign for Δxi and Δyi.
Table 1. Orientation angle of flexure hinges/beams with respect to the reference coordinate frame.

Variables Values Variables Values Variables Values

θ1 −90 θ6 θr θ 11 0
θ2 90 θ7 θr θ 12 180 − θ r
θ3 180 θ8 −90 θ 13 180 − θ r
θ4 180 θ9 90 θ 14 180 − θ r
θ5 θr θ 10 0
Actuators 2022, 11, 134 7 of 18

Flexure beams (5) and (12) are connected to rigid bodies with their j end. Their
extended dynamic stiffness matrices can also be calculated in the reference frame o-xy:

∆yi
 
 T   cos θi sin θi
R pi 0 R pi 0
Di ( ω ) = · De ( ω ) · , R pi =  − sin θi cos θi −∆xi  (4)
0 Ri 0 Ri
0 0 1

where ∆xi and ∆yi are the mass centre position of a rigid body with respect to the j-end or
k-end of the ith flexure hinge/beam in the local coordinate frame j-xi yi (their values are
listed in Table 2). It is noticed a plus or minus sign for ∆xi and ∆yi .

Table 2. The mass center position of a rigid body with respect to the j-end or k-end of the ith
flexure element.

Variables Values Variables Values

(∆x3 , ∆y3 ) (∆1 , − ∆2 ) (∆x11 , ∆y11 ) (∆1 , ∆2 + l3 )
(∆x4 , ∆y4 ) (∆1 , −∆2 − l3 ) (∆x5 , ∆y5 ) (−∆3 sinθ h − ∆1 cosθ h , ∆1 sinθ h − ∆3 cosθ h )
(∆x10 , ∆y10 ) (∆1 , ∆2 ) (∆x12 , ∆y12 ) (−∆3 sinθ h − ∆1 cosθ h , ∆3 cosθ h − ∆1 sinθ h )

Based on the above, the frequency-dependent relationship of nodal displacement and

nodal force for the ith flexure hinge/beam in the reference coordinate frame o-xy can be
correlated with the dynamic stiffness matrix Di (ω) in a similar form of Hook’s law:
( ) ( )   ( )
Fi,j xi,j ki,1 ki,2 xi,j
= Di ( ω ) · = · (5)
Fi,k xi,k ki,3 ki,4 xi,k

where F i,j (ω) = [Nj ; Qj ; Mj ], F i,k (ω) = [Nk ; Qk ; Mk ] and xi,j (ω) = [uj ; wj ; ϕj ], xi,k (ω) = [uk ;
wk ; ϕk ] are the nodal forces and nodal displacements of the ith flexure hinge/beam in the
reference coordinate frame.
The dynamic stiffness matrix in Equation (5) captures the relationship of nodal forces
and nodal displacements of the ith flexure hinge/beam in a similar form of Hook’s law.
This relationship can be easily transformed in the form of transfer matrix:
( ) ( )   ( ) " # ( )
xi,j xi,j −1 −1 xi,j
xi,k ti,1 ti,2 −ki,2 · ki,1 ki,2
= Ti · = · = −1 −1 · (6)
−Fi,k Fi,j ti,3 ti,4 Fi,j ki,4 · ki,2 · ki,1 − ki,3 −ki,4 · ki,2 Fi,j

where T i is the transfer matrix of the ith flexure hinge/beam in the reference frame.
With the above preparation of flexure elements, the displacement amplification mech-
anism in Figure 5 can be further discretized as a building block configuration, as shown
in Figure 7. The detailed nodal force and nodal displacement of each building block are
illustrated in the figure. The nodal displacements between two adjacent building blocks
are equal, while an opposite reaction is legal for the two nodal forces of adjacent building
blocks. Therefore, the total transfer matrix of the two sub-chains can be directly obtained
by taking the chain path from input ports to the output port. The nodal forces and nodal
displacements between the input and output building blocks can be then related with the
total transfer matrices T I and T II :
( ) ( ) ( )
x7,k x3,j x3,j
= [T I ] · = [T7 · T6 · T5 · Tm3 · Q2 · T3 · Q1 · Tm1 ] · (7)
−F7,k F3,j F3,j
( ) ( ) ( )
x14,k x10,j x10,j
= [T I I ] · = [T14 · T13 · T12 · Tm3 · Q4 · T10 · Q3 · Tm1 ] · (8)
−F14,k F10,j F10,j

where T m1 and T m3 are the transfer matrix of the input port and rigid body with respect
to the mass centre. Qi (I = 1, 2, 3, 4) are the accessional stiffness matrices of the parallel
sub-chains at the j-end and/or k-end of the flexure hinges (3) and (10). Actually, Qi indicates
 Actuators
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2022, 11,11,
134x FOR PEER REVIEW 88ofof1818

and
the Qi are:
force summation of parallel sub-chains at the joint point [38]. The expressions of T m
and Qi are:
 mi 0 0 
 I O
 Tmi =  3  3  , M i = − 2  m0i m0i 00 (i = 1,3)
 
(9)
I3  −3M i I 3 
O 2  0 
Tmi = , Mi = −ω · 0 mi 0i  0 J  (i = 1, 3) (9)
−Mi I3
0 0 Ji
  I3 O   I O3  
Q1 =  I3 O3 3  , Q2 =  I33
=

