Purestat Engineered Technologies, Inc: The Quality Choice in Clean Room Certification

PURESTAT ENGINEERED
TECHNOLOGIES, INC
ISO CLASS 5 CLEANROOM
CLEANROOM CERTIFICATION REPORT
REPORT NO. 14145
OCTOBER 23, 2014
The Quality Choice in

Clean Room
Certification
Phone (214) 607-0555 w Fax (214) 607-0564

www.cleanroomcerts.com
Table of Contents
Section 1
Room Layout ...................................................................................................... 1
Filter Layout ...................................................................................................... 2
Section 2 - Airflow Velocity Measurements

Summary .......................................................................................................3
Maps .......................................................................................................4
Data .......................................................................................................5
Section 3 - Room Pressurization

Summary .......................................................................................................6
Maps .......................................................................................................7
Data .......................................................................................................8
Section 4 - Particle Counts

Summary .......................................................................................................9
Maps .......................................................................................................10
Data .......................................................................................................11
Section 5 – CCSI Procedures

Velocity Test .......................................................................................................13
Pressurization .......................................................................................................15
Particle Counts .......................................................................................................16
Section 6 - Equipment Calibration Certificates
71 Winter Ct  Woonsocket, RI 02895  ph (401)765-5743  fx (401)769-6739 www.cleanromcerts.com

PURESTAT ENGINEERED TECHNOLOGIES, INC
ROOM LAYOUT
A B C D E F G H
1
CLEANROOM
3
ISO CLASS 5
4
6 AIR
CONTROLS
SHOWER
7 ROOM
GOWNING ROOM
TESTS
Customer: PURESTAT
Test: Room Layout 1. Airflow Velocity
Certification & Calibration Services, Inc. Test Date: 10/23/2014 2. Pressurization
3201 Fair Oak Drive Project Mgr: David Bowman 3. Particle Counts
Rowlett, TX 75089 Technician: Marc Lambert
ph: (214) 607-0555 fx: (214) 607-0564
Page 1
FILTER LAYOUT
A B C D E F G H
1
TESTS
Customer: PURESTAT
Test: Filter Layout 1. Airflow Velocity
Certification & Calibration Services, Inc. Test Date: 10/23/2014 2. Pressurization
3201 Fair Oak Drive Project Mgr: David Bowman 3. Particle Counts
ph: (214) 607-0555 fx: (214) 607-0564
Page 2
PURESTAT ENGINEERED TECHNOLOGIES, INC.
CLEANROOM CERTIFICATION SUMMARY
TEST DATE: OCTOBER 23, 2014
SUMMARY
AIRFLOW VELOCITY MEASUREMENTS
INSTRUMENTATION:
1. Shortridge Multimeter model ADM-870 with velgrid attachment.
PROCEDURE:
Measurements of 8 second duration were taken on a 2' X 2' test matrix under each filter
at an elevation 6" beneath each filter face as per procedures in IES-RP-CC-006.2. Four
measurements were recorded for each 4' X 4' filter within the cleanroom.
RESULTS
1. 56 Measurements were taken on 14 filters. The results are as follows:
Average FPM: 161

