SmartTest

HLT 550
HLT 560
HLT 570

Maintenance Instructions
IG 0108 BEN_I (1008)

EN
EN
 Product identification
The data specified on the rating plate are necessary in correspondence with Pfeiffer
Vacuum. Therefore transfer the data to the copy.

Fig. 0-1

Validity
This document is valid for products with the article number
SmartTest
PT L02 100 (HLT 560, 230 V~, with rotary vane pump UNO 005 A)
PT L02 101 (HLT 560, 120 V~, with rotary vane pump UNO 005 A)
PT L02 102 (HLT 560, 100 V~, with rotary vane pump UNO 005 A)
SmartTest
PT L02 020 (HLT 550, 100 … 230 V~, with backing pump provided by the customer)
SmartTest
PT L02 110 (HLT 570, 230 V~, with diaphragm pump MVP 035)
PT L02 111 (HLT 570, 120 V~, with diaphragm pump MVP 035)
PT L02 112 (HLT 570, 100 V~, with diaphragm pump MVP 035)

This document is based on firmware versions beginning with V2.3.

If the instrument does not work as described, check whether your instrument is
equipped with these firmware versions.
Subject to technical modifications without prior notice. The figures are not to scale.

2
Content

1 Maintenance instructions 5
1.1 Important notes 5
1.2 Symbols used 5
1.2.1 About these maintenance instructions 6
1.2.2 Safety instructions 6
1.2.3 General conditions 7
1.2.4 Document list 7
1.3 Structure and functional description 8
1.3.1 System overview 8
1.3.1.1 Block diagram 9
1.3.1.2 Mains wiring and earthing 10
1.3.2 Pump system 11
1.3.2.1 Backing pump 12
1.3.2.2 Turbo pump SplitFlow 80 with electronic drive unit TC 110 14
1.3.2.3 Vacuum measurement 15
1.3.2.4 Valve block 16
1.3.3 Sniffing probe LP 5xx 17
1.3.4 Analysis unit 18
1.3.4.1 Detection system 18
1.3.4.2 Mass spectrometer supply MSV 20
1.3.4.3 Electrometer pre-amplifier EVV 21
1.3.5 Electronics 22
1.3.5.1 MC 68 control card 22
1.3.5.2 I/O board 23
1.3.5.3 Wiring plane 24
1.3.5.4 Fuses 25
1.4 SmartTest MAINTENANCE AND SERVICE 26
1.4.1 Maintenance and service schedule 26
1.4.2 Maintenance kits 29
1.5 Maintenance work 31
1.5.1 General 31
1.5.2 UNO 005A 32
1.5.2.1 Check oil level, top up 32
1.5.2.2 Change oil 32
1.5.3 Oil mist filter 33
1.5.3.1 Check and empty the oil mist filter and clean the oil tray. 33
1.5.3.2 Replace the filter in the oil mist filter. 34
1.5.4 MVP 035 35
1.5.4.1 MVP 035, replace diaphragms 35
1.6 SplitFlow 80 36
1.6.1 Replace operating fluid reservoir 36
1.6.1.1 Exchange SplitFlow 80 for bearing change 38
1.6.2 Valve block 38
1.6.2.1 Clean screw connection with filter at the venting connection 38
1.6.2.2 Clean Pirani measuring elements P1 and P2 39
1.6.2.3 Clean the valve block, replace seals and revise valves 39
1.6.3 Fan 1 39
1.6.3.1 Clean / replace filter mat 39
1.6.4 LP 5xx 40
1.6.4.1 Replace capillary filter 40
1.6.4.2 Replace sinter filter 40
1.6.5 Maintenance inspection 40
1.6.5.1 Weekly maintenance work 40
1.6.5.2 Annual maintenance work 41

3
 1.6.5.3 Maintenance work every 2 years 41
1.6.5.4 Maintenance work every 4 years 41
1.7 Replace ion source 42

4
1 Maintenance instructions

1.1 Important notes

Note
Vorsicht
Maintenance work on the HLT 5xx may only be carried out by persons
authorised by PFEIFFER VACUUM.

Qualified Personnel
Fachpersonal
Authorised persons:
Repair stage I1) customer
Repair stage II1) customer with technical training or PFEIFFER VACUUM service
technician
Repair stage III1) customer with PFEIFFER VACUUM service training2) or
PFEIFFER VACUUM service technician
1)
→ Maintenance schedule Chapter 1.4.
2)
→ PFEIFFER VACUUM offers courses for repair stages II and III.

1.2 Symbols used

The following symbols are used with explanatory text to alert people to remaining
risks during use for the intended purpose and to stress important technical
requirements.

STOP Danger
Gefahr
Specifications for the prevention of bodily injuries of all kinds.

Warning
Warnung
Specifications for the prevention of severe material and environmental damage.

Note
Vorsicht
Specifications for handling or use. Failure to observe these can lead to faults
or minor material damage.

5
 Qualified Personnel
Fachpersonal
Work identified by this symbol may only be performed by persons who have a
suitable technical training and the necessary experience.

1.2.1 About these maintenance instructions

These maintenance instructions contain explanations about the periodic
maintenance of the SmartTest.
Information about operating the instrument, the instrument description and the
technical data can be found in the separate operating instructions.