O3
 Q1  −2(− 2 ( k1,4 + k2,4 ) I 3  2, Q = − kk4,4 II3 

−

k1,4 + k 2,4 ) I 3 4,4 3 
 (10)
(10)
   33
 
I O I
 Q3 =Q =  3 I 3 O I
3 O
3 3
, Q =4 =  3

2 ( k 9,4+ k )3 I −k11,4 I3 
 3−2(k−8,4 , 4Q

+ k ) I − k I
  8,4 9,4 3   11,4 3 

where I3 and O3 are the 3 × 3 unit and zero matrices. ki,4 (i = 1, 2, 4, 8, 9, 11) are the last
where
three I3 and
rows andOthree
3 are the 3 × 3 unit and zero matrices. ki,4 (i = 1, 2, 4, 8, 9, 11) are the last three
columns of the dynamic stiffness matrix Di (ω) in Equation (5).
rows and three columns of the dynamic stiffness matrix Di(ω) in Equation (5).

Figure 7. Discretized building blocks of the displacement amplification mechanism.

Figure 7. Discretized building blocks of the displacement amplification mechanism.

Basedon
Based on the the condensation
condensation above, above,the thedisplacement
displacement amplification
amplification mechanism
mechanism in Fig-
in
ure 7 can be simplified as an equivalent network shown
Figure 7 can be simplified as an equivalent network shown in Figure 8. The relationship be- in Figure 8. The relationship be-
tween the nodal force and nodal displacement of the
tween the nodal force and nodal displacement of the two condensed links can be expressed two condensed links can be ex-
pressed again in the form of the
again in the form of the dynamic stiffness matrix: dynamic stiffness matrix:
)  F   (  x )
   i, j    ki ,1 ki ,2  − 
x 1 i, j 
  −ti−,21  t− ti−,21    xi , j 
( ) ( " # ( )
i ,11
Fi,j xi,j = Di ( )  x
ki,1 i , j ki,2 i,j  =  − t i,2
 · ti,1=  t x   
= ki ,3 ki ,4 −1 xi , k   ti ,4  ti−,21  ti ,1i,2− t−i ,31 −·ti ,4  ti−,21i,j  xi , k  (11)
(11)
= Di ( ω ) · = 
 Fi , k   · 
 xi , k 

Fi,k xi,k ki,3 ki,4 xi,k ti,4 · ti,2 · ti,1 − ti,3 −ti,4 · ti,2 xi,k
wheret ti,1, ,tti,2,, tti,3,, and ti,4 (i = I, II) are the block sub-matrices of TI and TII.
where i,1 i,2 i,3 and ti,4 (i = I, II) are the block sub-matrices of T I and T II .
Taking the input and output ports in Figure 8 as the study objects, the following force
equilibrium equation sets can be directly established based on d’Alembert’s principle by
summarizing the inverse nodal force, inertial force, and external force:

 fin1 = F I,j
f = F I I,j (12)
 in2
fout = F I,k + F I I,k + M2 · xout

where the mass matrix M 2 can be calculated by Equation (9) with the value of m2 . It is
noticed that J2 = 0 which will not significantly influence the dynamic performance.
 tween the nodal force and nodal displacement of the two condensed links can be ex-
pressed again in the form of the dynamic stiffness matrix:

 Fi , j 
 
 xi , j 
  ki ,1 ki ,2   x    −ti−,21  ti ,1 ti−,21    xi , j 

  = Di ( )   =    i, j  =  −1   (11)

 i,k 
F  
 i,k 
x   ki ,3 ki ,4     ti ,4  ti ,2  ti ,1 − ti ,3
 xi , k  −ti ,4  ti−,21  
 i, k 
x 
Actuators 2022, 11, 134 9 of 18

where ti,1, ti,2, ti,3, and ti,4 (i = I, II) are the block sub-matrices of TI and TII.

Figure 8. Condensed configuration of the displacement amplification mechanism.

By substituting Equation (11) into Equation (12), and re-writing the linear equation sets
in the form of matrix, the two-port dynamic stiffness model of the presented displacement
amplification mechanism can be ultimately derived as:
       
 fin1   xin1  k I,1 O3 k I,2  xin1 
fin2 = D( ω ) · xin2 =  O3 k I I,1 k I I,2 · x (13)
 in2 
fout xout k I,3 k I I,3 k I,4 + k I I,4 + M2 xout
   

where kI,i and kII,i (i = 1, 2, 3, 4) are the block sub-matrices of DI and DII in Equation (11).