Standard Deviation: 33.1
Relative Standard Deviation: 20.5%
Average CFM: 1,552
Air Changes/Hour: 408
3201 Fair Oak Dr., Rowlett, TX 75089 PH: 214 607-0555 FX: 214 607-0564 www.cleanroomcerts.com
Page 3
AIRFLOW VOLUME MEASUREMENTS (CFM)
A B C D E F G H
1
2 479 1,471 1,647 1,702 1,753 1,767 1,830
4 1,565 1,637 1,454 1,519 1,563 1,572 1,772
TEST DATA:
Customer: PURESTAT
Test: Velocity Meas. Avg CFM: 1,552
Certification & Calibration Services, Inc. Test Date: 10/23/2014
3201 Fair Oak Drive Project Mgr: David Bowman
ph: (214) 607-0555 fx: (214) 607-0564
Page 4
FILTER VELOCITY MEASUREMENT DATA
AREA LOCATION 1 2 3 4 AVG FPM AVG CFM DATE
CLEANROOM A2 41 67 44 47 50 479 10/23/2014
CLEANROOM A4 165 146 170 169 163 1,565 10/23/2014
CLEANROOM B2 176 143 119 173 153 1,471 10/23/2014
CLEANROOM B4 174 103 198 205 170 1,637 10/23/2014
CLEANROOM C2 168 174 135 207 171 1,647 10/23/2014
CLEANROOM C4 151 140 171 142 151 1,454 10/23/2014
CLEANROOM D2 196 168 164 179 177 1,702 10/23/2014
CLEANROOM D4 146 153 189 143 158 1,519 10/23/2014
CLEANROOM E2 173 211 132 212 182 1,753 10/23/2014
CLEANROOM E4 181 150 132 186 162 1,563 10/23/2014
CLEANROOM F2 196 157 180 201 184 1,767 10/23/2014
CLEANROOM F4 165 185 114 189 163 1,572 10/23/2014
CLEANROOM G2 193 188 224 155 190 1,830 10/23/2014
CLEANROOM G4 161 225 185 165 184 1,772 10/23/2014
AVERAGE 161 1,552
STANDARD DEVIATION 33.1
RELATIVE STANDARD DEVIATION 20.5%
OPEN FILTER AREA (FT2) 9.63
AVERAGE CFH/FILTER 93,148
ROOM SIZE (CF) 3,199
TOTAL CFM 1,304,069
AIR CHANGES/HOUR 408
Page 5
SUMMARY
ROOM PRESSURIZATION MEASUREMENTS
INSTRUMENTATION:
1. Shortridge Multimeter model ADM-870.
DESIGN REQUIREMENTS:
1. Cleanroom maintains a positive pressure to areas with less clean requirements.
PROCEDURE:
Close all doors throughout the cleanroom. Measure and record the pressure differential
(in. w.g.) between the inner most cleanroom or clean space and adjacent spaces, rooms, or
the exterior environment. Measure and record the pressure differential (in. w.g.) between
the next adjacent spaces or rooms and other spaces or the exterior environment. Continue
the above measurements until all pressure differentials have been obtained and recorded.
RESULTS
1. The results are indicated on the enclosed map and data sheet.
2. The cleanroom is positive to areas with less clean requirements.
Page 6
ROOM PRESSURIZATION MEASUREMENTS
A B C D E F G H
1
2
CLEANROOM
3
4
0.014 " w.g.
5 0.018 " w.g.
6
AIR
7 CONTROLS SHOWER
ROOM
GOWNING ROOM
TESTS
Customer: PURESTAT
Test: Pressurization Cleanroom is positive
Certification & Calibration Services, Inc. Test Date: 10/23/2014 to areas with less
3201 Fair Oak Drive Project Mgr: David Bowman clean requirements.
ph: (214) 607-0555 fx: (214) 607-0564
Page 7
ROOM PRESSURIZATION DATA
LOCATION AVG. PRESS. AREA DATE
A5 0.018 " w.g. *ISO Class 5 Cleanroom/Controls Room 10/23/2014
F5 0.014 " w.g. *ISO Class 5 Cleanroom/Air Shower 10/23/2014
* ROOM UNDER POSITIVE PRESSURE
Page 8
SUMMARY
AIRBORNE PARTICLE COUNTS
INSTRUMENTATION:
1. Climet Instruments model CI-750 particle counter with 2.6 CFM sampling rate and
minimum sensitivity of 0.3 microns.
DESIGN REQUIREMENTS:
1. ISO Class 5 </= 100 particles/cu. ft. at 0.5 microns
PROCEDURE:
Particle counts were taken as specified in ISO 14644-1 with sample volumes of 1 cubic foot.
Isokinetic probes were used on each particle counter and size discriminations of 0.3, 0.5,
1.0, and 5.0 microns were recorded.
RESULTS
1. A total of 15 measurements were taken. The results for the Cleanroom are as follows:
ISO 14644-1
Area Average Standard Classification
particle/ft3 Deviation @0.5 microns
Cleanroom 23 23 ISO Class 5
2. The cleanrooms were tested in the "At Rest" phase and passed ISO 14644-1 Specifications
as defined above.
Page 9
AIRBORNE PARTICLE COUNTS > 0.5 MICRONS
A B C D E F G H
1
2 19 9 35 18 24
3 91 10 7 19 28
4 3 1 40 16
TEST DATA:
Customer: PURESTAT
Test: Particle Counts Average particle/ft3:
Certification & Calibration Services, Inc. Test Date: 10/23/2014 23
3201 Fair Oak Drive Project Mgr: David Bowman
ph: (214) 607-0555 fx: (214) 607-0564
Page 10
PARTICLE COUNT DATA
1 CUBIC FOOT SAMPLES (PER ISO 14644-1 SPECIFICATIONS)
AREA LOCATION > 0.3 uM > 0.5 uM > 1.0 uM > 5.0 uM DATE
CLEANROOM A2 26 19 12 3 10/23/2014
CLEANROOM A3 149 91 54 14 10/23/2014
CLEANROOM C2 24 9 7 0 10/23/2014
CLEANROOM C3 21 10 4 1 10/23/2014
CLEANROOM C4 5 3 1 0 10/23/2014
CLEANROOM D2 52 35 23 8 10/23/2014
CLEANROOM D3 11 7 7 1 10/23/2014
CLEANROOM D4 4 1 1 0 10/23/2014
CLEANROOM F2 29 18 11 8 10/23/2014
CLEANROOM F3 26 19 15 7 10/23/2014
CLEANROOM F4 109 40 20 2 10/23/2014
CLEANROOM G2 34 24 17 4 10/23/2014
CLEANROOM G3 42 28 22 7 10/23/2014
CLEANROOM G4 23 16 9 2 10/23/2014
STANDARD DEVIATION>> 41 23 13 4
STANDARD ERROR>> 11 6 4 1
AVERAGES>> 40 23 15 4
ISO 14644-1 CLASS 5 LIMITS 289 100 24 1
This area has "PASSED" ISO 14644-1 for ISO Class 5 at 0.5 microns
Page 11
CERTIFICATION AND CALIBRATION SERVICES, INC.
CLEANROOM TESTING PROCEDURES
TESTING PROCEDURES
Testing may be performed at different stages as characterized by the completeness of cleanroom
installation and operational modes as defined below. The testing stages are defined as follows:
Stage 1 As-Built Facility: A clean room which is complete and operating with all services
connected and functioning, following initial clean down. There is to be no process
equipment or operating personnel within the facility.
Stage 2 At-Rest Facility: A cleanroom which is complete and operating. The room is to
be fully populated with process equipment staged in a non-operational mode.
There shall be no operating personnel present.
Stage 3 Operating Facility: A cleanroom in normal operation, fully populated with