1.2.2 Safety instructions

Basic safety observations
• The relevant regulations and protective measures must be observed when
handling the gases used.
• The inert gas helium is suffocating in heavy concentrations.
• The test item and the gas fittings must be able to withstand the pressure
differential applied.
• Products sent in for repair must be free from contaminants (e.g. of a
radioactive, toxic, caustic or biological nature). Otherwise the type of
contamination must be declared.
(A form for declaration of the contamination can be found in the Operating
Instructions IG 0100 BEN. Or can be ordered from your service point.)
• The mains filter, the mains unit, the wiring plane and the backing pump have
parts connected to voltages above 50 V. Therefore always pull out the mains
plug before opening the HLT 5xx during service work.

Note
Vorsicht
Vacuum area:
Please wear clean, lint free gloves and use a clean tool when working in this area.

6
1.2.3 General conditions

• Electrical components (Prints, EPROMs, electrical connections) are sensitive

to electrostatic charges. Please bear this in mind accordingly, the prints and
EPROMs especially must be stored in antistatic packing.
• Defects which arise through failure to observe the protective measures can
lead to a loss of warranty entitlement.
• PFEIFFER VACUUM does not assume any liability or warranty in the event
that the product is modified or converted or if it is operated with accessories
which are not cited in the accompanying product documentation.

1.2.4 Document list

IG 0100 BEN Operating instructions HLT 5xx

PK 0152 BEN Operating instructions UNO 005A

PJ 11400 Operating instructions MVP 035

PT 0208 BEN Operating instructions SplitFlow 80

PT 0217 BN Supplementary Information SplitFlow 80

BG 805 268 BEN Operating instructions LP 5xx

7
1.3 Structure and functional description
The SmartTest is a microprocessor-controlled leak detector equipped with state of
the art electronic and electrical components . All the processes in the instrument are
therefore controlled automatically.

1.3.1 System overview

1
2
12
3 13
14

4 15

5
6
7
8
9

10 16

17
11
18

Fig. 1-1 SmartTest

Item Description Item Description

1 Oil mist filter (HLT 560 only) 10 Valve V1
2 Holder fan 2 11 Fan 1
3 Test connection 12 UNO 005A or MVP 035
4 Test leak 13 I/O circuit card
5 Turbo pump SplitFlow 80 14 MC 68 circuit card
6 Test leak valve V5 15 MSV circuit card
7 Valve block 16 Speaker
8 Valve V3 17 Electrometer amplifier
9 Valve V2 18 Wiring plane

8
1.3.1.1 Block diagram

Fig. 1-2 SmartTest Block diagram

9
1.3.1.2 Mains wiring and earthing

(on wiring plane)

Fig. 1-3 Mains wiring and earthing

10
1.3.2 Pump system
The pump system consists of a backing pump, a turbo pump, a helium sensor and
a valve block which makes most of the connections between the helium sensor and
the test connection. The schematic structure of the pump is illustrated in Fig. 1-4.

Test port
Testanschluss

P2
Helium- Pressure test connection
Sensor Druck Testanschluss
V4 V5

Test leak
Testleck
V3 V6

Turbo pump
Vent or LP connection
Turbopumpe
Belüftungs oder LP Anschluss
V2
V1

P1
Pressure fore vacuum Backing pump
Druck Vorvakuum Vorvakuumpumpe

Backing pump optional

Vorvakuumpumpe optional

Fig. 1-4 Pump system HLT 5xx

An object to be tested can be connected to the test connection with a flange KF 25.
With the valves V1, V2, V3 and V4 the connection is made between the object to be
tested and the helium sensor vacuum-technically without an operating state being
produced which is unsuitable for the helium sensor.
For internal calibration of the HLT 5xx a test leak can be connected with the valve
V5.
The valve V6 normally serves for venting so that the object being tested can be
removed from the test connection again afterwards. It is also used as a sniffing
connection in the sniff mode however.

11
1.3.2.1 Backing pump

a) HLT 560: UNO 005A (→ Fig. 1-5)

Single-stage, oil encapsulated rotary vane pump with a rated volume flow rate of
4 m3/h at 50 Hz and 5 m3/h at 60 Hz.

Fig. 1-5 UNO 005A

Item Description
1 Oil level sight glas
2 Oil level min.
3 Oil level max.
4 Oil drain
5 Oil filter

12
b) HLT 570: MVP 035 (→ Fig. 1-6)
Two-stage diaphragm vacuum pump for absolutely oil-free pumping of gases with
a volume flow rate of 2 m3/h.

Fig. 1-6 MVP 035

c) HLT 550: External backing pump

An external backing pump can be connected at the bottom above the connecting
flange KF 25 on the HLT 550. If objects of large volume need to be tested an
additional external backing pump can be connected in parallel at this connecting
flange on the HLT 560 and HLT 570.

13
1.3.2.2 Turbo pump SplitFlow 80 with electronic drive unit TC 110

Fig. 1-7 SplitFlow 80 with TC 110

14
1.3.2.3 Vacuum measurement

Pirani measuring elements P1 and P2

P1 measures the fore-vacuum pressure in the turbomolecular pump.
P2 measures the pressure in the test connection.

to the valve block

zum Ventilblock
Pirani measuring elements
Pirani-Messelemente

P2

P1

Holder
Halter

Fig. 1-8 Vacuum measurement

15
1.3.2.4 Valve block

3 6
V6 V5
4 V4
V2 6
V6 V4
V3
V2
V1
V3

V1
P2 P1
5

Fig. 1-9 Valve block

Item Description Item Description

1 Test connection 4 Venting connection
2 Connection backing pump 5 Screw-in flange optional backing pump
3 Valve block 6 Internal test leak

Electromagnetic valves V1 to V6.

