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PHYSICAL REVIEW 8 VOLUME 32, NUMBER 5 1 SEPTEMBER 1985

Properties of superconducting vanadium nitride sputtered films

John Zasadzinski
Illinois Institute of Technology, Chicago, Illinois 606I6

R. Vaglio and G. Rubino


Dipartimento di Fisica, Universita degli Studi di Salerno, I-84100 Salerno, Italy

K. E. Gray
Materials Science and Technology DiUision, Argonne National Laboratory, Argonne, Illinois 60439

M. Russo
Istituto di Cibernetica del Consiglio Nazionale delle Ricerche, I-80072 Arco Felice, Italy
(Received 15 April 1985)
High-quality films of VN were prepared by reactive dc sputtering with the use of a triode source.
The films were characterized by x-ray diffraction, temperature-dependent electrical resistivity, and
superconducting T, . Deposition onto single-crystal sapphire substrates heated to 600 C resulted in
uniaxial growth of grains a1ong the [111]direction. Residual resistance ratios as high as 5 were ob-
tained and T, up to 8.9 K. The dependence of T, on a lattice parameter differs considerably from
previous reports in the literature. The temperature-dependent resistivity was found to be consistent
with the parallel-resistor model. Tunnel junctions were fabricated by direct plasma oxidation of the
film surface and preliminary quasiparticle results confirm that VN exhibits strong electron-phonon
coupling. Josephson junctions utilizing an artificial CdS barrier display diffraction characteristics
leading to an upper-bound estimate of the penetration depth of A, -1300 A.

I. INTRODUCTION ,
tivity since A, is a repulsive electron-electron interaction
like the Coulomb interaction (p*). Roughly speaking, the
The 3d transition-metal nitrides have long been of in- net attractive interaction is Az — A, , —
p, so that if
terest due to their unusual physical properties, which are —
X, & Az p*, there can be no superconductivity. Thus, the
of technological as well as fundamental importance. ' large values of S and A., in Pd and Sc are consistent with
Strong interest in VN has been stimulated recently by the absence of superconductivity in these elements. ' lt
Rietschel et al. , who argue that spin fluctuations (i.e., has also been suggested that the dominant T part of the
paramagnons) reduce the T, of VN from =30 K to the low-temperature resistivity (subtracting out the residual
observed bulk value of about 9 K. Earlier predictions in- resistivity) is due to electron-electron (paramagnon)
dicated a smaller suppression of T, in Nb and V, and re- scattering.
cently, tunneling spectroscopy data on Nb, V, and Ta Perhaps the most direct evidence for paramagnon ef-
have been reanalyzed using a rescaled form of the Eliash- fects will come from tunneling measurements of the re-
berg equations which was demonstrated by Daams et al. , duced density of states. In analogy to the electron-phonon
to account for paramagnon effects. It was concluded coupling constant Ay, the effect of A,, should also be
that T, in V is indeed suppressed by up to 45%. Howev- found. 5 We have made tunnel junctions on sputtered
er, the larger magnitude estimated for VN makes it a films of VN, and although the tunneling results are incon-
natural choice to study paramagnon effects in detail. Spin clusive, we have demonstrated the importance and diffi-
fluctuations (paramagnons) are the precursor of band fer- culty of obtaining well-ordered films. Disorder can signi-
romagnetism, and as such they suppress the antiparallel ficantly reduce T„but its effect on Az, A,„and p indi-
alignment of electron spina in a Cooper pair. Although vidually is the subject of considerable speculation and is
the paramagnon spectral density has not been observed not readily determined. A convenient measure of disorder
directly, a measure of the potential influence of spin fiuc- is the residual resistance ratio, rtt equal to the ratio of the
tuations is the exchange enhancement of the spin suscepti- resistances at 300 and 10 K. Our best films have
bility, given by the Stoner factor. Another indication of r~-2 —5, which is considerably larger than similarly
paramagnon effects is the contribution to the electron prepared films of the isoelectronic compound NbN. The
mass enhancement in heat capacity or de Haas — van Al- VN films also display a high degree of polycrystalline epi-
phen. In such measurements the mass enhancement is taxy with the [111]direction normal to the substrate. The
m*/m = I+A&+i,„where Ay and A,, are, respectively, temperature-dependent resistivities (T), for two of our
the electron-phonon and electron-spin fluctuation cou- samples and one from the literature, are shown to be con-
pling strengths. Note that while the coupling strengths sistent with the parallel-resistor model, with Matthiesen's
add in m*, they have opposite effects for superconduc- rule approximately verified for the ideal resistivity. The

