BMM 453 – Micro/Nano

Fabrication

Lecture - 1
Dr. Öğr. Üyesi Yavuz Nuri ERTAŞ
BS: Başkent – Biomedical Engineering

MS: Bilkent (UNAM) – Materials Science

& Nanotechnology

MS: University of California, Los Angeles

(UCLA) – Biomedical Engineering

PhD: UCLA - Biomedical Engineering

(minor: Neuroengineering)

Postdoc: UCLA
TÜBİTAK 2232 – How/Why am I here?
https://www.hurriyet.com.tr/teknoloji/turk-bilim-insani-yapay-organlari-gercege-yakinlastirdi-41618326
https://www.sabah.com.tr/kayseri/2020/09/22/ozel-turk-bilim-insani-yapay-organlari-gercege-bir-adim-daha-yaklastirdi
https://www.haberturk.com/kayseri-haberleri/81022612-ozel-turk-bilim-insani-yapay-organlari-gercege-bir-adim-daha-yaklastirdibu-calisma-il
e
Class Content

• Introduction and Fundamental concepts in micro-nano fabrication

• Thin Film Growth Mechanisms
• Diffusion, Ion Implantation Course Content: The fundamentals of Micro and
• Oxidation, Rapid Thermal Annealing nano fabrication. Micro and nano fabrication
techniques and the tools used in these techniques.
• Chemical Vapor Deposition (CVD)
The real-world applications of small-scale fabrication.
• Physical Vapor Deposition (PVD)
• Lithography-1 Course Objectives: The objectives of this course are
to give information about the fundamentals of micro
• Lithography-2
and nanofabrication, and to provide students being
• Dry Etching familiar with techniques and the principles of the
• Wet Etching tools used in these techniques, and the real life
applications of micro-nano fabrication.
• Electron-Beam Lithography
• Nanoimprint Lithography
• Packaging, Wafer Bonding
• Metrology
Thin Film Growth
Diffusion, Ion Implantation
Oxidation, Rapid Thermal Annealing
Chemical Vapor Deposition (CVD)
Physical Vapor Deposition (PVD)
Lithography
Dry Etching
Wet Etching
Electron Beam Lithography
Nanoimprint Lithography