The valves have different rated widths and opening forces depending on their task.
V2 and V6 are designed for 0.0 – 1.1 bar (open to atmosphere).
V1, V3, V4 and V5 are designed for 0.0 – 0.5 bar.
All valves open electromagnetically and close with spring force. They are switched
with 24 V=.
The tightness of the valves to the outside is < 10-9 mbar l/s. The tightness of the
stamp is normally < 10-6 mbar l/s, but may be worse due to contamination without
the HLT 5xx being affected in normal operation.

16
1.3.3 Sniffing probe LP 5xx

(3 m / 5 m / 10 m) (218) (120 / 385)

Capillary filter
standard: plastic
option: metal

Sniffer line Handle Sniffer tip Kapillarfilter

Schnüffelsonde Handgriff Schnüffelspitze Standard: Kunststoff
Option: Metall

TP 312 Tip 120 mm stiff BG 449 215 -T TP 385 Tip 385 mm stiff BG 449 216 -T
TP 312 Spitze 120 mm steif BG 449 215 -T TP 385 Spitze 385 mm steif BG 449 216 -T
(120) (385)

Sinter filter Sinter filter

Sinterfilter Sinterfilter
TF 312 Tip 120 mm flexible BG 449 217 -T TF 385 Tip 385 mm flexible BG 449 218 -T
TF 312 Spitze 120 mm flex BG 449 217 -T TF 385 Spitze 385 mm flex BG 449 218 -T
(120) (385)

Sinter filter Sinter filter

Sinterfilter Sinterfilter

Fig. 1-10 Sniffing probe with sniffing tip

Length of sniffing
Type Order number Sniffing tip TP 312
probe

LP 503 BG 449 207 -T 3 metres 120 mm rigid / BG 449 215 -T

LP 505 BG 449 208 -T 5 metres 120 mm rigid / BG 449 215 -T

LP 510 BG 449 209 -T 10 metres 120 mm rigid / BG 449 215 -T

Other sniffing tips (optional)

Type Length / property Order number

TF 312 120 mm / flexible BG 449 217 -T

TP 385 385 mm / rigid BG 449 216 -T

TF 385 385 mm / flexible BG 449 218 -T

Spare parts kits for LP 5xx: BN 845 979 -T (5 x sinter filter)

BN 846 392 -T (5 x capillary filter cpl.)

Option: BG 449 140 -T (capillary filter: metal version for

harsh conditions)

17
1.3.4 Analysis unit

1.3.4.1 Detection system

The detection system basically consists of the ion source (1, 2, 3 and 11), the
magnetic separation system and the ion catcher.
The ion source ionises neutral gas particles and generates an ion beam from them.
The positively charged ions are accelerated out of the ion source and then reach the
magnetic field. There they are deflected into an orbit, the radius of which depends
on the ratio of mass/charge of the ions. Only the helium ions satisfy the separation
conditions and reach the ion catcher where they can be measured by the
electrometer amplifier.

1 2 3 4
Legend:
1 Cathode 1
2 Anode
3 Cathode 2
4 Amplifier
5 5 Ion collector
6 Ion collector screen
11 6 7 Suppressor
8 Magnetic field
9 Intermediate orifice
10 Extractor orifice
10 7 11 Screening ring
Legende:
1 Katode 1
2 Anode
3 Katode 2
M<4 4 Verstärker
5 Ionenfänger
8 6 Abschirmung zu Ionenfänger
M=4
7 Suppressor
8 Magnetfeld
M>4 9 Zwischenblende
9 10 Extraktorblende
11 Abschirmring

Fig. 1-11 Detection system principle schematic

18
Fig. 1-12 Detection system structure

19
1.3.4.2 Mass spectrometer supply MSV

This module generates all the voltages and currents necessary for operating the
mass spectrometer.
– Anode heating voltage
– Cathode heating voltage
– Anode voltage
– Suppressor voltage
Errors in the mass spectrometer are detected and passed on to the MC 68. The
mass spectrometer supply is monitored in the MC 68.

Anode on/ein Anode preheating Suppressor potential

K2 A K1 Anode vorheizen Suppressor Potential
IKP ISP +15V
Cathode potential
Cathode error Katodenpotential
Katode Fehler
Anode potential
Anodenpotential IAP n.c. +24V -15V

e-
Emission on/ein F3=T1A

XP1 XP2

F1=T2A F4=M0,032A
F2=T3,15A

Fig. 1-13 Mass spectrometer supply MSV

20
1.3.4.3 Electrometer pre-amplifier EVV

The electrometer pre-amplifier transforms the current flowing on the ion catcher of
the mass spectrometer into a voltage signal. Its amplification can be switched in
four steps. The analog output voltage is switched and processed by the MC68
control card. The detection limit in the most sensitive range is about 1x10-15 A.

Note
Vorsicht
The ion catcher pre-amplifier cannot be opened and repaired. The whole unit
is exchanged in the event of an error.