32 2929 1985 The American Physical Society


2930 ZASADZINSKI, VAGLIO, RUBINO, GRAY, AND RUSSO 32

maximum resistivity of this model is about 231 pQ cm


and the intrinsic temperature-dependent resistivity at 300
K is about 21 pO cm. The coefficient of the T part of
the intrinsic low-temperature resistivity is found to a~ = 4.124 A
be =9.75&(10 pQ cm/K . These results, along with Tc=83K
Josephson tunneling measurements, will be discussed in
the following sections.

II. SAMPLE PREPARATION


AND CHARACTERIZATION

All films were made reactive dc sputtering using a


Plasmax triode source which allowed independent manip-
ulation of the discharge current and target potential (typi-
cally 400 — 700 V). Approximately 25 films were deposit-
ed onto polished, single-crystal sapphire substrates with
two different orientations, i.e., the sapphire c axis parallel
(0') or perpendicular (90') to the film normal. Optimum
substrate temperature for well-ordered films was 600'C, I

40'
35
measured by mounting a Chromel-Alumel thermocouple
to the surface of an adjacent substrate on the heater block.
The stainless-steel vacuum chamber was pumped sequen- FIG. 1. Typical 8-28 x-ray diffraction pattern showing the
tially by an oilless rotary pump, liquid-nitrogen-cooled uniaxial growth of the VN films along the [111]direction. The
sorption pump, and a closed-cycle helium cryopump peak height is about 100 times larger than conventional, diode-
which provided a hydrocarbon-free environment. After sputtered films of VN and NbN. No other reflections are ob-
bakeout the typical residual pressure in the chamber prior served.
to sputtering was 2& 10 Torr with the heater at 600 C.
High-purity (99.999%) argon was injected directly into
the Plasmax source, whereas the Nz gas was bled in via growth conditions rather than compatibility of film and
one of the chamber ports, both gases being pumped substrate crystal structures. The evidence for this is that
through a liquid-nitrogen-cooled orifice on the cryopump. NbN (and VN) films sputtered onto single-crystal sap-
Typical pressures for the Ar and Nz were 4 and 1 mTorr phire by conventional rf and dc diode methods show ran-
respectively, as measured by an ion gauge and a Baratron dom orientations, whereas NbN prepared by us under
absolute-pressure manometer. The vanadium target (0.75 identical conditions as the VN samples always exhibit ep-
in. diam) was prepared by melting VP-grade pellets from itaxial growth in the [111]direction. Since the (111) plane
MRC in an ultrahigh vacuum (UHV) electron-beam is the one of closest packing for fcc structure, it is not
hearth. Because of the sensitivity of T, to oxygen con- surprising the [111] growth is preferred. Possibly the
tamination in transition metals and their compounds, it is lower target potentials (400 — 500 V) compared to conven-
important to maintain as low a partial pressure of Oz as tional magnetron sputtering (1000 V) facilitates the pre-
possible. A stringent test of 02 contamination for any ferred orientation.
sputtering system is to deposit pure V at moderate rates The superconducting transition was determined resis-
and check T, . Our deposition of V films onto unheated tively and in some cases additional inductive measure-
substrates at rates of 3 A/sec resulted in T, values near ments were obtained using a SQUID (superconducting
5.0 K, close to the bulk value of 5.3 K. We believe this quantum interference device) susceptometer. The transi-
indicates that there are no significant problems with oxy- tion width b T„edtermi end by the 10%-to-90% criterion,
gen contamination in our films. Typical deposition rates was very small for resistive measurements of the best sam-
of the VN films were 100 A/min and their thickness was ples, usually 0.05 K or less. Susceptibility measurements
-4000 A. generally displayed values of b T, =0.2 K or less for the
The crystal structure of the deposited films was deter- best samples, whereas low T, films (-4.5 K) had widths
nuned by conventional x-ray diffraction. All films depo- as great as 1.0 K. The transition temperature was deter-
sited on 600'C substrates displayed only a single, sharp mined from the midpoint of the transition and the highest
x-ray line corresponding to reflections from (111) plane of value was 8.9 K.
the fcc structure, as shown in Fig. 1. The peak height is
about 100 times larger than that found in typical poly-
crystalline films of VN and NbN, and no other reflections
"
The VN system has been well characterized by a num-
ber of experiments on bulk samples. ' Efforts to make
thin films by reactive sputtering include the early work of
are observed. This indicates that essentially all of the Hofmann-Kraeft' and more recently the work of Zhao
grains are growing in the [111]direction. We refer to this et al. The bulk studies generally agree that the B 1 fcc
as polycrystalline epitaxy, and it is observed for both phase of VN„exists in the composition range
orientations of the sapphire substrate. The exact role of 0.72(x (1. 00. The lattice constant increases in a nearly

