Need for Surface Inspection/Profilometry

Electronics (IC-Packaging): Surface Height, Shape, Width, and

Defects.
Mechanical Components (Tribology): Surface Height, Shape,
Roughness and 3D parameters of mechanical engineering
components.
MEMS (Micro-Electro-Mechanical Systems): Surface Height,
Shape/ Form, Roughness and Defects.
OEMS Micro-Opto-Electro-Mechanical Systems): Surface Height,
Shape/Form, Roughness and defect.
Engineering Surfaces: Roughness, Quality Control, and Shape.
Thick/Thin films: Height, Width and Area analysis
Optical and Photonic Components: Surface Error, Shape, Width,
and Defect Analysis.
2
3D face reconstruction: Application in security systems
(face recognition), gaming, virtual reality etc

Projected
Fringe Patterns
on 3D-Object

Reconstructe
d 3D-shape

3
Biomedical Applications
􀂄Non-invasive 3D monitoring of vascular wall deformations.
􀂄Lower back deformation measurement.
􀂄Inspection of wounds.
􀂄Skin topography measurement for use in for cosmetology.

Cultural
Heritage and
art
conservation
Corrosion analysis
Fringe Projection Profilometry

Dimples on a flat surface (a)

observed by a CCD camera.

System arrangement of a typical projected fringe profilometry. 6

Fringe Projection Profilometry
Fringe Projection Geometries
 Fringe Projection Geometries

3D-Height map can be determined by:

Flow Chart
Fourier Transform Fringe Analysis (One Dimensional)
I x   I x   I x   2 I x I x  cos x 
1 2 1 2

I x   ax   bx cos  x 

 2 
 ax   bx cos  x   x 
d 
 2   2 
1 j 1
x   ( x )   j x   ( x ) 
 ax   bx e  d
 bx e
  d 
2 2
2 2
1 j x j x
 ax   bx e j ( x )
e d
 bx e  j ( x )
e d
2
2 2
1~ j x 1 ~ j x
 ax   b x e d
 b x e d

~ 2 2

Where b x  b x exp j x    
The Fourier transform gives
1~ 1 ~*
{I ( x)}  F  f x   A f   B ( f  )  B ( f  1 )
1
2 d 2 d
 Fourier Spectrum
Fourier Transform Fringe Analysis
1~ 1 ~*
F  f x   A f   B ( f  )  B ( f  1 )
1
2 d 2 d
Filter

1~ 1 ~*
F  f x   A f   B ( f  )  B ( f  1 )
1
2 d 2 d Filter

Compute Inverse Fourier Transform

~ 1 ~ j 2 x 1 j 2 x 1 j [ 2 x   ( x )]
{B ( f  1 )}  b ( x)e d  b( x)e e d  b( x)e d
j  ( x )
d 2 2 2
1 1
 b( x) cos[ d x   ( x)]  b( x) sin[ 2d x   ( x)]
2
2 2
~ ~
 Re{{B ( f  1 )}}  Im{{B ( f  1 )}}
d d
~
 Im{{B 1 )}} 
( f 
 ( x)  tan 1  d 
Phase Map ~
 Re{{B ( f  1 )}}
 d 
13
Measurement Principles of a Typical Phase-
shifting Projected Fringe Profilometry

x y

1 if  n  0,
BD  AC
tan  n  tan  0  BD  AC cot  0


 A   C d 0 cot  0
2 14
15
 Measurement Principles of a Typical Phase-
shifting Projected Fringe Profilometry

How to find the phase values?

1. Phase-shifting technique
2. Fourier Transform Technique

16
 Measurement Principles of a Typical Phase-
shifting Projected Fringe Profilometry

5-Steps Phase-shifting Technique:

• For inspected opject:
 2c   2c 6 
I 0 (c, r )  a(c, r )  b(c, r ) cos   (c, r ) I 3 (c, r )  a(c, r )  b(c, r ) cos   (c, r ) 
 d 5 
 d 
 2c 2   2c 8 
I1 (c, r )  a (c, r )  b(c, r ) cos   (c, r )  I 4 (c, r )  a(c, r )  b(c, r ) cos   ( c , r )  
 d 5   d 5
 2c 4 
I 2 (c, r )  a (c, r )  b(c, r ) cos   (c, r ) 
 d 5 

