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Phoxiity tffect
high so i n ut
EBL has the
enerally
i m i t e l L y the
The Theovehcal eutim is
a n d a u s t Y a t e
the P R
eluctron Ac«t terinq in
yeioukdon.
Knew that
A tL
t A
iven : toClcm
I 0A
A Somm
o o 10
t
t so XIO sec
Time taken to QSnm t h i k OwIa ds
SaS min
Snn
ISnm
a.S mm
mn
OY PorabC Yeuth,
thiencn =
4Snm iS nm 3 0 n m
-
oo n
A mi n
A W3 )min
A O.OSS6 min
For Loonm Thick n e
Une ay
S'nmO:
tusnmnmlmin)
t 2-Smin
aSnm Kt,
2
22S nm
36 12.Smin
iir
( en
iim t mak
Alitiv S
fm
etahrot d fim aoo um |hY
-
Sm et h Tete îy mask
aop m/hr
etch rk Jsmask
eth e d nmask = A m nr
etth y t (fm
ftin to uhstretialctivitu
Ss
a09 Am |hY
io AumhY
Sps 320
o.4Sx SoISnm
S
The hicrnes d S
Sutostrat Conume
3 5 nm
( eduad Ly
Given fhe neay mensron s
we knoc fhat
Sin
r o maqrmtic fuY C K
F oill be e a a d fechsy
6 Cech
Puanhtative hang FE eucd
93.1'
Fm is duced L l q9.40137s7
Elasi
mit
Strain
A klastie omit poimt
C w qilAstawfaint
ul Gm stye pornt
S oL
2 m
So Lumn
fveo am
Al= a l t a l 2
E Ay
F F F
Kjo 2 5 x Lo
t x
oxid2s
/o7
AL I 2 x 10 m
a i m u m shain
3
31Soo Nm
R s o luuttn: èan bvi ne
The minimum shmuluus tht
iSCRAe
h h e utrut
a datetblu, change in
Psotion
o.2mV
han in olp ifv
o2mVN
imV
2.S nm