4. Parameter Influence Analysis

By solving Equation (13) with the dynamic frequency ω = 0, the static performances can
be calculated as: displacement amplification ratio R = xout /2xin , input stiffness Kin = fin /xin ,
output stiffness Kout = fout /xout . The dynamic response spectrum can be directly obtained
starting from an initial value of frequency f = 1 Hz (ω = 2πf ) and incrementing step-by-step
with ∆f =1 Hz. In addition, the resonance frequency in the output direction can be obtained
by checking the peaks of the dynamic displacement response spectrum curve, while all the
natural frequencies can be calculated by tracking the zero roots of the determinant of the
overall dynamic stiffness matrix D(ω) in Equation (13).
The static performances, the first two-order natural frequencies and the dynamic
displacement response on the frequency domain were calculated by the theoretical model
in Equation (13) and the finite element software package ANSYS Workbench 15.0. The
geometric parameters are listed in Table 3, in which the mass m3 and mass moment of
inertial J3 were read out from CAD software. The material was selected as aluminum
alloy 7075 with the density of ρ = 2770 kg/m3 , Young’s modulus of E = 71 GPa, and the
shear modulus of G = 27 GPa. During the finite element simulation, the static, modal, and
harmonic analyses with small deformation were performed. The Solid186 element was
chosen to build the model and the advanced size function of proximity and curvature was
adopted to refine the elements. An input force with the magnitude of 100 N and dynamic
frequencies from 1 Hz to 5 kHz was exerted.

Table 3. Geometric parameters of the displacement amplification mechanism.

Parameters Values Parameters Values Parameters Values

l1 5.0 mm h1 0.6 mm d 7.0 mm
l2 5.0 mm h2 1.5 mm r 0.4 mm
l3 10.0 mm h3 4.0 mm L 15.0 mm
l4 24.0 mm h4 4.0 mm m1 ρ × d × 5 mm × 7 mm
l5 5.0 mm h5 0.4 mm m2 ρ × d × 2 mm × 4 mm
le 3.0 mm he 1.5 mm m3 4.2 g
θr 8.0 deg θe 40.0 deg J3 0.4 kg·mm2
∆1 3.6 mm ∆2 6.5 mm ∆3 17 mm
Actuators 2022, 11, x FOR PEER REVIEW 10 of 18

Actuators 2022, 11, 134 θr 8.0 deg θe 40.0 deg J3 0.4 kg·mm102 of 18
Δ1 3.6 mm Δ2 6.5 mm Δ3 17 mm

Figure 9 provides the numerical results of the dynamic bandwidth of the amplifier
Figure 9 provides the numerical results of the dynamic bandwidth of the amplifier
in terms of the dynamic response spectrum of output displacement and zero roots of the
in terms of the dynamic response spectrum of output displacement and zero roots of the
determinant of the overall dynamic stiffness matrix D(ω). The finite element results of the
determinant of the overall dynamic stiffness matrix D(ω). The finite element results of
first two mode shapes are also shown in Figure 9a with the first two-order natural fre-
the first two mode shapes are also shown in Figure 9a with the first two-order natural
quencies of 1808 and 2150 Hz. The two zero roots of the determinant of the overall dy-
frequencies of 1808 and 2150 Hz. The two zero roots of the determinant of the overall
namic
dynamic stiffness matrix
stiffness matrixD(ω) in in
D(ω) Figure
Figure 9a9aexactly
exactlycorrespond
correspondtotothe thefirst
firsttwo-order
two-order modemode
shapes provided by the finite element method. A sharp peak
shapes provided by the finite element method. A sharp peak of the lightly damped of the lightly damped reso-
nance emerges
resonance emergesin the frequency
in the frequency response
response curve, as as
curve, shown
shownininFigure
Figure9b.9b.Assuming
Assumingthe the
finite
finite elemental results as the benchmark, it appears that around 0.8% and 3.4% of
elemental results as the benchmark, it appears that around 0.8% and 3.4% of the
the two
two
resonance
resonance frequencies
frequencies werewere overestimated
overestimated by by the
the theoretical
theoretical model,
model, which
which demonstrate
demonstrate
the
the validity of the presented method. The errors between the theoretical model
validity of the presented method. The errors between the theoretical modelandand finite
finite
element results are mainly attributed to the mismatching of
element results are mainly attributed to the mismatching of geometric parameters geometric parameters and and
the
rigid bodybody
the rigid assumption
assumption during the theoretical
during the theoretical modeling.
modeling. Visualized fromfrom
Visualized the dynamic
the dynamic re-
sponse spectrum in Figure 9b, the first-order spurious rocking vibration
response spectrum in Figure 9b, the first-order spurious rocking vibration mode in the two mode in the two
levers
levers was
was not
not excited
excited byby the
the input
input force.
force. ItItisiseasy
easytotounderstand
understandthat thatthe
theinput
inputforce
forceonly
only
excited
excited the movement along the output direction owing to the symmetric structure of
the movement along the output direction owing to the symmetric structure of the
the
compliant
compliant mechanism.
mechanism. This This indicates
indicates thethe fact
fact that
that there
there isis no
no need
needto todesign
designextra
extraguiding
guiding
flexure
flexure mechanisms
mechanisms at at the
the output
output port
port to
tocompensate
compensate this this type
type of
ofspurious
spuriousvibration
vibration mode
mode
from
from the
the structural
structural compactness
compactness point point of view.

