MEMS

(Micro Electro Mechanical System)

Introduction

Sung-Hoon Choa

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 MEMS & SENSORS : THE 5 SENSES…

▪ 초소형 기술의 장점으로 응용 분야가 확대

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 스마트폰에 적용된 센서

가속도 센서, 기압 센서, 지문 센서, 자이로 센서, 지자기 센서, 홀 센서, 심박수 측
정 센서, 홍채 인식 센서, 압력 센서, 근접 센서, RGB 광 센서, LED 센서 등

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Sensors in Smartphone

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Sensors Market

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 Scale

10,000 Meter Scale 1000 meter scale

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100 meter scale 10 Meter

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1 meter 0.1 m

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0.01 meter, or 10 mm 0.001 meter, or 1 mm

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0.1 mm, or 100 micrometer 10 micrometer

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1 micrometer 0.1 micrometer

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1 micrometer

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 0.01 micrometer, or 10 nm

• The realm of molecules, DNA, proteins, and atoms.

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 Scale

• 1 mm = 1/1000 mm
• 1 nm = 1/1000 mm = 1/1,000,000 mm

• Characteristic length scale of MEMS

– 1 micrometer to 1 mm
– Special case: large distributed array.

15 mm

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Definition of MEMS

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Terminology

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MEMS scale

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NEMS and Nano technology scale

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What is MEMS ?

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 MEMS

❑ MEMS (Micro Electro Mechanical System) ?

▪ 3 Dimensional Micro Structure Device using IC fabrication tech.

100 um 50 um

Surface Micromachined MEMS Bulk Micromachined MEMS

❑ Main Characteristics
▪ Micro system device integrated with Sensor/Manipulator/Processor
▪ Motion/Light/Color/Heat/Fluid Manipulating Fuction

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Why MEMS ?

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Main material for MEMS

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MEMS is 3D

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MEMS is 3D

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 Difference between MEMS & IC

MEMS IC

Metal
Glass Electrode
Si 기판 Drain Source
Glass
Structure 3D 2D

Silicon Silicon

1~ m(poly)
Film Thickness < 1 m
1~ m(Si)
Critical Dimension > 1m nm

Aspect Ratio < 100:1 < 3:1

Topology < 100 m < 1 m

Mechanical/Optical/
Properties Electrical
Fluidic/Electrical

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 History of MEMS Device

1993 ▪ First surface micro-machined accelerometer sold (Analog Devices, ADXL50)

1992 ▪ First grating light modulator (Solgaard, Sandeljas, Bloom)

▪ MCNC starts MUMPS

1991 ▪ Polysilicon hinge (Pister, Judy, Burgett, Fearing)

1989 ▪ First lateral comb drive (Tang, Nguyen,Howe)

1988 ▪ First rotary electrostatic side drive motors (Fan, Tai, Muller)

1984 ▪ First poly silicon MEMS device (Howe, Muller)

1982 ▪ First disposable blood pressure transducer (Foxboro/ICT, Honeywell)

1977 ▪ First capacitive pressure sensor (Stanford)

1970 ▪ First silicon accelerometer demonstrated (Kulite)

1967 ▪ Invention of surface micro-machining (Nathanson, Resonant Gate Transistor)

1961 ▪ First silicon pressure sensor demonstrated (Kulite)

1958 ▪ Silicon strain gauges commercially available)

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 MEMS Market (Top 30 MEMS Manufacturers)

Thermal Inkjet

DMD

Sensors

출처: Broadview, ’05.01 27

 MEMS PLAYER

▪ MEMS 업체의 개수도 계속 증가 추세임 (국내는 없음)

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 Markets & sensors

▪ IoT 기술의 핵심은 MEMS 센서임

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 Weapon Safeguarding – Sandia National Lab.

• http://www.mdl.sandia.gov/Micromachine/

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MEMS(Video)

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Surface Micromachined Gear Chains

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Micro Air Vehicle and other DARPA Funded Efforts

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MEMS Electrostatic Actuator

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MEMS Motor

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MEMS Gear

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 Ink Jet Printer

Hewlett-Packard Photo

ink ink

Ink jet printer

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Digital Micro Mirrors (DMD)

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Towards a real Dick Tracy Watch (1990 년)

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Whole Blood Analysis at Home …

• Patient-side testing with

disposable cartridge for 11
tests
• electrochemical sensors
– potentiometric (Na, K,
Cl, urea, Ca, pH and
CO2)
– amperometric (glucose,
creatinine, oxygen)
– conductometric.
– Coagulation detection
• viscometric
endpoint
detection
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 Needle without Pain …

• Georgia Tech

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Diabetic Phone(LG Electronics)

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 Automobile MEMS Sensor

* Gyro * Accelerometer
- ABS - Air Bag
- GPS - ABS
- Stability System - Stability System
Gyro Accelerometer

* Pressure
- Manifold Pressure
- Tire Pressure
pressure Tire - Oil Pressure
pressure Gyro & Acceler.
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sensor
 But why mems for sensors?

Sensors made using MEMS are better than

their conventional counterparts because they are :

• Smaller in size
• Have lower power consumption
• More sensitive to input variations
• Cheaper due to mass production
• Less invasive than larger devices

So good things do come in small packages !!!!

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