1

FINITE-SIZE CORRECTIONS FOR 4-POINT PROBE MEASUREMENTS (rev 07Jan04)

With the probes centered on a very wide (lateral dimension d >> s ) and very thin
( thickness t << s) sample, with s the probe spacing, the resistivity is given by:

,
_

,
_

I
V
t 5324 . 4
I
V
t
) 2 ln(
For a sample of finite width and non-negligible thickness this should be multiplied by
correction factors f
1
and f
2
:
2 1 2 1
f f
I
V
t 5324 . 4 f f
I
V
t
) 2 ln(

,
_

,
_

where
f
1
= f
1
(t/s)= finite thickness correction :
f
1
= f
11
(t/s) = for an insulating
bottom boundary
f
11

1
]
1
ln( )
ln
( / )
( / )
2
2
sinh t s
sinh t s
f
1
= f
12
(t/s) = for a conducting
bottom boundary
f
12

1
]
1
ln( )
ln
cosh( / )
cosh( / )
2
2
t s
t s
in our probe: s=1.59 mm
for t<<s, f
11
1 and

_
,

_
,

ln
.
2
4 5324
2 2
t
V
I
f t
V
I
f
f
12

8
3
ln( ) 2
2
2
s
t
and

_
,

8
3
2
2
s
t
V
I
f
for t>>s, f
11
= f
12

2 2 ln( )
s
t
and

_
,

2
2
s
V
I
f
f
2
= finite width correction :
f
2
= f
2C
(d/s) = for a circular sample of diameter d
f
2
= f
2R
(a/d,d/s) = for a rectangular sample of width d and length a
for d/s >> 1, f
2C
= f
2R
1
Original references:
A. Uhlir Jr., The Bell System Technical Journal 34, 105 (1955)
F.M.Smits, The Bell System Technical Journal 37, 711-718 (1958)
More easily accessible reference:
D.K. Schroeder, Semiconductor Material and Device Characterization, Wiley 1990.
2
Source.: F.M.Smits,"Measurement of Sheet Resisitivities with the Four-Point
Probe", The Bell System Technical Journal 37, 711-718 (1958)
0.1 1 10
0.1 0.1
0.15
0.2
0.25
0.3
0.35
0.4
0.45
0.5
0.55
0.6
0.65
0.7
0.75
0.8
0.85
0.9
0.95
11
1.5
2
2.5
3
3.5
4
4.5
5
5.5
6
6.5
7
7.5
8
8.5
9
9.5
10 10
0.1 1 10
0.1 0.1
0.15
0.2
0.25
0.3
0.35
0.4
0.45
0.5
0.55
0.6
0.65
0.7
0.75
0.8
0.85
0.9
0.95
11
1.5
2
2.5
3
3.5
4
4.5
5
5.5
6
6.5
7
7.5
8
8.5
9
9.5
10 10
f
11
f
12
8 ln(2) s
2
/ 3 t
2
2 ln(2) s/t


t/s (thickness/probe spacing)
f
1
3
Source.: F.M.Smits,"Measurement of Sheet Resisitivities with the Four-Point
Probe", The Bell System Technical Journal 37, 711-718 (1958)
0 5 10 15 20 25 30 35 40
0.30
0.35
0.40
0.45
0.50
0.55
0.60
0.65
0.70
0.75
0.80
0.85
0.90
0.95
1.00
0 5 10 15 20 25 30 35 40
0.30
0.35
0.40
0.45
0.50
0.55
0.60
0.65
0.70
0.75
0.80
0.85
0.90
0.95
1.00


f
2
circle diameter d
square side d
rectangle width d, length 2d
rectangle width d, length 3d
rectangle width d, length >4d
d/s (diameter or width/probe spacing)