6 The first The second

mode shape: mode shape:
Determinant of D(ω)

4 1808 Hz 2150 Hz

Zero root: 1822 Hz Zero root: 2224 Hz

-2
1000 1500 2000 2500
Frequency (Hz)

(a)
4
10
Theory Resonance: 2224Hz (Theory)
FEM
Magnitude (dB)

2
10
Resonance: 2150Hz (FEM)

0
10

2 3
10 10
Frequency (Hz)

(b)
Figure
Figure 9.
9. Dynamic bandwidthof
Dynamic bandwidth ofthe
thedisplacement
displacementamplification
amplification mechanism
mechanism provided
provided by the
by the two-
two-port
port dynamic stiffness model and finite element software package ANSYS Workbench 15.0. (a)
dynamic stiffness model and finite element software package ANSYS Workbench 15.0. (a) Searching
the zero roots of the determinant of the dynamic stiffness matrix D(ω) and the finite element results
of mode shapes. (b) The dynamic response spectrum of the output displacement.
Actuators 2022, 11, 134 11 of 18

Table 4 shows the variation of the static performances and the first two-order natural
frequencies under two sets of angle θ r . During the theoretical calculation, the lever arm
was respectively regarded as rigid bodies (Theory1) and as two flexure beams (Theory2)
for a comparison. The lever arm was equivalent as two flexure beams with rectangular
cross-section based on the equal area, thus the in-plane thickness of the two equivalent
beam elements are, respectively, 7.74 mm (corresponding to length l3 in Figure 5) and
6.25 mm (corresponding to length l4 in Figure 5). The modeling process for the case of
Theory2 is similar to these in Section 3. It can be clearly seen from Table 4 that Theory1
and Theory2 well predicts the natural frequencies with respect to the results of FEM.
However, the prediction accuracy of Theory1 by regarding the lever arm as rigid bodies
is reduced for the results of the displacement amplification ratio R and input stiffness Kin .
This indicates the fact that the compliance of the lever arm has a significant influence on
the static performances of the displacement amplification mechanism. Actually, the output
stiffness Kout and the first two natural frequencies fn1 and fn2 are mainly dependent on the
semi bridge-type flexure amplifier, and these metrics are slightly influenced whether the
lever arms are regarded as rigid bodies or flexure beams.

Table 4. Comparison on the static and dynamic performances of the displacement amplification
mechanism provided by the presented model and finite element method (FEM).

The First Two-Order

Static Performances
Angle Natural Frequencies
Methods
R Kin (N/µm) Kout (N/µm) fn1 (Hz) fn2 (Hz)
Theory1 10.54 20.27 0.078 1822 2224
Theory2 5.39 11.23 0.077 1790 2223
θ r = 8 deg FEM 5.84 10.45 0.072 1808 2150
Error1 80.48% 93.97% 8.33% 0.77% 3.44%
Error2 7.71% 7.46% 6.94% 1.00% 3.40%
Theory1 4.62 5.92 0.132 1803 2089
Theory2 3.88 5.28 0.126 1777 2094
θ r = 20 deg FEM 3.91 4.82 0.123 1794 2073
Error1 18.20% 22.82% 7.31% 0.50% 0.77%
Error2 0.77% 9.54% 2.43% 0.95% 1.01%

Figures 10–12 theoretically show the displacement amplification ratio considering the
axial stiffness of piezoelectric stacks [R·Kp /(Kin + Kp ), here Kp = 100 N/µm] and the main
resonance frequency (i.e., the second-order natural frequency) of the mechanism versus
three key geometric parameters: (a) thickness h5 of the guiding flexure beams, (b) length l2
of the semi bridge-type amplifier, and (c) minimum thickness he of the V-type flexure hinges.
The displacement amplification ratio reduces with the increase of thickness h5 and length l2 ,
but it is nonsensitive at the domain of small values of l2 . Actually, the compliance of flexure
arm of the semi bridge-type compliant amplifier is mainly dependent on the in-plane
thickness h1 when the length l2 is small. Therefore, displacement amplification ratio is
slightly influenced by small values of l2 . A suitable value of 0.4 mm can be confirmed for h5 ,
and the length l2 can be selected as 5 mm for the prototype. In addition, the displacement
amplification ratio increases with a larger minimum thickness he of the V-type flexure
hinges and reaches to a maximum value due to the attenuation effect of input stiffness. The
dynamic resonance frequency continuously increases with the increase of he , and a relatively
large thickness he of 1.5 mm can be optimally selected for fabricating the prototype.
Actuators2022,
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Figure 10.
Figure 10. Theoretical
Theoretical results
results of
of the
the displacement
displacement amplification
amplification ratio
ratio and
and the
the main
main resonance
resonance fre-
fre-
Figure10.
Figure
quency 10.
for Theoretical
Theoretical
the results of
results
displacement of thedisplacement
the displacement
amplification amplification
amplification
mechanism versus ratio
ratio
the and the
and the main
thickness main
of resonance
resonance
guiding fre-
fre-
flexure
quency for the displacement amplification mechanism versus the thickness of guiding flexure
quencyfor
quency
beams. forthethe displacement
displacement amplification
amplification mechanism
mechanism versus
versus the the thickness
thickness of of guiding
guiding flexure flexure
beams.
beams.
beams.

Figure 11.
Figure
Figure 11. Theoretical
11. Theoretical results
Theoretical results of
results of the
of the displacement
the displacement amplification
displacement amplification ratio
ratio and
and the
the main
main resonance
resonance fre-
fre-
Figure 11.
quency for Theoretical
the results
displacement of the displacement
amplification amplification
mechanism versus the ratio
length and
of the main
internal resonance
links of the fre-
semi
quency for the displacement amplification mechanism versus the length of internal links of the semi
quency for the
bridge-type displacement amplification mechanism versus the length of internal links of the semi
amplifier.
bridge-type amplifier.
bridge-type amplifier.

