()

VIBRATION ANALYSIS AND

TRAJECTORY CONTROL FOR WAFER
TRANSFER ROBOT

2011 6

TP242.2

10213

681

()

2011 6

Classified Index: TP242.2

U.D.C: 681

Dissertation for the Master Degree in Engineering

VIBRATION ANALYSIS AND

TRAJECTORY CONTROL FOR WAFER
TRANSFER ROBOT

(Applied)

Candidate

Xu Guobao

Supervisor

Associate Prof. Liu Yanjie

Academic Degree Applied for

Master of Engineering

Speciality

Mechatronics Engineering

Affiliation

School of Mechatronics Engineering

Date of Defence

June, 2011

Degree-Conferring-Institution Harbin Institute of Technology

(IC)
IC
IC

(
2009ZX02012-002)

T R D-H -
MATLAB
ADAMS
/ ADAMS MATLAB

T R

-I-

Abstract
As the foundation of electronic information industry, Integrated Circuit(IC)
industry is one of the high-tech that promotes the economic development. The rapid
development of the IC manufacturing equipment industry requires the wafer transfer
robot work with high speed. This increases the robots impact on the support frame. On
the other hand, the particularity of IC production line puts forward higher requirements
on vibration abatement.
Aiming at the problem of impact on the support frame when high speed wafer
transfer robot works, according to the major project of national science and technology
key technology research and prototype development for wafer transfer robot (granted
No. 2009ZX02012-002), various factors impacting on vibration of the robot are
discussed in this thesis, and the method of reducing the vibration is proposed in terms of
the robot structure and trajectory control.
First, according to the structure and drive principle of the robot, a flexible
joint-rigid bar dynamic model is built based on D-H principle. Considering the
flexibility of harmonic drive gear and timing belt, torsion springs is added to T-axis and
R-axis. Kinematics and dynamics equations are derived, and dynamics formula is
compiled by MATLAB. A virtual prototype is created by ADAMS simulation software.
By comparing the results calculated by ADAMS and MATLAB, the accuracy of the
model is verified, and the applicability of the model is evaluated.
The effects of the robot structure and the motor movement on the vibration of the
robot are analyzed based on the model. The current structure of the robot arm is
optimized, which can be a reference for a next-generation robots processing. The
vibration of the robot is analyzed when the motor of T-axis and R-axis moves under
different motion curves. The law of vibration of the robot is summed up, which will be
the basis for the trajectory planning.
Based on vibration analysis, the trajectory planning of the robot manipulator is
finished. Three kinds of trajectory control algorithms are provided in this paper. The
vibration of the robot is discussed in the three different tracks, and the reasons of the
vibration are analyzed.
Finally, experimental system of wafer transfer robot is established, the debug
interface is finished. The conclusion of the vibration analysis and trajectory control is
verified. Experimental results show that the single motor moving according to triangular
or trapezoid acceleration curve displays the best performance; all of the three kinds of
trajectory control strategies meet the technical specifications. Compared with the
- II -

traditional trajectory control method, the impact of the robot on its supporting frame
reduces greatly when two-axis interpolation strategy is used.
Keywords: wafer transfer robot, dynamic modeling, vibration analysis, trajectory
planning

- III -

............................................................................................................................ I
Abstract ....................................................................................................................... II
1

............................................................................................................. 1

1.1 ............................................................................................................. 1
1.1.1 IC ........................................................... 1
1.1.2 ................................................................................. 2
1.2 ......................................................................................... 3
1.3 ................................................................................................. 5
1.3.1 ..................................................................... 5
1.3.2 ......................................................................... 7
1.4 ......................................................................................... 8
2 ......................................................................... 9
2.1 .................................................................................................................... 9
2.2 ............................................................................. 9
2.3 ....................................................................................... 10
2.3.1 ................................................................................................... 10
2.3.2 ....................................................................................... 11
2.4 ........................................................................................................... 13
2.4.1 ............................................................................................... 13
2.4.2 ............................................................................................... 15
2.5 ............................................................................................... 23
2.6 ........................................................................................................... 27
3 ........................................................................... 29
3.1 .................................................................................................................. 29
3.2 ................................................................................................... 29
3.3 ................................................................................... 30
3.3.1 ................................................................................................... 30
3.3.2 ............................................................................... 30
3.3.3 ............................................................................... 32
3.4 ................................................................................... 35
3.4.1 T ................................................................................. 35
3.4.2 R ................................................................................. 36
- IV -

3.5 ........................................................................................................... 37
4

......................................................................... 39

4.1 .................................................................................................................. 39
4.2 ........................................................................................... 40
4.2.1 ................................................................................................... 40
4.2.2 ................................................................................................... 42
4.3 ........................................................................................................... 45
4.3.1 ........................................................................................... 45
4.3.2 ................................................................................... 47
4.4 ........................................................................................................... 48
......................................................................................................................... 49
..................................................................................................................... 50
......................................... 53
......................................................................................................................... 54

-V-

1.1
1.1.1 IC
40
1962 RCA MOS CMOS
95%60
Intel (Gordon Moore)
18

70 64kb
0.5cm 2 14 (Integrated Circuit

IC) 90 1cm 2 3500

90 Intel
Tri-Gate IC
2011 5 17 2011
45nm 14nm
IC (
)

[1]
80
100mm 150mm 80
200mm

[2,3](YASKAWA)
(Kawasaki)
Adept [1]

