MEMS Sensors for Biomedical

Applications
Yu-Chong Tai
Professor of EE
Member of NSF/CNSE
California Institute of Technology

(NSF/ERC Industry Day, May 16-17, 2001)

What is MEMS?
A Micro-Electro-Mechanical System (MEMS) is a batch-fabricated
(microfabricated) system that contains both electrical and mechanical
components with characteristic sizes ranging
from nanometers to millimeters.

Other Names
In US:
Microdynamics
In Europe: Micro Systems (Technology)
In Japan: Micromachines, MicroRobots

Machine Size
Quantity
Micromachines
(MEMS)
Conventional
Machines

Molecular (Nano)
Machines

nm

mm

km

Pressure Sensors
200 m

Nitride diaphragm

Poly strain gauges

Schlumberger Oil-Well Pressure Sensor

4 nitride
Diaphragms

Polysilicon
thermistor

10,000 2 psi design

Multi-diaphragm configuration

output voltage (V)

0.65

0.6

0.55

0.5

0.45
0

1000

2000

3000

P ressu re (p si)

4000

5000

MEMS Pressure Sensor Probe

for Intraocular Pressure Measurement
Wafer with flexible
pressure sensor skins
Flexible ribbon

Pressure sensor
Sensor Tip

Vacuum-Insulated Shear Stress Sensor

Polysilicon Wire
(3 x 150 x 0.5 m3)

Metal lead

Polysilicon wire

Vacuum Cavity
(200 x 200 x 2 m3)

Metal lead

Nitride diaphragm
Vacuum cavity

Si substrate

Cross-section
Photograph

Successful Test on NASAF 15

1 cm

Shear-stress Sensor Imager

Shear Stress (Pa)

2.86 cm

M=0.9

Stanton
Sensor

M=0.7
M=0.5

M=0.3

Micro
Sensor
Time

Multi-sensor chip:
Pressure, Temperature and Flow
1 mm

200 m

1 cm

2 mm

Shear stress
sensor

2 cm

Five sensor clusters with a

pitch of 2 mm.

Pressure
sensor

Temperature
sensor

MEMS Mass Flow Meter

N2
Channel chip

Inlet

Bonding wires
Multi-sensor array chip

picture of a packaged device

PCB

Schematic of packaged device

Channel width: 2.5 mm

Channel height: 0.2 mm
Channel length: 18 mm

P (mW)

6.5

6.0

5.5

5.0
0.0

0.5

1.0

Q1/2.2

1.5

Calibration of the thermal flowmeter

7.5

Laminar
flow

Power (mW)

7.0
6.5

Turbulent flow

6.0
5.5
5.0
0

Q (SLPM)

Non-linear output

10

Measurement of channel flow

1
0.15

0.5

V/ V0

25.5

T (oC)

p (psig)

26

25

0.05

24.5
24

0
1

0
1

0.1

Position

Positon

(a) Pressure distribution

Position

(b) Temperature distribution

(c ) Relative output change of shear stress sensors

27

T (oC)

p (psig)

16

V/ V0+ (V/ V0)2/2

Measurement of fully developed incompressible channel flow (Mach number = 0.2 )

11

26.5
26
25.5
25

6
2

Position

(a) Pressure distribution

0.25

0.15
1

0.35

Position

Position

(b) Temperature distribution

(c ) Relative output change of shear stress sensors

Measurement of fully developed compressible channel flow (Mach number = 0.6 )

Microflow (l) Sensor

Bottom View

Top View

Flow Rate Data

0

200

400

600

800

1000

1200

-0.001

Water
Saline

V [V]

-0.002

-0.003

-0.004

-0.005

30 mA
36 mW

-0.006

-0.007

Q [ul/min]

Measures flow rates up to 10 l/min

Flow Sensor Transient Data

0.7590

Voltage [V]

0.7585

0.7580

0.7575

0.7570

0.7565
0

100

200

300

400

500

600

700

800

Time [sec]

No Flow & Intermittent Power

900

Nanoflow (nl) Sensors

Suspended
Micro
200m
Channel

Poly-Si
Sensors
Micro
Channel

50 m

100m
100 m

20 m
Nitride

lightly B doped
polysilicon

heavily B doped
polysilicon

2 m
Si

Cavity

~100 m

Temperature Change vs. Flow Rate

0

T(oC)

-1
Channel on substrate
ST 0.0071oC/(nL/min)

-2
-3

Suspended channel
-4
ST 0.026 oC/(nL/min)

Power 140
W
Top 10 oC

-5
0

100
200
Q (nL/min)

300

Sensor Resolution
Histogram

14
12

Gausian

Measurement

Frequency

10
8
6
4

2
0
2.034

2.035
2.036
2.037
Sensor Output (V)

Time-averaged Resolution nL/min

2.038

Monocyte Attachment through Molecular Recognition

lipids trapped in arterial wall

monocyte attachment

flow
lipids stimulate EC
Endothelial cells (EC)
Versatile Test Facility

ow
l
F

monocytes
sec
0

sec
2

Monocytes/Field

Monocyte Attachment

Control

Ox-PAPC

Ox-PAPC +
Ox-PAPC +
Ox-PAPC +
High slew Rate Low Slew Rate Oscillating Flow

Other MEMS Applications

Micromachined Neurowell
neuron trapping
canopy grillwork

neurite growing in
micro-tunnel

30 m

gold
electrode

full-grown cell
in neuron well
Spontaneous Spike Recording

54
36

Voltage (V)

18
0

10

-18
-36

Recorded Data
Hand-Fitted Curve

-54
-72
-90

Background 60 Hz averaged away.

-108

time (msec)

Traditional ESI for Mass Spectrometry

particle filter

air flow

MS
Inlet
Vacuum
inside MS

Glass capillary 1-4 kV

Silica Capillary

Spray stability depends

on:
flow rate
voltage
distance
Caltech Micromachining Group

MS inlet hole

Taylor Cone

ESI Nozzle for Protein Mass Spectrometry

SEM of Capillary Tips

16+

15+

17+

2.5 mm

18+
20+

14+

Relative Abundance

19+
21+
22+

23+
13+
24+

25+

600

12+

800

1000

1200

1400 m/z

Taylor Cone Formation

800 V

15 m

950 V

15 m

Solution: 1% Acetic Acid

49.5% Methanol
49.5% Water
Voltage: 800 V~ 1250 V
Distance: 500 m from electrode

Caltech Micromachining Group

1250 V

15 m

15 m

On the Microbat ...

Flying Onithopter
Transceiver
Antenna

MEMS Wings

Wing Control
Actuators

Acoustic Sensor Arrays

CMOS Imaging Array

Autopilot Computer

Gearbox and
Transmission

Electric Motor

Battery

Power Management
Electronics

New MAV Design

Specifications

Weight:
12.5 g
Wing span:
9 inch
Flapping amp.: 65 deg
Flapping freq.: 20 Hz
Flight velocity: 4 m/s
Power required: 2 W
Power source: Battery
Propulsion:
Flapping Wings