Figure 12.
Figure 12. Theoretical
Theoretical results
Theoretical results of
results of the
of the displacement
the displacement amplification
displacement amplification ratio
amplification ratio and
ratio and the
and the main
the main resonance
main resonance fre-
resonance fre-
fre-
Figure 12.
quency for Theoretical
the results amplification
displacement of the displacement amplification
mechanism versus ratio
the and the thickness
minimum main resonance
of fre-
V-type
quency
quency for
for the displacement amplification
the displacement amplification mechanism
mechanism versus
versus the
the minimum
minimum thickness
thickness of
of V-type
V-type
quencyhinges.
flexure for the displacement amplification mechanism versus the minimum thickness of V-type
flexure
flexure hinges.
flexurehinges.
hinges.
5.Prototype
5. Prototypeand
Prototype andExperimental
and ExperimentalTestingTesting
5. Prototype and Experimental Testing
AAprototype
prototypeof of the
ofthe proposed
theproposed amplified
proposedamplified
amplified piezoelectric
piezoelectric
piezoelectric actuator
actuator
actuator was
was was fabricated
fabricated
fabricated andand
and ex-
ex-
A prototype
perimentally
experimentally of
tested,
tested, the
as proposed
shown
as shown in amplified
Figure
in Figure 13. Thepiezoelectric
material of actuator
the was
displacement fabricated and
amplificationex-
perimentally tested, as shown in Figure 13. 13.
TheThe material
material of theof displacement
the displacement amplifica-
amplification
perimentally
mechanism tested, as shown in Figure 13. The material of the displacement 3 amplification
isisaluminum
aluminum alloyalloy
70757075withwith
thedensity
density of ρρ==of2770
2770 kg/mkg/m andYoung’s
Young’s mod-
3
tion mechanism
mechanism is aluminumalloy 7075 with the the density
of ρ = kg/m
2770 3 and and Young’s
mod-
mechanism
ulus
modulus of E =
of71Eis=GPa.
aluminum
71 The
GPa. alloy
amplifier
The 7075was
amplifier with the density
fabricated
was of
through
fabricated ρ =the
through 2770 kg/m 3 and Young’s mod-
wire-electrode
the wire-electrode cutting tech-
cutting
ulus of E = 71 GPa. The amplifier was fabricated through the wire-electrode cutting tech-
ulus ofTwo
nique.
technique. E =Two
71 GPa.
through-holesThe amplifier
through-holes on the
on wasinput
input
the fabricated
ports were
ports through
reserved
were the
to
reserved wire-electrode
exert
to a tensile
exert a cutting
force
tensile in tech-
order
force in
nique. Two through-holes on the input ports were reserved to exert a tensile force in order
nique.
to Two
increase
order to through-holes
the
increase distance
the on the
between
distance input
the
between ports
twothe were
input
two reserved
ports
input for
ports to exert
assembling
for a tensile force instacks
piezoelectric
assembling order
piezoelectric
to increase the distance between the two input ports for assembling piezoelectric stacks
to increase
stacks
into theinto thedisplacement
the distance
displacement between themechanism
two input
amplification
amplification ports
mechanism
by thefor byassembling piezoelectric
the interference
interference with stacks
withaafittolerance
fitwith a tol-
tolerance of
into the displacement amplification mechanism by the interference fit of
into
erance the displacement
ofμm.
about 20 amplification
The whole mechanism by the interference fit
× 44and with ×a tolerance of
about20
about 20 μm. The
The µm. amplifier
whole
whole amplifier isisamplifier
sizedas
sized as50 ismm
50 sized
mm asmm
××44
44 50 mm
mm ××77mm,
mm, mm
and ititwas
was7 mm, and
mounted
mounted
about 20 μm. The whole amplifier is sized as 50 mm × 44 mm
it was mounted on an optical table for the static and dynamic measurements with the × 7 mm, and it was mounted
Actuators 2022, 11, x FOR PEER REVIEW 13 of 18
Actuators 2022, 11, 134 13 of 18

on an optical table for the static and dynamic measurements with the reduced ground
reduced
vibration.ground vibration.
Piezo-stacks Piezo-stacks
(18 mm × 7 mm × (18 mmwas
7 mm) × 7 excited
mm × using
7 mm)a was
powerexcited using(PI
amplifier a
power amplifier (PI Corp., E-500). The used piezoelectric stacks have the
Corp., E-500). The used piezoelectric stacks have the axial stiffness of 100 N/μm and theaxial stiffness
of 100 N/µm
output strokeand the output
of about 16 μmstroke
underof about
the input16voltage
µm under theV.
of 100 input
The voltage of 100 V. The
output displacement
output displacement of the amplified piezoelectric actuator was measured
of the amplified piezoelectric actuator was measured using a precision laser using a precision
sensor
laser sensor (Keyence, LK-G10) and recorded by a data recorder (Yiheng
(Keyence, LK-G10) and recorded by a data recorder (Yiheng Inc., Hangzhou, China). Non- Inc., Hangzhou,
China).
negativeNon-negative sinusoidal
sinusoidal signals at thesignals at the
working workingof
frequency frequency
1 Hz wasofused
1 Hzfor
wasthe
used for dis-
static the
static displacement
placement and hysteresis
and hysteresis evaluation.evaluation. The dynamic
The dynamic responsesresponses were measured
were measured by sweep- by
sweeping the frequencies from 1 to 4000 Hz and step signals, respectively. All
ing the frequencies from 1 to 4000 Hz and step signals, respectively. All of the tests were of the tests
were implemented
implemented at room
at room temperature.
temperature.