()
[4] IC
IC
65nmIntelAMD 45nm 1
-1-

30nm DRAM IC
0.13m/0.18m 90nm
65nm [5]

IC 2006
2 9 [6] 16

16
IC

IC

1.1.2

[7]

R - SCARA 1-1

a) R-

b) SCARA

1-1

R -

Z Z
R T
SCARA
-2-

R -

1-2
RZ
T

CST

ZR
T

ZR
T

CST

ZR
T

RZ
T

1-2

1T Z
CST(cassette)
2T R CST
3Z
4
5T R CST
6T Z

1.2
IC
[8]

IC
-3-

[9]

PID
[10][10][11][12]
1-3

IC

PID

1-3

10~35Hz
- 4s
1-1
1-1
Hz

10

10~35

35

<55

<1.4

<55

1
-4-

2 1-1

1.3
1.3.1

--
70

--[13]
-- 1-4 a

a) [13]

b) [19]

1-4 --

[14]

[15][16] Meng Linqi[17]

Jun-Koo KangSeung-Ki Sul

-5-

[18]F.QiaoA.Winfield [19]
1-4 b

--
Kiyoshi Takagi Hidekazu Nishimura
1-5 a
[20]De la Rosede [21]
1-5 b

[22]

a) [20]

b) [21]

1-5

--

3
--

[23]
Lagrange
Newton-Euler
-6-

[24]

[24]
Farzad Rafieian [25]
+

[26]

1-2
1-2

--

1.3.2
[27]300mm
[28]Intel
450mm IC IC

Hong Wang
[29]

PID Dhanda
[30]Singer
[31] Meckl[32]
-7-

[11]
Park
[33]
Sarkar[34]Pond[35] B
[33][36]
[37] B

1.4

2009ZX02012-002

1
+
Newton-Euler
MATLAB ADAMS
2

FFT()

-8-

2
2.1

IC

2.2
R - 3 Z T R
Z
R T T R
2-1

1- 2- 3- 4-R 5-T
2-1 T R

T
R T

1-21 R R
-9-

2-2

2-2 R

1
2 Newton-Euler
MATLAB ADAMS
3

2.3
2.3.1

Z
[38]T
R R

[39]

-
4
- 10 -

1
1:3
2 RT

Spong[40]

1P5R(1 5 )
[41]
3
[42][43]

4
-

2.3.2
R T - D-H
- D-H

O0 Z O0 Z 0 X 0 Z 0

Y0
O1 T O1 O0

Z O1 Z 0 ( Z1 ) S Z
O1 ( Z )
d1 S 2
O2 R O2 T

- O1
O3 O3 R

-
Z 3 X 3 X 3 X 2 Z 3
Y3
O4 O4 Z 4 X 4
- 11 -

X 4 Z 4 X 3
Y4
O5 O5 Z 5 O4 Z

X 5 X 5
Z 5 X 4 Y5
O6 O6 O5 X 5 L5

2-3

Z3

Y3

l3
X3

l4

m3

Z2

X4

d4

Z6

Y5
X5

l5

Y6

m5

X6

d5

d3

Y2

X2

7
5

d2

m1
l1

m4

Z4

m2
l2

Z5

Y4

Z1

Y1

X1

3
2

d1
Z0

Y0

X0

2-3

1Z
2Z
3T T T
4T
5R R T
6R
7
2-3 23 K T K R BT
BR

D-H 2-1

- 12 -

2-1 D-H
i

ai

di

0
d1

d2

L3

d3

L4

d4

L5

d5

2.4
2.4.1
Z T R Z T R iZ iT iR
iZ =1 iT =50 iR =100

1 Z iZ Z

2 T iT
i
R R
3

(2-1)

1 S(
)
d1 S 1 2

(2-2)

ii=1,2,5 i D-H
D-H

1
0

0
T1
0

1 S
0 1 d1

2
0 0
1

0 0
1 0

0
0

cos(T 2 ) sin(T 2 )
sin( ) cos( )
T
2
T
2
1
T2

0
0

0
0

- 13 -

(2-3)

0 0
0 0
1 d2

0 1

(2-4)

cos( R 3 ) sin(R 3 )
sin( ) cos( )
R
3
R
3
2
T3

0
0

0
0

cos( 4 ) sin( 4 )
sin( ) cos( )
4
4
3
T4

0
0

0
0

0
0
1
0

cos(5 ) sin(5 )
sin( ) cos( )
5
5
4
T5

0
0

0
0

0
0
1
0

1
0
4
T5
0

0
1
0
0

0 0
0 0
1 d3

0 1
L3cos( 4 )
L3 sin( 4 )

d4

L4cos(5 )
L4 sin(5 )

d5

(2-5)

(2-6)

(2-7)

0 L5
0 0
1 0

0 1

(2-8)