functioning process equipment and operating personnel.
NOTE: At times it will be necessary to take exception to strict compliance with the
aforementioned testing stages. Deviation or interaction among the stages may be
required due to availability or operational status of the process equipment. These
situations shall be identified and acknowledged as part of the contractual
agreement.
REFERENCE DOCUMENTS
1. NATIONAL ENVIRONMENTAL BALANCING BUREAU (NEBB): Procedural Standards for

Certified Testing of Cleanrooms.
2. FEDERAL STANDARD 209E: Clean Room and Work Station Requirements, Controlled
Environment.
3. RECOMMENDED PRACTICE IEST-RP-CC-001-86: HEPA Filters
4. RECOMMENDED PRACTICE IEST-RP-CC-002-86: Laminar Flow Clean Air Devices.
5. RECOMMENDED PRACTICE IEST-RP-CC006-84-T: Testing Clean Rooms.
6. RECOMMENDED PRACTICE IEST-RP-CC-013-86-T: Equipment Calibration or Validation

Procedures.
7. ISO 14644-1: Cleanrooms and associated controlled environments - Part 1: Classification of air
cleanliness
8. ISO 14644-3: Cleanrooms and associated controlled environments - Part 3: Metrology and test
methods
Page 12
I. FILTER AIRFLOW AND UNIFORMITY TESTS
A. SCOPE
1. The purpose of these tests is to determine the average airflow velocity and/or volume, the uniformity
of airflow within a unidirectional area of a cleanroom, and the total airflow provided.
2. Measurement readings shall be taken at a specified distance (entrance plane) from the face of the filter
system, such as 3 to 6 inches (75 to 150 mm) from the filter face, or as specified by the Buyer or
Owner.
3. The measurement area shall be a cross-sectional area of the filter face normal to the airflow. This area
shall consist of the filter media area, which is exclusive of the filter frame or patch area of the filter
(the net free area). For example, a 48 inch x 24 inch (1200 mm x 600 mm) HEPA filter does not have
a net free area of eight square feet (0.72 square meters), but is closer to a little over seven square feet
(0.63 square meters), with the frame, etc. deducted.
B. MEASUREMENT INSTRUMENTATION
1. Use an airflow velocity measurement device capable of accurate velocity measurement between 50
fpm and 120 fpm (0.25 m/s and 0.80 m/s) velocity ± 5 percent of the reading.
C. VELOCITY TEST PROCEDURES (Unidirectional Airflow)
1. Divide the net filter face (entrance plane) for single point measurements into grids of equal area of not
greater than one square foot (0.09 square meters), or as specified by the buyer or Owner. With other
types of measurements, such as a tube array sensor, individual grid areas shall not exceed four square
feet (0.37 square meters).
2. Measure and record the velocity at the specified distance of each grid point. Special care is necessary
to keep the sampled area unobstructed during the airflow measurement. The use of a support stand is
recommended with sensor type measuring instruments.
3. Take the measurement for a minimum of 5 seconds or the minimum specified time for the meter,
using the average during that period as the measurement. No adjacent reading should vary by more
than 20 percent of one another.
D. AIRFLOW AND UNIFORMITY REPORTING
1. Velocity Reports
a. Record all airflow measurements with corresponding grid locations.
b. Calculate the average airflow velocity, which is the arithmetic mean of the recorded velocity
measurement readings, using the following Equation:
Equation: VAM = (V1 + V2 + ... + VN) /N
Where: VAM = Arithmetic Mean Velocity - fpm (m/s)
Page 13
VN = Velocity readings - fpm (m/s)