Figure 13.
Figure 13.Prototype
Prototypeand
andthethe experimental
experimental setup
setup for measuring
for measuring the static
the static and dynamic
and dynamic perfor-
performances.
mances. (a) Prototype. (b) Experimental setup.
The static output displacement at the working frequency of 1 Hz and input voltage
of 100The static
V is output
shown displacement
in Figure 14, fromatwhich
the working frequency
steady and smooth of waves
1 Hz and caninput voltage
be observed.
of 100
The V is shown
maximum inputin Figure
and output14, from
static which steady andcan
displacements smooth
be read waves can10beand
out as observed.
61 µm
The maximum
with input and
the displacement output static
amplification ratiodisplacements can be
of 6.1. In addition, theread out aserror
hysteresis 10 and 61 μm
of around
with from
17% the displacement
piezoelectricamplification
material canratio of 6.1. In addition,
be observed and this thetypehysteresis
of error error
can beof around
further
17% from piezoelectric
compensated by advanced material
controlcanstrategies
be observed thatand thisthe
is not type of errorof
emphasis can
thebecurrent
furtherstudy.
com-
The parasitic
pensated motion error
by advanced of the
control output port
strategies that isalong x direction
theemphasis
not the ofwas also measured,
the current study. The as
shown
parasiticin motion
Figure 14c.
errorThe maximum
of the output parasitic
port along motion
the x error is about
direction was 0.25
alsoµm under the
measured, as
output
shown displacement
in Figure 14c.ofThe 61 µm, which corresponds
maximum parasitic motionto theerror
relative error of
is about 0.41%.
0.25 The small
μm under the
parasitic motion errorofis61
output displacement attributed
μm, which to the symmetric
corresponds toand compacterror
the relative structure of the
of 0.41%. design.
The small
The dynamic
parasitic motion errorresponse of the prototype
is attributed was recorded
to the symmetric by sweeping
and compact the frequency,
structure and
of the design.
the results on both time and frequency domain are shown in
The dynamic response of the prototype was recorded by sweeping the frequency, Figure 15. The single peak
in
andthethe
response
results curve
on both corresponds to the vibration
time and frequency domain mode
are in the output
shown in Figuredirection,
15. Theand the
single
measuring result is 2176 Hz. From the dynamic response curve in
peak in the response curve corresponds to the vibration mode the output direction, andFigure 15b, the first-order
local spurious swing
the measuring result and rocking
is 2176 vibration
Hz. From mode inresponse
the dynamic Figure 9acurve
was indeed
in Figure not15b,
excited and
the first-
only
orderthe main
local vibration
spurious modeand
swing along the output
rocking direction
vibration modeappear. The9a
in Figure experimental
was indeedresult not ex-of
single resonance peek further indicates that there is no necessity
cited and only the main vibration mode along the output direction appear. The experi- to design guiding flexure
beams
mentalat the output
result of single port from thepeek
resonance compactness point ofthat
further indicates view.
there is no necessity to design
guiding flexure beams at the output port from the compactness point of view.
The third experiment was performed to obtain the step response time in an open-
loop control. In this case, two step transient signals with the magnitude of 100 V were
followed by the amplified piezoelectric actuator. From the results in Figure 16, it can be
seen that the step response time obtained necessary to reach 90% of the targeted stroke is
Actuators
Actuators2022,
2022,11,
11,xxFOR
FORPEER
PEERREVIEW
REVIEW 14
14 of
of 18
18

Actuators 2022, 11, 134 14 of 18

about
about 0.4
0.4 ms.
ms. The
The fast
fast step
step response
response time
time in
in aa matter
matter ofof sub-microseconds
sub-microseconds is
is superior
superior
which
whichisisattributed
attributed to
tothe
the refined
refined design
design in
inthe
the current
current study.
study.

80
80 80
80

(μm)
Input

displacement (μm)
Input

(μm)
displacement (μm)
Output
Output
60
60 60
60

Output displacement
Static displacement
40
40 40
40

20 20

Output
20 20
Static

00 00
00 0.5
0.5 11 1.5
1.5 00 50
50 100
100
Time
Time (s)
(s) Input
Input voltage
voltage (V)
(V)
(a)
(a) (b)
(b)
0.2
0.2
(μm)
error (μm)

0.1
0.1
Parasitic error
Parasitic

00

-0.1
-0.10
0 11 22 33 44
Time
Time (s)
(s)
(c)
(c)
Figure
Figure14.
Figure 14.Experimental
14. Experimental
Experimental results
results of
of the
results the static
static
of the input
input
static and output
andand
input output displacements
displacements
output displacementsof
of the
theofpresented
presented dis-
dis-
the presented
placement
placement amplification
amplification
displacement mechanism.
mechanism.
amplification mechanism. (a) Input
(a) (a)
Input and
and
Input output
output
and displacements.
displacements.
output displacements.(b) Open-loop
(b)(b)
Open-loop hysteresis
Open-loophysteresis
hysteresis
characteristic.
characteristic. (c) Parasitic motion error of the output port in the xxdirection.
characteristic.(c)
(c)Parasitic
Parasiticmotion
motionerror
errorofofthe
theoutput
outputport
portininthe
the xdirection.
direction.