Fig. 1-14 Ion catcher pre-amplifier unit

21
1.3.5 Electronics

1.3.5.1 MC 68 control card

Lithium Flash PROM

Jumper XJ1 Accumulator L H

J2 J1
XP3

XP7_MC68 XP6_MC68

Fig. 1-15 Equipping of the MC 68 control card

22
1.3.5.2 I/O board

F3=T0,315A

J1 J2

XP5_IO

XP1_IO XP2_IO
F2=T0,8A
P2 High vacuum F1=T0,8A
P2 Atmosphere

P1 High vacuum

P1 Atmosphere

XT3

Fig. 1-16 I/O board

23
1.3.5.3 Wiring plane

XS5
XP13

Relay K2

XP18
24V
Relay K1

XP17
24V

XS6
XS8

XS3
XS15
EEPROM

Terminator RS485
XP11
XP21

F3 = T4A
XS16
XS24

XP32
XP20
XP22

XP19

XS14
XS30

XS29
XP12

XS2_I/O XS1_I/O
XP9

XS6_MSV XS7_MC68
XS10

XP23

XS2_MSV
XS1_MSV
XS31

Fig. 1-17 Wiring plane

24
 1.3.5.4 Fuses

Designation Fuse value Dimensions Function Remark

Main fuse
F1) T10 A 5 x 20 Mains fuses
Wiring plane
F31) T4 A 5 x 20 24 V (main fuse apart from TC Power)
I/O board
F11) T0.8 A 5 x 20 24 VI Sniffer connection LP and total pressure and I/O port
1)
F2 T0.8 A 5 x 20 24 VIII Plug XS4 RC and fan
1)
F3 T0.315 A 5 x 20 not used in HLT 5xx
MSV
F11) T2 A 5 x 20 24 V of MSV
1)
F2 T2 A 5 x 20 Anode heating current fuse value
1)
F3 T1 A 5 x 20 24 V DC/DC transformer for +5 V/±15 V
F41) M0.032 A 5 x 20 Anode/cathode potential
1) contained
in fuse kit PT 110 050 -T.

Fuse kit

PT 110 050 -T MSV / F1 T2A 1

MSV / F2 T2A 1
MSV / F3 T1A 1
MSV / F4 M0.032A 1
IO / F1,F2 T0.8A 2
IO / F3 T0.315A 1
Wiring plane / F2 T0.315A 1
Wiring plane / F3 T4A 1
Main fuse T10.0A 2
25
26
1.4 SmartTest MAINTENANCE AND SERVICE

1.4.1 Maintenance and service schedule

Module Task Operating hours/weeks Operating Rep. Site Test Material Article No. Ref.
Article number 160 8600 17200 34400 instructions step equipment designation chapter
Qty 1 52 104 208 remarks
Vacuum system
Check oil level,
UNO 005A 1 X* PK 800 152 BN II os 1.5.2.1
top up
Europe PK D31 822 Change oil X II os Maintenance kit(4A) PT E01 006 -T 1.5.2.3
Replace UNO
America PK D31 824 III os in case of error UNO 005A, 230V/50Hz PK D31 822
005A
Asia PK D31 823 UNO 005A, 120V/60Hz PK D31 824
UNO 005A, 100V/50-60Hz PK D31 823
if oil is refilled to
Oil mist filter 1 Check, empty II os 1.5.3.1
UNO 005 A
B 8199 999 ET Replace filter X II os Maintenance kit(4A) PT E01 006 -T 1.5.3.2
Replace oil mist
II os in case of error Oil mist filter B 8199 999 ET
filter
Replace
MVP 035 1 X PJ 11400 II os Maintenance kit(4B) PT E01 007 -T 1.5.4.1
diaphragms
Europe Replace MVP
III os in case of error MVP 035, 230 V/50 Hz B 8199 999 EM
B 8199 999 EM 035
America
MVP 035, 120 V/60 Hz B 8199 999 EN
B 8199 999 EN
Asia
MVP 035, 100 V/50-60 Hz B 8199 999 EP
B 8199 999 EP
Operating fluid Maintenance kit(4A)
SplitFlow 80 1 X PT 0208 BE II os PT E01 006 -T 1.6.1
reservoir (4B)
PM P04 010 x replace PT E01 007 -T
exchange for
X(3) III ws in case of error Exchange SplitFlow 80 PM P04 010 -x 1.6.1.1
bearing change
Replace TC 110 III os in case of error TC 110 PM C01 790