T6 0T1 1T2 2T3 3T4 4T5 5T6

(2-9)

nx
p ny

1 nz

px nx ox
py ny oy
n o a
0
T6

pz 0 0
0 0 0

1 0 0
T R
ox
oy
oz
0

ax
ay
az
0

i
(i = 1,4,5)

qi i T , T =M T /KT (i = 2)
, =M /K (i = 3)
R
R
iR
R
i
i

T T
R R
M T T
M R R
K T T
- 14 -

0
0
1
0

px
py
pz

(2-10)

(2-11)

K R R

R
L3 L4

q3 :q4 :q5 1: (2) :1

(2-12)

(2-3)~(2-8)(2-10)

nx
n
y
ox

oy

px

py

p
z

cos(q2 )
sin(q2 )
sin(q2 )
cos(q2 )
L3cos(q2 q3 ) L4sin(q2 q3 )
L5cos(q2 )

(2-13)

L3sin(q2 q3 ) L4sin(q2 q3 )
L5 sin(q2 )
d1 d 2 d3 d 4 d5 S q1 2

2 3 Z T R
T 2
1 2 3
T R
T R

2.4.2
Newton-Euler Lagrange
Newton-Euler Lagrange Newton-Euler

Newton-Euler

1i=0,1,2,3,4
i +1

i +1 i +1 Riii J_S qi +1i +1zi +1

- 15 -

(2-14)


i +1

i +1

i +1 i +1 Ri ii J_S (i +1 Ri ii qi +1i +1 zi +1 qi +1i +1 zi +1 )

vi 1 i +1 Ri [i vi i +1 i +1 i pi +1 i +1 i +1 (i +1i +1 i pi +1 )]

(2-16)

J_S (2i +1i +1 di +1i +1 zi +1 di +1i +1 zi +1 )

i +1

(2-15)

vci +1 i +1 vi +1 i +1 i +1 i +1 pci +1 i +1 i +1 (i +1i +1 i +1 pci +1 )

(2-17)

f ci +1 mi +1i +1vci +1

(2-18)

i +1

i +1

nci +1

ci +1

i +1 i +1 (

i +1
i +1

i +1

ci +1

i +1 )

i +1
i +1

(2-19)

(2)i=4,3,2,1,0
i

fi +1 i R i +1 (i +1 fi +2 i +1 f ci +1 )

ni +1 i R i 1i +1ni +2 i +1 nci +1 i +1 pci +1 i +1 f ci +1 i pi 1 i R i 1i +1 fi +2

(2-20)

(2-21)
J_SJ_S=1J_S=0
j

i i j
i i j

qi i
qi i
j

Ri i j

pi i j

vi i j
i

z i i Z i

mi i
d i i
d i i
i

pci i i

vci i i
f ci i i

nci i i

ci

Ii i ci ()

f i i i j

ni i i j

- 16 -

ci

0 0 li T
pci =
T
li 0 0

I xxi

I i = -I xyi
-I xzi

(i = 1,2)

-I xzi I xxi

-I yzi =
I zzi

-I xyi
I yyi
-I yzi

(2-22)

(i = 3,4
5)

I zzi

I yyi

(2-23)

0 0 di +1 T
(i = 0,1,2)

L3 sin(q4 ) L3 cos(q4 ) d 4 T (i = 3)
i
pi +1 =
T
L4 cos(q5 ) L4sin(q5 ) d5 (i = 4)

T
(i = 5)
L5 0 0

(2-24)

0 0 0 0 0 0
0 v0 g 0 z 0
5 f 6 0 5 n6 0
/
F 0 f1
N 0
n1

f2
1
n2

f3
2
n3

f6

5
n6

f4
3
n4

f5
4
n5

(2-25)

i -1 f i i -1 ni i (i = 1 ~ 6) i
i-1
i -1

i -1

fi i -1 fix

i -1

ni i -1 nix

i -1

fiy

i -1

niy

i -1

fiz
niz

(2-26)

(2-27)

f1x =1 f 2 x
3

i 2

= m3 (l3 S2+3 q i2 - l3C2+3 qi ) + m4 ( L3 S 2+3 q i2 - L3C2+3 qi

i 2

i 2

i 2

i 2

i 2

i 2

i 2

+l4 S 2+3+4 q i2 - l4C2+3+4 qi ) + m5 ( L3 S 2+3 q i2 - L3C2+3 qi

4

i 2

i 2

i 2

+L4 S2+3+4 q i2 - q2~4 L4C2+3+4 +l5 S2+3+4+5 q i2 - l5C2+3+4+5 qi )

- 17 -

(2-28)

li i i
Li i
S2+3 S2+3 sin(q2 q3 )

C2+3 C2+3 cos(q2 q3 )

0

f1y =1 f 2 y
3

i 2

= m3 (-l3C23 q i2-l3 S2 3 qi ) + m4 (-L3C2 3 q i2 - L3 S 2 3 qi

i 2

i 2

i 2

i 2

i 2

i 2

i 2

-l4C23 4 q i2 - l4 S2 3 4 qi ) + m5 (-L3C2 3 q i2 - L3 S 2 3 qi
4

(2-29)

-L4C23 4 q - L4 S23 4 qi - l5C2 3 4 5 q - l5 S 23 45 qi )

i 2

2
i

i 2

i2

2
i

i2

f1z = mi ( g +
i 1
5

f 2 z = mi ( g
i 2

S q1
)
2

(2-30)

S q1
)
2

(2-31)