N = Number of readings
c. Calculate the standard deviation of the velocity measurement readings using the following
Equation:
SDV = (((V1 - VAM)2 + (V2 - VAM)2 + ... + (VN - VAM)2)/ N-1)1/2
Where: SDV = Standard Deviation of velocities - fpm (m/s)

VN = Velocity readings - fpm (m/s)
N = Number of readings
d. The relative standard deviation (uniformity) of the airflow velocity may be calculated as a
percentage using the following Equation:
RSD = SDV/VAM x 100
Where: RSD = Relative Standard Deviation - %

SDV = Standard Deviation of velocities - fpm (m/s)
VAM = Velocity average - fpm (m/s)
E. TEST ACCEPTANCE
1. The average airflow velocity for the cleanroom should be within ± 5 percent of that specified by the
Buyer or Owner unless otherwise specified.
2. The relative standard deviation should not exceed 15 percent unless otherwise specified by the Buyer
or Owner.
3. Identify all readings which are outside the airflow uniformity ranges.
Page 14
II. PRESSURIZATION TEST
A. SCOPE
1. After a cleanroom or clean space has been tested successfully for airflow volume, velocity, uniformity
and parallelism, the proper pressurization of cleanroom areas must be verified. The purpose of this test
is to verify the capability of the HVAC systems to maintain the specified pressure differentials.
B. INSTRUMENTATION
1. An electronic manometer, inclined manometer or differential pressure gauge should be used with all
openings and doors closed and all air handling systems operating.
C. PROCEDURE
1. Measure and record the pressure differentials (in.w.g. or Pa) between the inner most cleanroom or
clean space and adjacent spaces, rooms, or the exterior environment.
2. Measure and record the pressure differential (in.w.g. or Pa) between the next adjacent spaces or rooms
and other spaces or the exterior environment.
3. Continue the above measurements until all pressure differentials have been obtained and recorded.
D. REPORTING
1. Report all measured pressure differentials to the nearest 0.01 in.w.g. (2.5 Pa) at recorded or specified
locations.
E. ACCEPTANCE
1. Specified pressurization levels (such as 0.03 to 0.05 in.w.g. or 7.5 to 12.5 Pa) are subject to the
agreement between the Buyer and the Seller.
Page 15
III. AIRBORNE PARTICLE COUNT
A. SCOPE
1. The airborne particle count test is performed to determine the actual particle count level within the
facility at the time of the test (as-built, at-rest, or operating).
B. TEST APPARATUS
1. Use an optical particle counter having a particle size discrimination capability to count particles 0.5
micron and larger for testing clean areas designated ISO Class 6(Class 1000) and greater, a capability
to count particles 0.2 micron and greater for testing clean areas designated ISO Class 5(Class 100),
and a capability to count particles 0.1 micron and greater for testing clean areas designated from ISO
Class 1 through 4(Class 1 through Class 10).
C. TEST PROCEDURES
1. Verify that all aspects of the cleanroom system which contribute to its operational integrity (air
handling, filtration systems, walls, ceilings, floors, etc.) are complete and functioning nominally in
accordance with the requirement of the type clean room and the operational mode under test. The
requirements are those specified by the Cleanroom Owner.
2. Establish a test point grid pattern at the working level which satisfies user requirements and is
compatible with the type of cleanroom and the operational mode being tested.
3. Sampling Points - ISO 14644-1
a. Derive the minimum number of sampling points from the following equation:
NL = (A)1/2
Where: NL = Minimum number of sample locations

A = Area of the cleanroom in square meters
b. Where only one sampling location is required, a minimum of three sample volumes shall be taken.
4. The size of particles for room certification particle counts shall be as agreed between the Owner and
Certification Firm or as specified. Particle counts and size normally shall be based on Table I of
Federal Standard 209E Airborne Particulate Cleanliness Classes or Table 1 of ISO 14644-1
Cleanrooms and associated controlled environments.
a. For example, particle counts for a ISO Class 5(Class 100) cleanroom may be based on 0.2 micron,
0.3 micron, and/or 0.5 micron particle sizes per unit volume of air depending on the agreement or
specification.
Note: All measurements are made under ambient conditions; there is no induced challenge.
5. Each sample of air tested at each location shall be of sufficient volume such that at least 20 particles
would be detected, if the particle concentration were at the class limit, for each specified particle size.
Page 16
The following formulas provide a means of calculating the minimum volume of air to be sampled as a
function of the number of particles per unit volume listed in the appropriate table:
ISO 14644-1 (Table 1):
Volume = 20/[class limit (particle/volume) from Table 1] x 1000 {Volume is in litres}
6. The volume of air sampled shall be no less than 2 litres (.071 ft3) for ISO 14644-1. The results of the
calculation of the sampled volume shall not be rounded down.
D. REPORTING
1. Record the mean particle count at each grid location.
2. Note all measurement exceeding the specified air cleanliness level.
E. ACCEPTANCE
1. To classify the complete cleanroom as meeting the specified air cleanliness level, particle counts
shown on the sample point plan should not exceed the specified level. Clean work zone areas within
the cleanroom may also be specified and classified by the maximum allowable particle count, in
addition the room or work area may be classified differently in the as-built, at-rest. and operating
facility modes. Classification requirements should be specified.
Page 17
CCSI Test Equipment List
Test: Airflow Velocity Measurements/Room Pressurization

