Stephan Sylvest Keller, DTU Nanolab

Introduction to DryLab A

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 Dry Lab Assignment A
– Microfabrication of an electrochemical sensor
• Describe the design and fabrication of a predefined electrochemical sensor using screen
printing
• Describe the design and fabrication of the electrochemical sensor using cleanroom based
microfabrication methods
• Discuss the advantages and drawbacks of the two approaches
• Submit an individual Dry Lab Protocoll by Friday 19/03

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 Step 1 - Design an electrode chip
• Three electrode layout with working electrode (WE), counter electrode (CE) and reference
electroe (RE) (see Arto’s introduction of the different parts in module 4)
• WE and CE are carbon-based
• Pseudo RE is made of Au
• Insulating layer between the electrodes (avoiding short circuits)
• Well-defined electrode area (e.g. with a passivation layer)

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 Step 2 - Screen printing of electrodes
• Describe the fabrication step by step (main steps, not the exact parameters/materials)
• Use schematic drawings of steps, stencils and substrates

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 Step 3 – Cleanroom-based fabrication of electrode
• Describe the fabrication step by step (main steps, not the exact parameters/materials)
• Use schematic drawings of steps, stencils and substrates
• Specifically, include drawings of the photomasks used for photolithography

Photomask 1
1st UV exposure

Au evaporation

Lift-off 1

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 Step 4 – Discussion
• Discuss the advantages and drawbacks of the two approaches

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