the substrate in this epitaxial growth has not been investi- linear fashion from ao 4. 0662 A at x =0.72 to
gated, but we believe the dominating factors are the ao — 4. 1398 A at x =1.00. Although the determination
32 PROPERTIES OF SUPERCONDUCTING VANADIUM NITRIDE. . . 2931

1.0 0.9 0.8 0.7 1.0

9—
~ ~
0.8
O~

Ims 0.6

0.4
Bulk
c Ajami and IVlacCrone
~ Zhao et al. (Films) 0.2
o Schubert et al.
+ Present Study
l I I l

4.130 4.110 4.090 4.070 4.050 2


a. (A)

FIG. 2. Superconducting transition temperature T, vs lattice FIG. 3. Superconducting T, (normalized T, p —9.25 K) vs


parameter ap for our films as well as bulk and thin-film results resistance ratio r~ for our VN„ films. Open circle data point is
from the literature. The data of Ajami and MacCrone (Ref. 10) from the work of Zhao et al. (Ref. 7). The shaded region corre-
are representative of other bulk results. The nitrogen content x sponds to the universal behavior demonstrated by high-T, 315
(top abscissa) corresponds with the values of ap obtained from compounds as well as the ternary compound ErRh484. A11 the
the bulk studies. The VN„ film data point near ap=4. 050 A VN„points lie above the universal curve, clearly demonstrating
was not single phase. less sensitivity to disorder.

of nitrogen content in VN„samples might contain some compounds. More recently, elemental niobium' and the
uncertainty, lattice-constant measurements are quite accu- ternary compound' ErRh484 were shown to follow this
rate. Considering this, the dependence of T, vs ao for our universal behavior. Surprisingly, this universal behavior
films, as well as the bulk' '"
and thin-film results from does not depend on the origin or nature of the disorder;
the literature, are plotted in Fig. 2. The maximum value thus "as-prepared, " radiation-damaged, and ion-implanted
of T, is found near ao — 4. 130 A, which corresponds to samples behave the same. One explanation of the univer-
x =0.96 in the bulk studies. The decrease of T, with de- sality of this behavior' postulates that it is intrinsic to su-
creasing ao is consistently found, but the differences be- perconductors whose Fermi energy Ez lies near a sharp
tween the various sets of data are quite large. For exam- peak in the electronic density of states N(E). In this
ple, at ao — 4. 070 A the T, values range between 2 and 6 model, disorder shortens the electron lifetimes, thus
K. It might be argued that bulk and thin-film data smearing out N(E) and reducing its value at EF. This in
should not be compared because effects such as strain turn reduces Az and hence T, . Therefore the effect does
might change the lattice constant for a given composition not depend on how the electron lifetimes (related to the
in thin films. However, Zhao et al. have shown that for residual resistivity and r~) are shortened.
a given lattice constant the nitrogen content of thin films The data for our VN films, also shown in Fig. 3, are in
is less that that of the bulk material, implying that all clear disagreement with the above universal behavior. '
thin film data should lie below the bulk data in Fig. 2. Thus the T, of VN is less sensitive to disorder, and this is
Clearly this is not the case. Although the lattice constant consistent with the insensitivity of T, to radiation damage
seems to be consistent indicator of nitrogen content in in experiments' on NbN. ' The explanation may be
bulk samples and allows a reasonable estimate in thin found in band-structure calculations ' ' for VN and
films, it is apparent that composition alone does not NbN, supported by experiment, ' which indicate that EF
determine T, . One possible reason is the amount and type lies not to a peak, but midway between a peak and a valley
of disorder, and this will be discussed in the next section. in N(E). Recalling that T, of low-T, 315 compounds
increases with disorder because EF is at a valley in N(E),
III. RESULTS AND DISCUSSION it is not difficult to imagine a low sensitivity to disorder
in VN, as shown in Fig. 3. Calculations of N(E) and
A. Disorder E~ for substoichiometric TiN„, which has a similar N(E)
at x =1 as VN, shows that N(E) is considerably altered,
There has been considerable interest in the role of disor- but that N(EF) changes little (it actually increases slight-
der in superconductivity since the pioneering work of ly), with the increased disorder in going from x =1 to
Poate et ah. , ' who demonstrated the "universal" behavior x =0.75. This increased disorder is not surprising since,
of T, vs rz (the shaded region of Fig. 3) for high-T, 215 for example, at x =0.75, the vacancies are about 15 A
2932 ZASADZINSKI, VAGI. IO, RUBINO, GRAY, AND RUSSO 32