Equipment: Anemometer
Manufacturer: Shortridge Instruments
Model: ADM-870
Serial Number: M01113
Calibration Due: 02/02/2015
Test: Airborne Particle Counts
Equipment: Particle Counter
Model: CI-750
Serial Number: 067708
Calibration Due: 01/31/2015
3201 Fair Oak Dr. w Rowlett, TX 75089 w ph: (214)607-0555 w fx: (214)607-0564 w www.cleanroomcerts.com
Pro-Calibration. LLC
480 Harwich Rd. Brewster, MA 02631
774-323-3662
Calibration Certificate
Manufacturer: SHORTRIDGE INSTRUMENTS CUSTOMER: CCS Inc.

Model: ADM-870 71 Winter Court
Serial Number: M01113 VVoonsocketRI02895
Asset Number: CCS-008
Pro-Calibration, LLC certifies that the above listed instrument meets or exceeds all specifications as stated in the referenced ·
procedure (unless otherwise noted). It has been calibrated using measurement standards traceable to the National Institute of
Standards and Technology (NIST), or to NIST accepted intrinsic standards of measurement, or derived by the ratio type of
self-calibration techniques. This calibration complies with ANSI/NCSL Z540.3.2006 and or ISO/IEC 17025:2005. (TUR >=4: 1) in
accordance with "The Guide to the Epression of Uncertainty in Measurement (GUM)".This report may not be reproduced, except
in full, unless permission for the publication of an approved abstract is obtained in writing from the calibration organization
issuing this report.
JcALIBRATION INFORMATION
Cal Date 2 Feb 2014 Temperature: 20.0"C As Received: In Tolerance

•
Next Cal Due 2 Feb 2015 Humidity: 40 % As Returned: In Tolerance
Cal Procedure: Manufacturer Specifications Test Result: y
I R'm"k>•
!sTANDARDS USED FOR CALIBRATION
Asset Number Description Cal. Date Due Date •

CTI1064 FLUKE 725 MULTIFUNTION PROCESS 01 Mar 2013 01 Mar 2014
CALIBRATOR
CTI1066 FLUKE 9009 DUAL WELL DRY BLOCK 15 May 2013 15 May 2014
CALIBRATOR
CTI1072 SHORTRIDGE INSTRUMENTS ADM-870 AIRDATA 28 Oct 2013 28 Oct 2014
MULTI METER
CTI1094 PRINCO INSTRUMENTS 453 FORTIN TYPE 13 Sep 2012 13 Sep 2017
MERCURIAL BAROMETER
CTI1097 FLUKE 700P01 10"WC PRESSURE MODULE 28 Jan 2014 28 Jan 2015
CTI1098 FLUKE 700POO 1.0"WC PRESSURE MODULE 28 Jan 2014 28 Jan 2015
CTI930 MERIAM INSTURMENTS DP2001 DIGITAL 18 Dec 2013 18 Dec 2014
MANOMETER
CTI993 TSI1650 THERMOANEMOMETER 22 Feb 2013 22 Feb 2014
Signed: ~-~~JI
~7~
Certificate Number
PRINTED ON 2 Feb 2014 Page 1 of 1
CCS-008:1391333346
Pro-Calibration, LLC Calibration Data Sheet
Page 1 of 1
Submitted by: """""C::....::C=S=-:.In=c::..:.·--------- Asset Number #: ---------==C'-'=C'""'S'--'-0"-'0~8
Manufacturer: Shortridge Instruments Cal. Technician: ----------------~=
CT2
Model Number: =...cA=D=M~-8'--'-7--"-0_ _ _ _ _ _ _ __ Cal. Date: -------=2"--'/0=2"--'/1'--'-4
Serial Number: -=-M=0-"'--1"'--'lo__e1e..=:3'----------- Due Date: -------=2'--"/0=2"--'11'-"'-5
Description: Air Data Multimeter Cal. Procedure: Manufacturer Specifications
Cal. Interval: 12 Months
Standards Used:
930 993 1064 1066 1072 1094 1097 1098
Temperature: 20Deg.C Barometric Pressure: 30.17"HG Humidity: 40%RH
STD# Tested Function Range Standard Uut. Meas. Val. Allowable Tolerance Range
930 Pressure in/we 0-60"WC 0.0500 0.0501 0.0480- 0.0520"wc
1064 +!- 2%rdg.,+/-O.OOJ"wc 0.5000 0.5005 0.4890- 0.5110"wc
1072 1.000 1.003 0.9790- 1.0210"wc
1097 10.00 10.08 9.799 -10.201"wc
1098 25.00 25.11 24.499- 25.501 "we
50.00 50.35 48.999- 51.001 "we
930 Air Velocity 25-5000 54 55 45-63 tpm
993 +!- 3%rdg.,+/-7fpm Ft/min. 190 190 177-203 tpm
1072 465 464 444-486 tpm
810 812 779- 841 tpm
1805 1809 1744- 1871 tpm
3265 3272 3160-3375 tpm
4880 4898 4727 - 5033 fpm
1066 Temperature -65/+250°F 5.00 5.2 4.5- 5.5of
+/- 0.5°F 32.00 32.1 31.5- 32.5of
+/- 0.5°F 77.00 77.1 76.5 -77.5of
+/- 1.0°F 100.00 100.1 99.0- lOl.Oof
+/- 1.0°F 240.00 240.1 239.0 -241.0of
1094 Absolute Pressure 14 -40in.Hg 30.17 29.9 29.47-31.57 in.Hg.
±2%, rdg, ±O.l"HG
Note;
Pro-Calibration, LLC 480 Harwich Rd. Brewster, MA 02631

