Tutorial 9

Problem 1 (WWWR 26.17)

“Microvia” are microscopic passages between two thin films on a microelectronic device.
Often, microvia are filled with a conductive metal to make a microscopic conductor for the
flow of electrons between the two thin films. In one particular process, tungsten is deposited
onto the base of the microvia by the following chemical vapor deposition reaction:
WF6 (g) + 3 H2 (g) à W (s) + 6 HF (g)
As the tungsten metal forms, it fills the microvia (2.0 µm depth, 0.5 µm diameter) as
illustrated in the following figure:

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The tungsten metal does not coat the side walls of the microvia; it only grows upward from
the base of the microvia where the tungsten was initially seeded. The reactants are
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significantly diluted in inert Helium (He) gas to lower the deposition rate. The temperature is
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700K, the total system pressure is 75 Pa, and the concentrations of WF6 and H2 in the bulk
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gas space over the microvia are each 0.001 mol%. Assume that the tungsten deposition is
limited by molecular diffusion. The molecular weight of tungsten, W, is 184 g/mol, the
molecular weight of fluorine is 19 g/mol, and the density of solid tungsten is 19.4 g/cm3.
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a. Develop a pseudo-steady-state model to predict the depth of tungsten metal within the
microvia as a function of time.
Estimate the time required to completely fill the microvia assuming Knudsen diffusion for
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WF6 vapor.
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 Problem 2 (WWWR 26.27)

A 20-cm-long, cylindrical graphite (pure carbon) rod is inserted into an oxidizing atmosphere
at 1145 K and 1.013 x 105 Pa pressure. The oxidizing process is limited by the diffusion of
oxygen counterflow to the carbon monoxide that is formed on the cylindrical surface. Under
the conditions of the combustion process, the diffusivity of oxygen in the gas mixture may be
assumed to be 1.0 x 10-5 m2/s.
a. Determine the moles of CO that are produced at the surface of the rod per second at
the time when the diameter of the rod is 1.0 cm and the oxygen concentration that is
1.0 cm radial distance from the rod is 40 mol%. Assume a steady-state process.
b. What would be the composition of oxygen 1.0 cm from the center of the rod?

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 Problem 3 (WWWR 27.6)

A large tanker truck overturns and spills a herbicide over a field. If the mass diffusivity of the
fluid in the soil is 1 x 10-3 m2/s and the fluid remains on the soil for 1800 s before evaporating
into the air, determine the depth at which plant and insect life is likely to be destroyed if a
concentration of 0.1% by weight will destroy most of the life.

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