Legend: Repair stage I Customer * Function check; clean if necessary, top up operating fluids,
Repair stage II Customer with technical training or completed adjust, re-tighten, find leak
HLT 5xx training at Pfeiffer Vacuum x Place holder for the current version number
Repair stage III PFEIFFER VACUUM service technician X Perform maintenance work
os on-site / at system at customer’s 1 Process-dependent
ws workshop 2 Dependent on media equipment
3 Dependent on environment, application
(4) Contained in maintenance kit, set of seals or spare parts kit
 Module Task Operating hours/weeks Operating Rep. Site Test Material Article No. Ref.
Article number 160 8600 17200 34400 instructions step equipment designation chapter
Qty 1 52 104 208 remarks
Clean valve
Valve block 1 X III os Set of seals(4C) PT 110 030 -T 1.6.2.3
block, seals
and valves to be Spare parts kit for valve
B 8199 999 ER PT 110 040 -T
replaced block(4D)
Clean venting
II os if required PT E01 006 -T 1.6.2.1
filter
PT E01 007 -T
Replace valve
III ws in case of error Valve block B 8199 999 ER
block
Pirani measuring
2 clean X II os 1.3.2.3
element P1, P2
BN 846 056 -T replace II os in case of error Pirani measuring element BN 846 056 -T
Test leak 1 replace II os in case of error Test leak B 8199 999 DW
B 8199 999 DW
Screw coupling 1 replace II os in case of error Screw coupling B 8199 999 ES
B 8199 999 ES
Replace X or in case of
LP 5xx 1 BG 805 268 BD I os Kit with 5 capillary filters BN 846 392 -T 1.6.4.1
capillary filter (3) error
Replace sinter or in case of
3 m → BG 449 207 -T X(3) I os Kit with 5 filters and O-rings BN 845 979 -T 1.6.4.2
filter error
5 m → BG 449 208 -T Replace LP 5xx II os in case of error LP503 BG 449 207 -T
10 m → BG 449 209 -T LP505 BG 449 208 -T
LP510 BG 449 209 -T
Analysis unit
MSV card 1 replace III os in case of error MSV card B 8199 999 DZ
B 8199 999 DZ
EVV 1 replace III os in case of error EVV B 8199 999 EW
B 8199 999 EW

Legend: Repair stage I Customer * Function check; clean if necessary, top up operating fluids,
Repair stage II Customer with technical training or completed adjust, re-tighten, find leak
HLT 5xx training at Pfeiffer Vacuum x Place holder for the current version number
Repair stage III PFEIFFER VACUUM service technician X Perform maintenance work
os on-site / at system at customer’s 1 Process-dependent
ws workshop 2 Dependent on media equipment
3 Dependent on environment, application
(4) Contained in maintenance kit, set of seals or spare parts kit
27
28 Module Task Operating hours/weeks Operating Rep. Site Test Material Article No. Ref.

Article number 160 8600 17200 34400 instructions step equipment designation chapter

Qty 1 52 104 208 remarks

order ion source

Replace ion
Helium sensor 1 II os immediately if a Ion source, packed B 8199 999 EU 1.7
source
cathode fails

Magnet system 1 replace III os in case of error Magnet system B 8199 999 EV

B 8199 999 EV

Electrics, electronics

Mains unit 1 replace III os in case of error Mains unit PT 110 140

PT 110 140

Mains plug, cpl. 1 replace III os in case of error Mains plug, cpl. B 8199 999 EB

B 8199 999 EB

I/O card 1 replace III os in case of error I/O card PT 110 141

PT 110 141

MC 68 card 1 replace III os in case of error MC 68 card B 8199 999 ED

B 8199 999 ED

Clean / replace blow out with

Fan (1) 1 * X(3) I os Filter mat (5 pieces) B 8199 999 EG 1.6.3.1
filter mat compressed air

B 8199 999 EF Replace fan II os in case of error Fan B 8199 999 EF

Fan (2) 1 Replace fan II os in case of error Fan B 8199 999 EF

B 8199 999 EF

Wiring plane 1 replace III os in case of error Wiring plane PT 110 143

PT 110 143

Legend: Repair stage I Customer * Function check; clean if necessary, top up operating fluids,
Repair stage II Customer with technical training or completed adjust, re-tighten, find leak
HLT 5xx training at Pfeiffer Vacuum x Place holder for the current version number
Repair stage III PFEIFFER VACUUM service technician X Perform maintenance work
os on-site / at system at customer’s 1 Process-dependent
ws workshop 2 Dependent on media equipment
3 Dependent on environment, application
(4) Contained in maintenance kit, set of seals or spare parts kit
1.4.2 Maintenance kits