40
40 0.025
0.025
(μm)
displacement (μm)

0.02
0.02
(dB)
Magnitude (dB)
Output displacement

20
20 Resonance
Resonance
0.015
0.015 frequency:
frequency:
Magnitude

2176
2176 Hz
Hz
00 0.01
0.01
Output

0.005
0.005
-20
-20
00
30
30 35
35 40
40 45
45 50
50 500
500 1000
10001500
1500 2000
20002500
2500 3000
3000
Time
Time (s)
(s) Frequency
Frequency (Hz)
(Hz)

(a)
(a) (b)
(b)
Figure
Figure15.
Figure 15.Experimental
15. Experimentalresults
Experimental resultsof
results ofthe
of the dynamic
the dynamic response
dynamic of
responseof
response the
ofthe presented
thepresented displacement
presenteddisplacement
displacement amplifica-
amplifica-
amplification
tion
tion mechanism.
mechanism. (a)
(a)Output
Output on
on the
the time
time domain.
domain. (b)
(b) Response
Response on
on the
the frequency
frequency domain.
domain.
mechanism. (a) Output on the time domain. (b) Response on the frequency domain.

To
To summarize,
Thesummarize, Table
Table 55was
third experiment compares
compares
performedthe
the maximum
maximum
to obtain theoutput
output displacement
displacement
step response time inandan the
and the main
main
open-loop
resonance
resonance frequency
control. Infrequency of
this case, two the
of the presented
presented
step amplified
transientamplified piezoelectric
piezoelectric
signals with actuator
actuator
the magnitude with
with
of 100 other typical
otherfollowed
V were typical
ones
ones in
inliterature.
by the amplified The
literature. Thefindings show
showthat
findingsactuator.
piezoelectric that very compact
verythe
From resultsstructure
compact in Figurecan
structure 16, be
can achieved
becan
it achieved
be seen in some
inthat
some
the
previous
previous studies
studies
step response with
with
time satisfying
satisfying
obtained output
outputdisplacements,
necessary to reach 90% ofsuch
displacements, such as
asthe
thedesign
the targeted design
strokein [35].
inis[35].The
aboutThe0.4cur-
cur-
ms.
rent
Thedesign
rent design
fast stephas
has aa little
little larger
response time insize
larger size in
in comparison
comparison
a matter to
to this
this one,
of sub-microseconds but
one,is
but the
the presented
superior which isamplified
presented amplified
attributed
to the refined design in the current study.
 also confirmed by the parameter influence analyses with a comprehensive two-port dy-
namic stiffness model. Further investigations on inventing better configurations and some
advanced closed-loop controller are deserved, which are expected for potential applica-
tions requiring small space, high motion speed and high accuracy. These potential appli-
Actuators 2022, 11, 134 cation scenarios would involve precision positioning stages, micro-grippers, fast mechan-
15 of 18
ical switches and clutches, as well as jet dispensers, to name a few.

Output displacement (μm)

80 80

Output displacement (μm)

Output displacement (μm)

100
60 60
50
100 0.4ms
40 40
0
20 50 20 2 2.0005 2.001
0.4ms Time (s)
0 0 0
0.5 0.5005 0.501
-20 -20
0 0.5 1 1.5 2 2 2.2 2.4
Time (s) Time (s)

(a) (b)

Figure 16.16.Experimental
Figure Experimentalresults ofof
results the step
the stepresponse
responsefor
forthe
thepresented
presenteddisplacement
displacementamplification
amplification
mechanism. (a) Step increasing. (b) Step reducing.
mechanism. (a) Step increasing. (b) Step reducing.

