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Satyendra Kumar
Department of Electronics and Communication Engineering
Jaypee Institute of Information Technology
Noida, India
satyendra.kumar@jiit.ac.in
Abstract—This article investigates the DC, analog/radio fre- ature dependency, immunity towards short channel effects
quency, and linearity performance parameters of various dual- (SCEs), lower leakage current [1–6]. However, due to in-
material stacked gate oxide hetero-junction tunnel field-effect adequate interband tunneling, the ON-state current of TFET
transistor (DMSGO-HTFET) structures using III-V materials
on the source and silicon in the channel and drain regions, is lower than MOSFET, which prohibits its use for energy-
respectively, forming a hetero-junction at the source-channel efficient switching and analog/radio frequency applications
junction. In addition, a stacked gate oxide (SiO2 +Hf O2 ) with [7,8]. To enhance the ON-state current, various device struc-
workfunction engineering is used to improve the ON-state current tures have been explored by the researchers, such as work-
(ION ) of the device. In this regard, In0.53 Ga0.47 As-Si hetero- function engineering [7-9], gate dielectric engineering [10,11],
junction based DMSGO-HTFET, GaSb-Si hetero-junction based
DMSGO-HTFET are analyzed using technology-computer aided electrically doped TFET [12,13], stacked gate oxide structure
design (TCAD) simulations, and the performance is compared [14,15], L-shaped TFET [16], pocket doped TFET [17], di-
with conventional all-Si DMSGO-TFET in terms of transfer electric pocket TFET [18], extended source TFET [19], gate
characteristics, output characteristics, transconductance (gm ), to source overlap [20]. These methods focused primarily on
cut-off frequency (fT ), gain-bandwidth product (GBP), transcon- tunneling width variation and a higher lateral electric field at
ductance frequency product (TFP), transit time (τ ), and linearity
performance parameters such as higher-order transconductance the source-channel interface to improve the tunneling current
(gm2 , gm3 ), second and third-order voltage intercept points and analog/radio frequency performance of the conventional
(VIP2, VIP3), third-order input-interception point (IIP3), and all-silicon TFET. However, due to their large bandgap (Eg )
inter-modulation-distortion (IMD3) are analyzed. This compara- and effective mass, conventional all-silicon TFET exhibits
tive analysis reveals that GaSb-Si hetero-junction based DMSGO- a lower inter-band tunneling rate [21]. Therefore, hetero-
HTFET exhibits 294 % and 586 % increase in ION , 169 % and
543 % increase in gm , 162 % and 532 % increase in fT , 162 % junction with low bandgap material in the source is a better
and 533 % increase in GBP as compared to In0.53 Ga0.47 As/Si choice for improving the ON-state current. Table II shows
hetero-junction based DMSGO-HTFET and conventional all- the lattice constants and low bandgap materials used for
Si DMSGO-TFET respectively. The average subthreshold swing hetero-junction formation in silicon channel-TFET [24]. In this
(25.7 mV/decade) and also major improvements in linearity regard, various III-V hetero-junction structures based on low
performance parameters which ensures the proposed device is
suitable for low power switching and radio frequency applica- bandgap materials such as Ge, InAs, InGaAs, InP, GaSb, and
tions. GaAsSb in the source region have been investigated [22-30].
keywords—Dual material, Stack gate oxide, Low band gap, Furthermore, In0.53 Ga0.47 As-Si and GaSb-Si hetero TFETs
Hetero-junction, Workfunction can be fabricated using the approach mentioned in [24, 30,
32].
I. I NTRODUCTION The main limitation of III-V material-based TFETs is that
The tunnel field-effect transistors (TFETs) have attracted their OFF-state current is higher than the conventional all-Si-
much attention due to significantly lower sub-threshold swing based TFETs [3]. Hence, device structural engineering, along
(SS) lower than 60 mV/decade compared to conventional with source material, has been used to improve the ON-state
metal–oxide–semiconductor FETs (MOSFETs), lower temper- current, subthreshold swing and decrease the IOF F of the de-
vice. In literature, the DC and radio frequency performance of
In0.53 Ga0.47 As-Si and GaSb-Si hetero-junction VTFETs are
investigated [17]. The stacked gate oxide with work function
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engineering enhances the lateral electric field and improves labelled as tunnelling gate (M1 ), control gate (M2 ), and
the DC and RF performance of the TFET [15]. Therefore, in auxiliary gate (M3 = M1 ) with respective segment lengths (L1 ,
this work, the DC characteristics, analog/radio frequency, and L2 , L3 ) and segment work-functions (ϕ1 , ϕ2 , ϕ3 ). The control
linearity performance of III-V / Si hetero-junction DMSGO- gate work-function (ϕ2 ) is taken as 4.4 eV which corresponds
HTFET structures are compared with all-Si DMSGO-TFET to molybdenum (Mo) material (4.36 eV - 4.95 eV). Tunneling
and recent literature using the TCAD tool. gate work-function (ϕ1 ) and auxiliary gate work-function (ϕ3 )
values taken as 4.0 eV which corresponds to aluminum (Al)
(4.0 eV - 4.26 eV) [8].