S q1
S q1
)C23 45 - m4l4 (g +
)C23 4
2
2
S q1
S q1
-m3l3 (g +
)C23 + m5 L4 (g +
)C2 3 4
2
2
5
S q1
+3 f5 y d 4 S23 -3 f5 x d 4C23 + mi L3 (g +
)C2 3
2
i 4
S q1
- 2 f 4y d3C2 2 f 4x d3 S2 -1 f3 y d 2 - 0 f 2y (d1 +
)
2

n1x -m5l5 (g

f 2 y 1 f3 y 0 f1y

i 2

i 2

i 2

f 4 x = m4 ( L3 S3 q i2 - L3C3 qi +l4 S3+4 q i2 - l4C3+4 qi )

i 2

+m5 ( L3 S3 q - L3C3 qi L4 S3+4 q -L4C3+4 qi

i 2

2
i

i 2

i 2

i 2

i 2

+l5 S3+4+5 q i2 - l5C3+4+5 qi )

- 18 -

2
i

i 2

(2-32)

i 2

i 2

i 2

i 2

i 2

i 2

i 2

f 4 y = m4 (-L3C3 q i2 - L3 S3 qi - l4C3+4 q i2 - l4 S3+4 qi )

i 2

+m5 (-L3C3 q i2 - L3 S3 qi - L4C3+4 q i2 - L4 S3+4 qi

5

-l5C3+4+5 q i2 - l5 S3+4+5 qi )
i 2

i 2

f5 x = m5 (-L3 q i2 L4C4 q i2 L4 S 4 qi l5S4 5 qi l5 C4 5 q i2)

i 2

i 2

i 2

i 2

i 2

i 2

i 2

i 2

i 2

i 2

f5 y = m5 ( L3 qi - L4 S 4 q i2+L4C4 qi - l5 S 45 q i2 +l5C4 5 qi )
0

S q1
S q1
) S 23 45 - m4l4 (g +
) S 2 3 4
2
2
S q1
S q1
-m3l3 (g +
) S 23 + m5 L4 (g +
) S 2 3 4
2
2
5
S q1
3
3
- f5y d 4C23 - f5x d 4 S2 3 + mi L3 (g +
) S 2 3
2
i4
S q1
- 2 f 4y d3 S2 +2 f 4x d3C2 +1 f 3 x d 2 +0 f 2x (d1 +
)
2

n1y = -m5l5 (g +

(2-33)

f 2x 1 f3x 0 f1x

Z
T
0

n1z =1 n2 z
3

i 2

i 2

= I zz 2 q2 +I zz 3 qi +I zz 4 qi + I zz 5 qi - m4l4 4vc 4y
i 2

-m5l55vc 5 y - m3 (L3 - l3 )l3 qi +3 f 5y L4C4

(2-34)

i 2

- f5 x L4 S4 - f 4y L3 S3 - f 4x L3C3

S q1
S q1
)C23 45 - l4 m4 (g +
)C2 3 4
2
2
S q1
S q1
-l3m3 (g +
)C23 + L4 m5 (g +
)C23 4
2
2
5
S q1
+3 f5 y d 4 S 23 -3 f 5 x d 4C23 + L3 mi (g +
)C23
2
i 4

n2 x = -l5 m5 (g +

- 2 f 4y d3C2 - 2 f 4x d3 S 2 -1 f 3y d 2
- 19 -

(2-35)

S q1
S q1
) S23 45 - l4 m4 (g +
) S 2 3
2
2
S q1
S q1
-l3m3 (g +
) S23 + L4 m5 (g +
) S 2 3 4
2
2
5
S q1
3 f5y d 4C23 3 f5 x d 4 S23 +L3 mi (g +
) S 2 3
2
i 4

n2 y = -l5 m5 (g +

(2-36)

- 2 f 4y d3 S2 +2 f 4x d3C2 +1 f3 x d 2

f3x = m3 (l3 S3 q i2 - l3C3 qi ) + m4 ( L3 S3 q i2 - L3C3 qi

i 2

i 2

i 2

i 2

i 2

i 2

i 2

i 2

+l4 S3+4 q i2 - l4C3 4 qi ) + m5 ( L3 S3 q i2 - L3C3 qi

4

(2-37)

+L4 S3+4 qi2 - L4C3+4 qi +l5 S3+45 q i2 - l5C23 45 qi )

i 2

i 2

i 2

i 2

f3y = m3 (-l3C3 q - l3 S3 qi ) + m4 (-L3C3 q - L3S3 qi

i 2

2
i

i 2

i 2

2
i

i 2

i 2

i 2

i 2

i 2

-l4C3 4 q i2 - l4 S3 4 qi ) + m5 (-L3C3 q i2 - L3 S3 qi
4

i 2

i 2

i 2

i3

(2-38)

-L4C3 4 q i2 - L4 S3 4 qi - l5C3 45 q i2 l5 S3 4 5 qi )
5

f 3 z = mi ( g +
i 3

S q1
)
2

(2-39)

S q1
S q1
) - m4l4C3 4 (g +
)
2
2
S q1
S q1
-m3l3 (g +
)C3 + m5 L4C3 4 (g +
)
2
2
5
S q1
+L3 mi (g +
)C3 +3 f 5 y d 4 S3 -3 f 5 x d 4C3 - 2 f 4y d 3
2
i4

n3 x = -m5l5C3 45 (g +

(2-40)

