tions of the contents thereof, are forbidden without express authority.

Offen-
case of the grant of a patent or the registration of a utility model of design.
Copying of this document, and giving it to others and use of communica-
ders are liable to the payment of damages. All rights are reserved in the
R1
1 interlock 1
KL1 2 power ground 2 KL1 KL3
77020081 3 power + 3
Plasma Generator supply
EK0606-- 75260120
76020017 Ignition Sparc Stand
I II 24VDC / 13A ST1 Plasma Generator KL4 clamp
ST13 control ST2 frame
ST3 supply ST1

trigger OPT4
door switch ST3

ST9
S1 S2 KL2 KL5/6
65021056 frame
main distribution door switches

DMB
frame frame
main surge to external PC
230V 50/60 Hz absorber
76010120
F1 (5A) readout system
line filter
F2 (5A)
EK0011A1

DMB Ethernet
DMB-Master
Trigger
75060050
cooling 76070174
optics agitation fan EK0311-2 LVDS EK0310--
CCD1 CCD10

M
AD-converter CCD/ PM
client
EK0411--
J
agitation fan EK0311-2 LVDS EK0310--
S3 temp. optics CCD11 CCD18
J AD-converter CCD/ PM
Source client

77030114 75080121 PM1 PM16 LVDS

EK0603-- EK0310--
scanner control scanner
Integrator CCD/ PM
trigger out M0 client
trigger in

M
ST21 door switch
ST7 Source ON

EK0605--
ST11 temp optics

DMB PM17 PM32 LVDS

cooling

24VDC EK0603-- EK0310--

DMB

Integrator CCD/ PM
client
75160198 77020080 EK0701--
valve unit HV1A 1-40
ST1
ST5

EK0612-- HV-supply HV- PM33 PM48

DMB- distribution EK0603-- LVDS EK0310--
shutter LWL (Y2)
ST20 distribution Integrator CCD/ PM
shutter UV (Y4)
client
analytical flow UV Kanal (Y7) 77020080 EK0701--
analytical flow LWL Kanal (Y5) ST19 HV-supply HV1B HV- 41-80
EK0014B2 optional distribution PM49 PM64 LVDS
mask (Y3) ST18 EK0603-- EK0310--
System control HV-control
optional
constant flow (Y6) ST17 Integrator CCD/ PM
client
pressure switch (S5) P ST22 77020080 EK0701--
HV-supply HV2 HV-
ST30 optional distribution PM65 PM80 LVDS
EK0603-- EK0310--
instrument fan ST8 ST32
optional
ST6 Integrator CCD/ PM
65041015 client
ST12 ST2 pressure sensor
Weitergabe sowie Vervielfaeltigung dieser Unterlage, Verwertung und Mittei-

temp. instrument J U
lung ihres Inhaltes nicht gestattet, sofern nicht ausdruecklich zugestanden.

P EK0310--
LVDS
Zuwiderhandlungen verpflichten zu Schadensersatz. Alle Rechte für den

CCD/ PM
S4 EK0311-2 client
HV-supply CCD1 CCD16
AD-converter

77020081 77060506
instrument supply pump EK0312--
Fall der Patenterteilung oder GM-Eintragung vorbehalten.

76070177 line filter

F2 (2A)
optional optics +5VDC
II I
+/-12VDC
I II
24VDC / 13A 76004135
76010120
readout supply

Datum Name
gez.: 17.01.07 BEG 76004135
gepr.: 29.10.07 RAV SPECTRO LAB LAVM10
Norm: 29.10.07 TMB
geän.: 16.08.07 BEG SPECTRO ANALYTICAL INSTRUMENTS
Boschstraße 10, 47533 Kleve
29.10.07 BEG
2901647C GERMANY
Tel.: +49/(0)2821 892-0
Dateiname: 2901647C.Sch Baugruppenrevision: Blatt 1 von 1