A. Simulation models
The performance of the proposed III-V / Si DMSGO-
HTFET is analyzed using TCAD simulations. For this, the
non-local BTBT model, which utilizes Wentzel-Kramers-
Brillouin (WKB) method is considered, for measuring tun-
neling probability across the junction. TAT.NLDEPTH model
is used to improve the results because lattice and thermal co-
efficient mismatch between two different materials can cause
defects in the hetero-junction. The Shockley-Read-Hall model
is enabled for taking into account the recombination effect.
(a) (b)
The bandgap narrowing (BGN) model is used to account for
(a)
heavily doped concentrations in source and drain regions.
The proposed III-V / Si DMSGO-HTFET can be fabricated
using techniques similar to those reported earlier [9], [19].
Fig. 2(a)-(i) illustrates the fabrication process flow for the
proposed device. Fig. 2(a) depicts the formation of a thin
intrinsic silicon film, while Fig. 2(b) shows the p-i-n structure
formation using ion implantation. Then, SiO2 can be grown
on the p-i-n structure by oxidation process as illustrated in
Fig. 2(c). Then, Hf O2 layer is deposited, using atomic layer
deposition (ALD), as illustrated in Fig. 2(d). After that, as
(c) shown in Fig. 2(e), the creation of the control gate can be done
Fig. 1: 2D structural view of (a) D1 [15], (b) D2 (c) D3 using masking and metallization of Mo material. Additionally,
auxiliary and tunnel gates can also be metalized using the
This paper is organized as follows: The structural, simula- self-aligned symmetrical spacer method, as shown in Fig. 2(f).
tion details and process flow are discussed in Section 2. Impact Next, selective etching can be done for electrode formation, as
of III-V /Si hetero-structure on DC, analog/radio frequency indicated in Fig. 2(g). Similarly, the back gate can be formed,
and linearity performance parameters are presented in section as illustrated in Fig. 2(h). Lastly, Fig. 2(i) illustrates the
3. Lastly, the main findings of this work are concluded in metallization of source and drain contacts using Mo material
Section 4. as it provides the work-function ranges from 4.36 eV to 4.95
eV.
II. D EVICE STRUCTURE , PARAMETERS , SIMULATION
STRATEGY AND PROCESS FLOW III. R ESULTS AND DISCUSSION
The Proposed hetero-junction TFET structure uses III-V This section investigates the DC characteristics, ana-
semiconductors in the source region and silicon in the chan- log/radio frequency, and linearity performance parameters of
nel and drain regions respectively, forming hetero-junction D1, D2 and D3.
at the source-channel junction. Fig. 1(a)-(c) illustrates the
2D structural views of all-Si DMSGO-TFET (say, D1), A. DC characteristics
In0.53 Ga0.47 As-Si hetero-junction DMSGO-HTFET (say, Fig. 3(a) and Fig. 3(b) illustrates the OFF state condition
D2), and GaSb-Si based hetero-junction DMSGO-HTFET (i.e. VGS = 0V) and ON-state condition (VGS = 1.0 V, and
(say, D3) respectively. Table I presents the list of design VDS = 0.5 V) band diagrams of the three devices D1, D2, and
parameters and dimensions used in the simulation. The source D3 respectively. Fig. 3(a) clearly illustrates that, in the OFF
region doping (NA ) of 1×1020 cm−3 , the drain region doping state tunneling of electrons does not occur from the valence
(ND ) of 5×1018 cm−3 is considered. The length of the stack band of the source to the conduction band of the channel
gate (LG ) is considered 50 nm with SiO2 layer thickness of due to the nonalignment of energy bands in D1, D2, and
(0.8 nm) and Hf O2 oxide layer thickness of (1.2 nm) [15]. D3. However, in the ON state, applied positive VGS decreases