77 4-323-3662
www.pro-calibration.com
Veteran owned and operated.
. CALIBRATION SERVICES, INC.
615 Aldrich Street Uxbridge, MA 01569 508-278-2932, fax 508-278-7244, mdcsi@charter.net
CERTIFICATE OF CALIBRATION
IN CONFORMANCE WITH ISO 21501-4
Requirements for calibration intervals
Summary of tests conformed for ID # 7708
• Size calibration
The voltage response to test particles are evaluated using the internal PHA and
proprietary calibration software. Thresholds for each channel are adjusted to
match the median particles response.
• False counts
Commonly referred to as a zero count test, under ISO 21501-4 the results are
expressed as a 95 % upper confidence limit for false counts, Although not a
requirement for post - production calibrations, a standard Zero count test is
provided as part of the recalibration intervals, because the basic testing is still
important.
DOCUMENT LIST
• PAGE 1: This cover page
• PAGE 2: Certificate of calibration, summary page
• Page 3: Certificate of calibration, data sheet
• Page 4: Certificate of calibration, traceability sheet
REVISED 12 February 2013 Page lof4

CALIBRATION SERVICES INC.
615 Aldrich St., Uxbridge, MA 01569 508-278-2932 fax 508-278-7244 !.~::,,::'-" .:c..;,;c_::..:..c::::_.::-=-."".:=.:
.
Performance Summary
Climet aerosol particle counter, model: CI-750 SIN: 067708 Unit ID: 7708
Cal date: 07 Jan 2014 Due date: 31 Jan 2015
PREPARED FOR: CCS

CALIBRATION PERFORMED AT: Calibration Services, Inc.
CALIBRATION PRCEDURE NUMBER: Procedure Number 01
Physical condition upon receipt: _ not applicable

.x good _ damaged poorly packaged _ rough handling
Condition of calibration, as found: condition, as left

new unit x in tolerance out of tolerance lL to specifications
Comments
Calibration parameters: Laser Power and Peak Noise are recorded for reference purposes
only. Air Flow is a critical parameter during calibration, because it establishes the nominal
sample volume and it establishes particle velocity, which affects sizing. Because flow
variances after calibration affects sample volume inversely, variances up to 100/0 have
negligible affect on recorded counts. Particle response amplitudes correspond to detection
thresholds. Amplitudes greater than the thresholds will result in counts greater than normal.
Amplitudes below thresholds will result in undercounting.
Calibration perfo~d by: ",,-M=i~ke~~~......;;;;..
Signed:~'-~~~~~_____~~~~~~_ Date: 07 Jan 2014
Page 2
CALIBRATION SERVICES
615 Aldrich Street, Uxbridge MA 01569 phone: 508-278-2932 fax: 508-278-7244 email: !I!g~§!!@Qb.§!t©l:.n.~l
CALIBRATION TEST DATA