Order number Designation Amount

(4A) MAINTENANCE KIT, HLT 560

PT E01 006 -T Operating fluid reservoir 1

SplitFlow 80
cover plate 1

Oil mist filter Filter insert for oil mist filter 1

Pirani measuring elements O-ring, 3.69 x 1.78 2

Vacuum oil P3 1 litre

O-ring, 10 x 2,5 1
UNO 005A
Usit-ring U10,4/16 x 2 1

felt plate for oil tray 1

Fan 1 Air filters (set of 5) 1

(4B) MAINTENANCE KIT, HLT 570

PT E01 007 -T Operating fluid reservoir 1

SplitFlow 80
cover plate 1

MVP 035 Wearable parts kit 1

Pirani measuring elements O-ring, 3.69 x 1.78 2

Fan 1 Air filters (set of 5) 1

(4C) Set of seals HLT 5xx

Pre-amp., venting, ext. pump

PT 110 030 -T Sealing ring, 18/13.5x1.6 (PTFE) 3
connection

SplitFlow 80 – MS/ MS – IQ /
Flat seal, 55/41.5 x 0.5 3
MS – EVV

Adapter – valve block

Block – adapter / TL housing – O-ring, 12 x 1.5 3
block

SplitFlow 80 – fore-vacuum
O-ring, 13.94 x 2.62 1
connection

Test port O-ring, 19 x 3 1

Pirani measuring elements O-ring, 3.69 x 1.78 2

SplitFlow 80 – valve block O-ring, 30 x 3.5 2

VB – pump O-ring, 18 x 5 (DN 16 KF) 1

Test port O-ring, 28 x 5 (DN 25 KF) 1

29
 Order number Designation Amount

(4D) Spare parts kit for valve block

PT 110 040 -T Spare parts for valve V5 3/2-way valve (4D1) 1

Spare parts for valve V1, V2,

2/2-way valve (4D2) 4
V3, V6

Spare parts for valve V4 2/2-way valve (4D3) 1

(4D1) Spare parts kit for valve V5

PT 110 041 -T Core 1

Spring 2

Spring pin 2

Valve brass adapter O-ring, 12.5 x 1.1 1

Brass adapter block O-ring, 12 x 1.5 1

Brass adapter block O-ring, 3 x 1.5 1

(4D2) Spare parts kit for valve V1, V2, V3, V6

PT 110 042 -T Sealing cap 1

Spring 1

Valve O-ring, 25 x1.5 1

(4D3) Spare parts kit for valve V4

PT 110 043 -T Seal B SPE 1

Spring 1

Valve O-ring, 26.7x1.78 1

30
1.5 Maintenance work

1.5.1 General

Note
Vorsicht
Maintenance work on the HLT 5xx may only be carried out by persons
authorised by Pfeiffer Vacuum.

Qualified Personnel
Fachpersonal
Repair stage I1) customer
Repair stage II1) customer with technical training or
with HLT 5xx training completed at PFEIFFER VACUUM
Repair stage III1) PFEIFFER VACUUM-service technician
1) → Maintenance schedule see chapter 1.4.

Note
Vorsicht
The safety instructions according to (chapter 1.2.2) must be observed for all
maintenance work.

Note
Vorsicht
The mains unit and the backing pump have parts connected to voltages above
50 V. Therefore always pull out the mains plug before opening the HLT 5xx
during maintenance work.

Note
Vorsicht
Vacuum area:
Please wear clean, lint free gloves and use a clean tool for all work in this area.

31
1.5.2 UNO 005A
(valid for HLT 560)

1.5.2.1 Check oil level from outsite

(weekly)

Procedure:
UNO 005A, check oil level
• Check the oil level and discoloration of the oil in the UNO 005A visually
through the oil level sight glas at the rear side of the HLT560.
• If the oil level is less than 5 mm over the lower rim of the oil level sight glas,
check the oil level in detail (→ chapter 1.5.2.2).
• Change the oil if it is discoloured (→ chapter 1.5.2.3).

1.5.2.2 Check oil level, top up

(weekly)

Material required: Mineral oil, 1 l, from maintenance kit,

order no. PT E01 006 -T
Procedure:
UNO 005A, check, top up oil level
• Switch off mains switch
• Unplug mains plug
• Loosen the cover on the left and right with size 8 Allan key.
• Lift cover.
• Loosen earth cable.
• Check the oil level and discoloration of the oil in the UNO 005A visually
through the fan (2).
• If the oil level is below minimum, remove the oil inlet screw with a
screwdriver (→ Fig. 1-5), top up oil to the max. mark and screw the oil inlet
screw back in.
• Change the oil if it is discoloured (→ chapter 1.5.2.3).
• Connect the earth cable.
• Replace the cover and lock on the left and right with a size 8 Allan key.
• Restart the HLT 560 according to the operating instructions.

32
1.5.2.3 Change oil

(annually)

Material required: Mineral oil, 1 l, from maintenance kit,

order no. PT E01 006 -T
Procedure:
• Switch off mains switch
• Unplug mains plug
• Loosen the cover on the left and right with size 8 Allan key.
• Loosen earth cable.
• Lift cover.
• Remove the oil inlet screw with a screwdriver (→ Fig. 1-5).
• Place the oil collection receptacle at the ready and direct the oil drain hose
(→ Fig. 1-5) into the receptacle.
• Loosen the screw cap on the oil drain hose (→ Fig. 1-5) with a size 13 open-
ended wrench and a size 5 hexagonal wrench and drain the oil.
• Screw in the oil inlet screw lightly, insert the mains plug and run the pump
for 5 to 10 s to drain off the remaining oil.
• Unplug mains plug again.
• Replace the screw cap on the oil drain hose with a size 13 open-ended
wrench and a size 5 hexagonal wrench.
• Remove the oil inlet screw again and refill with 0.33 l of fresh oil using a
funnel.
• Replace the oil inlet screw.
• Connect the earth cable.
• Replace the cover and lock with a size 8 Allan key.
• Restart the HLT 560 according to the operating instructions.
• Dispose of the old oil according to local regulations.

1.5.3 Oil mist filter

(valid for HLT 560)

1.5.3.1 Check and empty the oil mist filter and clean the oil
tray.

(if oil is refilled to UNO 005 A)

Procedure:
• Switch off mains switch
• Unplug mains plug
• Loosen the cover on the left and right with size 8 Allan key.

33
 • Loosen earth cable.
• Lift cover.
• Visual inspection at transparent plastic cylinder (→ Fig. 1-18).
• If there is oil in the plastic cylinder, unscrew the plastic cylinder by hand in
anticlockwise direction and dispose of the collected oil according to local
regulations.
• Screw the plastic cylinder back in.
• Clean the oil tray with a cloth lightly dampened with alcohol.
• Connect the earth cable.
• Replace the cover and lock with an Allan key.
• Restart the HLT 560 according to the operating instructions.

