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    This document describes the layers and representations used in a 0.25 μm CMOS process. It lists the metal, well, polysilicon, contact/via, active area/FET, and select layers. Colorplate 1 provides a visualization of these layers and Colorplate 4 specifies the design rules for contacts and vias, including spacing requirements between layers like minimum poly-to-contact and metal-to-contact distances.

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    This document describes the layers and representations used in a 0.25 μm CMOS process. It lists the metal, well, polysilicon, contact/via, active area/FET, and select layers. Colorplate 1 provides a visualization of these layers and Colorplate 4 specifies the design rules for contacts and vias, including spacing requirements between layers like minimum poly-to-contact and metal-to-contact distances.

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    7 views1 page

    CH - 2 Page1

    Uploaded by

    razu
    This document describes the layers and representations used in a 0.25 μm CMOS process. It lists the metal, well, polysilicon, contact/via, active area/FET, and select layers. Colorplate 1 provides a visualization of these layers and Colorplate 4 specifies the design rules for contacts and vias, including spacing requirements between layers like minimum poly-to-contact and metal-to-contact distances.

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    of 1

    Layer Description Representation

    metal

    m1 m2 m3 m4 m5

    well

    nw

    polysilicon

    poly

    contacts & vias

    ct v12,v23,v34,v45 nwc pwc

    active area
    and FETs
    ndif pdif nfet pfet

    select

    nplus pplus prb

    Colorplate 1. CMOS layers and representations


    (for vanilla 0.25 µm CMOS process)

    0.3µ (contact to contact)

    m1 0.36µ
    m2

    via contact
    0.14µ (poly to contact)
    poly

    0.09µ (metal to contact)

    poly-m1
    poly-m1-m2 overlap overlap
    0.14µ (ndif to contact)

    m1

    0.28µ (transistor to contact) 0.35µ


    poly
    metal-to-poly
    n+ contact

    Colorplate 4. Design rules regarding contacts and vias.


    Overlapping layers are marked by merged colors.

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