S q1
S q1
) - m4l4 S3 4 (g +
)
2
2
S q1
S q1
-m3l3 (g +
) S3 + m5 L4 S3 4 (g +
)
(2-41)
2
2
S q1
m4~5 L3 (g +
) S3 -3 f5 y d 4C3 -3 f 5 x d 4 S3 +2 f 4x d3
2
R
2

n3 y = -m5l5 S3 45 (g +

- 20 -

i 2

i 2

n3 z = I zz 3 qi +I zz 4 qi +I zz 5 qi - m4l4 4vc 4y
i 2

-m5l55vc 5 y - m3 (L3 - l3 )l3 qi +3 f 5 y L4C4

(2-42)

i 2

-3 f5 x L4 S4 - 2 f 4y L3 S3 - 2 f 4x L3C3

vc 4y q 223 L3 S4 +q23 L3C4 + qi l4

i 2

i 2

i 2

i 2

vc 5 y q 223 L3 S45 +q23 L3C45 q i2L4 S5 +L4C5 qi +l5 qi

f 4x = m4 (-L3 q i2 - l4C4 q i2 l4 S4 qi ) + m5 (-L3 q i2

i 2

i 2

i 2

i 2

(2-43)

-L4C4 qi2 - L4 S4 qi - l5C45 q i2 - l5 S 45 qi )

i 2

i 2

i 2

i 2

f 4y = m4 ( L3 qi - l4 S4 q i2 +l4C4 qi ) + m5 ( L3 qi
i 2

i 2

i 2

i 2

i 2

i 2

i 2

i 2

S q1
)
2

(2-44)

-L4 S4 qi2+L4C4 qi - l5 S45 q i2 +l5 S45 qi )

3

f 4 z mi (g +
i 4

(2-45)

S q1 3
) - f5 y d 4
2
S q1
S q1
S q1
3
n4 y = m5l5C4+5 (g +
)+m4l4 (g +
)C4 - m5 L4 (g +
)C4 +3 f 5 x d 4
2
2
2
3

n4 x = -m5l5 S4+5 - m4l4 S4 + m5 L4 S4 (g +

i 2

i 2

n4 z = I zz 4 qi +I zz 5 qi - m4l4 4vc 4y - m5l55vc 5 y +3 f 5 y L4C4 - 3 f 5 x L4 S 4

(2-46)
(2-47)
(2-48)

i 2

i 2

i 2

i 2

i 2

f5x = m5 (-L3C4 q i2+L3 S 4 qi - L4 q i2 - l5C5 q i2 - l5 S5 qi )

3

i 2

i 2

i 2

i 2

i 2

f5y = m5 ( L3 S 4 q i2 + L3C4 qi +L4 qi - l5S5 q i2 +l5C5 qi )

4

f5 z = m5 ( g +

S q1
)
2

- 21 -

(2-49)
(2-50)
(2-51)

S q1
) S5
2
S q1
4
n5 y = m5l5 (g +
)C5
2

n5 x = -m5l5 (g +

(2-52)
(2-53)

n5 z = I zz 5 qi - m5l55vc 5 y
i 2

(2-54)

()
K T K R BT BR
T R Z
() M T M R

T = q2 - 2
= q -
R
3
3

M T = KT T + BT T
M R = K R R + BR R

(2-55)

2-552-25~2-54
/

f1z S
+ FZ
2
J Z Z

Z = J Z1 +

(2-56)

FZ Z
T

T = iT J T 2 +

n2z + M T
+ FT
iT

(2-57)

J T T

FT T
R

R = iR J R3 +

n3z - 2 3 n4z +4 n5z + M R

+ FR
iR
- 22 -

(2-58)

J R R

FR R

F1x
Fx
0

F = Fy =
F1 y
Fz 0 F1z + m0 g
m0
0

(2-59)

2.5
T R

2-2
2-2
i

di (mm)

Li (mm)

li (mm)

mi (kg)

I zzi (kg m 2 )

24.0701

69.3

7.5600

57.8

7.7

5.5622

8.02 102

284.5

185

42.1

1.7059

1.66 102

-4.3

185

19.8

1.3712

1.08 102

47.8

290

1.1985

1.28 102

Z 120

2
(2-60)
3

MATLAB
ADAMS
2-2 MATLAB
MATLAB
2-4

- 23 -

NewtonEuler

()

T
R

NewtonEuler

2-4 MATLAB

ADAMS

ADAMS
2-5 2-5 a 2-5 b

a)

b)

2-5 ADAMS

Z T T R
R

- 24 -

1:-2:1 T R

(rad/s)

(rad/s)

(rad/s)

3s
R
2000
0
-2000

0.0

0.5

1.0

1.5
(s)

2.0

2.5

3.0

T
4500
0
-4500
0.0

0.5

1.0

1.5
(s)

2.0

2.5

3.0

2.0

2.5

3.0

Z
400
0
-400

0.0

0.5

1.0

1.5
(s)

2-6

2-6 MATLAB ADAMS

Newton-Euler / ADAMS
R T Z XYZ

Z Z
Z 2-7

a)Z

b)