Table 5.ToComparison
summarize,onTable
the static and dynamic
5 compares performances
the maximum of displacement
output different amplified piezoelectric
and the main reso-
actuators.
nance frequency of the presented amplified piezoelectric actuator with other typical ones in
literature. The findings show that very compact structure can Stroke
Output be achieved in some previous
studies with satisfying outputSize:
displacements, such as the design Resonance
in [35]. The current design
Amplifiers (Displacement Amplifying
Length
has a little larger size × Width × Height
in comparison to this one, but the presented amplifiedFrequency
piezoelectric
Ratio)
actuator exhibits much higher dynamic bandwidth. In addition, some reported compliant
120 mm × 80 mm × 25 mm
amplifying
Ref. [7] mechanisms in literature have a relatively 30 μmlarge
(R =displacement
10.4) amplification
1152 Hz
(Approximate value)
ratio, but the dynamic resonance frequency and the compactness still needs to be further
Ref. [35]in comparison
improved 30 mm to × 30
themm × 15 mm
current 80 μm (Ramong
design. The tradeoff = 10) the displacement
190 Hz am-
Ref. [31] 98 mm × 52 mm × 20 mm 69 μm (R = 3.51)
plification ratio, dynamic bandwidth and structural compactness is still a challenging 457 Hzissue
Ref.
in the [31]of compliant mechanisms. The current study attempts to equilibrate the tradeoff
field
by(Traditional
combining the 98 mm × 52and
lever-type mmsemi
× 20 bridge-type
mm 74 μm (R =amplifying
compliant 3.70) 355 Hz in
mechanisms
bridge-type)
a compact configuration. The optimal structural parameters were also confirmed by the
parameter influence 134 analyses
mm × 50 with
mm ×a20 mm
comprehensive two-port dynamic stiffness model.
Ref. [36] 200 μm (R = 20) 189 Hz
Further investigations on inventingvalue)
(Approximate better configurations and some advanced closed-loop
controller are deserved,
Ref. [40] 92 mm which
× 50 are
mmexpected
× 18 mmfor potential applications
214 μm (R = 12.1)requiring 205
small
Hzspace,
high motion
Ref. [41] speed and high accuracy.
65 mm × 22 mm × 10 mm These potential application
200 μm (R = 16.2)scenarios would involve
628 Hz
precision positioning
The presented stages, micro-grippers,
50 mm × 44 mm × 7 mm fast mechanical switches
61 μm (R = 6) and clutches,
2176 Hzas well
as jet dispensers, to name a few.
6. Conclusions
Table 5. Comparison on the static and dynamic performances of different amplified piezoelectric ac-
In this paper, we focused on exploring the benefits of synthesizing different types of
tuators.
compliant mechanisms to mechanically amplify the micro displacement of piezoelectric
Output Stroke
Size: Resonance
Amplifiers (Displacement
Length × Width × Height Frequency
Amplifying Ratio)
120 mm × 80 mm × 25 mm
Ref. [7] 30 µm (R = 10.4) 1152 Hz
(Approximate value)
Ref. [35] 30 mm × 30 mm × 15 mm 80 µm (R = 10) 190 Hz
Ref. [31] 98 mm × 52 mm × 20 mm 69 µm (R = 3.51) 457 Hz
Ref. [31]
98 mm × 52 mm × 20 mm 74 µm (R = 3.70) 355 Hz
(Traditional bridge-type)
134 mm × 50 mm × 20 mm
Ref. [36] 200 µm (R = 20) 189 Hz
(Approximate value)
Ref. [40] 92 mm × 50 mm × 18 mm 214 µm (R = 12.1) 205 Hz
Ref. [41] 65 mm × 22 mm × 10 mm 200 µm (R = 16.2) 628 Hz
The presented 50 mm × 44 mm × 7 mm 61 µm (R = 6) 2176 Hz
Actuators 2022, 11, 134 16 of 18

6. Conclusions
In this paper, we focused on exploring the benefits of synthesizing different types of
compliant mechanisms to mechanically amplify the micro displacement of piezoelectric
stacks. The design purpose is to achieve a large displacement amplification efficiency while
guaranteeing a high dynamic bandwidth within a compact size. The following conclusions
can be reached:
(1) Combining lever-type and semi bridge-type complaint amplifying mechanisms, we
proposed a new amplified piezoelectric actuator. Although these two types of compli-
ant mechanisms might not be perfect from a practical point of view, our combination
enables an improved performance. We showcase by comparing with previous designs
such a hybrid displacement amplification mechanism can reach a resonance frequency
of 2.1 kHz and the displacement amplification ratio of 6 within a compact size of
50 mm × 44 mm × 7 mm.
(2) The benefits of using a comprehensive two-port dynamic stiffness model for the di-
mension synthesis have been validated by extensive studies of the parameter influence
analysis. The traditional transfer matrix method, which is rarely used in the presence
of serial-parallel compliant mechanisms including rigid bodies and complex branches,
now is able to successfully utilize for such a complicated application scenario in a
way of conciseness.
It is noticed that the static and dynamic behaviors of piezoelectric stacks, such as the
hysteresis and creep as well as coupling between the piezoelectric stacks and compliant
amplifying mechanism, were not involved in the current study. The future work will focus
on developing advanced control strategies for precision tracking control and compensating
the nonlinear hysteresis and creep errors of the presented amplified piezoelectric actuator.

Author Contributions: Conceptualization, M.L. and X.Z.; methodology, M.L.; software, L.Y.; valida-
tion, L.Y.; experiment, T.H. and Z.L.; data curation, M.L.; writing, M.L.; supervision, X.Z.; project
administration, M.L.; funding acquisition, M.L. All authors have read and agreed to the published
version of the manuscript.
Funding: This research was funded by the National Natural Science Foundation of China [grant
number 52075179], and the National Defense Technology Foundation Program of China [grant
number JSHS2018212C001].
Institutional Review Board Statement: Not applicable.
Informed Consent Statement: Not applicable.
Data Availability Statement: Data are available upon email the corresponding authors.
Conflicts of Interest: The authors declare no conflict of interest.

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