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The plasma industry uses process power over a wide range of frequencies: from DC to several gigahertz. A variety of methods
are used to couple the process power into the plasma load, that is, to transform the impedance of the plasma chamber to meet
the requirements of the power supply.
A plasma can be electrically represented as a diode, a resistor, and a capacitor Most AC generators are designed
in parallel, as shown in Figure 1. to operate into a 50 Ω load because
that is the standard the industry
has settled on for measuring
and transferring high-frequency
electrical power. The function of
an impedance matching network,
then, is to transform the resistive
and capacitive characteristics of
the plasma to 50 Ω, thus matching
the load impedance to the AC
generator’s impedance.
below 1 MHz
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If the generator requires a load Forward Power, Reflected Power, When using this type of
with a 50 Ω impedance and the Load Power instrumentation, it is critical to
actual load is 100 Ω, a transformer Forward power is the amount optimize the product of the voltage
with a 1.41:1 step-up voltage ratio of power that the generator is and current so that it comes as close
is required. Thus, the impedance producing and is trying to send as possible to the actual power that
transformation would be 1.412 =2, into the load. The reflected power is being displayed. This minimizes
and since this is a step-up is the amount of power that is the phase angle of the voltage and
transformer, we now divide the load “bounced back” from the load. current, ensuring that the maximum
impedance by the transformation Reflected power results when the possible amount of energy is being
ratio to get the input impedance load impedance is not matched to transferred to the load.
that the generator sees: the generator’s requirements. Load
100/2=50 Ω power is the amount of power that
is actually delivered to the load; in Impedance Matching
Note that transformer impedance most cases, this is accepted as being Networks (Tuners)
matching only matches the “real” equal to the forward power minus For applications above 1 MHz,
part of the impedance. If there the reflected power. an impedance matching network,
is a large amount of reactance in or tuner, is needed. The primary
the load, a transformer will not Some generators accurately measure devices used in constructing an
eliminate these reactive components. the forward and reflected power. effective impedance matching
In fact, a transformer may When attempting to match the network are capacitors and
exaggerate the reactive portion of impedances with these generators, inductors.
the load impedance. This reactive the amount of reflected power
component results in power that is should be minimized. Depending Series Elements
reflected to the generator. on the generator, this may be Elements are in series when one
accomplished automatically or by end of the subject device is
Generators used with impedance manually selecting the appropriate electrically tied to the next device.
matching transformers must be transformer ratio. Current must go through the first
more robust than other types of device to get to the next device.
generators because they must Other generators display the
tolerate any reflected power. If the output power, voltage, and current. Shunt Elements
load impedance does not match The mathematical calculation for Elements are in parallel (shunt)
the characteristic impedance of the power is: when both ends of the subject
generator, power is reflected from P=VxIxcos(θ) device are electrically tied to the
the load back to the generator, P=power next device. Current reaches both
where it causes higher stresses V=voltage devices at the same time.
on the generator components. I=current
cos(θ)=cosine of the phase angle In Figure 3, we see that capacitor
between the voltage and current A is in series with inductor B, and
capacitor C is in shunt (parallel)
with inductor D.
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advanc e d e n e r g y
+jX
0 Resistance ∞
A B
-jX
C
Smith ® Charts to +∞
Calculating the values of the devices needed to build an impedance-matching
network requires an understanding of the characteristic impedance of the
generator and the load impedance. The plasma can be modeled as having an +jX
Reactance
In actual design, other factors, such as the power limitations of the components -jX
and the effects of the components’ packaging, must also be understood and
considered. However, we will focus on impedance during this discussion because
it is the fundamental parameter to understand. to ∞
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Figure 6 is similar to Figure 5, but +jX points on the chart are multiplied
with logarithmic scaling on the X by the value of that impedance, and
and Y axes. calculations are made based on the
Reactance
new reference point values.
to +∞ 0 Resistance ∞
Inductors=
Positive Values
+jX
+jX
-jX
Reactance
Resistance to +∞
0 0 ∞
Forms a Smith® Chart
Figure 6. Logarithmic X-Y reveals the purpose of each line of Figure 9. Specific locations on the
coordinate system the chart. The straight line running Smith chart determine device types
horizontally represents the real and values.
Now, if we bend around the resistance of the circuit. This line
endpoints (infinity symbols) of has remained unchanged from the By examining Figure 9, we see that:
the X-Y coordinate system as shown original X-Y coordinate system; • Because capacitors have negative
in Figure 7, we see that it forms a only the 0 to +∞ is shown. This impedance values on the impedance
Smith chart (Figure 8). means that the circles (which are chart, they are represented below the
sometimes referred to as constant center line.
+jX to +∞ resistance circles) that cross the center • Because inductors have positive
line represent the constant, “real” impedance values, they are
resistance of the circuit. represented above the center line.
Reactance
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advanc e d e n e r g y
The admittance chart is a mirror Admittance, as mentioned in AE® Using an impedance chart implies
image of the impedance chart. white paper Introducing Power Supplies the use of series devices. Figure 12
Admittance is the reciprocal of and Plasma Systems, represents the shows that, on an impedance chart,
impedance, and it is measured in ease of current flow in a circuit. moving in a clockwise direction
1
siemens. Because of the reciprocal Admittance = along the real axis tells us that we
impedance
relationship of these two charts, the must add a series inductor. Moving
signs for the “ j” values are opposite. So, for example, if a circuit has 50 Ω counterclockwise tells us to add a
of impedance, its admittance is: series capacitor.