34
1.5.3.2 Replace the filter in the oil mist filter.

(annually)

Material required: Filter, from maintenance kit, order no. PT E01 006 -T

Procedure:
• Switch off mains switch
• Unplug mains plug
• Loosen the cover on the left and right with size 8 Allan key.
• Lift cover.
• Loosen earth cable.
• Unscrew the plastic cylinder by hand in anticlockwise direction and dispose
of the collected oil according to local regulations.
• Wipe off the filter retaining screw with a dry cloth first, then loosen by hand
and remove with filter.
• Place a spare filter on the retaining screw and remount the retaining screw
with filter.

Plastic cylinder
Kunststoffzylinder

Filter

Filter retaining screw

Filterhalteschraube

Fig. 1-18 Replace the filter in the oil mist filter.

• Screw the plastic cylinder back in.
• Connect the earth cable.
• Replace the cover and lock on the left and right with a size 8 Allan key.
• Restart the HLT 560 according to the operating instructions.

35
1.5.4 MVP 035
(valid for HLT 570)

1.5.4.1 MVP 035, replace diaphragms

(annually)

Material required: Wearable parts kit, from maintenance kit,

order no. PT E01 007 -T
Procedure:
• Switch off mains switch
• Unplug mains plug
• Loosen the cover on the left and right with size 8 Allan key.
• Lift cover.
• Loosen earth cable.
• Loosen 2 hoses (fore-vacuum and exhaust air connection) on the diaphragm
pump.
• Remove 6 screws from each of the head covers with a Allan key size 3 and
carefully position both head covers upward simultaneously with the
connecting cables.
• Remove the two sealing rings and valve plates from each head cover.
• Mark the position of the intermediate plates and remove them.
(The position will be needed for mounting later.)

Fig. 1-19 1 - Lift diaphragm 2 - Unscrew diaphragm

Note
Vorsicht
No compensating discs may be lost when removing the form diaphragms.

• Press in the form diaphragm with your thumb so that you can hold it with
your other fingers at the edge (→ Fig. 1-19/1).
• Unscrew form diaphragm from the pump housing in counterclockwise
direction (→ Fig. 1-19/2).

36
 • Clean contaminated parts and sealing surfaces with alcohol.
Don‘t use sharp-edged tools.
• Equip every new form diaphragm with the same number of compensating
discs as the old form diaphragms.
• Screw the new form diaphragms back in.
• Put the intermediate plates back on the form diaphragms in the marked
position and equip with valve plates and sealing rings.
• Place the two head covers in the right position on the intermediate plates.
• Screw the 6 screws per head cover back in and tighten them with an Allan
key size 3.
• Reconnect the fore-vacuum hose and exhaust air connection with the
diaphragm pump.
• Connect the earth cable.
• Replace the cover and lock on the left and right with a size 8 Allan key.
• Restart the HLT 570 according to the operating instructions.

1.6 SplitFlow 80
(valid for HLT 5xx)

1.6.1 Replace operating fluid reservoir

(every two years)

Material required: Operating fluid reservoir, from PT E01 006 -T or

maintenance kit, order no. PT E01 007 -T

The system for lubricating the ball bearing is filled with TL011 operating fluid when
the SplitFlow 80 is delivered. The operating fluid reservoir should be changed at
least every two years (more frequently in case of extreme stress or contaminated
processes).
The complete operating fluid reservoir must always be changed.
Enable the maintenance in the menu under set up → access control → enable
maintenance.

Procedure:
• Switch on mains switch.
• Choose Run-up → details → Vent TMP.
• Wait for the message “TMP is vented. Please switch of the leak detector”.
• Switch off mains switch.
• Unplug mains plug.
• If an external backing pump is used, disconnect the KF 25 connection from
the external backing pump.
• Carefully place the HLT 5xx backwards onto its back or left hand side when
seen from the front.

37
 Fig. 1-20 Base of the HLT 5xx

• With the PFEIFFER tool PVM40813 unscrew the cap (→ Fig. 1-20) from the
bottom.
• Lever out the operating fluid reservoir (→ Fig. 1-20) with 2 screwdrivers and
dispose of it according to local regulations.
• Insert the new operating fluid reservoir and Porex sticks
(→ operating instructions PT 0208 BEN) and remount the cap.
• Re-stand the HLT 5xx in an upright position.
• If an external backing pump is used, reconnect the KF 25 connection to the
external backing pump.
• Restart the HLT 5xx according to the operating instructions.

38
1.6.1.1 Exchange SplitFlow 80 for bearing change

(every 4 years at least, earlier in case of heavy load)

Required material: Exchange SplitFlow 80, order no. PM P04 010

Note
Vorsicht
This work must be performed at PFEIFFER VACUUM or by a service technician
trained by PFEIFFER VACUUM.