Further, the entire gate electrode is split into three segments the tunneling width, allowing interband tunneling as illustrated
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TABLE I: List of device parameters used in simulation
Parameters Si InGaAs-Si GaSb-Si
Gate Length (LG ) 50 nm 50 nm 50 nm
SiO2 thickness (TSiO2 ) 0.8 nm 0.8 nm 0.8 nm
Hf O2 thickness (THf O2 ) 1.2 nm 1.2 nm 1.2 nm
Silicon Film Thickness (Tsi ) 10 nm 10 nm 10 nm
Channel doping (Nch ) 1×1017 cm−3 1×1017 cm−3 1×1017 cm−3
Source doping(p type) (NS ) 1×1020 cm−3 1×1020 cm−3 1×1020 cm−3
Drain doping(n type) (ND ) 5×1018 cm−3 5×1018 cm−3 5×1018 cm−3
Hf O2 dielectric constant (K) 25 25 25
Tunneling gate Length (L1 ) 10 nm 10 nm 10 nm
Control gate Length (L2 ) 25 nm 25 nm 25 nm
Auxiliary gate Length (L3 ) 15 nm 15 nm 15 nm
Tunneling gate work-function (ϕ1 ) 4.0 eV 4.0 eV 4.0 eV
Control gate work-function (ϕ2 ) 4.4 eV 4.4 eV 4.4 eV
Auxiliary gate work-function (ϕ3 ) 4.0 eV 4.0 eV 4.0 eV
Tunneling Mass of Hole in GaSb - - 0.4000
Tunneling Mass of Electron in GaSb - - 0.0410
Tunneling Mass of Hole in In0.53 Ga0.47 As - 0.457 -
Tunneling Mass of Electron in In0.53 Ga0.47 As - 0.0410 -
Tunneling Mass of hole in Silicon 0.24m0 0.24m0 0.24m0
Tunneling Mass of Electron in Silicon 0.20m0 0.20m0 0.20m0
TABLE II: Band gap and Lattice constant of III-V and IV mass of electrons in the source region of D2 and D3. Fig.
materials for hetero-junction formation with silicon at 300K 3(d) illustrates the IDS -VDS characteristics plot at VGS = 0.5
[24] V. From the figure, it has been noted that the drain current
Material Lattice constant Bandgap IDS rises initially and then saturates due to velocity saturation
as VDS increases from 0 to 0.4 V. The tunneling current
Si 5.43 A 1.12 eV
Ge 5.65 A 0.67 eV
does not change significantly beyond VDS = 0.4 V onwards,
In0.53 Ga0.47 As 5.87 A 0.74 eV hence the drain current remains constant. From the IDS -VGS
InAs 6.05 A 0.37 eV characteristics shown in Fig. 3(c) various device parameters
GaSb 6.09 A 0.69 eV
such as ION , ION /IOF F , SSavg and VT for the devices D1,
D2 and D3 are extracted and listed in Table III and plotted in
Fig 4. (a) and Fig. 4(b). The results in Fig 4. (a), Fig. 4(b)
in Fig. 3(b). The results also indicate that GaSb / Si hetero- and Table III shows that device D3 shows better performance
junction significantly decreases the tunneling barrier width at than D1 and D2 at the same biasing conditions.
the source junction resulting in an improved drain current after
a certain positive VGS . B. Analog/radio frequency Performance improvement
The inter-band tunneling probability of the carrier (TW KB ) This section investigates the analog/radio frequency (RF)
at the tunneling barrier is computed using Wentzel-Kramer- performance parameters such as the gm , parasitic capacitance
Brillouin (WKB) approximation [3,19]. (Cgs , Cgd ), fT , GBP, τ , and TFP of the devices D1, D2 and
√ q D3. Fig. 5(a) illustrates the gm variation with VGS for D1, D2
4λ 2m∗ Eg 3 and D3 respectively. The gm reflects the gain of the device,
TW KB ∝ exp − (1)
3qh(Eg + ∆ϕ) a larger gm is useful for analog/radio frequency applications.
Moreover, gm plays a crucial role in attaining higher fT and
Where m∗ is the effective mass of an electron, q represents GBP values. The results also illustrate that D3 device attains
the electron charge, h represents Plank’s constant, Eg is the larger value of gm ( 1.38 mS/µm), whereas at the same biasing
effective bandgap, λ represents the tunneling width and ∆ϕ conditions D2 and D1 shows 0.51 mS/µm and 0.21 mS/µm
represents the energy overlap window where tunneling occurs. respectively.