• For reference plane:

 2c 
I 0' (c, r )  a(c, r )  b(c, r ) cos   2c 6 
 d  I 3' (c, r )  a (c, r )  b(c, r ) cos  
 2c 2   d 5 
I1' (c, r )  a (c, r )  b(c, r ) cos  
 d 5  I 4' (c, r )  a(c, r )  b(c, r ) cos 
 2c 8 
 
 2c 4   d 5
I 2' (c, r )  a(c, r )  b(c, r ) cos  
 d 5 

17
 Measurement Principles of a Typical Phase-
shifting Projected Fringe Profilometry

5-Steps Phase-shifting Technique:

Inspected surface:
2c
   c , r   tan 1  I c, r sin
n
2 n
5

d  I c, r cos
n
2 n
5

2c n
I '
c , r sin 2 n
Reference plane:  tan 1 5

d  n c, r cos 2n5

I '

 (c, r )  tan 1
 I n (c, r ) sin 2n5  tan 1  n
I '
(c, r ) sin 2 n5
 I n (c, r ) cos 2 n
5 n 5
I '
cos 2 n

18
 Measurement Principles of a Typical Phase-
shifting Projected Fringe Profilometry

Fourier Transform Technique:

I x   ax   bx cos  x 
 2 
 a x   bx cos  x   x 
d 
 2   2 
1 j x   ( x )  1  j x   ( x ) 
 a x   bx e  d 
 bx e  d 
2 2
2 2
1 j x j x
 a x   bx e j ( x )
e d  bx e  j   ( x )
e d
2
2 2
1~ j x 1 ~ j x
 a x   b x e d  b x e d , 

2 2
where ~ . x 
b x   bx exp j

The Fourier transform gives

1~ 1~
{I ( x)}  F  f x   A f   B ( f  1 )  B * ( f  1 . )
2 d 2 d

19
 Measurement Principles of a Typical Phase-
shifting Projected Fringe Profilometry

Fourier Transform Technique:

1~ 1~
F  f x   A f   B ( f  1 )  B * ( f  1 )
2 d 2 d

Filter Filter

1~ 1~
F  f x   A f   B ( f  1 )  B * ( f  1 )
2 d 2 d

20
 Measurement Principles of a Typical Phase-
shifting Projected Fringe Profilometry
Fourier Transform Technique:
~ 1 1~ j 2 x 1 2
j ( x ) j d x 1 j [ 2 x   ( x )]
{B ( f  )}  b ( x)e d
 b( x )e e  b ( x )e d
d 2 2 2
1 1
 b( x) cos[ 2d x   ( x)]  b( x) sin[ 2d x   ( x)]
2 2 .
~ ~
 Re{{B ( f  1 )}}  Im{{B ( f  1 )}}
d d
Phase value is determined as ~
 Im{{B ( f  1 )}} 
 ( x)  tan 
1 d 
~
 Re{{B ( f  1 )}}
 . d 

21
 Measurement Principles of a Typical Phase-
shifting Projected Fringe Profilometry

Eexample: fringes on a flat plate:

480 480

500 500

520 520
row

row
540 540

560 560

580 580
660 680 700 720 740 660 680 700 720 740

col (a) (b) col

2.50 63

1.25 50

0.00 38

-1.25 25

-2.50 13

660 680 700 720 740 660 680 700 720 740

col col

(c) (d)
22
 Projected Fringe Profilometry for dynamic
objects inside a cavity

500
400
300
200
100
1250

250

375

500

625

750

875

250 375 500 625 750 875

(a) (b)

(a) Appearance of reconstructed fringes by holographic techniques on

a fan blade. (b) Rreconstructed 3D shape using the proposed scheme. 23
 Projected Fringe Profilometry for dynamic
objects inside a cavity
z (mm)

30
23
15
20 40 60 80 100 120
8 0
0 y (mm)

20

40

60

80

100

120

(a) x (mm) (b)

(a) Appearance of a reconstructed two-frequency pattern on a fan

blade. (b) Rreconstructed 3D shape using the proposed scheme. 24
Projected Fringe Profilometry for dynamic
objects inside a cavity

25