800.848.

1141
RHFS.com

Slurry/Chemical
Benefits

The RHFS small-scale Slurry/Chemical Blend and

Distribution Unit is designed to support one or two CMP
Mix and Delivery
or similar process tools. The SMDU/CMDU platform is
applicable to both slurry and liquid chemistry applications.
Unit (SMDU)
This system blends slurry or chemical from an on-board 20
liter (5 gallon) container with deionized water and (optionally)
another chemical and delivers to a recirculated day tank.
The SMDU/CMDU provides users with a mini, pressure-
controlled "global loop" from this day tank to support a small
number of CMP polishers without the expense of a major
bulk-slurry installation or to perform R+D activities without
disrupting existing infrastructure.

Standard Features

• Accurate and consistent automatic blending of multiple

concentrated chemicals and/or slurries for small scale
distribution
• White polypropylene cabinet with blue-clear PVC
process area cover and stainless steel frame
• Compact blend and distribution modules integrated into
a single enclosure
• PLC control system including touchscreen for operator
controls and diagnostics with local data trending and
file storage
• User configurable recipe storage capability
• Continuous recirculation and mixing of distribution tank
• Periodic recirculation of concentrated chemical and/or
slurry
• Levitronix distribution pump integrated for active
pressure control
• Cleanroom assembled and tested
 800.848.1141
RHFS.com

Slurry/Chemical Mix and

Delivery Unit (SMDU)

Optional Features
• FM 4910 PVC Cabinet Materials
• Internal pump to pull concentrated chemical from an external drum Continuous
filtration of distribution tank
• Concentration monitoring for Hydrogen Peroxide dosed slurry systems
• Humidifier vessel to provide humidified nitrogen to concentrate vessel and
distribution tank to reduce the amount of slurry that dries along the top edge of
the fluid level in the respective reservoirs
• Spray bars, spray gun, and glove ports for ease of washdown
• SCADA, Ethernet, or web based communication capabilities to remotely monitor
and/or control system operation
• UL508A Listed electrical panel with UL Listed electrical enclosure

SMDU / CMDU Operations

This system mixes deionized water with concentrated liquid slurry/chemical and
delivers the mixture to a distribution tank. The system recirculates and filters the
contents of the distribution tank and dispenses the diluted slurry/chemical to either a
nearby tool or global loop.

The operation of the system is divided into two different sections:

Blend Section Distribution Section

–– Dilutes concentrated slurry/ –– Stores the slurry/chemical for
chemical with deionized water distribution and contains one
by simultaneously operating two distribution pump, an optional
different peristaltic pumps at fixed filter, and the storage tank.
flow rates. The Blend Module only
operates when replenishing the
recirculation tank.

One Call Gets it All!