2-7 Z

1 0 MATLAB ADAMS
T R
2-8 10000N m/rad /
- 25 -

a) R

b) T

c) X

d) Y

2-8 /(1)

2 0 MATLAB
ADAMS 2-9 100N m / rad
/

a) R

b) T

c) X

d) Y

2-9 /(2)

3 2-8 2-9 /
2-10 100N m / rad 10N m s/rad /
- 26 -

a) R

b) T

c) X

d) Y

2-10 /(3)

123/
/ 0

2-10 10N m s/rad

/
2-8 2-9 2-10MATLAB ADAMS

2.6
-

- 27 -

T R
R Z
Z
Z
Newton-Euler
ADAMS
/

- 28 -

3
3.1

3.2
1-1
10Hz~35Hz 1.4N
55N
F
F

F f (mi ,li ,Li , j , j , j ,K k ,Bk )

(3-1)

mi 1~5
li 1~5
Li 1~5

j T R Z
j T R Z
j T R Z
K k T R
Bk T R

F
1
2
3
2

KT 9 103 N m/rad

3
K R 110 N m/rad
B =B =1N m s/rad
T R

(3-2)

- 29 -

T R

3.3
3.3.1

2
345
012 d i i=0~2

3.3.2
2-6
3-2
FFT

3-1 290mm
L5=290mm

15.0

(N)

11.25
7.5

1L3=L4=150mm
2L3=L4=180mm
3L3=L4=210mm
4L3=L4=240mm

4
3
2
1

3.75
0.0
0.0

3.75

7.5
(Hz)

11.25

3-1 ()
- 30 -

15.0

L3L4L5 R
L3=L4 150mm 30mm 240mm
3-1

180mm
L3=L4=180mm

7.5

1L5=200mm
2L5=230mm
3L5=260mm
4L5=290mm

(N)

5.625

3
2

3.75

1
1.875
0.0

0.0

20.0

15.0

10.0
(Hz)

5.0

3-2

3-2 200mm 30mm 290mm

280.28

179.72

475.28

100

R248

545

460

617.22
114.72

3-3
- 31 -

3-3 1 617.22mm

Y1 =L3 L4 +L5 617.22mm

(3-3)
(
120)

Y2 =max L5 (L3 L4 ) cos( ), (L3 L4 ) cos( ) 248mm

3
3

(3-4)

Y1 Y2 3-1
3-1 (mm)
L3 L4 (mm)

200
230
260
290

L5

(mm)

150

180

210

240

500/150
530/150
560/150
590/150

560/180
590/180
620/180
650/180

620/210
650/210
680/210
710/210

680/240
710/240
740/240
770/240

3-1

185mm 290mm

3.3.3

120mm
3-4
W4=120mmW5=120mm

9.0
6.75

(N)

1W3=120mm
2W3=160mm
3W3=200mm

3
2
1

4.5

2.25
0.0

0.0

2.5

5.0
(Hz)

7.5

3-4
- 32 -

10.0

W3W4W5 120mm
160mm 200mm

160mm 120mm

9.0

W3=160mmW5=120mm

3
2

6.75

(N)

1W4=80mm
2W4=120mm
3W4=160mm

1
4.5

2.25
0.0

0.0

2.5

5.0
(Hz)

7.5

10.0

3-5

3-4 80mm
160mm 50%
160mm 120mm

W3=160mmW4=120mm

9.0

1W5=80mm
2W5=120mm
3W5=160mm

3
2

(N)

6.75

4.5

2.25
0.0

0.0

2.5

5.0
(Hz)

7.5

10.0

3-6

()
R
- 33 -

1:-2:1
R1:R2 = 2 :1

r1:r2 = 1: 2

(3-5)

R1
R2

r1
r2

3-7

3-7

3-8 3-8 a 3-8 b

a)

b)
3-8

160mm 120mm

- 34 -

100mm
3-7~ 3-8

3.4
3.4.1 T
T
1 3 1sT
T
3-9
120
4

()

100
3

80
60
40

20
0

0.0 0.1

0.2

0.3

0.4

0.5 0.6
(s)

0.7

0.8

0.9

1.0

1- 2- 3- 4-
3-9

3-9 1s 117.2 T

T 3-10

(rad/s)

(rad/s)

2000
4
1500
3
1000
500
2
0
-500
1
-1000
-1500
-2000
0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0
(s)

450
400
350
300
250
200
150
100
50
0

4
0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0
(s)

a)

b)
3-10 T

1
2
- 35 -

3
4
3-10 T ADAMS T T
3-11
3.5

T_F_3
T_F_4

(N)

2.625

1.75
T_F_2
T_F_1

0.875

0.0

0.0

15.0

60.0

45.0

30.0
(Hz)

3-11 T

T_F_1T
T_F_2T
T_F_3T
T_F_4T
3-11 T
S

3.4.2 R
T 1
1sR
3-12
700
600

(mm)

4
500

400
1

2
300
200
100

0.0

0.1

0.2

0.3

0.4

0.5 0.6
(s)

0.7

0.8

0.9

1.0

1- 2- 3- 4-
3-12
- 36 -

1 512.2mmR

800
600
400
200
0

-200
-400
-600
-800

3
1

0
-20
-40
-60
-80
-100
-120
-140
-160
-180

(rad/s)