1.6.2 Valve block

(valid for HLT 5xx)

1.6.2.1 Clean screw connection with filter at the venting

connection

PT E01 006 -T or PT E01 007 -T

Procedure:
• Switch off mains switch
• Unplug mains plug

Venting filter
Belüftungsfilter

Fig. 1-21 Venting connection

39
 • Loosen the cover on the left and right with size 8 Allan key.
• Lift cover.
• Loosen earth cable.
• Loosen the hose connection on the valve block with an open-ended wrench
size 12 and pull off the hose from the nipple (→ Fig. 1-21).
• Remove the screw connection with filter with a size 17 hexagon pipe
wrench.
• Clean filter and mount on the valve block.
• Plug hose to nipple and tighten again with the screw connection.
• Connect earth cable.
• Replace the cover and lock left and right witn a size 8 Allan key.
• Restart the HLT 5xx according to the operating instructions.

1.6.2.2 Clean Pirani measuring elements P1 and P2

(every six months)

Note
Vorsicht
This work must be performed at PFEIFFER VACUUM or by a service technician
trained by PFEIFFER VACUUM.

1.6.2.3 Clean the valve block, replace seals and revise valves

(annually)

Required material: Set of seals, order no. PT 110 030 -T

Spare parts kit for valve block PT 110 040 - T
Procedure:

Note
Vorsicht
This work must be performed at PFEIFFER VACUUM or by a service technician
trained by PFEIFFER VACUUM.

1.6.3 Fan 1

1.6.3.1 Clean / replace filter mat

(weekly / annually)
see Fig. 1-20

40
1.6.4 LP 5xx

1.6.4.1 Replace capillary filter

(weekly)
see operating instructions IG 0100 BEN

1.6.4.2 Replace sinter filter

(annually, depending on ambient conditions and load)

see operating instructions IG 0100 BEN

1.6.5 Maintenance inspection

The following sections are a suggestion how to inspect periodic maintenance work.

Note
Vorsicht
Failure to observe the maintenance intervals can lead to a reduction in scope
or loss of warranty.

1.6.5.1 Weekly maintenance work

Module work to be done → chapter OK

UNO 005A Check oil level, top up See Chapter 1.5.2.1
Fan 1 Clean filter mat See Fig. 1-20
LP 5xx Replace capillary filter BG 805 268 BE

The above work was performed by:

......................................................................................................................
Date: ............................................. Signature: ....................................................................

41
1.6.5.2 Annual maintenance work

Module work to be done → chapter OK

See Chapter
UNO 005A Change oil
1.5.2.3
Clean the valve block, replace See Chapter
Valve block
seals, revise valves 1.6.2.3
Fan 1 Replace filter mat See Fig. 1-20
LP 5xx Replace sinter filter BG 805 268 BE
See Chapter
Oil mist filter Replace filter
1.5.3.2
See Chapter
MVP 035 Replace diaphragms
1.5.4.1
Replace screw connection with See Chapter
Valve block
venting filter 1.6.2.1
Clean Pirani measuring See Chapter
elements P1 and P2 1.6.2.2

The above work was performed by:

......................................................................................................................
Date: ............................................. Signature: ....................................................................

1.6.5.3 Maintenance work every 2 years

Module work to be done → chapter OK

Replace operating fluid
SplitFlow 80 reservoir See Chapter 1.6.1

The above work was performed by:

......................................................................................................................
Date: ............................................. Signature: ....................................................................

1.6.5.4 Maintenance work every 4 years

Module work to be done → chapter OK

Exchange SplitFlow 80 for See Chapter
SplitFlow 80 bearing change 1.6.1.1

The above work was performed by:

......................................................................................................................
Date: ............................................. Signature: ....................................................................

42
1.7 Replace ion source
It is possible to change the ion source with the detection system in the installed
state through the revision opening in the chassis base of the SmartTest. For
this event, lay the instrument on its side so that the revision opening is
accessible.

Note
Vorsicht
To avoid damage on the turbo pump the rotor must have come to a standstill.
Do not move the SmartTest for 4 minutes at least after switching off.

Fig. 1-22 View chassis base with revision opening (1)

43
 Required tools

Allan key size SW 4 mm

Required material
Replacement Ion source Order no.: B 8199 999EU

Notice For all disassembly work on the mass spectrometer it is

recommended to flood the mass spectrometer which simplifies
removal of the individual components.
• Loosen the lock nut of the ion source plug and pull the ion source cable out
of the ion source.

Note
Vorsicht
Attention! High connection forces of the ion source plug.

• Then loosen the 4 allan head screws of the ion source and remove the
pressure ring. Pull the ion source out of the mass spectrometer.

Note
Vorsicht
If this is not possible, use one of the allan head screws and turn it into the
threaded bore in the ion source flange. The ion source is then pressed off the
mass spectrometer.

Fig. 1-23 Ion source

44
 1

Fig. 1-24 Assembly of ion source

Item Description Item Description

1 4 x Screw M5 x 20 4 Flat gasket 41.5 x 55 0.5
2 Pressure ring ion source 5 Guide pin
3 Ion source 6 Mass spectrometer housing

• Insert the replacement ion source Fig. 1-24/3 with a new flat gasket. Alcohol
can be used to clean the flat gasket to remove adhering talcum residue.
• Fix the flat gasket on the ion source and insert the ion source in the mass
spectrometer. The ion source can only be inserted in a defined position
specified by the guide pin in the mass spectrometer.

45
 • Finally remount the pressure ring and tighten the fastening screws with 8.5
Nm. The raised groove in the pressure ring must be mounted on the ion
source flange.
• Reinsert the ion source plug and lock the plug with the lock nut.

46
47
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