From this approximation, it can be seen that, to increase the The Cgd and Cgs are also crucial analog/radio frequency
tunneling probability the band gap (Eg ), the effective mass performance evaluation parameters for any FET. Fig. 5(b)
(m*) of the carrier, and the tunneling barrier width (λ) should and (c) illustrates the comparative plots of the Cgs and Cgd
be minimized. Where Eg and m* are material-specific, λ is respectively, for D1, D2, and D3 devices. The above results
influenced by other factors such as device geometry, doping shows that the magnitude of Cgs is smaller than Cgd for all the
profiles, and gate capacitance. three devices D1, D2, and D3. Moreover, Cgd variation with
The IDS -VGS and IDS -VDS characteristics of the three gate voltage is negligible in all the three devices, whereas D3
devices D1, D2 and D3 are compared in Fig. 3(c) and Fig. has higher Cgs than D1 and D3.
3(d) respectively. Fig. 3(c) shows the drain current of D2 and The cut-off frequency (fT ) is considered as one of the
D3 devices are higher compared to D1 due to lower effective crucial parameters for the RF performance assessment of the
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(a)
(f) 1.5
CB DMSGO-HTFET
OFF state
1.5
CB
DMSGO-HTFET ON state
VGS = 1.0 V,
1.0 VGS = 0 V, 1.0
Si Si
VDS = 0.5 V VDS = 0.5 V
InGaAs-Si InGaAs-Si
Energy (eV)
0.5 GaSb-Si 0.5
GaSb-Si
Energy (eV)
-
0.0 0.0 e Tunneling
VB VB
-
e Tunneling
-0.5 -0.5
-1.0 -1.0
(g) -2.0
0.00 0.02
CHANNEL
(a) (b)
-3
10 9.0 0.30
DMSGO-HTFET
(A/µm)
V = 0.5 V
(µA/µm)
GS
(µA/µm)
-5
10 VDS = 0.5V 7.5 0.25
(c) 10
-7
6.0 0.20
DS
DS
DS
-9 Si
Drain current, I
10
Drain current, I
Drain current, I
InGaAs-Si 4.5 0.15
(h) 10
-11 GaSb-Si
Si
InGaAs-Si 0.10
3.0
-13
10 GaSb-Si
1.5 0.05
-15
10
0.00
-17 0.0
10
0.0 0.2 0.4 0.6 0.8 1.0 0.0 0.2 0.4 0.6 0.8 1.0
(d) (c)
(d)
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-3 14
10 10
1.80 0.24
DM SGO-HTFET VDS = 0.5 V DMSGO-HTFET
DMSGO-HTFET
(mS)
0.22
I VGS = 1.0 V 1.50
ON V = 0.5 V V = 0.5 V
Capacitance, Cgs(fF)
DS DS
m
I /I 0.20
Transconductance, g
ON OFF 1.20 Si
(A/µm)
OFF
Si-GaSb 0.18
0.90
I
Si-InGaAs
-4
/
13
10 10
0.16
ON
ON
Si
0.60
I
0.14 Si-GaSb
I
0.30 Si-InGaAs
0.12
0.00
0.10
(a)
0.0 0.2 0.4 0.6 0.8 1.0 1.2 0.0 0.2 0.4 0.6 0.8 1.0 1.2
-5 12
10 10 Gate Voltage, V (V) Gate Voltage, V (V)
GS GS
Si InGaAs-Si GaSb-Si
(a) (b)
0.55
50
V 3.0 100
T
DMSGO-HTFET DMSGO-HTFET
0.50
Si
SS
80 Si
Capacitance, Cgd(fF)
Si-GaSb
T
Threshold Voltage, ( V
0.45 Si-GaSb
Si-InGaAs
40 2.0
Si-InGaAs
(GH )
60
Z
0.40
1.5
35 V = 0.5 V
T
40 DS
0.35
f
1.0
VDS = 0.5V
30
0.30 20
0.5
25
0.25
0
0.0
(b) 0.0 0.2 0.4 0.6 0.8 1.0 1.2 0.0 0.2 0.4 0.6 0.8 1.0 1.2
0.20 20
Gate Voltage, V (V) Gate Voltage, V (V)
Si InGaAs-Si GaSb-Si GS GS
(c)
(d)
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TABLE III: Comparison of DC, analog/RF parameters
Parameters Si (This Work∗ ) InGaAs-Si (This Work∗ ) GaSb-Si (This Work∗ ) Ref(17) Ref(16) Ref (11)