apart on average, and should lead to significant electron 1000 llillll Ilia )}ill i( ltlii(l$l l I)l&1&&ll II II)I &iilll illl) I1$I
oo
scattering and concomitant broadening of the structure in (a) VN No. 2 ~cP
0o

N(E). T =54K
Based on the changes in N(E) found in Ref. 22 for 97.5—
x =0.75, it is surprising that a rigid-band model could be E
used' to describe the T, variations for bulk VN shown
in Fig. 2. A simple rigid-band calculation, using K(E) Cg
0
0
oo

from Ref. 20, assuming each nitrogen atom contributes 95.0— 00


0 o

five electrons to the conduction band, and assuming that o

-1.
Az — 1 and p'=0. 13 for x =1, gives T, —
1.4 K for
0

x =0.72 using the McMillan equation. Although this 92 5 I i I I I I I I li I I I I I I l I I I i I ili i I I Illa' I I II I I I I i l I I I ii l I t ll I I I l i ll


agrees reasonably well with the bulk data of Ref. 10 0 30 60 90 120 150 180 210 240 270 300
shown in Fig. 2, it is clear from the other data shown in
Fig. 2 that the composition x (or lattice constant ao) alone )oo
is insufficient to determine T, . The possibility of oxygen 40— )
l ( I
l l I
l I &
l
( ) l I I l
( 1 l ) i l ) I
l
oo
oooooo
contamination reducing T, cannot be ruled out. It is also (b) VN No. 5
possible, depending on the band structure, that the sam- T =895K
ples with higher T, values are actually more disordered,
due to impurity or grain-boundary scattering. Knowledge E
of rR for all samples shown in Fig. 2 would be most help-
CP
30—
ful to clear us this point.