MODEL: CI-750 Aerosol Particle Counter SIN 067708 10: 7708
DATE OF CALIBRATION: 07 Jan 2014 Due: 31 Jan 2015
Condition of instrument In tolerance Out of tolerance
ELECTRONIC MEASUREMENTS
TEST NOMINAL TOLERANCE AS FOUND PASS AS LEFT
L.D. current drive (voltage) 2050 mVdc (reference) 2058 mVdc NIA 2058 mVdc
AIR FLOW 75 LPM +1- 3.5 LPM 75 LPM Y 75 LPM
PEAK NOISE <200 mV (reference) 175 mV NIA 175 mV
I\lnitlal value; the voltage Increases as the laser diode ages
PERFORMANCE DATA
NOMINAL PARTICLE SIZE 0.3 UM I 0.5 UM 1.0 UM 5.0 UM
EXPECTED AMPLITUDE (last cal) 302mV 306mV 920mV 401 mV
TOLERANCE +1- 60 mV +1 30 mV +1-165 mV +1- 50 mV
AS FOUND 308mV 317 mV 900mV 401 mV
PASS (YIN) Y Y Y Y
AS LEFT 308mV 317mV 900mV 401 mV
COLLECTIVE UNCERTAINTY OF MEASUREMENT:+/- 2.3% AT 0.3 UM AND 0.5 UM; +/- 3.5% AT 5 UM.
The collective uncertainty is based on the contribution of the Pulse Height Analyzer, the Mass Flow Meter, and the judgement of
the technician in establishing the median of the displayed distribution, as determined by empirical tests and 1 sigma uncertainty
calculation.
ACCURACY RATIO: The collective uncertainty of the measurement standard is less than 25% of the listed tolerances (4:1
measurement ratio).
CALIBRATION TOLERANCES: The particle sizes listed are nominal; refer to the Test Equipment Record for actual sizes.
Tolerance voltages listed represent a 2% sizing error and the particle deviation from the size. If the particle response is below the
tolerance for Expected Amplitude the particle will be sized larger than it actually is, resulting in counts that are greater than they
actually should be. The actual counts cannot be extrapolated from the out-of-tolerance counts. Temperature and Humidity
sensors) if present, are for reference, and are not part of the calibration.
Technician: Mike DiLibero
Page 3
CALIBRATION SERVICES INC.
615 Aldrich St., Uxbridge, MA 01569 508-278-2932 fax 508-278-7244, email: ,~. =_~;....""'":~:!.._."-",,o.:-,_,-,,,__,
Standards of Traceability
UNIT ID: 7708 DOCUMENT DATE: 07 Jan 2014

ST ATEMENT OF TRACEABILITY CALIBRATION METHOD
This instrument has been calibrated in accordance with Climet particle counters are calibrated by using one
ISO 10012-1 and ANSI Z540-1 (which replaces or more sizes of polystyrene latex spheres, which
MIL-STD-45662A). serve as standards for comparing and adjusting
amplifier response to known particle sizes. The
Temperature and Relative Humidity are not controlled particles are introduced to the sensor as an aerosol
during calibration because of the wide operating range sample with moderate concentration. The digital
of the instrument. (Temperature:30 deg F to 120 degF voltmeter is used to make reference measurements.
humidity:O-lOO%, non-condensing). The oscilloscope is used for reference during
calibration, and as a tool to evaluate the
Al1 test equipment used in the calibration of Calibration condition of the sensor. The Pulse Height
Services Inc.s' products is calibrated at manufacturer Analyzer (PHA) is the primary calibration
Recommended intervals by an approved outside instrument. It is used to collect particle pulses
calibration service. Calibration certificates for each produced by the test particles; these form a
piece of test equipment are on file at Calibration distribution ofpulses on the PHA display.
Services Inc; copies will be supplied if requested.
Calibration traceability to a National Measurement The PHA provides the requisite resolution to
Standard (NMS) is established by using determine the mediation of the distribution. The
monodisperse latex spheres as a calibration standard. amplifier circuitry is adjusted, as needed, to
These spheres are sized by methods traceable, by lot bring the median distribution to the amplitude
number, to the National Institute of Standards specified for a given particle standard. Initial
and Technology. factory prime calibration includes verification
of count efficiency by count comparison with
The instruments and reference standards listed below CDCIDMA or with a reference particle counter
were used to calibrate the instrument certified used as a transfer standard.
by this document.
Equipment Make and Model Serial Number Cal Date Cal Due Date
Pulse Height Analyzer Amptek MCA 8000 001335 22 Aug 2013 31 Aug 2014
DVM Fluke 73 34154633 09 Aug20l3 28 Feb 2014
Oscilloscope TDS220 B071196 09 Aug20l3 28 Feb 2014
Flow Meter 4043 40430628002 26 Aug 2013 28 Feb 2014
Flow Meter 4040 40401024010 l3 Aug2013 28 Feb 2014
Particle Counter CI-88R ~-
103962 22 Aug 2013 28 Feb 2014
Digital Stop Watch 1051 111599574 09 Aug 2013 28 Feb 2014
PARTICLE STANDARDS
NOMINAL ACTUAL SIZE LOT EXP. NOMINAL ACTUAL SIZE LOT EXP.
SIZE SIZE DEVIATION NUMBER DATE SIZE SIZE DEVIATION NUMBER DATE
300nm 296nm +/- 6 nm 41699 Feb 2016 l.Oum 1.019 urn +/-0.015urn 39486 Sep 2014
495nm 496nrn +-/- 8.1 nm 42179 Jun 2016 3.0um 3.002 urn +/- 0.019um 40078 Feb 2015
5.0 urn 4.996 urn +/- 0.056 um 41903 Apr 2016
Cert Statement form Revised Aug 2013

Page 4
Document of Certification
CERTIFICATION & CALIBRATION SERVICES, INC.
CERTIFIES THAT
PUREST AT ENGINEERED TECHNOLOGIES, INC.