ION (A/µm) 4.8×10−5 8.34×10−5 3.29×10−4 2.06×10−5 1.9×10−6 1.85×10−5
IOF F (A/µm) 1.46×10−17 3.52×10−17 1.84 ×10−17 2.76×10−17 2×10−17 1.26 ×10−16
ION /IOF F 3.28×1012 2.37×1012 1.79 ×1013 7.5×1011 9.5×1010 1.46 ×1011
VT H (V) 0.45 0.47 0.25 0.31 0.65 0.7
SSavg (mV /decade) 45.3 49.7 25.7 26 79.8 40.44
gm (s) 2.1×10−4 5.13×10−4 1.38×10−3 66×10−6 7 ×10−6 7.4×10−5
fT (GHz) 13.2 31.8 83.6 46 0.7 0.17
GBP (GHz) 1.38 3.33 8.74 7 0.4 0.16
TFP (GHz) 59.1 196 350 550 - 500
10 450 4 15
DMSGO-HTFET VDS = 0.5 V
DMSGO-HTFET DMSGO-HTFET
DMSGO-HTFET
VDS = 0.5 V VDS = 0.5 V 10
400 Si VDS = 0.5 V
3
Si 5
8 Si InGaAs-Si
350 InGaAS-Si
(GHZ/V)
0
InGaAs-Si GaSb-Si 2 GaSb-Si
(mA/V )
(mA/V )
(GHZ)
3
2
300 -5
GaSb-Si
6
250 1 -10 Si
m2
m3
-15 InGaAS-Si
200
GBP
g
0 GaSb-Si
4 -20
TFP
150
-25
-1
100 -30
2
50 -2 -35
0.0 0.2 0.4 0.6 0.8 1.0 1.2 0.0 0.2 0.4 0.6 0.8 1.0 1.2
0.0 0.2 0.4 0.6 0.8 1.0 1.2 0.0 0.2 0.4 0.6 0.8 1.0 1.2 (a) (b)
2 Si 4
80 6
10
DMSGO-HTFET InGaAS-Si
DMSGO-HTFET
VDS = 0.5 V 4
Si
0 GaSb-Si
10 InGaAS-Si
)
VDS = 0.5 V 3
VIP3 (V)
VIP2 (V)
2
-1
(S )
GaSb-Si
-2 Si
(V
60 10 0
Si
Transit time,
InGaAs-Si 2
TGF = gm/IDS
-2
-4
InGaAs-Si 10
GaSb-Si -4
40 GaSb-Si 10
-6 1
-6
-8 -8
10
0
-10
-10 0.0 0.2 0.4 0.6 0.8 1.0 1.2 0.0 0.2 0.4 0.6 0.8 1.0 1.2
20 10
Gate Voltage, V (V) Gate Voltage, V (V)
GS GS
-12
10
(c) (d)
-14
0 10
50 15
0.2 0.4 0.6 0.8 1.0 1.2 0.0 0.2 0.4 0.6 0.8 1.0 1.2 DMSGO-HTFET DMSGO-HTFET
IIP3 (dBm)
-100 -30
Si Si
Fig. 6: (a) Comparative GBP - VGS variation (b) TFP - VGS -150
InGaAS-Si
GaSb-Si
-45
InGaAS-Si
GaSb-Si
variation (c) TGF - VGS variation (d) fT - VGS variation for -200 -60
-300 -90
0.0 0.2 0.4 0.6 0.8 1.0 1.2 0.0 0.2 0.4 0.6 0.8 1.0 1.2
(e) (f)
higher than the other two structures indicating better linearity
and minimum distortion at lower VGS . IMD3 originates from
the non-linearity characteristics of IDS -VGS and seems to be a
Fig. 7: comparision of (a) gm2 - VGS variation (b) gm3 - VGS
distorting signal in wireless communication systems. Devices
variation (c) VIP2 variation with VGS (d) VIP3 variation with
with lower IMD3 values can have the ability to tolerate higher
VGS (e) IMD3 variation with VGS (f) IIP3 variation with VGS
signal distortion [31] . Fig. 7(e) shows the comparative IMD3
for D1, D2, and D3 at room temperature.
variation with VGS at VDS = 0.5 V. Further, IMD3 of D1 is
noted to be the smallest, indicating that the intermodulation-
distortion performance of D1 is the best of the above devices.
IV. C ONLUSION
The higher IIP3 value shows the device is more linear. Fig.
7(f) shows the comparative IIP3 variation with VGS at VDS In this work, the DC characteristics, analog / radio fre-
= 0.5 V. It has been observed that the IIP3 of D3 is higher, quency, and linearity performance of III-V / Si based hetero-
which indicates that D3 is more linear than D2 and D1. junction TFET structures such as, GaSb/Si based hetero-
335
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