1
Note that the newer term “siemens” Admittance = = 0.02 S
50 Ω
has replaced “mhos” as the IEEE- +jX
Add Series
preferred unit of measurement By using the Smith chart, we can Inductor
for admittance. determine what type of device is
needed for a particular part of the 0 ∞
When designing circuits, it is impedance matching circuit, and
convenient to overlay the impedance what the value of that device must Add Series
Capacitor -jX
chart and the admittance chart as be. We learn this by starting with
shown in Figure 11. As you can see, the load impedance, and translating
when you are working with paper, it on the chart until we reach the Figure 12. Moving around the
the overlain charts are very busy optimum impedance point. For our constant resistance circles on an
and hard to work with. Sometimes example, the optimum impedance impedance Smith® chart specifies
transparencies are used so that the point is 50 Ω because the output what type of series device to add
required information can easily be circuits of most generators for
transferred between the impedance plasma systems are designed to Remember that these circular
and the admittance charts. Some deliver power into 50 Ω loads. lines were vertical lines on an X-Y
computer programs facilitate the coordinate system. Moving up on
transferring of information easily as Impedance and admittance charts an X-Y graph is the same as adding
well. Later in this paper, we use an are used to calculate the component inductance, while moving down is
impedance chart with just the unit values needed for devices in the same as adding capacitance.
circle from the admittance chart different parts of the impedance These lines have been converted to
drawn in for clarity. matching circuit. The impedance circles, so now the movement has
chart provides device values for been translated in clockwise and
elements placed in series in the counterclockwise rotation.
circuit, while the admittance chart
provides device values for shunt To illustrate how this occurs, let’s
(parallel) elements. look at two examples. Figure 13
shows point A where the load
impedance value is 10-j20 Ω. If we
wanted to make this a pure, real
resistance of 10 Ω, we could cancel
out the -j20 Ω of capacitance with
+j20 Ω of inductance.
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+j20
10 Ω ∞ 0
0 ∞
Add Shunt
A Inductor +jb
-jB
A
Figure 13. Example of how adding a series inductor results in clockwise
movement of the chart
∞ C 0
Figure 14 starts at point B where the load impedance is 10+j20 Ω. If we add
a series capacitor of -j20 Ω, the resulting impedance would be 10+j0 Ω.
+j20
+jB
Yin =20+j0 mS
0 ∞
10 Ω
+j40 mS
A
-j20
20-j40 mS
Zin=10+j0 Ω
-j20 Ω Figure 16. Example of how adding a
∞ C
0
Impedance
B Matching
Network
Actual
+jB Load
10-j30 Ω
Yin=20+j0 mS
+j40 mS
of 20+j0 mS.
10-j30 Ω 50 Ω
Figure 19. You want to make the load impedance of the plasma chamber
look like a pure 50 Ω load.
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In Figure 20, we start on an impedance chart from point A (10-j30). Now, we can switch to the
This chart has the unit circle for an admittance chart dotted in. Ideally, we admittance chart. If we were to
would show an entire admittance chart overlying the impedance chart. To overlay the two charts (impedance
minimize confusion, we will just show the unit circle of the admittance chart. and admittance), we could stick
The unit circle is important because it travels through the 20 mS point a pin through the top one and
(50 Ω point) on the charts. find the corresponding equivalent
point on the lower chart. How is
We are interested in the distance between the load impedance, point A, and this possible? Remember that the
the admittance unit circle. You may note that there are two intersecting points. impedance is a complex number;
Both of these points are valid to use; the ensuing calculations would result in a at point B on the impedance chart,
matching network that worked fine for this particular load impedance. However, it is 10+j20. The admittance is the
we will use the farthest point; it is the one that is most commonly used for reciprocal of the impedance. Take
plasma impedance matching, because it allows for a wider tuning range. This the reciprocal of the impedance, and
brings us to point B. Because we are moving clockwise on the impedance chart, then multiply by the conjugate over
we know that we must use a series inductor with this reactive value. The total the conjugate (which equals 1) to
reactance is equal to 50 Ω. At 13.56 MHz, this equates to a 587 nH inductor. remove the j from the denominator:
Figure 20 also shows the equivalent circuit.
1
X (10-j20) = (10-j20)
(10+J20) 10-j20 (100+J200-j200+400)
+j20
B
= (10-j20) = 0.02 - j0.04 S = 20-j40 mS
500
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Zin=50 Ω, Yin=20 mS
+j50 Ω
(587 nH)
10-j30 Ω
40 mS
(470 pF)
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advanc e d e n e r g y
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Advanced Energy ® and AE® are trademarks of Advanced Energy Industries, Inc. • Smith® is a trademark of Analog Instruments Company, New Providence, NJ 07974.
The Smith® charts shown are produced under a copyright license from Analog Instruments Company, New Providesnce, New Jersey 07974.