(rad/s)

3-13

4
0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0
(s)

4
2
0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0
(s)

a)

b)

3-13 R

3-13 T
R 3-13
3-14
6.0
R_F_3

(N)

4.5

R_F_1

3.0
R_F_4

R_F_2

1.5

0.0
0.0

15.0

30.0
(Hz)

45.0

60.0

3-14 R

R_F_1R
R_F_2R
R_F_3R
R_F_4R
3-14 T
S

3.5
2

- 37 -

T R
S

- 38 -

4
4.1
IC 3-3

4s
4-1

B
D
C
1

4-1

4-1
A 1 D T A B
R D T R C
R D

- 39 -

4.2
4.2.1
4-1 2 1
4-2 A 1
2 B

A
1

4-2

4-3
2
2

A
1

a) 1

B
A

b) 2

4-3

4-3a 1R T R
- 40 -

T 5
1R 1
2R A
3T B
4R 2
5R B
4-3 b 2
1R 1 4-3 a 1
2R T 2
3R B 4-3 a 5
1 2 4-4

2
Q2' S5

Q2
S4

r2

r1

r3 S3
M

Q1

Q3
S2

S1

Q1'

4-4 2

1 1 ()
Q1 Q1 Q2 Q2
2
Q1 Q2
3 Q1 Q2 (
) Q1 Q2
4 Q1 Q2 Q3 MN
5 S1 1 S2~S3
- 41 -

S4 2

1 2 1 R T
2 R T

2 1

4.2.2
1 4-1 1
R T

4-1 ( 1)

(mm)

(s)

512.22

0.7

0.3

512.22

0.7

1 A

131.49

0.8

468.87

0.6

468.87

0.3

0.6

2 B

1. T R Z
2. T T

3 T R S
4-5 MATLAB
250

(rad/s)

(rad)

200
150
100
50
T
0

0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0

(s)

500
400
300
200
100
0
-100
-200
-300
-400
-500

a)

R
0

0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0

(s)

b)

4-5 ( 1)

4-2 2
- 42 -

4-1 S T R

4-2 ( 2)

mm

512.22

0.7

0.3

T R

867.13

2.1

1 2

0.3

468.87

0.6

2 B

T R r3 1200mm 67.13mm

2 4-6
250
200

(rad/s)

(rad)

R
150

100
50
T
0

0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0

(s)

500
400
300
200
100
0
-100
-200
-300
-400
-500

a)

100

(rad/s)

(rad)

200
R

50
0

R
0

0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0

(s)

b)

250

150

0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0

(s)

500
400
300
200
100
0
-100
-200
-300
-400
-500

c)

R
0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0
(s)

d)

4-6 ( 2)
- 43 -

4-6 b R 1s 3s
4-6 a R
T R

1 4-7 a

600

600

500

500

400

400

Y(mm)

Y(mm)

2 4-7 b

300

300

200

200

100

100

100

200 300 400

X(mm)

500

600

700

100

200 300

a) 1

400 500
X(mm)

600

700

b) 2
4-7

T R 4-5 4-6
4-8
4.0

(N)

3.0
2.0

1.0
0.0
0.0

10.0

20.0

(Hz)

30.0

40.0

50.0

4-8

4-8
1 2 3 2
10Hz~35Hz 3

- 44 -

4.3
4.3.1

4-9

4-9

PC104 PMD
4-10

4-10

ISA PC/104
DAC()
()

MFC

PID
- 45 -

T R PID

4-11

4-11

4-12

4-12

4-11
- 46 -

4-3
4-3

10

(N)

5.6

6.2

5.9

5.7

5.9

6.1

5.6

6.3

5.8

6.5

4-3

1 10
f n 5.96N
10 n 1

(4-1)

f n n
(LANCETEC) ULT2753

4-2
F m amax +f

(4-2)

m 50kg
amax X Y

amax Max(ax ,ay )

4.3.2
4s 1 3
1

0.2
0
-0.2

(m/s)

2
0.5
0
-0.5
3
0.2
0
-0.2
0.0

0.5

1.0

1.5

2.0

2.5

3.0

3.5

(s)

4-13
- 47 -

4.0

4-2 FFT(
) 4-14
2.0

(N)

1.5

1.0

0.5
0.0

0.0

8.75

17.5
(Hz)

