Biz-Ocean Column July, 2015

153-790
286, 1312
( 13 1312 )

TEL) 02-3281-0216
E-mail) info@biz-ocean.com
 3D FinFET

FinFET

FinFET . Plannar Gate

Wafer FinFET Wafer
. 1, FinFET 3 Source/Gate . 3
.

FinFET (Fully Depleted Channel)

- .
50% . ,
37% .

1. Transistor

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2. FinFET

FinFET

FinFET Bulk FinFET SOI FinFET . Bulk FinFET ,

, SOI FinFET SOI
, . SOI FinFET (Fully
Depletion) .

Bulk FinFET SOI FinFET Litho step Process step

. , SOI FinFET SOI Bulk
4 , SOI FinFET Bulk 15%
. SOI FinFET
Bulk FinFET .

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3. FinFET

Bulk finFET Definition FINs on Oxide Definition

4. Bulk FinFET vs SOI FinFET

FinFET on SOI FinFET on Bulk

Process Litho Process

Litho Steps Cost Cost Delta Cost
steps Steps steps

Substrate $500 $120 $380

FEOL Process 7 56 $561 9 91 $805 -$244

Total Cost
$136
difference

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FinFET

FinFET SOI FinFET Bulk FinFET . SOI FinFET

SOI Wafer Bulk FinFET Wafer . SOI FinFET
Wafer Wafer 4
. Bulk FinFET Wafer SOI FinFET
.

SOI FinFET . 1) SOI Wafer PR , 2)

BOX , 3) Gate . SOI FinFET SOI Wafer
. Wafer
.

5. FinFET - SOI FinFET

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Bulk FinFET

Bulk FinFET SOI Wafer Wafer . FinFET 1) Wafer

PR , 2) Fin , 3) , 4) CMP
. 5) , 6) Gate .

Bulk FinFET SOI FinFET . SOI Wafer

Wafer .
SOI FinFET , Bulk
FinFET .

6. FinFET - Bulk FinFET

FinFET

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FinFET 10nm 14nm . 7nm EUV
SOI FinFET . 5nm 3D NAND
, 5nm EUV DPT
.

5nm Gate All Around(GAA) Gate Round

. 3D NAND CMP ALD
. III-V Gate Epi .
Vertical TFET Tunnel Field Transistor . 7nm
EUV 5nm EUV DPT
Round Transistor .

7. Transistor

8. FinFET

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14nm

14nm
. 7nm, 5nm 1nm .
.

14nm Boost up
Life Time 2 .
.

9. 14nm
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10. FinFET

FinFET

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 FinFET , TSMC,
Globalfoundries . 2011 FinFET 22nm
(Ivy Bridge) . , 14nm (Haswell)
. FinFET .

FinFET

ARM 3 EDA , , 14nm 3D FinFET

2013 . 14nm FinFET AP
AP . 7420
. 64bit AP 810 AP
64bit AP
.

A9 .
TSMC .
AP PC CPU Apple, , Qualcomm, Mediatek, Nvidia
Fabless AP
PC CPU .

, TSMC 16nm 3D FinFET ARM -A57 -(Tape-Out) ,

. TSMC
14 (16nm FinFET ) Fab . TSMC 16nm+ FinFET
.

11.
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 FiFET . 3D FinFET
16 10nm , TSMC,
.

* NH .
[ .]

153-790
286, 1312 ( 13 1312 )

TEL) 02-3281-0216
E-mail) info@biz-ocean.com

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