B. Temperature-dependent resistivity aiiailt

The temperature dependence of the electrical resistivity 20—


l ) ) l ) l I I ( l t ( l ) ( l ) & l ( ( l l ( I

p(T) was measured on three films using standard four- 0 30 60 90 120 150 180 210 240 270 300
terminal techniques (see Fig. 4). The behavior of p(T) is T (K)
similar to the high-T, A15 compounds, i.e., an initial T
dependence at low temperatures followed by a region of
FIG. 4. Resistivity versus temperature for two VN films with
resistance ratios (a) r& —1.07 for sample 2 and (b) rR —1.86 for
negative curvature. Including the VN film reported in
sample 3.
Ref. 7, the coefficient of the T term is found to decrease
monotonically with the measured residual resistivity.
Such behavior was also found by Gurvitch et al. for
Nb3Sn. A parallel-resistor model has been proposed to as a function of A. When A =9.75X10 pQcm/K,
explain the saturation of p(T). It assumes a temperature- the values of p are sufficiently close (from Table I,
and sample-independent resistivity pm in parallel with the 231+1 pQ cm) to demonstrate the consistency of the
sum of the ideal residual (po) and ideal temperature- model. The temperature at which the S' term equals the
dependent resistivities. To check this model at low tem-
A' term is (p~/A)'~ -400 K, independent of sample,
peratures, we calculate the parallel combination of which justifies its neglect below 40 K where the T term
pm and po+AT to be is found The im. plication of this agreement is that the T2
term does not depend on residual resistivity. The value of
p =po+ A' T' —8'T4, p~ is not too far from the maximum metallic resistivity
where po
—p po/(p+po), A'=p A/(p +po), and
of 251 pQcm, calculated by Hake for NbN. Changing
B'=p are the coefficients determined by only the lattice constant to the smaller value for VN,
A /(p~+po) Hakes's analysis yields a maximum metallic resistivity of
fitting the experimental data. Neglecting B' for the mo-
ment, we calculate p as a function of A for each of the about 236 pQ cm for VN. One also finds po — pov A/A',
samples listed in Table I, using (from above) and pz. , which is the difference in the ideal resistivity at
10 K and 300 K, is given in terms of the measured resis-
p~ =pa/(1 —V'A'/A) tivity p300 K, by

TABLE I. Parallel-resistor model. Parameters were determined using the paraBel-resistor model for
our samples shown in Fig. 4 and that of Fig. 3 of Ref. 7. The resistivities of Ref. 7 were reduced uni-
formly by 3% to significantly improve the fit. This is justified since film thicknesses can rarely be mea-
sured with such accuracy. The parameter A is 9.75)& 10 pQ cm/K .
I
Sample po A' Pm po p30o pT
4
(pQ cm) (10 pQcm/K2) (pQ cm) (p, Q cm) (pQ cm) (pQ cm)
3 22 7.9 230 25 42 26
Ref. 7 55 5.6 232 73 65 17
2 93 3.5 232 154 100 21
32 PROPERTIES OF SUPERCONDUCTING VANADIUM NITRIDE. .. 2933

(P300 K PO)P +P3rN KPO tunnel barriers. Even though vanadium oxides had been
PT= previously found unsuitable for barriers, this method was
Pm P300 K tried since it had been successful in fabricating low-
The agreement for the three samples is much poorer than leakage NbN junctions. In Fig. 5 conductance data for
for fitting AT (last column of Table I). Forcing a such a junction using a Pb counterelectrode are shown. A
minimum deviation in pT for the three samples results in well-defined sum gap is observed, leading to a value of
a lower p ( —190 pQcm) and a larger variation in the b, =1.09 mV for this VN sample. The ratio 2b, (0)!k~ T,
T term, so a more complete study is desirable to ascer- is 3.78, somewhat reduced from the value 3.99 for
tain whether Matthiesen's rule is followed for the ideal stoichiometric VN. The change from weak-coupling to
resistivity. strong-coupling behavior as T, approaches its maximum
The above discussion casts little light on the origin of value is similar to that observed in NbN as well as in
the T term in VN, which has been suggested as being 215's. Leakage conductance for this junction is relatively
due to electron-electron (paramagnon) scattering. Howev- high (-25 %), and a mor'e extensive investigation of the
er, it seems unlikely that the very similar results found in plasma-oxidation technique using higher-T, VN films is
Nb3Sn would have different origins (paramagnon effects currently underway. Attempts to restore the surface of
are expected to be small in Nb3Sn). Also, a stronger elec- films, previously used for resistivity, by mild ion bom-
tron scattering due to paramagnons compared to phonons bardment, followed by plasma oxidation, were unsuccess-
would imply a large coupling constant A, „making it un- ful. Good junctions were formed but superconductivity in
likely that VN would be superconducting at 9 K (see com- the surface layer of the VN films was severely degradated.
ments in the Introduction). A more reasonable picture is
that VN behaves like pure V, i.e., A, & A,„but nevertheless D. Josephson tunneling
T, is reduced by spin fluctuations. Available experimen- Josephson tunnel junctions were fabricated on some VN
tal data on VN, including our results, are consistent with
films using light-sensitive semiconducting CdS films for
the theoretical values (A~ —1. 1 and A,, -0.
3) suggested by
tunneling barriers and indium counterelectrodes. The
Rietschel et aI.. in their intermediary" situation in which
basic fabrication technique and the behavior of Josephson
T, would be -22 K if spin fluctuations are ignored. The tunnel junctions realized by CdS barrier depositions on
similarity of the p(T) behavior in VN and other high-T,
different base electrodes is described in Ref. 28 and 29.
superconductors is understandable within this picture.
The VN-CdS-In junctions made by this technique
C. Tunneling
displayed I
Vcurves with -well-defined sum-gap struc-
tures, but with leakage currents of the order of
All of the better films were either used for resistivity 30%— 40%. The magnetic field dependence of the zero-
measurements or lost in susceptibility measurements. voltage Josephson current, in "dark" conditions, is report-
Several films with T, near 7 K were used to test the ed in Fig. 6 for one of our samples with T, (VN) =8.6 K.
method of plasma oxidation of the VN surface to form The well-defined Fraunhofer-type behavior indicates good
barrier uniformity. Using the magnetic field periodicity
observed in the diffraction pattern (AB~;„-=0.35 G), the
film thickness (tvN — 500 nm, tcds —— 60 nm, t&„— —150
nm), the junction length perpendicular to the field
V&IOx&Pb (233 pm), and the bath temperature (3.33 K), a value of
To=6.~ K the London penetration depth of VN equal to 130+10 nm
= 1.08 m
can be deduced. This value is consistent with the low
1.5— resistivity of our VN films compared to NbN films, in
which a value of 500 nm is found. The temperature
dependence of the zero-field Josephson current was also
measured for these samples and the behavior was found to