26.25

35.0

4-14

4-14

72% 35%

4.4
44
2

1 T R
3 S
2 T R
-

- 48 -

IC IC

1
-
MATLAB ADAMS

2
T R
S
3
10Hz

4
10Hz 72% 10~35Hz
35%

2 R T Z

- 49 -

[1] ,,.[J].
.2007,7:18-23
[2] Dave Calhoun, Wafe handling management strategies[R]. Micro,1998:15-24
[3] Hiromitsu K, Wafer processing system including a robot[P]. U.S Patent,
568899B1,2003
[4] .[J]..2009 1
[5] . IC [J]..2010
4
[6] http://www.nmp.gov.cn/zxjs/[OL]
[7] Ying-Shieh Kung, Cheng-Ting Hsu, Hsin-Hung Chou. FPGA-Realization of a
Motion Control IC for Wafer-Handling Robot[C]. Industrial Informatics (INDIN),
2010 8th IEEE International Conference on.2010,8,16:493
[8] .[D].
.2010,6:9-12
[9] , . [J].
.2002,13,20:1715-1717
[10] WeiMin Tao, MinJun Zhang, Ou Ma. Modeling and Vibration Suppression for
Industrial Track Robots[C]. IEEE International Conference on Robotics and
Automation Orlando, Florida. May,2006:1072-1077
[11] .[D].
.2010,6
[12] Yanjie Liu, Yong Hu, Xiaofei Zheng. Stable and Accurate Trajectory Control
Technology for the Wafer Transfer Robot[C]. IEEE International Conference on
Information and Automation. June,2010:1336-1340
[13] .[J]..1979 12 4
:72-89
[14] ,,.4200 [J].
.1993 11 : 16 6
[15] ,,. ADAMS/Vibration [J].
.2006 6 : 18 6
[16] ,,.[J]..2008
1
- 50 -

[17] Meng Linqi, Wu Haoliang. Study on Non-linear Twist Vibration of Main

Transmission System of Vertical Rolling Mill[J]. IEEE International Symposium
on Computational Intelligence and Design.2008:207-210
[18] Jun-Koo Kang, Seung-Ki Sul. Vertical-Vibration Control of Elevator Using
Estimated Car Acceleration Feedback Compensation[J].IEEE Transactions on
Industrial Electronics.2000,2:91-99
[19] F.Qiao, Q.M.Zhu, S.Y.Li, A.Winfield. Torsional Vibration Suppression of a 2-Mass
Main Drive System of Rolling Mill with KF Enhanced Pole Placement[C].
Proceedings of the 4th World Congress on Intelligent Control and Automation.
2002,6:206-210
[20] Kiyoshi Takagi and Hidekazu Nishimura. Control of a Jib-Type Crane Mounted on
a Flexible Structure[J]. IEEE Control Systems Technology.2003:32-42
[21] Juan Jose Gonzalez De la Rosa, J.A. Carmona Torres, A. Illana,etc. Modeling and
Simulation of a Container Gantry Crane Cabins Operation with Simulink[C]. IEEE
International Conference on Computer as a Tool.2007:2015-2018
[22] ,,, 1:2:1
[J]..2010 3 : 8 1
[23] ,.-[J]..2000,30(1):15-20
[24] .[D].
.2005:7-12
[25] Farzad Rafieian, Zhaoheng Liu, Bruce Hazel. Dynamic Model and Modal Testing
for Vibration Analysis ofRobotic Grinding Process with a 6DOF Flexible-joint
Manipulator[C]. IEEE International Conference on Mechatronics and Automation.
2009,08:2793-2798
[26] , . [J].
.2009 4 29 2
[27] Research on A Novel R Wafer-handling Robot[C]. International Conference
on Automation and Logistics. 2007,8,18-21:597-602
[28] .[D]..2007:7-11
[29] Hong Wang, Wei Zhao, Bing Li, Xiaorui Lin, Donglai Zhang. Dynamic Analysis
and Robust Reliability Design of Pan Mechanism for a cooking Robot[C]. IEEE
International Conference on Robotics and Biomimetics, Guilin, China.2009:
1999-2001.
[30] Abhishek Dhanda, Gene F.Franklin. Control Formulations of Vibration Reduction
Problems[J]. IEEE Transactions on Automatic Control.2010,2:378-394.
[31] Neil C. Singer, Warren P. Seering. An Extension of Command Shaping Methods for
Controlling Residual Vibration Using Frequency Sampling[C]. IEEE International
- 51 -

Conference on Robotics and Automation.1992,5:800-805.

[32] Peter H.Meckl, Warren P.Seering. Reducing Residual Vibration in Systems With
Time-Varying Resonances[J]. IEEE Robotics and Automation.1987,5:1690-1695.
[33] ,,,.[J].
.2003 5 : 25 3
[34] Pritam Kumar Sarkar, Motoji Yamamoto, Akira Mlhri. Significance of Spline
Curve in Path Planning of Flexible Manipulator[C]. IEEE International Conference
on Robotics and Automation Albuauerque.1997,4:2535-2540
[35] B.Pond and I.Sharf. Motion Planning for Flexible Manipulators[C]. IEEE
International Conference. Man and Cybernetics.1995:2103-2108
[36] .[J]..
.2004,23(5)
[37] .[D]..2008
3
[38] Yong Zhou, Fangyu Peng, Bin Li, Yongzhi Li. Mechatronic Modeling and
Analyzing for Feed Servo Control System Based on Torsion Dynamics of
Lead-screw[C]. IEEE International Conference on Measuring Technology and
Mechatronics Automation.2010:632-635.
[39] .[D].
.2010 5 :22-23
[40] Spong M W. Modeling and Control of Elastic Joint Robots[J]. ASME Transaction
on Journal of Dynamic Systems, Measurement, and Control.1987,109(4):310-319
[41] ,,.1P5R [J].
.2009 12 20 24 :2907-2911
[42] ,,.[J].
.2006 30 6 :58-61
[43] .[D].
.2008 6 :53-54

- 52 -

1
2
3

- 53 -

- 54 -

[] 2011