21 OLD FARM ROAD
LEWISTON, ME 04240
CLASS 100 CLEANROOM
Has been tested to meet performance parameters as outlined in

ISO 14644-1 for an ISO Class 5 Cleanroom at 0.5 microns
C e r t ; a 23n:! ~~y ofOctobei, 2014
bdt764--.
David Bowman
CERTIFICATION & CALIBRATION SERVICES, INC.
320 I Fair Oak Drive
Rowlett, TX 75089
Phone(214)607-0555
Fax (214) 607-0564

Purestat Engineered Technologies, Inc: The Quality Choice in Clean Room Certification

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PURESTAT ENGINEERED

CLEANROOM CERTIFICATION REPORT

REPORT NO. 14145

OCTOBER 23, 2014

The Quality Choice in

Phone (214) 607-0555 w Fax (214) 607-0564

Section 2 - Airflow Velocity Measurements

Section 3 - Room Pressurization

Section 4 - Particle Counts

Section 5 – CCSI Procedures

Section 6 - Equipment Calibration Certificates

71 Winter Ct  Woonsocket, RI 02895  ph (401)765-5743  fx (401)769-6739 www.cleanromcerts.com

TEST DATE: OCTOBER 23, 2014

AIRFLOW VELOCITY MEASUREMENTS

1. Shortridge Multimeter model ADM-870 with velgrid attachment.

1. 56 Measurements were taken on 14 filters. The results are as follows:

Average FPM: 161

AIRFLOW VOLUME MEASUREMENTS (CFM)

2 479 1,471 1,647 1,702 1,753 1,767 1,830

4 1,565 1,637 1,454 1,519 1,563 1,572 1,772

TEST DATE: OCTOBER 23, 2014

ROOM PRESSURIZATION MEASUREMENTS

1. Shortridge Multimeter model ADM-870.

1. Cleanroom maintains a positive pressure to areas with less clean requirements.

2. The cleanroom is positive to areas with less clean requirements.

ROOM PRESSURIZATION MEASUREMENTS

* ROOM UNDER POSITIVE PRESSURE

TEST DATE: OCTOBER 23, 2014

AIRBORNE PARTICLE COUNTS

1. ISO Class 5 </= 100 particles/cu. ft. at 0.5 microns

AIRBORNE PARTICLE COUNTS > 0.5 MICRONS

Stage 3 Operating Facility: A cleanroom in normal operation, fully populated with

1. NATIONAL ENVIRONMENTAL BALANCING BUREAU (NEBB): Procedural Standards for

3. RECOMMENDED PRACTICE IEST-RP-CC-001-86: HEPA Filters

4. RECOMMENDED PRACTICE IEST-RP-CC-002-86: Laminar Flow Clean Air Devices.

5. RECOMMENDED PRACTICE IEST-RP-CC006-84-T: Testing Clean Rooms.

6. RECOMMENDED PRACTICE IEST-RP-CC-013-86-T: Equipment Calibration or Validation

I. FILTER AIRFLOW AND UNIFORMITY TESTS

C. VELOCITY TEST PROCEDURES (Unidirectional Airflow)

D. AIRFLOW AND UNIFORMITY REPORTING

a. Record all airflow measurements with corresponding grid locations.

Equation: VAM = (V1 + V2 + ... + VN) /N

Where: VAM = Arithmetic Mean Velocity - fpm (m/s)

VN = Velocity readings - fpm (m/s)

SDV = (((V1 - VAM)2 + (V2 - VAM)2 + ... + (VN - VAM)2)/ N-1)1/2

Where: SDV = Standard Deviation of velocities - fpm (m/s)

RSD = SDV/VAM x 100

Where: RSD = Relative Standard Deviation - %

II. PRESSURIZATION TEST

III. AIRBORNE PARTICLE COUNT

3. Sampling Points - ISO 14644-1

Where: NL = Minimum number of sample locations

ISO 14644-1 (Table 1):

Volume = 20/[class limit (particle/volume) from Table 1] x 1000 {Volume is in litres}

1. Record the mean particle count at each grid location.

2. Note all measurement exceeding the specified air cleanliness level.

Test: Airflow Velocity Measurements/Room Pressurization

Manufacturer: SHORTRIDGE INSTRUMENTS CUSTOMER: CCS Inc.

Cal Date 2 Feb 2014 Temperature: 20.0"C As Received: In Tolerance

!sTANDARDS USED FOR CALIBRATION

Asset Number Description Cal. Date Due Date •

930 993 1064 1066 1072 1094 1097 1098

Temperature: 20Deg.C Barometric Pressure: 30.17"HG Humidity: 40%RH

Signed:~'-~_____~~_ Date: 07 Jan 2014