IC {mAi
o'0
o
——1.0 0
VN 0
0.5— 0 0
0 0
0 0
0 ——05
0 oo
I 0 0 0 0 o 0 0 OOO
1.0 2.0 3.0 0 o o 0 e.0 0o 0
0 0 o Qo 00 0
Y (mY) 0 0
I l l
0
—1.0 -0.5 0.5
FICx. 5. Normalized dynamic conductance versus bias for l„(mA)
VN/O„/Pb tunnel junction fabricated by plasma oxidation of
the VN surface. A well-defined sum gap is observed leading to FICr. 6. Maximum Josephson current versus magnet current
the ratio 26{0)/k~ T, =3.78. for a VN tunnel junction utilizing a CdS artificial barrier.
2934 ZASADZINSKI, VAGLIO, RUBINO, GRAY, AND RUSSO 32

be consistent with the proximity effect model that gen- while the Frauenhofer pattern observed in Josephson tun-
erally applies to CdS-barrier Josephson junctions. ne1ing through a CdS barrier reveals the penetration depth
to be 1300+ 100 A.
IV. SUMMARY Tote added. Recent resistivity measurements on our
We have reported on high-quality VN„ films made by
cleanest sample ( rtt -4) show p( T) ~ T for T, & T & 30
K rather than the T dependence for the lower rit sam-
dc triode sputtering. The films exhibit a very high degree ples shown in Fig. 4. This crossover from T to T as
of preferential orientation with the [111]direction normal resistivity is reduced is in agreement with the empirical
to the sapphire substrate. Measured T, are higher than trends noted by Gurvitch.
bulk for the same lattice constant, especially for N defi-
cient samples. The role of disorder in reducing T, is
ACKNO%'LEDGMENTS
found to be much less than for high- T, A15 superconduc-
tors. A T term in the temperature-dependent resistivity We thank M. Gurvitch for helpful discussions. This
is found, as in the case of NbsSn, and a parallel-resistor work is supported in part by the U. S. Department of En-
model successfully accounts for differences amongst sam- ergy. One of us (J.Z. ) would like to acknowledge the re-
ples with a maximum resistivity of 231 pQ cm. Quasi- ceipt of a Cottrell grant from the Research Corporation
particle tunneling confirms that VN is strong coupling, (New York, NY).

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I7There is also clear disagreement with the "universal behavior" lished.
in SmRh4B4, but this is associated with disorder enhanced

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